TW200703379A - Thin film device - Google Patents

Thin film device

Info

Publication number
TW200703379A
TW200703379A TW095111103A TW95111103A TW200703379A TW 200703379 A TW200703379 A TW 200703379A TW 095111103 A TW095111103 A TW 095111103A TW 95111103 A TW95111103 A TW 95111103A TW 200703379 A TW200703379 A TW 200703379A
Authority
TW
Taiwan
Prior art keywords
coil
thin film
magnetic film
parasitic capacitance
film device
Prior art date
Application number
TW095111103A
Other languages
English (en)
Inventor
Toshiyasu Fujiwara
Original Assignee
Tdk Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tdk Corp filed Critical Tdk Corp
Publication of TW200703379A publication Critical patent/TW200703379A/zh

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/12Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
    • H01F10/14Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys containing iron or nickel
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F10/00Thin magnetic films, e.g. of one-domain structure
    • H01F10/08Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
    • H01F10/10Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
    • H01F10/18Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
    • H01F10/20Ferrites
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00Details of transformers or inductances, in general
    • H01F27/28Coils; Windings; Conductive connections
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041Printed circuit coils
    • H01F41/046Printed circuit coils structurally combined with ferromagnetic material

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Magnetic Heads (AREA)
  • Semiconductor Integrated Circuits (AREA)
TW095111103A 2005-03-31 2006-03-30 Thin film device TW200703379A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005104864A JP2006286931A (ja) 2005-03-31 2005-03-31 薄膜デバイス

Publications (1)

Publication Number Publication Date
TW200703379A true TW200703379A (en) 2007-01-16

Family

ID=36586115

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095111103A TW200703379A (en) 2005-03-31 2006-03-30 Thin film device

Country Status (6)

Country Link
US (1) US20060220776A1 (zh)
EP (1) EP1708210A2 (zh)
JP (1) JP2006286931A (zh)
KR (1) KR100785678B1 (zh)
CN (1) CN1841580A (zh)
TW (1) TW200703379A (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11756985B2 (en) 2017-11-16 2023-09-12 Georgia Tech Research Corporation Substrate-compatible inductors with magnetic layers

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JPWO2011148819A1 (ja) 2010-05-28 2013-07-25 日本碍子株式会社 インピーダンス整合素子
US8928450B2 (en) * 2010-06-10 2015-01-06 General Electric Company Transformer assembly for a magnetic resonance imaging system
KR101514499B1 (ko) * 2012-03-15 2015-04-22 삼성전기주식회사 공통모드필터 제조방법 및 공통모드필터
US9009951B2 (en) * 2012-04-24 2015-04-21 Cyntec Co., Ltd. Method of fabricating an electromagnetic component
CN103022018B (zh) * 2012-12-07 2015-04-15 中国电子科技集团公司第五十五研究所 电流调谐的集成磁膜微电感的制作方法和电感调谐方法
TWI513960B (zh) * 2013-05-20 2015-12-21 Nat Univ Tsing Hua 具有微電感結構之感測晶片
JP6170790B2 (ja) * 2013-09-13 2017-07-26 新光電気工業株式会社 配線基板及びその製造方法
CN103795347B (zh) * 2013-12-27 2017-01-04 中国电子科技集团公司第五十五研究所 一种电流调谐的集成磁膜单片混频器
CN104485507B (zh) * 2014-12-05 2018-02-13 广州丰谱信息技术有限公司 一种可控的宽频磁波波束形成装置与方法
CN105896985A (zh) * 2015-01-26 2016-08-24 台达电子工业股份有限公司 电源装置、磁性元件及其绕组单元
US20160217906A1 (en) * 2015-01-27 2016-07-28 Seung Wook Park Coil component
KR101730232B1 (ko) * 2015-04-01 2017-04-25 삼성전기주식회사 적층 전자부품 및 그 제조방법
KR20170003199A (ko) * 2015-06-30 2017-01-09 삼성전기주식회사 박막형 코일 부품 및 그 제조방법
US10593449B2 (en) * 2017-03-30 2020-03-17 International Business Machines Corporation Magnetic inductor with multiple magnetic layer thicknesses
US10597769B2 (en) 2017-04-05 2020-03-24 International Business Machines Corporation Method of fabricating a magnetic stack arrangement of a laminated magnetic inductor
US10347411B2 (en) 2017-05-19 2019-07-09 International Business Machines Corporation Stress management scheme for fabricating thick magnetic films of an inductor yoke arrangement
CN107481833B (zh) * 2017-07-12 2020-12-15 华为机器有限公司 一种薄膜耦合电感和电源转换电路
JP6760247B2 (ja) * 2017-12-05 2020-09-23 株式会社村田製作所 コイル部品

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JP2677415B2 (ja) * 1989-05-17 1997-11-17 ティーディーケイ株式会社 薄膜磁気ヘッド
GB9120053D0 (en) * 1991-09-19 1991-11-06 Razedge Ltd Induction heating apparatus
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JPH07268610A (ja) * 1994-03-28 1995-10-17 Alps Electric Co Ltd 軟磁性合金薄膜
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JP2002222711A (ja) * 2001-01-24 2002-08-09 Kawasaki Steel Corp 平面磁気素子
JP2003017322A (ja) * 2001-06-29 2003-01-17 Kawasaki Steel Corp 平面磁気素子
JP3724405B2 (ja) * 2001-10-23 2005-12-07 株式会社村田製作所 コモンモードチョークコイル
JP2003234216A (ja) * 2001-12-06 2003-08-22 Jfe Steel Kk 平面磁気素子
JP2003217922A (ja) * 2002-01-21 2003-07-31 Goto Denshi Kk コイルの端末リード線保護構造
JP2003249408A (ja) * 2002-02-26 2003-09-05 Hitachi Ltd 磁性薄膜インダクタ
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JP4293603B2 (ja) * 2004-02-25 2009-07-08 Tdk株式会社 コイル部品及びその製造方法
US20050257439A1 (en) * 2004-04-29 2005-11-24 Abb Technology Ag Ventilated transformer enclosure
JP4012526B2 (ja) * 2004-07-01 2007-11-21 Tdk株式会社 薄膜コイルおよびその製造方法、ならびにコイル構造体およびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11756985B2 (en) 2017-11-16 2023-09-12 Georgia Tech Research Corporation Substrate-compatible inductors with magnetic layers

Also Published As

Publication number Publication date
CN1841580A (zh) 2006-10-04
JP2006286931A (ja) 2006-10-19
EP1708210A2 (en) 2006-10-04
KR100785678B1 (ko) 2007-12-17
KR20060105612A (ko) 2006-10-11
US20060220776A1 (en) 2006-10-05

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