WO2006010451A3 - Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung - Google Patents

Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung Download PDF

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Publication number
WO2006010451A3
WO2006010451A3 PCT/EP2005/007418 EP2005007418W WO2006010451A3 WO 2006010451 A3 WO2006010451 A3 WO 2006010451A3 EP 2005007418 W EP2005007418 W EP 2005007418W WO 2006010451 A3 WO2006010451 A3 WO 2006010451A3
Authority
WO
WIPO (PCT)
Prior art keywords
coating
vacuum
vacuum chamber
installation
coating installation
Prior art date
Application number
PCT/EP2005/007418
Other languages
English (en)
French (fr)
Other versions
WO2006010451A2 (de
Inventor
Marten Walther
Tobias Kaelber
Stefan Bauer
Hartmut Bauch
Joern Gerban
Original Assignee
Schott Ag
Marten Walther
Tobias Kaelber
Stefan Bauer
Hartmut Bauch
Joern Gerban
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Ag, Marten Walther, Tobias Kaelber, Stefan Bauer, Hartmut Bauch, Joern Gerban filed Critical Schott Ag
Priority to EP05773105A priority Critical patent/EP1771600A2/de
Priority to JP2007522952A priority patent/JP5224810B2/ja
Priority to US11/572,255 priority patent/US20080210550A1/en
Publication of WO2006010451A2 publication Critical patent/WO2006010451A2/de
Publication of WO2006010451A3 publication Critical patent/WO2006010451A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering

Abstract

Die Erfindung sieht eine Vorrichtung zur Vakuumbeschichtung von Substraten vor, welche eine Vakuumkammer, eine Einrichtung zur Halterung wenigstens eines Substrats, zumindest einem ersten Beschichtungsbereich der Vakuumkammer mit wenigstens einer Einrichtung zur plasmaimpuls-induzierten chemischen Dampfphasenabscheidung (PICVD) und zumindest einem zweiten Beschichtungsbereich der Vakuumkammer mit wenigstens einer Einrichtung zur Sputterbeschichtung, sowie eine Transporteinrichtung zum Transport des Substrats in die Beschichtungsbereiche umfasst.
PCT/EP2005/007418 2004-07-26 2005-07-08 Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung WO2006010451A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP05773105A EP1771600A2 (de) 2004-07-26 2005-07-08 Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung
JP2007522952A JP5224810B2 (ja) 2004-07-26 2005-07-08 真空コーティング設備及び方法
US11/572,255 US20080210550A1 (en) 2004-07-26 2005-07-08 Vacuum Coating System and Method for Vacuum Coating

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004036170A DE102004036170B4 (de) 2004-07-26 2004-07-26 Vakuumbeschichtungsanlage und Verfahren zur Vakuumbeschichtung und deren Verwendung
DE102004036170.3 2004-07-26

Publications (2)

Publication Number Publication Date
WO2006010451A2 WO2006010451A2 (de) 2006-02-02
WO2006010451A3 true WO2006010451A3 (de) 2006-04-20

Family

ID=35148995

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/007418 WO2006010451A2 (de) 2004-07-26 2005-07-08 Vakuumbeschichtungsanlage und verfahren zur vakuumbeschichtung

Country Status (5)

Country Link
US (1) US20080210550A1 (de)
EP (1) EP1771600A2 (de)
JP (1) JP5224810B2 (de)
DE (1) DE102004036170B4 (de)
WO (1) WO2006010451A2 (de)

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US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
EP2961858B1 (de) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Beschichtete spritze.
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
EP2971228B1 (de) 2013-03-11 2023-06-21 Si02 Medical Products, Inc. Beschichtete verpackung
US9863042B2 (en) 2013-03-15 2018-01-09 Sio2 Medical Products, Inc. PECVD lubricity vessel coating, coating process and apparatus providing different power levels in two phases
EP3693493A1 (de) 2014-03-28 2020-08-12 SiO2 Medical Products, Inc. Antistatische beschichtungen für kunststoffbehälter
TWI667366B (zh) 2014-09-19 2019-08-01 日商凸版印刷股份有限公司 Film forming device and film forming method
JP6672595B2 (ja) 2015-03-17 2020-03-25 凸版印刷株式会社 成膜装置
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US11383213B2 (en) 2016-03-15 2022-07-12 Honda Motor Co., Ltd. System and method of producing a composite product
US11171324B2 (en) 2016-03-15 2021-11-09 Honda Motor Co., Ltd. System and method of producing a composite product
CN109477219B (zh) * 2016-09-13 2021-01-12 应用材料公司 单一氧化物金属沉积腔室
US11081684B2 (en) 2017-05-24 2021-08-03 Honda Motor Co., Ltd. Production of carbon nanotube modified battery electrode powders via single step dispersion
US20190036102A1 (en) * 2017-07-31 2019-01-31 Honda Motor Co., Ltd. Continuous production of binder and collector-less self-standing electrodes for li-ion batteries by using carbon nanotubes as an additive
US10658651B2 (en) 2017-07-31 2020-05-19 Honda Motor Co., Ltd. Self standing electrodes and methods for making thereof
US11121358B2 (en) 2017-09-15 2021-09-14 Honda Motor Co., Ltd. Method for embedding a battery tab attachment in a self-standing electrode without current collector or binder
US11201318B2 (en) 2017-09-15 2021-12-14 Honda Motor Co., Ltd. Method for battery tab attachment to a self-standing electrode
DE102018101090A1 (de) * 2018-01-18 2019-07-18 Osram Opto Semiconductors Gmbh Anzeigeelement, Anzeigevorrichtung und Verfahren zur Herstellung einer Kontaktstruktur bei einer Vielzahl von Anzeigeelementen
DE102019132526A1 (de) 2019-01-15 2020-07-16 Fhr Anlagenbau Gmbh Beschichtungsmaschine
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US11325833B2 (en) 2019-03-04 2022-05-10 Honda Motor Co., Ltd. Composite yarn and method of making a carbon nanotube composite yarn
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DE4335224A1 (de) * 1993-10-15 1995-04-20 Leybold Ag Vorrichtung für die Herstellung optischer Schichten
US6186090B1 (en) * 1999-03-04 2001-02-13 Energy Conversion Devices, Inc. Apparatus for the simultaneous deposition by physical vapor deposition and chemical vapor deposition and method therefor
EP1245298A1 (de) * 2001-03-29 2002-10-02 Schott Glas Verfahren zum Herstellen eines beschichteten Kunststoffkörpers

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Also Published As

Publication number Publication date
DE102004036170A1 (de) 2006-03-23
JP2008507629A (ja) 2008-03-13
JP5224810B2 (ja) 2013-07-03
EP1771600A2 (de) 2007-04-11
DE102004036170B4 (de) 2007-10-11
US20080210550A1 (en) 2008-09-04
WO2006010451A2 (de) 2006-02-02

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