TW200643403A - Inspection device, inspection method, and positioning method - Google Patents

Inspection device, inspection method, and positioning method

Info

Publication number
TW200643403A
TW200643403A TW095106064A TW95106064A TW200643403A TW 200643403 A TW200643403 A TW 200643403A TW 095106064 A TW095106064 A TW 095106064A TW 95106064 A TW95106064 A TW 95106064A TW 200643403 A TW200643403 A TW 200643403A
Authority
TW
Taiwan
Prior art keywords
stage
inspection
angle
axis
alignment mark
Prior art date
Application number
TW095106064A
Other languages
English (en)
Chinese (zh)
Inventor
Yukinari Maeyama
Shuji Yamaoka
Shogo Ishioka
Original Assignee
Oht Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oht Inc filed Critical Oht Inc
Publication of TW200643403A publication Critical patent/TW200643403A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
TW095106064A 2005-02-23 2006-02-23 Inspection device, inspection method, and positioning method TW200643403A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005047937A JP4799880B2 (ja) 2005-02-23 2005-02-23 検査装置及び検査方法並びに位置決め方法

Publications (1)

Publication Number Publication Date
TW200643403A true TW200643403A (en) 2006-12-16

Family

ID=36927518

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095106064A TW200643403A (en) 2005-02-23 2006-02-23 Inspection device, inspection method, and positioning method

Country Status (3)

Country Link
JP (1) JP4799880B2 (ja)
TW (1) TW200643403A (ja)
WO (1) WO2006090891A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI550373B (zh) * 2011-11-14 2016-09-21 鴻海精密工業股份有限公司 自動更換測針系統及方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5120027B2 (ja) 2007-09-28 2013-01-16 東京エレクトロン株式会社 プローブ装置及びプロービング方法
WO2009147712A1 (ja) * 2008-06-02 2009-12-10 株式会社アドバンテスト Ｔｃｐハンドリング装置及びｔｃｐ試験装置
JP4725650B2 (ja) * 2009-01-07 2011-07-13 東京エレクトロン株式会社 プローブ装置
JP4878385B2 (ja) * 2009-12-07 2012-02-15 コグネックス・コーポレイション オブジェクト制御システム、オブジェクト制御方法、プログラム、及び回転中心位置特定装置
KR101891681B1 (ko) * 2016-11-07 2018-08-24 (주)하이비젼시스템 비젼을 이용한 피봇점 정렬 장치
CN107806844B (zh) * 2017-11-24 2023-08-01 成都瑞戈科技有限公司 一种防尘罩骨架偏正自动检测仪
TWI794324B (zh) * 2017-11-24 2023-03-01 日商日本電產理德股份有限公司 基板檢查裝置、檢查位置補正方法、位置補正資訊產生方法、以及位置補正資訊產生系統
JP7018784B2 (ja) * 2018-02-23 2022-02-14 東京エレクトロン株式会社 コンタクト精度保証方法および検査装置
CN111102940B (zh) * 2018-10-29 2022-07-05 北京金风科创风电设备有限公司 叶片桨距角偏差的检测方法、装置、存储介质及系统
KR102153910B1 (ko) * 2019-04-09 2020-09-09 주식회사 이엘피 디스플레이 패널의 양측 얼라인 및 검사장치
CN112683422A (zh) * 2020-12-02 2021-04-20 昆山广钰德智能装备有限公司 排温传感器检测设备
CN116060329A (zh) * 2023-02-17 2023-05-05 苏州天准科技股份有限公司 一种汽车空气减震器的电磁阀检测设备

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0662380U (ja) * 1993-01-29 1994-09-02 安藤電気株式会社 Ｔａｂ用測定機構
JPH11326229A (ja) * 1998-05-21 1999-11-26 Hitachi Electron Eng Co Ltd 異物検査装置
JP4119137B2 (ja) * 2002-02-27 2008-07-16 ヤマハ発動機株式会社 部品試験装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI550373B (zh) * 2011-11-14 2016-09-21 鴻海精密工業股份有限公司 自動更換測針系統及方法

Also Published As

Publication number Publication date
JP4799880B2 (ja) 2011-10-26
WO2006090891A1 (ja) 2006-08-31
JP2006234510A (ja) 2006-09-07

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