TW200731306A - Method of manufacturing thin film capacitor and printed circuit board having thin film capacitor embedded therein - Google Patents
Method of manufacturing thin film capacitor and printed circuit board having thin film capacitor embedded thereinInfo
- Publication number
- TW200731306A TW200731306A TW095136508A TW95136508A TW200731306A TW 200731306 A TW200731306 A TW 200731306A TW 095136508 A TW095136508 A TW 095136508A TW 95136508 A TW95136508 A TW 95136508A TW 200731306 A TW200731306 A TW 200731306A
- Authority
- TW
- Taiwan
- Prior art keywords
- thin film
- film capacitor
- dielectric layer
- metal foil
- circuit board
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title abstract 4
- 239000010409 thin film Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000011888 foil Substances 0.000 abstract 4
- 239000002184 metal Substances 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 2
- 238000001953 recrystallisation Methods 0.000 abstract 2
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1218—Ceramic dielectrics characterised by the ceramic dielectric material based on titanium oxides or titanates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/018—Dielectrics
- H01G4/06—Solid dielectrics
- H01G4/08—Inorganic dielectrics
- H01G4/12—Ceramic dielectrics
- H01G4/1209—Ceramic dielectrics characterised by the ceramic dielectric material
- H01G4/1236—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates
- H01G4/1245—Ceramic dielectrics characterised by the ceramic dielectric material based on zirconium oxides or zirconates containing also titanates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/16—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor
- H05K1/162—Printed circuits incorporating printed electric components, e.g. printed resistor, capacitor, inductor incorporating printed capacitors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/09—Use of materials for the conductive, e.g. metallic pattern
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0175—Inorganic, non-metallic layer, e.g. resist or dielectric for printed capacitor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0179—Thin film deposited insulating layer, e.g. inorganic layer for printed capacitor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/03—Conductive materials
- H05K2201/0332—Structure of the conductor
- H05K2201/0335—Layered conductors or foils
- H05K2201/0355—Metal foils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0353—Making conductive layer thin, e.g. by etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/03—Metal processing
- H05K2203/0369—Etching selective parts of a metal substrate through part of its thickness, e.g. using etch resist
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020050095957A KR100691370B1 (ko) | 2005-10-12 | 2005-10-12 | 박막 캐패시터의 제조방법과 박막 캐패시터 내장형인쇄회로기판 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200731306A true TW200731306A (en) | 2007-08-16 |
Family
ID=37910894
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095136508A TW200731306A (en) | 2005-10-12 | 2006-10-02 | Method of manufacturing thin film capacitor and printed circuit board having thin film capacitor embedded therein |
Country Status (5)
Country | Link |
---|---|
US (1) | US20070081297A1 (zh) |
JP (1) | JP2007110127A (zh) |
KR (1) | KR100691370B1 (zh) |
CN (1) | CN1949421B (zh) |
TW (1) | TW200731306A (zh) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20100024181A1 (en) * | 2008-07-31 | 2010-02-04 | E. I. Dupont De Nemours And Company | Processes for forming barium titanate capacitors on microstructurally stable metal foil substrates |
CN102129910B (zh) * | 2010-12-24 | 2012-12-05 | 珠海格力新元电子有限公司 | 一种降低薄膜电容器噪音的工艺方法 |
CN102354600B (zh) * | 2011-07-01 | 2013-05-29 | 上海上电电容器有限公司 | 高比能脉冲电容器元件热定型工艺 |
CN103173704B (zh) * | 2013-03-01 | 2015-04-01 | 溧阳华晶电子材料有限公司 | 一种薄膜电容器用复合基板的制造方法 |
CN108520825A (zh) * | 2018-04-02 | 2018-09-11 | 华中科技大学 | 一种用于井下特种电源的高温脉冲电容器及其制造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4189331A (en) * | 1978-06-22 | 1980-02-19 | Canada Wire And Cable Limited | Oxidation resistant barrier coated copper based substrate and method for producing the same |
US5079069A (en) * | 1989-08-23 | 1992-01-07 | Zycon Corporation | Capacitor laminate for use in capacitive printed circuit boards and methods of manufacture |
US5800575A (en) * | 1992-04-06 | 1998-09-01 | Zycon Corporation | In situ method of forming a bypass capacitor element internally within a capacitive PCB |
US5261153A (en) * | 1992-04-06 | 1993-11-16 | Zycon Corporation | In situ method for forming a capacitive PCB |
KR20000041957A (ko) * | 1998-12-24 | 2000-07-15 | 윤종용 | 반도체 디램 셀 캐패시터의 제조 방법 |
DE10009762B4 (de) * | 2000-03-01 | 2004-06-03 | Infineon Technologies Ag | Herstellungsverfahren für einen Speicherkondensator mit einem Dielektrikum auf der Basis von Strontium-Wismut-Tantalat |
US6679951B2 (en) * | 2000-05-15 | 2004-01-20 | Asm Intenational N.V. | Metal anneal with oxidation prevention |
US6649930B2 (en) * | 2000-06-27 | 2003-11-18 | Energenius, Inc. | Thin film composite containing a nickel-coated copper substrate and energy storage device containing the same |
US6541137B1 (en) * | 2000-07-31 | 2003-04-01 | Motorola, Inc. | Multi-layer conductor-dielectric oxide structure |
US6936301B2 (en) * | 2002-05-06 | 2005-08-30 | North Carolina State University | Methods of controlling oxygen partial pressure during annealing of a perovskite dielectric layer |
US7029971B2 (en) * | 2003-07-17 | 2006-04-18 | E. I. Du Pont De Nemours And Company | Thin film dielectrics for capacitors and methods of making thereof |
US7541265B2 (en) * | 2005-01-10 | 2009-06-02 | Endicott Interconnect Technologies, Inc. | Capacitor material for use in circuitized substrates, circuitized substrate utilizing same, method of making said circuitized substrate, and information handling system utilizing said circuitized substrate |
-
2005
- 2005-10-12 KR KR1020050095957A patent/KR100691370B1/ko not_active IP Right Cessation
-
2006
- 2006-10-02 TW TW095136508A patent/TW200731306A/zh unknown
- 2006-10-03 US US11/541,676 patent/US20070081297A1/en not_active Abandoned
- 2006-10-11 CN CN2006101400454A patent/CN1949421B/zh not_active Expired - Fee Related
- 2006-10-11 JP JP2006277769A patent/JP2007110127A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
CN1949421A (zh) | 2007-04-18 |
CN1949421B (zh) | 2010-12-01 |
JP2007110127A (ja) | 2007-04-26 |
KR100691370B1 (ko) | 2007-03-12 |
US20070081297A1 (en) | 2007-04-12 |
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