WO2006069774A3 - Vakuumbeschichtungssystem - Google Patents

Vakuumbeschichtungssystem Download PDF

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Publication number
WO2006069774A3
WO2006069774A3 PCT/EP2005/014042 EP2005014042W WO2006069774A3 WO 2006069774 A3 WO2006069774 A3 WO 2006069774A3 EP 2005014042 W EP2005014042 W EP 2005014042W WO 2006069774 A3 WO2006069774 A3 WO 2006069774A3
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum deposition
substrate
deposition system
glass
deposition
Prior art date
Application number
PCT/EP2005/014042
Other languages
English (en)
French (fr)
Other versions
WO2006069774A2 (de
Inventor
Dietrich Mund
Wolfgang Fukarek
Original Assignee
Schott Ag
Dietrich Mund
Wolfgang Fukarek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schott Ag, Dietrich Mund, Wolfgang Fukarek filed Critical Schott Ag
Publication of WO2006069774A2 publication Critical patent/WO2006069774A2/de
Publication of WO2006069774A3 publication Critical patent/WO2006069774A3/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

Zur Erhöhung der Effizienz und der Produktivität einer Vakuum-Beschichtungsanlage zum Aufbringen einer Schicht auf ein Substrat, insbesondere zum Abscheiden glasartiger, glaskeramischer und/oder keramischer Schichten aus der Dampfphase auf Substrate, sieht die Erfindung eine Substrathaltevorrichtung mit beweglichen Segmenten vor, welche eine erste Stellung zum Einsetzen oder Entnehmen von Substraten und eine zweite Stellung zum Beschichten einnehmen können. Ferner sieht die Erfindung eine Wechselvorrichtung zum Wechseln von Verdampfungsmaterialien innerhalb einer Vakuum-Beschichtungskammer, sowie dafür geeignete Verdampfungsmaterial-Einheiten vor. Außerdem ist ein Vakuum-Beschichtungsanlage mit den beschriebenen Vorrichtungen sowie ein entsprechendes Verfahren zum Beschichten von Substraten vorgesehen.
PCT/EP2005/014042 2004-12-28 2005-12-27 Vakuumbeschichtungssystem WO2006069774A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200410063703 DE102004063703A1 (de) 2004-12-28 2004-12-28 Vakuumbeschichtungssystem
DE102004063703.2 2004-12-28

Publications (2)

Publication Number Publication Date
WO2006069774A2 WO2006069774A2 (de) 2006-07-06
WO2006069774A3 true WO2006069774A3 (de) 2006-10-05

Family

ID=36298967

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/014042 WO2006069774A2 (de) 2004-12-28 2005-12-27 Vakuumbeschichtungssystem

Country Status (3)

Country Link
DE (1) DE102004063703A1 (de)
TW (1) TW200628619A (de)
WO (1) WO2006069774A2 (de)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8834954B2 (en) 2009-05-13 2014-09-16 Sio2 Medical Products, Inc. Vessel inspection apparatus and methods
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005035904B4 (de) * 2005-07-28 2012-01-12 Leybold Optics Gmbh Vorrichtung zum Behandeln von Substraten
US7465681B2 (en) 2006-08-25 2008-12-16 Corning Incorporated Method for producing smooth, dense optical films
DE102006047472A1 (de) * 2006-10-05 2008-04-10 Fhr Anlagenbau Gmbh Verfahren und Vorrichtung zur oberflächennahen Behandlung von flächigen Substraten
WO2009134041A2 (en) * 2008-04-29 2009-11-05 Sunic System. Ltd. Evaporator and vacuum deposition apparatus having the same
US11624115B2 (en) 2010-05-12 2023-04-11 Sio2 Medical Products, Inc. Syringe with PECVD lubrication
US9878101B2 (en) 2010-11-12 2018-01-30 Sio2 Medical Products, Inc. Cyclic olefin polymer vessels and vessel coating methods
CN103930595A (zh) 2011-11-11 2014-07-16 Sio2医药产品公司 用于药物包装的钝化、pH保护性或润滑性涂层、涂布方法以及设备
US11116695B2 (en) 2011-11-11 2021-09-14 Sio2 Medical Products, Inc. Blood sample collection tube
US20130137273A1 (en) 2011-11-28 2013-05-30 Infineon Technologies Ag Semiconductor Processing System
WO2014071061A1 (en) 2012-11-01 2014-05-08 Sio2 Medical Products, Inc. Coating inspection method
US9903782B2 (en) 2012-11-16 2018-02-27 Sio2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
AU2013352436B2 (en) 2012-11-30 2018-10-25 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition on medical syringes, cartridges, and the like
EP2961858B1 (de) 2013-03-01 2022-09-07 Si02 Medical Products, Inc. Beschichtete spritze.
US9937099B2 (en) 2013-03-11 2018-04-10 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging with low oxygen transmission rate
WO2014144926A1 (en) 2013-03-15 2014-09-18 Sio2 Medical Products, Inc. Coating method
EP3693493A1 (de) 2014-03-28 2020-08-12 SiO2 Medical Products, Inc. Antistatische beschichtungen für kunststoffbehälter
EP3337915B1 (de) 2015-08-18 2021-11-03 SiO2 Medical Products, Inc. Pharmazeutische und andere verpackungen mit niedriger sauerstoffübertragungsrate
CN110002766B (zh) * 2019-04-24 2023-06-23 苏州伯宇光电科技有限公司 玻璃电致变色膜化学浴镀膜装置
CN113791510A (zh) * 2021-08-06 2021-12-14 河北光兴半导体技术有限公司 用于电致变色玻璃的制备系统

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4378189A (en) * 1979-09-06 1983-03-29 Dainippon Screen Mfg. Co., Ltd. Wafer loading device
EP0401035A2 (de) * 1989-06-02 1990-12-05 Kabushiki Kaisha Toshiba Vorrichtung und Verfahren zur Erzeugung von Dünnschichten
US5325812A (en) * 1991-12-19 1994-07-05 Balzers Aktiengesellschaft Substrate holding and rotating arrangement for vacuum processes
US6054184A (en) * 1996-06-04 2000-04-25 General Electric Company Method for forming a multilayer thermal barrier coating
US6082298A (en) * 1996-05-10 2000-07-04 Satis Vacuum Industries Vertriebs-Ag Substrate carrier for a vacuum coating apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3542613A1 (de) * 1985-12-03 1987-06-04 Licentia Gmbh Nachfuellvorrichtung fuer eine verdampfungsquelle in einer vakuumkammer
DD261175A1 (de) * 1986-02-03 1988-10-19 Hochvakuum Dresden Veb Verfahren zum elektronenstrahlverdampfen von gering waermeableitenden materialien
CH668430A5 (de) * 1986-07-31 1988-12-30 Satis Vacuum Ag Vakuum-beschichtungsanlage fuer optische substrate.
US4891821A (en) * 1989-03-27 1990-01-02 Hanks Charles W Magnetic correcting fence for adjacent e-guns
EP0438827A1 (de) * 1990-01-19 1991-07-31 Koninklijke Philips Electronics N.V. Apparat mit einem Elektromotor mit variabler Motorleistung
CH681308A5 (de) * 1990-05-22 1993-02-26 Satis Vacuum Ag
DE10222964B4 (de) * 2002-04-15 2004-07-08 Schott Glas Verfahren zur Gehäusebildung bei elektronischen Bauteilen sowie so hermetisch verkapselte elektronische Bauteile

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4378189A (en) * 1979-09-06 1983-03-29 Dainippon Screen Mfg. Co., Ltd. Wafer loading device
EP0401035A2 (de) * 1989-06-02 1990-12-05 Kabushiki Kaisha Toshiba Vorrichtung und Verfahren zur Erzeugung von Dünnschichten
US5325812A (en) * 1991-12-19 1994-07-05 Balzers Aktiengesellschaft Substrate holding and rotating arrangement for vacuum processes
US6082298A (en) * 1996-05-10 2000-07-04 Satis Vacuum Industries Vertriebs-Ag Substrate carrier for a vacuum coating apparatus
US6054184A (en) * 1996-06-04 2000-04-25 General Electric Company Method for forming a multilayer thermal barrier coating

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8834954B2 (en) 2009-05-13 2014-09-16 Sio2 Medical Products, Inc. Vessel inspection apparatus and methods
US9545360B2 (en) 2009-05-13 2017-01-17 Sio2 Medical Products, Inc. Saccharide protective coating for pharmaceutical package
US9572526B2 (en) 2009-05-13 2017-02-21 Sio2 Medical Products, Inc. Apparatus and method for transporting a vessel to and from a PECVD processing station
US9458536B2 (en) 2009-07-02 2016-10-04 Sio2 Medical Products, Inc. PECVD coating methods for capped syringes, cartridges and other articles
US9272095B2 (en) 2011-04-01 2016-03-01 Sio2 Medical Products, Inc. Vessels, contact surfaces, and coating and inspection apparatus and methods
US9554968B2 (en) 2013-03-11 2017-01-31 Sio2 Medical Products, Inc. Trilayer coated pharmaceutical packaging

Also Published As

Publication number Publication date
DE102004063703A1 (de) 2006-07-06
TW200628619A (en) 2006-08-16
WO2006069774A2 (de) 2006-07-06

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