DE3870685D1 - Galvanisiereinrichtung zur erzeugung von hoeckern auf chip-bauelementen. - Google Patents

Galvanisiereinrichtung zur erzeugung von hoeckern auf chip-bauelementen.

Info

Publication number
DE3870685D1
DE3870685D1 DE8888101499T DE3870685T DE3870685D1 DE 3870685 D1 DE3870685 D1 DE 3870685D1 DE 8888101499 T DE8888101499 T DE 8888101499T DE 3870685 T DE3870685 T DE 3870685T DE 3870685 D1 DE3870685 D1 DE 3870685D1
Authority
DE
Germany
Prior art keywords
bumper
generating
electroplating
chip components
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8888101499T
Other languages
English (en)
Inventor
Ernst Ing Andrascek
Hans Ing Grad Hadersbeck
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Priority to DE8888101499T priority Critical patent/DE3870685D1/de
Application granted granted Critical
Publication of DE3870685D1 publication Critical patent/DE3870685D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Sustainable Development (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
DE8888101499T 1987-02-23 1988-02-02 Galvanisiereinrichtung zur erzeugung von hoeckern auf chip-bauelementen. Expired - Fee Related DE3870685D1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE8888101499T DE3870685D1 (de) 1987-02-23 1988-02-02 Galvanisiereinrichtung zur erzeugung von hoeckern auf chip-bauelementen.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3705727 1987-02-23
DE8888101499T DE3870685D1 (de) 1987-02-23 1988-02-02 Galvanisiereinrichtung zur erzeugung von hoeckern auf chip-bauelementen.

Publications (1)

Publication Number Publication Date
DE3870685D1 true DE3870685D1 (de) 1992-06-11

Family

ID=6321559

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8888101499T Expired - Fee Related DE3870685D1 (de) 1987-02-23 1988-02-02 Galvanisiereinrichtung zur erzeugung von hoeckern auf chip-bauelementen.

Country Status (4)

Country Link
US (1) US4906346A (de)
EP (1) EP0283681B1 (de)
JP (1) JPS63216998A (de)
DE (1) DE3870685D1 (de)

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US6375741B2 (en) * 1991-03-06 2002-04-23 Timothy J. Reardon Semiconductor processing spray coating apparatus
US5312532A (en) * 1993-01-15 1994-05-17 International Business Machines Corporation Multi-compartment eletroplating system
US6358388B1 (en) * 1996-07-15 2002-03-19 Semitool, Inc. Plating system workpiece support having workpiece-engaging electrodes with distal contact-part and dielectric cover
US6179983B1 (en) 1997-11-13 2001-01-30 Novellus Systems, Inc. Method and apparatus for treating surface including virtual anode
US6156167A (en) * 1997-11-13 2000-12-05 Novellus Systems, Inc. Clamshell apparatus for electrochemically treating semiconductor wafers
US6159354A (en) * 1997-11-13 2000-12-12 Novellus Systems, Inc. Electric potential shaping method for electroplating
US6027631A (en) * 1997-11-13 2000-02-22 Novellus Systems, Inc. Electroplating system with shields for varying thickness profile of deposited layer
US6126798A (en) * 1997-11-13 2000-10-03 Novellus Systems, Inc. Electroplating anode including membrane partition system and method of preventing passivation of same
US6919010B1 (en) 2001-06-28 2005-07-19 Novellus Systems, Inc. Uniform electroplating of thin metal seeded wafers using rotationally asymmetric variable anode correction
AU770057B2 (en) 1999-02-08 2004-02-12 Commonwealth of Australia Represented by Defence Science and Technology Organisation of the Department of Defence A micro-electronic bond degradation sensor and method of manufacture
US6585876B2 (en) * 1999-04-08 2003-07-01 Applied Materials Inc. Flow diffuser to be used in electro-chemical plating system and method
US6409903B1 (en) 1999-12-21 2002-06-25 International Business Machines Corporation Multi-step potentiostatic/galvanostatic plating control
US8308931B2 (en) * 2006-08-16 2012-11-13 Novellus Systems, Inc. Method and apparatus for electroplating
US8475636B2 (en) 2008-11-07 2013-07-02 Novellus Systems, Inc. Method and apparatus for electroplating
US7622024B1 (en) 2000-05-10 2009-11-24 Novellus Systems, Inc. High resistance ionic current source
US6527920B1 (en) 2000-05-10 2003-03-04 Novellus Systems, Inc. Copper electroplating apparatus
US6821407B1 (en) 2000-05-10 2004-11-23 Novellus Systems, Inc. Anode and anode chamber for copper electroplating
US6576110B2 (en) * 2000-07-07 2003-06-10 Applied Materials, Inc. Coated anode apparatus and associated method
US7682498B1 (en) 2001-06-28 2010-03-23 Novellus Systems, Inc. Rotationally asymmetric variable electrode correction
TWI240766B (en) * 2003-09-09 2005-10-01 Ind Tech Res Inst Electroplating device having rectification and voltage detection function
US8623193B1 (en) 2004-06-16 2014-01-07 Novellus Systems, Inc. Method of electroplating using a high resistance ionic current source
JP2006348373A (ja) 2005-06-20 2006-12-28 Yamamoto Mekki Shikenki:Kk 電気めっき用治具
US7799684B1 (en) 2007-03-05 2010-09-21 Novellus Systems, Inc. Two step process for uniform across wafer deposition and void free filling on ruthenium coated wafers
US8703615B1 (en) 2008-03-06 2014-04-22 Novellus Systems, Inc. Copper electroplating process for uniform across wafer deposition and void free filling on ruthenium coated wafers
US7964506B1 (en) 2008-03-06 2011-06-21 Novellus Systems, Inc. Two step copper electroplating process with anneal for uniform across wafer deposition and void free filling on ruthenium coated wafers
US8513124B1 (en) 2008-03-06 2013-08-20 Novellus Systems, Inc. Copper electroplating process for uniform across wafer deposition and void free filling on semi-noble metal coated wafers
US20110017604A1 (en) * 2008-04-23 2011-01-27 Atomic Energy Council - Institute Of Nuclear Energy Research Method for making semiconductor electrodes
US8475637B2 (en) * 2008-12-17 2013-07-02 Novellus Systems, Inc. Electroplating apparatus with vented electrolyte manifold
US8262871B1 (en) 2008-12-19 2012-09-11 Novellus Systems, Inc. Plating method and apparatus with multiple internally irrigated chambers
US9624592B2 (en) 2010-07-02 2017-04-18 Novellus Systems, Inc. Cross flow manifold for electroplating apparatus
US10094034B2 (en) 2015-08-28 2018-10-09 Lam Research Corporation Edge flow element for electroplating apparatus
US9523155B2 (en) 2012-12-12 2016-12-20 Novellus Systems, Inc. Enhancement of electrolyte hydrodynamics for efficient mass transfer during electroplating
US10233556B2 (en) 2010-07-02 2019-03-19 Lam Research Corporation Dynamic modulation of cross flow manifold during electroplating
US8795480B2 (en) 2010-07-02 2014-08-05 Novellus Systems, Inc. Control of electrolyte hydrodynamics for efficient mass transfer during electroplating
TWI410532B (zh) * 2010-09-01 2013-10-01 Grand Plastic Technology Co Ltd 晶圓填孔垂直式電極電鍍設備
US9017528B2 (en) 2011-04-14 2015-04-28 Tel Nexx, Inc. Electro chemical deposition and replenishment apparatus
US9005409B2 (en) 2011-04-14 2015-04-14 Tel Nexx, Inc. Electro chemical deposition and replenishment apparatus
US8575028B2 (en) 2011-04-15 2013-11-05 Novellus Systems, Inc. Method and apparatus for filling interconnect structures
US9670588B2 (en) 2013-05-01 2017-06-06 Lam Research Corporation Anisotropic high resistance ionic current source (AHRICS)
US9449808B2 (en) 2013-05-29 2016-09-20 Novellus Systems, Inc. Apparatus for advanced packaging applications
US9677190B2 (en) 2013-11-01 2017-06-13 Lam Research Corporation Membrane design for reducing defects in electroplating systems
US9303329B2 (en) 2013-11-11 2016-04-05 Tel Nexx, Inc. Electrochemical deposition apparatus with remote catholyte fluid management
US9816194B2 (en) 2015-03-19 2017-11-14 Lam Research Corporation Control of electrolyte flow dynamics for uniform electroplating
US10014170B2 (en) 2015-05-14 2018-07-03 Lam Research Corporation Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
US10364505B2 (en) 2016-05-24 2019-07-30 Lam Research Corporation Dynamic modulation of cross flow manifold during elecroplating
CN106435695A (zh) * 2016-08-24 2017-02-22 谢彪 电镀设备及电镀方法
US11001934B2 (en) 2017-08-21 2021-05-11 Lam Research Corporation Methods and apparatus for flow isolation and focusing during electroplating
US10781527B2 (en) 2017-09-18 2020-09-22 Lam Research Corporation Methods and apparatus for controlling delivery of cross flowing and impinging electrolyte during electroplating

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH494824A (de) * 1969-07-10 1970-08-15 Fluehmann Werner Verfahren zur elektrolytischen Abscheidung von Kupfer hoher Duktilität
US4137867A (en) * 1977-09-12 1979-02-06 Seiichiro Aigo Apparatus for bump-plating semiconductor wafers
US4170959A (en) * 1978-04-04 1979-10-16 Seiichiro Aigo Apparatus for bump-plating semiconductor wafers
JPS5819170Y2 (ja) * 1980-08-16 1983-04-19 征一郎 相合 半導体ウェハ−のめっき装置
JPS5828829A (ja) * 1981-08-13 1983-02-19 Nec Corp 半導体ウエハ−のメツキ装置
EP0144752B1 (de) * 1983-12-01 1989-03-22 EM Microelectronic-Marin SA Anordnung für die elektrolytische Abscheidung eines Leitermaterials auf integrierten Schaltungsscheiben
US4466864A (en) * 1983-12-16 1984-08-21 At&T Technologies, Inc. Methods of and apparatus for electroplating preselected surface regions of electrical articles

Also Published As

Publication number Publication date
JPS63216998A (ja) 1988-09-09
EP0283681B1 (de) 1992-05-06
US4906346A (en) 1990-03-06
JPH044399B2 (de) 1992-01-28
EP0283681A1 (de) 1988-09-28

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee