TW200712264A - Coated objects - Google Patents

Coated objects

Info

Publication number
TW200712264A
TW200712264A TW095128808A TW95128808A TW200712264A TW 200712264 A TW200712264 A TW 200712264A TW 095128808 A TW095128808 A TW 095128808A TW 95128808 A TW95128808 A TW 95128808A TW 200712264 A TW200712264 A TW 200712264A
Authority
TW
Taiwan
Prior art keywords
dimers
polymers
oxide ceramic
halogen
hydrogen
Prior art date
Application number
TW095128808A
Other languages
English (en)
Inventor
Michael Froitzheim
Josef Heppekausen
Original Assignee
Leybold Vakuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum Gmbh filed Critical Leybold Vakuum Gmbh
Publication of TW200712264A publication Critical patent/TW200712264A/zh

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/02Selection of particular materials
    • F04D29/023Selection of particular materials especially adapted for elastic fluid pumps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D7/00Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials
    • B05D7/24Processes, other than flocking, specially adapted for applying liquids or other fluent materials to particular surfaces or for applying particular liquids or other fluent materials for applying particular liquids or other fluent materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/60Deposition of organic layers from vapour phase
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/026Anodisation with spark discharge
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02Anodisation
    • C25D11/04Anodisation of aluminium or alloys based thereon
    • C25D11/18After-treatment, e.g. pore-sealing
    • C25D11/24Chemical after-treatment
    • C25D11/246Chemical after-treatment for sealing layers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2202/00Metallic substrate
    • B05D2202/20Metallic substrate based on light metals
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2202/00Metallic substrate
    • B05D2202/20Metallic substrate based on light metals
    • B05D2202/25Metallic substrate based on light metals based on Al
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2202/00Metallic substrate
    • B05D2202/30Metallic substrate based on refractory metals (Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W)
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D2350/00Pretreatment of the substrate
    • B05D2350/60Adding a layer before coating
    • B05D2350/63Adding a layer before coating ceramic layer
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00Manufacture
    • F05D2230/30Manufacture with deposition of material
    • F05D2230/31Layer deposition
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00Manufacture
    • F05D2230/90Coating; Surface treatment
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/10Metals, alloys or intermetallic compounds
    • F05D2300/17Alloys
    • F05D2300/173Aluminium alloys, e.g. AlCuMgPb
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/20Oxide or non-oxide ceramics
    • F05D2300/21Oxide ceramics
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/40Organic materials
    • F05D2300/43Synthetic polymers, e.g. plastics; Rubber
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05DINDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00Materials; Properties thereof
    • F05D2300/60Properties or characteristics given to material by treatment or manufacturing
    • F05D2300/611Coating
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/3154Of fluorinated addition polymer from unsaturated monomers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/31504Composite [nonstructural laminate]
    • Y10T428/31678Of metal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Wood Science & Technology (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Laminated Bodies (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Chemical Vapour Deposition (AREA)
TW095128808A 2005-08-27 2006-08-07 Coated objects TW200712264A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE200510040648 DE102005040648A1 (de) 2005-08-27 2005-08-27 Beschichtete Gegenstände

Publications (1)

Publication Number Publication Date
TW200712264A true TW200712264A (en) 2007-04-01

Family

ID=37533216

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095128808A TW200712264A (en) 2005-08-27 2006-08-07 Coated objects

Country Status (9)

Country Link
US (1) US8119243B2 (zh)
EP (1) EP1919632A1 (zh)
JP (1) JP2009506202A (zh)
KR (1) KR20080043316A (zh)
CN (1) CN101253004B (zh)
DE (1) DE102005040648A1 (zh)
RU (1) RU2413746C2 (zh)
TW (1) TW200712264A (zh)
WO (1) WO2007025868A1 (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090263641A1 (en) * 2008-04-16 2009-10-22 Northeast Maritime Institute, Inc. Method and apparatus to coat objects with parylene
US20090263581A1 (en) * 2008-04-16 2009-10-22 Northeast Maritime Institute, Inc. Method and apparatus to coat objects with parylene and boron nitride
CA2724602A1 (en) * 2008-04-16 2009-12-17 Hzo, Inc. Metal and electronic device coating process for marine use and other environments
DE102009012945A1 (de) * 2009-03-12 2010-09-16 Mtu Aero Engines Gmbh Verfahren zur Herstellung einer abrasiven Beschichtung und Bauteil für eine Turbomaschine
EP2677068A4 (en) * 2011-02-18 2016-10-05 Aisin Keikinzoku Co Ltd METHOD FOR SURFACE TREATMENT OF A METALLIC ELEMENT AND METAL ELEMENT THUS OBTAINED
CN102218393B (zh) * 2011-05-31 2013-10-02 宁波威霖住宅设施有限公司 一种采用全干法在金属表面双层复合镀膜的方法
DE102011105455A1 (de) 2011-06-24 2013-01-10 Henkel Ag & Co. Kgaa Konversionsschichtfreie Bauteile von Vakuumpumpen
EP2931946A2 (en) * 2012-07-10 2015-10-21 PCT Protective Coating Technologies Ltd. Method of sealing pores of an oxidation layer
DE102013219043A1 (de) * 2013-09-23 2015-03-26 Oerlikon Leybold Vacuum Gmbh Legierungen von Rotoren einer Turbomolekularpumpe
DE102014203172A1 (de) * 2014-02-21 2015-08-27 Oerlikon Leybold Vacuum Gmbh Beschichtete CFK Oberflächen von Turbomolekularpumpen
CN107138379A (zh) * 2017-06-29 2017-09-08 昆山特酷信息科技有限公司 电脑机箱的喷涂工艺
CN110102453B (zh) * 2019-04-18 2022-04-05 长沙新材料产业研究院有限公司 一种镁合金表面改性工艺
US20210180203A1 (en) * 2019-12-11 2021-06-17 GM Global Technology Operations LLC Vacuum impregnation of anodic oxidation coating (aoc) treated surfaces on valve metal substrates

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3379803A (en) * 1964-05-04 1968-04-23 Union Carbide Corp Coating method and apparatus for deposition of polymer-forming vapor under vacuum
JPS55148766A (en) * 1979-05-11 1980-11-19 Hitachi Ltd Surface treatment of magnesium or magnesium alloy
DD299595A7 (de) * 1989-07-19 1992-04-30 Jenoptik Carl Zeiss Jena Gmbh Werk Entw. Wiss.-Techn. Ausruestungen,De Schwarze konversionsschichten auf titanwerkstoffen
JP2989248B2 (ja) * 1990-11-08 1999-12-13 ティーディーケイ株式会社 ポリ(モノクロロ―p―キシリレン)を酸化して得られる重合体及びその製造方法並びに該重合体からなる保護膜
DE4124730C3 (de) * 1991-07-25 2001-09-06 Ahc Oberflaechentechnik Gmbh Anodisierte Gegenstände aus Aluminium oder Magnesium mit in die Oxidschicht eingelagerten Fluorpolymeren und Verfahren zu deren Herstellung
DE4239391C2 (de) * 1991-11-27 1996-11-21 Electro Chem Eng Gmbh Gegenstände aus Aluminium, Magnesium oder Titan mit einer mit Fluorpolymeren gefüllten Oxidkeramikschicht und Verfahren zu ihrer Herstellung
DE4139006C3 (de) * 1991-11-27 2003-07-10 Electro Chem Eng Gmbh Verfahren zur Erzeugung von Oxidkeramikschichten auf sperrschichtbildenden Metallen und auf diese Weise erzeugte Gegenstände aus Aluminium, Magnesium, Titan oder deren Legierungen mit einer Oxidkeramikschicht
JP2913537B2 (ja) * 1995-04-12 1999-06-28 セイコー精機株式会社 防食構造
IT1296155B1 (it) * 1996-04-05 1999-06-09 Varian Spa Rotore di pompa turbomolecolare
JP2002505803A (ja) 1996-10-25 2002-02-19 スペシャルティ、コーティング、システムズ、インコーポレイテッド パリレンコーティングの製造方法
US5938406A (en) * 1997-04-18 1999-08-17 Varian, Inc. Rotor for turbomolecular pump
WO2001048834A2 (de) * 1999-12-23 2001-07-05 Siemens Aktiengesellschaft Piezoelektrisches element
DE10163864A1 (de) * 2001-12-22 2003-07-10 Leybold Vakuum Gmbh Beschichtung von Gegenständen

Also Published As

Publication number Publication date
KR20080043316A (ko) 2008-05-16
RU2413746C2 (ru) 2011-03-10
CN101253004B (zh) 2011-10-26
JP2009506202A (ja) 2009-02-12
DE102005040648A1 (de) 2007-03-01
US8119243B2 (en) 2012-02-21
CN101253004A (zh) 2008-08-27
US20090068451A1 (en) 2009-03-12
WO2007025868A1 (de) 2007-03-08
RU2008111634A (ru) 2009-10-10
EP1919632A1 (de) 2008-05-14

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