DE60016896D1 - Mikroelektronischer sensor zur feststellung einer bindungsverschlechterung und zugehöriges herstellungsverfahren - Google Patents
Mikroelektronischer sensor zur feststellung einer bindungsverschlechterung und zugehöriges herstellungsverfahrenInfo
- Publication number
- DE60016896D1 DE60016896D1 DE60016896T DE60016896T DE60016896D1 DE 60016896 D1 DE60016896 D1 DE 60016896D1 DE 60016896 T DE60016896 T DE 60016896T DE 60016896 T DE60016896 T DE 60016896T DE 60016896 D1 DE60016896 D1 DE 60016896D1
- Authority
- DE
- Germany
- Prior art keywords
- sensor
- stud
- interchange
- related manufacturing
- voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004377 microelectronic Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 230000015556 catabolic process Effects 0.000 abstract 1
- 238000006731 degradation reaction Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
- G01N17/02—Electrochemical measuring systems for weathering, corrosion or corrosion-protection measurement
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/44—Resins; Plastics; Rubber; Leather
- G01N33/442—Resins; Plastics
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Biochemistry (AREA)
- Environmental Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Ecology (AREA)
- Biodiversity & Conservation Biology (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11916699P | 1999-02-08 | 1999-02-08 | |
PCT/US2000/003308 WO2000046593A2 (en) | 1999-02-08 | 2000-02-08 | A micro-electronic bond degradation sensor and method of manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
DE60016896D1 true DE60016896D1 (de) | 2005-01-27 |
Family
ID=22382891
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE60016896T Expired - Lifetime DE60016896D1 (de) | 1999-02-08 | 2000-02-08 | Mikroelektronischer sensor zur feststellung einer bindungsverschlechterung und zugehöriges herstellungsverfahren |
Country Status (6)
Country | Link |
---|---|
US (2) | US6384610B1 (de) |
EP (1) | EP1151286B1 (de) |
AT (1) | ATE285578T1 (de) |
AU (2) | AU770057B2 (de) |
DE (1) | DE60016896D1 (de) |
WO (1) | WO2000046593A2 (de) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002506488A (ja) | 1998-04-21 | 2002-02-26 | アプライド マテリアルズ インコーポレイテッド | 電気化学堆積システム及び基体の電気めっき方法 |
ATE285578T1 (de) | 1999-02-08 | 2005-01-15 | Defence Science & Tech Org | Mikroelektronischer sensor zur feststellung einer bindungsverschlechterung und zugehöriges herstellungsverfahren |
KR100427405B1 (ko) * | 2001-03-07 | 2004-04-17 | 박재만 | 피에스에스씨 합성거더 |
US6911828B1 (en) * | 2001-05-23 | 2005-06-28 | Southwest Research Institute | Apparatus and method for detecting the degradation of a coating using embedded sensors |
FR2839796B1 (fr) * | 2002-05-15 | 2004-11-26 | Ermme | Systeme d'acquisition multi-voies synchrones pour la mesure de grandeurs physiques, module d'acquisition utilise et procede mis en oeuvre dans un tel systeme |
US7590397B2 (en) * | 2003-09-10 | 2009-09-15 | Sony Corporation | Signal processing apparatus and signal processing method, program, and recording medium |
JP2005151617A (ja) * | 2003-11-11 | 2005-06-09 | Sumitomo Wiring Syst Ltd | 回路構成体及び回路構成体の製造方法 |
TW200717682A (en) * | 2005-10-11 | 2007-05-01 | Orbotech Ltd | Method for inspecting microelectronic components on a substrate and apparatus for testing same |
US7398698B2 (en) * | 2005-11-03 | 2008-07-15 | The Boeing Company | Smart repair patch and associated method |
US7434480B2 (en) * | 2005-12-14 | 2008-10-14 | The Boeing Company | Methods and systems for using active surface coverings for structural assessment and monitoring |
US7477060B2 (en) * | 2005-12-27 | 2009-01-13 | 3M Innovative Properties Company | Coating impedance monitoring system |
KR100750192B1 (ko) * | 2006-05-04 | 2007-08-17 | 삼성전자주식회사 | 크랙 검사 회로를 갖는 반도체 칩 및 이를 이용한 크랙검사 방법 |
US7504834B2 (en) * | 2006-12-20 | 2009-03-17 | 3M Innovative Properties Company | Detection system |
US7622737B2 (en) * | 2007-07-11 | 2009-11-24 | International Business Machines Corporation | Test structures for electrically detecting back end of the line failures and methods of making and using the same |
US7877009B2 (en) * | 2007-12-20 | 2011-01-25 | 3M Innovative Properties Company | Method and system for electrochemical impedance spectroscopy |
AU2009212091B2 (en) | 2008-02-05 | 2014-08-07 | The Commonwealth Of Australia | Degradation sensor |
DE102009042989A1 (de) * | 2009-09-25 | 2011-04-21 | Hellma Materials Gmbh & Co. Kg | Vorrichtung und Verfahren zur Bestimmung der Laserstabilität eines optischen Elements |
DE102009056894B4 (de) * | 2009-12-10 | 2011-11-10 | Eads Deutschland Gmbh | Verfahren zur Herstellung eines Bauteils mit mindestens einem Mikrosensor |
FR2953812B1 (fr) * | 2009-12-11 | 2012-09-07 | Airbus Operations Sas | Procede de reparation d'un fuselage d'aeronef |
US9816978B2 (en) * | 2010-07-15 | 2017-11-14 | Brigham Young University | Apparatus for analysis of concrete including a reinforcing bar |
AU2011314214A1 (en) * | 2010-09-29 | 2013-05-23 | Aerobotics, Inc. | Novel systems and methods for non-destructive inspection of airplanes |
US8928339B2 (en) * | 2010-10-29 | 2015-01-06 | The Boeing Company | Methods and systems for automated measurement of electrical bonds |
US9567104B2 (en) | 2011-04-12 | 2017-02-14 | The Boeing Company | Utilization of aircraft bondline embedded current sensors in the determination of a lightning damage index |
US8812251B2 (en) | 2011-04-12 | 2014-08-19 | The Boeing Company | System and method for monitoring bonding integrity |
US9267906B2 (en) | 2011-04-12 | 2016-02-23 | The Boeing Company | Bondline embedded current sensor |
JP2013108831A (ja) * | 2011-11-21 | 2013-06-06 | Seiko Epson Corp | センサー装置およびセンサー装置の製造方法 |
JP2014163900A (ja) * | 2013-02-27 | 2014-09-08 | Dainippon Printing Co Ltd | 濃度測定センサ、濃度測定センサ用シート及びその製造方法 |
US9123701B2 (en) * | 2013-07-11 | 2015-09-01 | Infineon Technologies Austria Ag | Semiconductor die and package with source down and sensing configuration |
US9261444B1 (en) * | 2013-07-30 | 2016-02-16 | The Boeing Company | Apparatus, system, and method for in situ strength testing of a bonded joint |
WO2016014134A2 (en) | 2014-04-28 | 2016-01-28 | Brigham Young University | Data acquisition system with rotating probe members and ground reference electrode |
US10031066B1 (en) | 2014-06-26 | 2018-07-24 | Analatom Incorporated | Linear polarization resistance flex sensors and methods that involve structure as working electrode(s) |
WO2016205207A1 (en) | 2015-06-14 | 2016-12-22 | Brigham Young University | Flexible elements for probes and guard rings |
EP3141893B1 (de) * | 2015-09-08 | 2019-12-11 | Mitsubishi Electric R&D Centre Europe B.V. | System zur bestimmung, ob in einer schnittstelle eines halbleiterchips eine verschlechterung stattfindet |
US9818655B2 (en) | 2015-12-08 | 2017-11-14 | International Business Machines Corporation | Method and structure for flip-chip package reliability monitoring using capacitive sensors groups |
IL247408B (en) | 2016-08-21 | 2018-03-29 | Elbit Systems Ltd | A system and method for identifying weaknesses in the adhesion between structural elements |
US11255820B2 (en) * | 2019-01-16 | 2022-02-22 | The Boeing Company | Patch for in-situ monitoring of structures |
DE102022208239A1 (de) * | 2022-08-08 | 2024-02-08 | Carl Zeiss Smt Gmbh | Vorrichtung und Verfahren zur Sensorischen Messung Chemischer und/oder Physikalischer Eigenschaften einer Klebeschicht und/oder eines die Klebeschicht Kontaktierenden Mediums, sowie Verfahren zur Herstellung einer entsprechenden Vorrichtung und Verfahren zur Sensorischen Messung |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2423776A1 (fr) * | 1978-04-19 | 1979-11-16 | Exper Rech Etu Batiment Centre | Procede et appareillage de detection de fissures dans une paroi de beton immergee |
US4423371A (en) * | 1981-09-03 | 1983-12-27 | Massachusetts Institute Of Technology | Methods and apparatus for microdielectrometry |
DE3870685D1 (de) | 1987-02-23 | 1992-06-11 | Siemens Ag | Galvanisiereinrichtung zur erzeugung von hoeckern auf chip-bauelementen. |
DE8706256U1 (de) * | 1987-04-30 | 1987-06-25 | Bayer Ag, 5090 Leverkusen | Kontrolleiter zum Prüfen von Schweißnähten |
US5158091A (en) * | 1990-11-30 | 1992-10-27 | Ivac Corporation | Tonometry system for determining blood pressure |
US5245293A (en) * | 1991-12-23 | 1993-09-14 | Teledyne Ryan Aeronautical, Division Of Teledyne Industries, Inc. | Adhesive bond degradation monitor |
US5572115A (en) * | 1992-09-22 | 1996-11-05 | Brigham Young University | Device and method for measuring charge carrying activity in generally non-conductive materials |
DE4239495C2 (de) * | 1992-11-25 | 1995-04-13 | Willibald Luber | Vorrichtung zur zerstörungsfreien Aufdeckung von Schäden an flächenhaften Abdichtungen wie auf Brücken, Wannen, Deponiesohlen und Flachdächern |
US5864162A (en) * | 1993-07-12 | 1999-01-26 | Peregrine Seimconductor Corporation | Apparatus and method of making a self-aligned integrated resistor load on ultrathin silicon on sapphire |
FR2732465B1 (fr) * | 1995-03-31 | 1997-06-06 | Aerospatiale | Procede de mesure du gradient d'humidite dans l'epaisseur d'une piece en materiau composite |
DE19707788A1 (de) * | 1996-12-24 | 1998-07-02 | I M E S Ges Fuer Innovative Me | Verfahren zur Überwachung und Kontrolle von Schlitz- und Dichtwänden |
US5833820A (en) | 1997-06-19 | 1998-11-10 | Advanced Micro Devices, Inc. | Electroplating apparatus |
US6004440A (en) * | 1997-09-18 | 1999-12-21 | Semitool, Inc. | Cathode current control system for a wafer electroplating apparatus |
ATE285578T1 (de) | 1999-02-08 | 2005-01-15 | Defence Science & Tech Org | Mikroelektronischer sensor zur feststellung einer bindungsverschlechterung und zugehöriges herstellungsverfahren |
-
2000
- 2000-02-08 AT AT00914558T patent/ATE285578T1/de not_active IP Right Cessation
- 2000-02-08 DE DE60016896T patent/DE60016896D1/de not_active Expired - Lifetime
- 2000-02-08 AU AU35931/00A patent/AU770057B2/en not_active Ceased
- 2000-02-08 WO PCT/US2000/003308 patent/WO2000046593A2/en active IP Right Grant
- 2000-02-08 EP EP00914558A patent/EP1151286B1/de not_active Expired - Lifetime
- 2000-02-08 US US09/501,798 patent/US6384610B1/en not_active Expired - Fee Related
-
2002
- 2002-05-03 US US10/139,035 patent/US6693417B2/en not_active Expired - Fee Related
-
2004
- 2004-05-11 AU AU2004201996A patent/AU2004201996A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
EP1151286B1 (de) | 2004-12-22 |
EP1151286A2 (de) | 2001-11-07 |
US20020190729A1 (en) | 2002-12-19 |
US6384610B1 (en) | 2002-05-07 |
WO2000046593A2 (en) | 2000-08-10 |
AU2004201996A1 (en) | 2004-06-10 |
AU3593100A (en) | 2000-08-25 |
ATE285578T1 (de) | 2005-01-15 |
US6693417B2 (en) | 2004-02-17 |
AU770057B2 (en) | 2004-02-12 |
WO2000046593A3 (en) | 2000-12-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE60016896D1 (de) | Mikroelektronischer sensor zur feststellung einer bindungsverschlechterung und zugehöriges herstellungsverfahren | |
DE69214767D1 (de) | Klasse-D Ausgangsverstärker in BICMOS für Hörhilfegerät | |
EP0809289A3 (de) | Deckelluftbrücke für integrierte Schaltung | |
EP0663719A3 (de) | Analoge Filterschaltung und integrierte Halbleiterschaltungsanordnung mit dieser Schaltung | |
DK1073313T3 (da) | Anordning til mekanisk tilkobling af en drivdel på et tilkoblingssted på ossikelkæden | |
KR960043268A (ko) | 출력 노드의 과도한 부의 요동을 고려하여 하프 브리지 구성의 파워 트랜지스터를 구동하는 구동방법과 구동회로 및 그러한 회로가 내장된 집적회로 | |
ATE462224T1 (de) | Differenzeingangsverstärker mit weitem gleichtaktbereich und verfahren | |
ATE356454T1 (de) | Treiberschaltung für laser und system | |
EP0951141A3 (de) | Direktes Audiosignal aus der Speisespannung | |
TW200511700A (en) | Switching power supply | |
DE69804298D1 (de) | Signalformgeber für drehmomentsensor | |
EP1193514A3 (de) | Integrierte optische Schaltung aus Halbleitermaterial | |
DE60105758D1 (de) | Digitales hörhilfegerät mit spannungswandler | |
GB2365130B (en) | Improved proximity sensor and related methods | |
MD2248B1 (en) | Device for impedance components measurement | |
DE60226835D1 (de) | Standard-CMOS-Hochspannungs-Gegentakttreiber | |
ATE330270T1 (de) | Elektronische schaltung | |
DE60128560D1 (de) | Ein genauer leistungsdetektor zur verwendung in einem leistungsverstärker | |
DE60143296D1 (de) | Verfahren und schaltung für einen verstärker mit zwei betriebsspannungen | |
EP0986167A3 (de) | H-Brückenschaltung | |
EP0963038A3 (de) | Shuntgeregelte Gegentaktschaltung mit grossem Frequenzbereich | |
CA2263918A1 (en) | Voltage conversion circuit for a laser based distance measurement and ranging | |
CA2292714A1 (en) | Constant current power supply over a wide range of input voltages | |
DE50107630D1 (de) | Stromrichterschaltungsanordnung zur Erhöhung einer Wechselspannung | |
ATE238563T1 (de) | Gleichstrommessgerät mit passivem eingang und mit galvanischer isolierung, insbesondere für hochspannung |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8332 | No legal effect for de |