TW200717682A - Method for inspecting microelectronic components on a substrate and apparatus for testing same - Google Patents

Method for inspecting microelectronic components on a substrate and apparatus for testing same

Info

Publication number
TW200717682A
TW200717682A TW095137415A TW95137415A TW200717682A TW 200717682 A TW200717682 A TW 200717682A TW 095137415 A TW095137415 A TW 095137415A TW 95137415 A TW95137415 A TW 95137415A TW 200717682 A TW200717682 A TW 200717682A
Authority
TW
Taiwan
Prior art keywords
substrate
transistor
transistors
photoconductive response
time
Prior art date
Application number
TW095137415A
Other languages
English (en)
Inventor
Arie Glazer
Abraham Gross
Ilya Leizerson
Raanan Adin
Tolila Raphael Ben
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Publication of TW200717682A publication Critical patent/TW200717682A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G2300/00—Aspects of the constitution of display devices
    • G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/34—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source
    • G09G3/36—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters by control of light from an independent source using liquid crystals
    • G09G3/3611—Control of matrices with row and column drivers
    • G09G3/3648—Control of matrices with row and column drivers using an active matrix

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Thin Film Transistor (AREA)
TW095137415A 2005-10-11 2006-10-11 Method for inspecting microelectronic components on a substrate and apparatus for testing same TW200717682A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US72487505P 2005-10-11 2005-10-11

Publications (1)

Publication Number Publication Date
TW200717682A true TW200717682A (en) 2007-05-01

Family

ID=37943219

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137415A TW200717682A (en) 2005-10-11 2006-10-11 Method for inspecting microelectronic components on a substrate and apparatus for testing same

Country Status (6)

Country Link
US (1) US7795887B2 (zh)
JP (1) JP2009511898A (zh)
KR (1) KR20080068644A (zh)
CN (1) CN101501516B (zh)
TW (1) TW200717682A (zh)
WO (1) WO2007043051A2 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI748060B (zh) * 2018-02-07 2021-12-01 鴻海精密工業股份有限公司 光電流掃描系統
TWI809765B (zh) * 2021-03-26 2023-07-21 群創光電股份有限公司 電子裝置的製作方法

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011516904A (ja) 2008-02-11 2011-05-26 クォルコム・メムズ・テクノロジーズ・インコーポレーテッド 表示駆動機構と統合された表示要素の検知、測定、または特性評価のための方法および装置、ならびにそれを使用するシステムおよび用途
US8466858B2 (en) 2008-02-11 2013-06-18 Qualcomm Mems Technologies, Inc. Sensing to determine pixel state in a passively addressed display array
US8115471B2 (en) 2008-02-11 2012-02-14 Qualcomm Mems Technologies, Inc. Methods for measurement and characterization of interferometric modulators
WO2009134502A2 (en) 2008-02-11 2009-11-05 Qualcomm Mems Technologies, Inc. Methods for measurement and characterization of interferometric modulators
JP2010021437A (ja) * 2008-07-11 2010-01-28 Ulvac Japan Ltd 太陽電池の製造装置およびその製造方法
CN102456592A (zh) * 2010-10-15 2012-05-16 北京京东方光电科技有限公司 测试阵列基板上薄膜晶体管特性的方法和装置
JP6166032B2 (ja) 2012-11-06 2017-07-19 浜松ホトニクス株式会社 半導体デバイス検査装置及び半導体デバイス検査方法
TWI472782B (zh) * 2013-04-10 2015-02-11 Inotera Memories Inc 半導體裝置之檢測方法以及半導體裝置之檢測系統
US9599666B2 (en) 2014-10-28 2017-03-21 Qualcomm Incorporated Minimum voltage and maximum performance mapping using laser-assisted techniques
CN105093574B (zh) * 2015-06-05 2018-06-08 京东方科技集团股份有限公司 显示面板检测台
US9748735B2 (en) * 2015-10-08 2017-08-29 The University Of North Carolina At Charlotte Light-effect transistor (LET)
CN108573884B (zh) * 2017-03-07 2020-06-09 中芯国际集成电路制造(上海)有限公司 测试结构及其形成方法、测试方法
CN109003567A (zh) * 2018-07-24 2018-12-14 深圳市华星光电半导体显示技术有限公司 Tft阵列基板测试装置及测试方法
CN108957278B (zh) * 2018-08-10 2024-03-29 中国矿业大学 基于门极电荷Qg的大功率IGBT故障诊断及保护方法和装置
JP6542971B1 (ja) * 2018-11-12 2019-07-10 信越エンジニアリング株式会社 検査装置及び検査方法
CN109742037B (zh) * 2019-01-03 2021-01-26 京东方科技集团股份有限公司 一种测试基板及其制作方法、测试方法
KR102586199B1 (ko) * 2021-10-21 2023-10-06 큐알티 주식회사 전력 반도체 소자의 검사 방법, 및 이를 위한 검사 시스템

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07301648A (ja) * 1994-05-06 1995-11-14 Mitsubishi Electric Corp 基板検査装置および基板検査方法
US5982190A (en) * 1998-02-04 1999-11-09 Toro-Lira; Guillermo L. Method to determine pixel condition on flat panel displays using an electron beam
DE60016896D1 (de) * 1999-02-08 2005-01-27 Defence Science & Tech Org Mikroelektronischer sensor zur feststellung einer bindungsverschlechterung und zugehöriges herstellungsverfahren
FR2801680B3 (fr) * 1999-11-26 2002-02-15 Christophe Vaucher Methode de test electrique de la conformite de l'interconnexion de conducteurs electriques disposes sur un substrat, sans contact et sans outillage
US6545500B1 (en) * 1999-12-08 2003-04-08 John E. Field Use of localized temperature change in determining the location and character of defects in flat-panel displays
JP2001284425A (ja) * 2000-04-03 2001-10-12 Mitsubishi Electric Corp 故障解析方法及び故障解析装置
JP3874996B2 (ja) * 2000-05-30 2007-01-31 ファブソリューション株式会社 デバイス検査方法および装置
WO2003062809A1 (en) * 2002-01-23 2003-07-31 Marena Systems Corporation Infrared thermography for defect detection and analysis
JP4733959B2 (ja) * 2003-12-24 2011-07-27 株式会社日立ハイテクノロジーズ プローブ接触方法及び荷電粒子線装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI748060B (zh) * 2018-02-07 2021-12-01 鴻海精密工業股份有限公司 光電流掃描系統
TWI809765B (zh) * 2021-03-26 2023-07-21 群創光電股份有限公司 電子裝置的製作方法

Also Published As

Publication number Publication date
KR20080068644A (ko) 2008-07-23
JP2009511898A (ja) 2009-03-19
CN101501516B (zh) 2013-04-24
WO2007043051A2 (en) 2007-04-19
US7795887B2 (en) 2010-09-14
US20080224724A1 (en) 2008-09-18
WO2007043051A3 (en) 2009-04-09
CN101501516A (zh) 2009-08-05

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