TW200610140A - An image sensor including multiple lenses and method of manufacture thereof - Google Patents
An image sensor including multiple lenses and method of manufacture thereofInfo
- Publication number
- TW200610140A TW200610140A TW094106414A TW94106414A TW200610140A TW 200610140 A TW200610140 A TW 200610140A TW 094106414 A TW094106414 A TW 094106414A TW 94106414 A TW94106414 A TW 94106414A TW 200610140 A TW200610140 A TW 200610140A
- Authority
- TW
- Taiwan
- Prior art keywords
- manufacture
- image sensor
- including multiple
- sensor including
- multiple lenses
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 235000012239 silicon dioxide Nutrition 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14621—Colour filter arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Transforming Light Signals Into Electric Signals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/939,894 US20060057765A1 (en) | 2004-09-13 | 2004-09-13 | Image sensor including multiple lenses and method of manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200610140A true TW200610140A (en) | 2006-03-16 |
Family
ID=36034570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094106414A TW200610140A (en) | 2004-09-13 | 2005-03-03 | An image sensor including multiple lenses and method of manufacture thereof |
Country Status (2)
Country | Link |
---|---|
US (3) | US20060057765A1 (zh) |
TW (1) | TW200610140A (zh) |
Families Citing this family (9)
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KR100685881B1 (ko) * | 2004-06-22 | 2007-02-23 | 동부일렉트로닉스 주식회사 | 씨모스 이미지 센서 및 그 제조방법 |
US7208783B2 (en) * | 2004-11-09 | 2007-04-24 | Micron Technology, Inc. | Optical enhancement of integrated circuit photodetectors |
US20060099800A1 (en) * | 2004-11-09 | 2006-05-11 | Chintamani Palsule | Method for fabricating low leakage interconnect layers in integrated circuits |
KR100703376B1 (ko) * | 2005-05-10 | 2007-04-03 | 삼성전자주식회사 | 매설된 렌즈를 갖는 이미지 센서 및 그 제조 방법 |
US7973380B2 (en) * | 2005-11-23 | 2011-07-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for providing metal extension in backside illuminated sensor for wafer level testing |
US7446294B2 (en) * | 2006-01-12 | 2008-11-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | True color image by modified microlens array |
US20070264424A1 (en) * | 2006-05-12 | 2007-11-15 | Nanoopto Corporation | Lens arrays and methods of making the same |
KR101013552B1 (ko) * | 2008-09-10 | 2011-02-14 | 주식회사 하이닉스반도체 | 이미지 센서 모듈 및 이의 제조 방법 |
CN105514091B (zh) * | 2014-09-22 | 2018-12-21 | 中芯国际集成电路制造(上海)有限公司 | 一种半导体器件及其制造方法和电子装置 |
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-
2004
- 2004-09-13 US US10/939,894 patent/US20060057765A1/en not_active Abandoned
-
2005
- 2005-03-03 TW TW094106414A patent/TW200610140A/zh unknown
-
2013
- 2013-11-22 US US14/087,370 patent/US8987113B2/en active Active
-
2015
- 2015-03-04 US US14/638,861 patent/US9768224B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20140061837A1 (en) | 2014-03-06 |
US8987113B2 (en) | 2015-03-24 |
US20060057765A1 (en) | 2006-03-16 |
US9768224B2 (en) | 2017-09-19 |
US20150187833A1 (en) | 2015-07-02 |
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