TW200708066A - Method and apparatus for obtaining the data of tracing points and the method and apparatus for tracing - Google Patents

Method and apparatus for obtaining the data of tracing points and the method and apparatus for tracing

Info

Publication number
TW200708066A
TW200708066A TW095111174A TW95111174A TW200708066A TW 200708066 A TW200708066 A TW 200708066A TW 095111174 A TW095111174 A TW 095111174A TW 95111174 A TW95111174 A TW 95111174A TW 200708066 A TW200708066 A TW 200708066A
Authority
TW
Taiwan
Prior art keywords
exposure
data
board
points
tracing
Prior art date
Application number
TW095111174A
Other languages
English (en)
Inventor
Mitsuru Mushano
Original Assignee
Fuji Photo Film Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Photo Film Co Ltd filed Critical Fuji Photo Film Co Ltd
Publication of TW200708066A publication Critical patent/TW200708066A/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70275—Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
TW095111174A 2005-03-31 2006-03-30 Method and apparatus for obtaining the data of tracing points and the method and apparatus for tracing TW200708066A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005103787 2005-03-31

Publications (1)

Publication Number Publication Date
TW200708066A true TW200708066A (en) 2007-02-16

Family

ID=37073309

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095111174A TW200708066A (en) 2005-03-31 2006-03-30 Method and apparatus for obtaining the data of tracing points and the method and apparatus for tracing

Country Status (5)

Country Link
US (1) US20090115981A1 (zh)
KR (1) KR101261353B1 (zh)
CN (1) CN101171826A (zh)
TW (1) TW200708066A (zh)
WO (1) WO2006106746A1 (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101692265B1 (ko) * 2009-12-08 2017-01-04 삼성전자 주식회사 마스크리스 노광 장치와 이를 이용한 패턴 보정 방법
KR101698141B1 (ko) * 2009-12-08 2017-01-19 삼성전자 주식회사 마스크리스 노광장치 및 그 제어방법
JP5813555B2 (ja) * 2012-03-30 2015-11-17 株式会社アドテックエンジニアリング 露光描画装置及び露光描画方法
US9395631B2 (en) * 2014-04-01 2016-07-19 Applied Materials, Inc. Multi-beam pattern generators employing yaw correction when writing upon large substrates, and associated methods
WO2017104717A1 (ja) * 2015-12-17 2017-06-22 株式会社ニコン パターン描画装置
US10719018B2 (en) * 2018-07-10 2020-07-21 Applied Materials, Inc. Dynamic imaging system

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003234968A (ja) * 1992-04-09 2003-08-22 Olympus Optical Co Ltd 画像処理装置及び撮像装置
US6205259B1 (en) * 1992-04-09 2001-03-20 Olympus Optical Co., Ltd. Image processing apparatus
JPH0991416A (ja) * 1995-09-26 1997-04-04 Dainippon Screen Mfg Co Ltd 画像の傾き補正装置および画像の傾き補正方法
JP2000122303A (ja) * 1998-10-20 2000-04-28 Asahi Optical Co Ltd 描画装置
JP4113418B2 (ja) * 2002-11-15 2008-07-09 富士フイルム株式会社 露光装置
JP4315694B2 (ja) * 2003-01-31 2009-08-19 富士フイルム株式会社 描画ヘッドユニット、描画装置及び描画方法
EP1482373A1 (en) * 2003-05-30 2004-12-01 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
DE10325183B4 (de) * 2003-06-04 2013-01-31 Robert Bosch Gmbh Verfahren und Vorrichtung zur Durchführung eines Verfahrens zur Ermittlung des Beladungszustands eines in einem Abgasbereich einer Brennkraftmaschine angeordneten Bauteils
JP2005031274A (ja) * 2003-07-10 2005-02-03 Fuji Photo Film Co Ltd 画像記録装置及び画像記録方法
EP1494077A3 (en) * 2003-07-02 2006-12-27 Fuji Photo Film Co., Ltd. Image forming apparatus and image forming method

Also Published As

Publication number Publication date
KR20070116100A (ko) 2007-12-06
WO2006106746A1 (ja) 2006-10-12
CN101171826A (zh) 2008-04-30
KR101261353B1 (ko) 2013-05-09
US20090115981A1 (en) 2009-05-07

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