TW200628619A - Vacuum coating system - Google Patents
Vacuum coating systemInfo
- Publication number
- TW200628619A TW200628619A TW094146998A TW94146998A TW200628619A TW 200628619 A TW200628619 A TW 200628619A TW 094146998 A TW094146998 A TW 094146998A TW 94146998 A TW94146998 A TW 94146998A TW 200628619 A TW200628619 A TW 200628619A
- Authority
- TW
- Taiwan
- Prior art keywords
- vacuum coating
- coating system
- provides
- substrates
- substrate
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200410063703 DE102004063703A1 (de) | 2004-12-28 | 2004-12-28 | Vakuumbeschichtungssystem |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200628619A true TW200628619A (en) | 2006-08-16 |
Family
ID=36298967
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094146998A TW200628619A (en) | 2004-12-28 | 2005-12-28 | Vacuum coating system |
Country Status (3)
Country | Link |
---|---|
DE (1) | DE102004063703A1 (zh) |
TW (1) | TW200628619A (zh) |
WO (1) | WO2006069774A2 (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408242B (zh) * | 2008-04-29 | 2013-09-11 | Sunic System Ltd | 蒸發器以及具有該蒸發器的真空沉積裝置 |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102005035904B4 (de) * | 2005-07-28 | 2012-01-12 | Leybold Optics Gmbh | Vorrichtung zum Behandeln von Substraten |
US7465681B2 (en) | 2006-08-25 | 2008-12-16 | Corning Incorporated | Method for producing smooth, dense optical films |
DE102006047472A1 (de) * | 2006-10-05 | 2008-04-10 | Fhr Anlagenbau Gmbh | Verfahren und Vorrichtung zur oberflächennahen Behandlung von flächigen Substraten |
DK2251453T3 (da) | 2009-05-13 | 2014-07-07 | Sio2 Medical Products Inc | Beholderholder |
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
CA2855353C (en) | 2011-11-11 | 2021-01-19 | Sio2 Medical Products, Inc. | Passivation, ph protective or lubricity coating for pharmaceutical package, coating process and apparatus |
US20130137273A1 (en) | 2011-11-28 | 2013-05-30 | Infineon Technologies Ag | Semiconductor Processing System |
CA2887352A1 (en) | 2012-05-09 | 2013-11-14 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
CA2890066C (en) | 2012-11-01 | 2021-11-09 | Sio2 Medical Products, Inc. | Coating inspection method |
EP2920567B1 (en) | 2012-11-16 | 2020-08-19 | SiO2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
US10201660B2 (en) | 2012-11-30 | 2019-02-12 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like |
WO2014134577A1 (en) | 2013-03-01 | 2014-09-04 | Sio2 Medical Products, Inc. | Plasma or cvd pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
WO2014164928A1 (en) | 2013-03-11 | 2014-10-09 | Sio2 Medical Products, Inc. | Coated packaging |
US9863042B2 (en) | 2013-03-15 | 2018-01-09 | Sio2 Medical Products, Inc. | PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases |
EP3693493A1 (en) | 2014-03-28 | 2020-08-12 | SiO2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
CN108138316A (zh) | 2015-08-18 | 2018-06-08 | Sio2医药产品公司 | 具有低氧气传输速率的药物和其他包装 |
CN110002766B (zh) * | 2019-04-24 | 2023-06-23 | 苏州伯宇光电科技有限公司 | 玻璃电致变色膜化学浴镀膜装置 |
CN113791510A (zh) * | 2021-08-06 | 2021-12-14 | 河北光兴半导体技术有限公司 | 用于电致变色玻璃的制备系统 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5638468A (en) * | 1979-09-06 | 1981-04-13 | Dainippon Screen Mfg Co Ltd | Loading equipment of wafer |
DE3542613A1 (de) * | 1985-12-03 | 1987-06-04 | Licentia Gmbh | Nachfuellvorrichtung fuer eine verdampfungsquelle in einer vakuumkammer |
DD261175A1 (de) * | 1986-02-03 | 1988-10-19 | Hochvakuum Dresden Veb | Verfahren zum elektronenstrahlverdampfen von gering waermeableitenden materialien |
CH668430A5 (de) * | 1986-07-31 | 1988-12-30 | Satis Vacuum Ag | Vakuum-beschichtungsanlage fuer optische substrate. |
US4891821A (en) * | 1989-03-27 | 1990-01-02 | Hanks Charles W | Magnetic correcting fence for adjacent e-guns |
JPH0387358A (ja) * | 1989-06-02 | 1991-04-12 | Toshiba Corp | 成膜装置と成膜方法およびスパッタ装置 |
EP0438827A1 (en) * | 1990-01-19 | 1991-07-31 | Koninklijke Philips Electronics N.V. | Apparatus comprising an electric motor having a variable motor power |
CH681308A5 (zh) * | 1990-05-22 | 1993-02-26 | Satis Vacuum Ag | |
CH684645A5 (de) * | 1991-12-19 | 1994-11-15 | Balzers Hochvakuum | Substrathalte-Vorrichtung für Vakuumprozesse. |
CH691308A5 (de) * | 1996-05-10 | 2001-06-29 | Satis Vacuum Ind Vertriebs Ag | Substrat-Träger für Vakuum-Beschichtungsanlagen. |
US6054184A (en) * | 1996-06-04 | 2000-04-25 | General Electric Company | Method for forming a multilayer thermal barrier coating |
DE10222964B4 (de) * | 2002-04-15 | 2004-07-08 | Schott Glas | Verfahren zur Gehäusebildung bei elektronischen Bauteilen sowie so hermetisch verkapselte elektronische Bauteile |
-
2004
- 2004-12-28 DE DE200410063703 patent/DE102004063703A1/de not_active Withdrawn
-
2005
- 2005-12-27 WO PCT/EP2005/014042 patent/WO2006069774A2/de not_active Application Discontinuation
- 2005-12-28 TW TW094146998A patent/TW200628619A/zh unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI408242B (zh) * | 2008-04-29 | 2013-09-11 | Sunic System Ltd | 蒸發器以及具有該蒸發器的真空沉積裝置 |
Also Published As
Publication number | Publication date |
---|---|
WO2006069774A3 (de) | 2006-10-05 |
WO2006069774A2 (de) | 2006-07-06 |
DE102004063703A1 (de) | 2006-07-06 |
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