TW200532009A - Abrasives and compositions for chemical mechanical planarization of tungsten and titanium - Google Patents
Abrasives and compositions for chemical mechanical planarization of tungsten and titanium Download PDFInfo
- Publication number
- TW200532009A TW200532009A TW094108885A TW94108885A TW200532009A TW 200532009 A TW200532009 A TW 200532009A TW 094108885 A TW094108885 A TW 094108885A TW 94108885 A TW94108885 A TW 94108885A TW 200532009 A TW200532009 A TW 200532009A
- Authority
- TW
- Taiwan
- Prior art keywords
- fumed silica
- water
- acid
- concentration
- titanium
- Prior art date
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- 239000010936 titanium Substances 0.000 title claims abstract description 33
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title claims abstract description 31
- 229910052719 titanium Inorganic materials 0.000 title claims abstract description 31
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 title claims abstract description 26
- 229910052721 tungsten Inorganic materials 0.000 title claims abstract description 26
- 239000010937 tungsten Substances 0.000 title claims abstract description 26
- 239000000203 mixture Substances 0.000 title claims description 28
- 239000003082 abrasive agent Substances 0.000 title claims description 7
- 239000000126 substance Substances 0.000 title claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 108
- 229910021485 fumed silica Inorganic materials 0.000 claims abstract description 70
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 53
- 239000002253 acid Substances 0.000 claims abstract description 45
- 238000005498 polishing Methods 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 22
- 239000004065 semiconductor Substances 0.000 claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 claims abstract description 10
- 230000002378 acidificating effect Effects 0.000 claims description 25
- 239000006185 dispersion Substances 0.000 claims description 21
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- 239000000377 silicon dioxide Substances 0.000 claims description 18
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- QGWNDRXFNXRZMB-UHFFFAOYSA-N guanidine diphosphate Natural products C1=2NC(N)=NC(=O)C=2N=CN1C1OC(COP(O)(=O)OP(O)(O)=O)C(O)C1O QGWNDRXFNXRZMB-UHFFFAOYSA-N 0.000 description 1
- UALVSYSEFNVPJT-UHFFFAOYSA-N guanidine;phosphono dihydrogen phosphate Chemical compound NC(N)=N.OP(O)(=O)OP(O)(O)=O UALVSYSEFNVPJT-UHFFFAOYSA-N 0.000 description 1
- GCWKPPGPWZXRJG-UHFFFAOYSA-N guanidine;phosphoric acid Chemical compound NC(N)=N.OP(O)(O)=O.OP(O)(O)=O GCWKPPGPWZXRJG-UHFFFAOYSA-N 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 229910052500 inorganic mineral Inorganic materials 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910000398 iron phosphate Inorganic materials 0.000 description 1
- WBJZTOZJJYAKHQ-UHFFFAOYSA-K iron(3+) phosphate Chemical compound [Fe+3].[O-]P([O-])([O-])=O WBJZTOZJJYAKHQ-UHFFFAOYSA-K 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229940049918 linoleate Drugs 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000006166 lysate Substances 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 229960002510 mandelic acid Drugs 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000011707 mineral Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
- JRKICGRDRMAZLK-UHFFFAOYSA-L peroxydisulfate Chemical compound [O-]S(=O)(=O)OOS([O-])(=O)=O JRKICGRDRMAZLK-UHFFFAOYSA-L 0.000 description 1
- AQSJGOWTSHOLKH-UHFFFAOYSA-N phosphite(3-) Chemical class [O-]P([O-])[O-] AQSJGOWTSHOLKH-UHFFFAOYSA-N 0.000 description 1
- 150000003009 phosphonic acids Chemical class 0.000 description 1
- 125000005496 phosphonium group Chemical group 0.000 description 1
- 150000003013 phosphoric acid derivatives Chemical class 0.000 description 1
- XFZRQAZGUOTJCS-UHFFFAOYSA-N phosphoric acid;1,3,5-triazine-2,4,6-triamine Chemical compound OP(O)(O)=O.NC1=NC(N)=NC(N)=N1 XFZRQAZGUOTJCS-UHFFFAOYSA-N 0.000 description 1
- NQQWFVUVBGSGQN-UHFFFAOYSA-N phosphoric acid;piperazine Chemical compound OP(O)(O)=O.C1CNCCN1 NQQWFVUVBGSGQN-UHFFFAOYSA-N 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 125000005498 phthalate group Chemical class 0.000 description 1
- 229960005141 piperazine Drugs 0.000 description 1
- 229960001954 piperazine phosphate Drugs 0.000 description 1
- IUGYQRQAERSCNH-UHFFFAOYSA-N pivalic acid Chemical compound CC(C)(C)C(O)=O IUGYQRQAERSCNH-UHFFFAOYSA-N 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000768 polyamine Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 229920000137 polyphosphoric acid Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- OQZCJRJRGMMSGK-UHFFFAOYSA-M potassium metaphosphate Chemical compound [K+].[O-]P(=O)=O OQZCJRJRGMMSGK-UHFFFAOYSA-M 0.000 description 1
- 229910000160 potassium phosphate Inorganic materials 0.000 description 1
- 235000011009 potassium phosphates Nutrition 0.000 description 1
- 235000019828 potassium polyphosphate Nutrition 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 229960000948 quinine Drugs 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 229910000162 sodium phosphate Inorganic materials 0.000 description 1
- GGCZERPQGJTIQP-UHFFFAOYSA-N sodium;9,10-dioxoanthracene-2-sulfonic acid Chemical compound [Na+].C1=CC=C2C(=O)C3=CC(S(=O)(=O)O)=CC=C3C(=O)C2=C1 GGCZERPQGJTIQP-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- OKQKDCXVLPGWPO-UHFFFAOYSA-N sulfanylidenephosphane Chemical compound S=P OKQKDCXVLPGWPO-UHFFFAOYSA-N 0.000 description 1
- 235000015523 tannic acid Nutrition 0.000 description 1
- 229940033123 tannic acid Drugs 0.000 description 1
- 229920002258 tannic acid Polymers 0.000 description 1
- MDDUHVRJJAFRAU-YZNNVMRBSA-N tert-butyl-[(1r,3s,5z)-3-[tert-butyl(dimethyl)silyl]oxy-5-(2-diphenylphosphorylethylidene)-4-methylidenecyclohexyl]oxy-dimethylsilane Chemical compound C1[C@@H](O[Si](C)(C)C(C)(C)C)C[C@H](O[Si](C)(C)C(C)(C)C)C(=C)\C1=C/CP(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 MDDUHVRJJAFRAU-YZNNVMRBSA-N 0.000 description 1
- RYCLIXPGLDDLTM-UHFFFAOYSA-J tetrapotassium;phosphonato phosphate Chemical compound [K+].[K+].[K+].[K+].[O-]P([O-])(=O)OP([O-])([O-])=O RYCLIXPGLDDLTM-UHFFFAOYSA-J 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229910052722 tritium Inorganic materials 0.000 description 1
- 239000000052 vinegar Substances 0.000 description 1
- 235000021419 vinegar Nutrition 0.000 description 1
- VUDJAFZYSMINQA-UHFFFAOYSA-L zinc metaphosphate Chemical compound [Zn+2].[O-]P(=O)=O.[O-]P(=O)=O VUDJAFZYSMINQA-UHFFFAOYSA-L 0.000 description 1
- LRXTYHSAJDENHV-UHFFFAOYSA-H zinc phosphate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O LRXTYHSAJDENHV-UHFFFAOYSA-H 0.000 description 1
- 229910000165 zinc phosphate Inorganic materials 0.000 description 1
- OMSYGYSPFZQFFP-UHFFFAOYSA-J zinc pyrophosphate Chemical compound [Zn+2].[Zn+2].[O-]P([O-])(=O)OP([O-])([O-])=O OMSYGYSPFZQFFP-UHFFFAOYSA-J 0.000 description 1
- CZPRKINNVBONSF-UHFFFAOYSA-M zinc;dioxido(oxo)phosphanium Chemical compound [Zn+2].[O-][P+]([O-])=O CZPRKINNVBONSF-UHFFFAOYSA-M 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21S—NON-PORTABLE LIGHTING DEVICES; SYSTEMS THEREOF; VEHICLE LIGHTING DEVICES SPECIALLY ADAPTED FOR VEHICLE EXTERIORS
- F21S8/00—Lighting devices intended for fixed installation
- F21S8/04—Lighting devices intended for fixed installation intended only for mounting on a ceiling or the like overhead structures
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
- F21V17/10—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening
- F21V17/12—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening by screwing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V5/00—Refractors for light sources
- F21V5/06—Hanging lustres for chandeliers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V17/00—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages
- F21V17/10—Fastening of component parts of lighting devices, e.g. shades, globes, refractors, reflectors, filters, screens, grids or protective cages characterised by specific fastening means or way of fastening
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21W—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO USES OR APPLICATIONS OF LIGHTING DEVICES OR SYSTEMS
- F21W2121/00—Use or application of lighting devices or systems for decorative purposes, not provided for in codes F21W2102/00 – F21W2107/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
- H01L21/3212—Planarisation by chemical mechanical polishing [CMP]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S362/00—Illumination
- Y10S362/806—Ornamental or decorative
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
200532009 九、發明說明： 【發明所屬之技術領域】 本杳明係關於半導體晶圓材料之化學機械平整化或拋光 (CMP)’更特別關於用於使半導體晶圓上的鎢和鈦拋光之 CMP研磨劑及方法。本發明進一步關於用於使半導體晶圓 上的4烏和欽抛先之組合物。 【先前技術】 由於對單獨晶片上有源裝置密度增加之需要不斷升級，對 晶圓有源表面上更大平坦度之需要同時增加。對下層的改良 互連金屬化及改良填充通路孔和線之能力需要平表面。 CMP為達到所需平坦度的最重要技術。CMp促進表面材 料移除’機械磨損表面，同時化學組合物（1料，，)選擇性侵 蝕表面。因此，習知CMP漿料對晶圓表面上的至少兩種不 同材料展示不同移除速率（”選擇性，，）（例如，相對於間層電 介質對金屬展示不同拋光速率）。 目剷CMP為形成鎢接觸/通路插塞期間使鎢和鈦拋光之 較佳方法。通常’對於此應帛…般使制/料孔餘刻通 過介電層，以暴露下面裝置之區域（對於第-級金屬化）或金 屬互連（對於更高級金屬化）。使鈦"膠"層沈積於接觸/通路 孔之側部和底部，且在其上沈積嫣。用CMP自晶圓表面移 :戶:沈積的鎢和鈦，在接觸/通路孔中留下具有與所暴露電 "枭八平面之表面之鎢插塞。因此，與電介質比較，用於 嫣處理的CMP毁料對鶴和欽為高度選擇性。此選擇性顧及 過度拋光，同時仍獲得平鎢插塞表面。 100298.doc 200532009 賽蘇若曼（Sethuraman)等人在美國專利第6,〇〇1，269號揭 示種使半導體裝置拋光的已知氧化鋁研磨劑組合物，該 組合物包含以碘酸鹽為基礎之氧化劑。一般用硬氧化鋁研 磨劑達到足夠金屬移除速率，尤其對於如鈦之金屬。很遺 撼’氧化铭研磨劑產生有害的增加缺陷。此外，氧化鋁趨 向於提供不良選擇性速率，特別為鈦對氧化物之選擇性。
因此，需要具有改良選擇性的鎢和鈦之化學_機械拋光之 研磨劑。特別需要提供改良鈦層移除同時抑制介電層移除 之研磨知彳及方法。更需要提供改良鈦層移除同時抑制介電 層移除的具有改良缺陷之組合物。 【發明内容】 第一方面，本發明提供一種製造用於使半導體晶圓上的 鎢和鈦拋光之煙霧矽石之方法，該方法包括，提供預定體 積之水；提供預定濃度之煙霧矽石，其中該濃度為其至少 35重篁％，將酸混入該體積水，以使水酸化，其中該酸之 浪度為該濃度煙霧矽石之〇 〇〇1〇至〇·5重量％ ;使煙霧矽石 分散進入經酸化的水；稀釋該濃度煙霧矽石，其中該水具 有1至7之pH;並收集該煙霧矽石。 第二方面，本發明提供一種用於使半導體晶圓上的鎢和 鈦拋光之煙霧矽石，其中該煙霧矽石具有大於9〇米2/克之表 面積，且已完全於酸性pH分散及稀釋。 第三方面，本發明提供一種用於使半導體晶圓上的鎢和 鈦拋光之組e物，5亥組合物包含研磨劑，其中該研磨劑為 具有大於90米2/克之表面積且已完全於酸性pH分散及稀釋 100298.doc 200532009 之煙霧矽石。 【實施方式】 該研磨劑和方法相對於介電層對銘 %曰对移除鎢和鈦提供意外選 擇性。該研磨劑有利在酸性pH處理，H目士一士 且吳有面表面積，以
抑制介電層移除。特別i也，該研磨冑為僅於酸性pH處理的 煙霧矽石，以相對於介電層選擇性使鎢和鈦拋光。此外， 該僅經酸性pH處理的煙霧矽石研磨劑具有大於9〇米v克之 表面積，以相對於介電層選擇性使鎢和鈦拋光。 在本文中，"僅經酸性pH處理的研磨劑”、"僅經酸性？11 處理的煙霧矽石酸性研磨劑，，及，，酸性煙霧矽石，，係界定 為僅於酸性pH處理之研磨劑。換言之，該研磨劑未在任何 點包括最終調配於鹼性溶液中分散或稀釋。 本發明之酸性煙霧矽石最佳藉由初始用預定體積去離子 水填充混合而製備。所用混合器較佳為高剪切混合器， 例如’由加利福尼亞州，貝爾的梅耶工程公司（Meyers Engineering，Inc. 〇f Beii，CA)製造之梅耶混合器（Myers
Mixer)。煙霧矽石，例如Aerosil 130(，，A 130”），自新澤西州， 帕悉潘尼，迪古薩公司（Degussa，of Parsippany，NJ)購得。 隨後，以所需pH為基礎將預定量酸加入水。將酸加入水後， 混合器運轉，以將酸和水混合成酸性水溶液。酸可為礦物 酸或有機酸，如鹽酸、硫酸、墙酸、麟酸、乙酸或馬來酸。 酸較佳為鹽酸。 加入水的酸之量有利為加入水的煙霧矽石之0.001 〇和 0·50重量％間之量。加入水的酸之量較佳為加入水的煙霧矽 100298.doc 200532009 石之0.0015和0.15重量。/〇間之量。
所選擇的水之初始量係基於欲加入的煙霧矽石之量以及 含水分散液中煙霧矽石之所需最終濃度。例如，如果煙霧 石夕石之含水分散液之所需最終濃度為35重量％之煙霧矽 石’則水之初始量為在混合器中產生大於35重量。/〇之煙霧 矽石之量或濃度。在本發明中，分散液將具有大於煙霧矽 石之含水分散液中煙霧矽石所需最終濃度約5重量％之煙 霧矽石濃度。隨後，藉由加入額外量水稀釋混合器中的含 水分散液’以達到煙霧矽石的所需最終濃度。 下一步’在混合器中，使煙霧矽石在水-酸溶液中分散到 預疋濃度。溶液溫度有利地保持在小於6〇〇c，較佳係小於 3 5 C。可將煙霧矽石加入水-酸混合物，同時混合器運轉， 或將煙霧矽石加入水_酸混合物，然後使混合器運轉，由此 加入煙霧石夕石。煙霧矽石亦可在一系列步驟增量加入，且 混合器在各步驟之間運轉。在含水分散液中煙霧矽石之濃 度升到南於煙霧矽石所需最終濃度之點後，使混合器運 轉’直到混合器中的分散液達到所需黏度。高剪切混合破 壞乾燥煙霧矽石之附聚結構，導致黏度下降。因此，高剪 切/%合在整個製程保持，以產生解聚。如果混合器停止， 則分散液可能膠凝並鎖住混合器，在分散液中產生不需要 的較大顆粒。如前討論，在稀釋前，混合器中的分散液具 有大於煙霧矽石所需最終濃度約5%之煙霧矽石濃度。 含水分散液有利包含至少35重量％之煙霧矽石。含水分 散液較佳包含40至65重量％間之煙霧矽石。此外，煙霧矽 100298.doc 200532009 石有利具有大於90米2/克之表面積。煙霧矽石較佳具有大於 130米/克之表面積。 下一步，藉由加入去離子水稀釋分散液。然後將額外水 混入混合器中的含水分散液。所加水之量為足以使含水分 散液中煙霧矽石之濃度降低到所需最終濃度之量。注意， 在稀釋期間，溶液之pH始終保持於丨至7之間。溶液之？11較 佳為1.5至5.5。
隨後’視需要離心或潷析煙霧矽石之含水分散液。此外， 可使煙霧矽石之含水分散液通過濾器，以移除粗粒及任何 附聚的煙霧矽石顆粒。特別過濾具有大於丨微米直徑的任何 不需要顆粒。隨後，視需要包裝經過濾的煙霧矽石，用於 將來使用。 本發明之方法允許製造用於使半導體晶圓中的鎢和鈦拋 光之煙霧矽石。特別地，該方法提供具有至少35重量％之 煙霧矽石濃度之酸性含水分散液。含水分散液更佳具有 % 和65重量％間之煙霧矽石。加入水的酸之量為加入水的煙 霧石夕石之0.0010和0.50重量％間之量。在稀釋期間，溶液之 pH始終保持於1至7之間。pH較佳為ι·5至5.5。此外，煙霧 石夕石有利具有大於90米2/克之表面積。煙霧矽石較佳具有大 於130米2/克之表面積。 本發明之酸性研磨劑有利用於使半導體晶圓上的鎢和鈦 . 拋光所用之組合物。除酸性研磨劑外，組合物可有利包含 0.5至9重量％之氧化劑。氧化劑較佳在1至4重量％之範圍 内。氧化劑最佳在2.5至3.5重量％之範圍内。氧化劑可為至 100298.doc •10- 200532009 夕 些氣化性化合物之一，如〆 鹽、峨酸鹽、過酞酸鎮、氣化氫（H2〇2)、單過硫酸 漠酸鹽、高峨酸鹽、；B肖酸鹽 ”匕過I、過硫酸鹽、 V, Λ/Γ ^ 、取幾、飾鹽、Mn(III)、Mn(IV) 及Mn(Vl)鹽、銀鹽、銅鹽、 nUV) 芨苴、、日入札σ L 视、始鹽、鹵素、次氣酸鹽 舍 吏用氧化劑化合物之混合物。 S拋光桌料包含一種不穩定氧 化Μ時，如過氧化氫，經常 最佳在使用點將氧化劑混入喈 水抖。較佳氧化劑為碘酸鹽， 包括其酸、鹽、混合酸鹽、酿 偏s曰、混合酯及其混合物。 溶液可有利包含0·1至5重量％ 至里/。之錯合劑，以軟化鎢上的鈍
化層。錯合劑較佳在0.5至3重量％之範圍内。錯合劑最佳在 1至2重量％之範圍内。溶液有利包含"含碟"化合物作為錯合 劑。含磷化合物為任何含磷原子之化合物。例如，較佳含 磷化合物為磷酸鹽、焦磷酸鹽、偏磷酸鹽、連二磷酸鹽、 多磷酸鹽、膦酸鹽，包括其酸、鹽、混合酸鹽、酯、偏酯、 混合酯及其混合物。特別地，較佳含水拋光組合物可用（例 如）以下含磷化合物調配：磷酸鋅、焦磷酸鋅、偏磷酸鋅、 連二麟酸鋅、多碟酸鋅、膦酸鋅、填酸銨、焦填酸錄、偏 麟酸按、連二填酸錢、多鱗酸按、麟酸按、填酸二錄；、焦 磷酸二銨、偏磷酸二銨、連二磷酸二銨、多磷酸二銨、膦 酸二銨、磷酸胍、焦磷酸胍、偏磷酸胍、連二磷酸胍、多 磷酸胍、膦酸胍、磷酸鐵、焦磷酸鐵、偏磷酸鐵、連二磷 酸鐵、多磷酸鐵、膦酸鐵、碟酸鈽、焦鱗酸鈽、偏填酸鈽、 連二磷酸鈽、多磷酸鈽、膦酸鈽、磷酸乙二胺、磷酸哌嗓、 焦磷酸旅嗪、偏碟酸哌嗪、連二填酸哌唤、膦駿旅嗪、填 -11 - 100298.doc 200532009
酸密胺、磷酸二密胺、焦磷酸密胺、偏磷酸密胺、連二磷 酸密胺、多鱗酸後胺、鱗酸密胺、碟酸密白胺、焦填酸密 白胺、偏填酸密白胺、連二磷酸密白胺、多填酸密白胺、 膦酸密白胺、磷酸密勒胺、焦磷酸密勒胺、偏磷酸密勒胺、 連二構酸密勒胺、多磷酸密勒胺、膦酸密勒胺、磷酸舒、 焦鱗酸鉀、偏鱗酸鉀、連二填酸鉀、多磷酸鉀、膦酸鉀、 磷酸雙亂胺、磷酸脲，包括其酸、鹽、混合酸鹽、醋、偏 6旨、混合酯及其混合物。亦可使用氧化膦、硫化膦及膦酸 鹽、亞磷酸鹽及次膦酸鹽之磷雜環己烷（ph〇sph〇Hnane)，包 括其酸、鹽、混合酸鹽、酯、偏酯及混合酯。較佳含構化 合物為焦磷酸鉀。 除錯合劑外，組合物可有利包含〇」至5重量％之螯合劑， 以使自墊上積累的氧化鶴抛光碎屑降到最少。組合物較佳 包含0.5至3重量。/❶之螯合劑。組合物最佳包含丨至2重量％之 螯合劑。實例螯合劑為羧酸，包括其金屬及非金屬鹽。螯 % 合劑可具有結合到開鏈烷（或其衍生物）結構或連接到環結 構的單、一、二或多羧基。羧酸之實例包括乙酸、丙酸、 丁酸、新戊酸、草酸、丙二酸、琥5白酸、戍二酸、己二酸、 本甲酸、丁二酸、天冬胺酸、五倍子酸、葡糖酸、鞣酸和 酞酸及其混合物。較佳螯合劑為“_羥基羧酸(aha)，包括 /、孟屬及非金屬鹽。AHA為在與羧基直接相鄰的碳原子上 . 含一每基之有機酸。AHA之實例包括輕基乙酸、乳酸、酒 石酸、檸檬酸、蘋果酸、扁桃酸和水楊酸及其混合物。較 佳AHA為乳酸。 100298.doc -12- 200532009 於夜的；l ^在水之溶液中於寬PH範圍提供效力。兮 〉合液的有用PH範圍自至少 ^ 餘量去離子水W伸此外，溶液有利依賴 佳自2至5丄;?至叫 為(例如 _ 皿I、磷酸及類似者。 溶液可視需要包含〇 ; 々 ·至5重$%抑制氧化物移除之添加 二浴讀佳/含0.5至3重量%之氧化物抑制劑。溶液最佳 匕31至2重量％之氧化物抑制齊I。實例添加劑包括乙二胺 四乙酸及其鹽、乙-胺、〗4 6故 一^ 胺i，4_二氮雜雙環辛烷、乙二醇、冠
醚、鄰苯二盼和掊盼、轉樣酸、乳酸、丙二酸、酒石酸、 琥轴酸、蘋果酸、乙酸和草酸、胺基酸、胺續酸、胺基硫 酸、碌酸、膦酸、2-喹琳叛酸及其鹽。此外，實例添加劑 包括敦化物、I硼酸、氣鈦酸、氫氟酸、氟矽酸及其鹽。 此外’亦可加入聚合添加劑’如聚丙稀酸、環氧丙烧、聚 口比洛烧酮（Polypyrilid()ne)、聚氧化乙稀及聚乙稀醇。 因此，本發明提供一種製造用於使半導體晶圓上的鎢和 鈦拋光之煙霧石夕石之方法。該方法包括提供預定體積水及 提供預定濃度煙霧石夕石之操作，其中該煙霧石夕石之濃度為 忒體積水之至少35重量％。另外，本發明提供以下操作， 將酸混入該體積水，以使水酸化，其中該酸之濃度為該濃 度煙霧矽石之0.001 〇至〇·5重量％，並使煙霧矽石分散進入 經酸化的水。此外，本發明提供稀釋該濃度煙霧矽石，其 中該水之pH為1至7，並收集該煙霧矽石。注意，本發明之 煙霧矽石為純矽石。換言之，該煙霧矽石不包含微量（例如） 100298.doc -13- 200532009 至屬離子或聚合物，以在酸性pH給予碎石電荷。 實例 在貫例中’數字代表本發明之實例，字母代表比較實例。 斤有實例〉谷液包含3重量％之換酸鉀、1.5重量％之焦磷酸卸 及1.5重量％之乳酸。 實例1
本試驗檢驗鎢和鈦相對於半導體晶圓上TEOS之選擇性。 特別檢測僅於酸性pH處理的煙霧矽石相對於te〇s對鶴和 欽之選擇性之影響。換言之，試驗1之煙霧矽石研磨劑未在 製程期間於任何點於鹼性溶液中分散或稀釋。特別地，煙霧 石夕石研磨劑由以下方法製備：1)初始用6531克去離子水和 6.8克鹽酸填充夾套混合容器。使pH保持在2。打開冷卻，將 容器中的溫度控制到低於35°C。開動混合器，使混合器在 6 1 58轉/分運轉。混合器為加利福尼亞州，貝爾的梅耶工程 公司製造之梅耶混合器；2)為允許減黏裂化及防止馬達高電 流牵引，緩慢計量送入煙霧二氧化矽（A 130)。矽石之總填 充量為4540克。用去離子水（272克）喷容器下側，以壓制矽 石粉末。在此點的總填充量為1 1350克，且矽石濃度為4〇% 固體，3)然後使混合器運轉6 0分鐘，保持溫度低於3 $。〇 ; 4) 用足夠去離子水填充一第二容器，以使固體下降到2〇%，並 開動葉輪式混合器。將自夾套槽的分散液快速加入該第二容 器；5)檢驗pH、固體％及顆粒大小，並準備使用。
實例1之溶液包含3重量％具有大於丨3〇米 '克表面積之煙 霧石夕石研磨劑。IPEC 472 DE 200毫米拋光機利用Icl000TM 100298.doc 14 200532009 聚胺基甲酸酯拋光塾[羅姆-哈斯電子材料CMP技術公司 (Rohm and Haas Electronic Materials CMP Technologies)]在 約5磅/平方英寸之下壓力條件下於15〇立方釐米/分之拋光 溶液流速、65轉/分之台板速度及65轉/分之載體速度使樣品 平整化。拋光溶液具有用硝酸調節的4.0之pH。所有溶液均 包含去離子水。 試驗 研磨劑完全 在酸性p Η處 理？ TEOS (埃/分） W (埃/分） Ti (埃/分） 選擇性 (W/TEOS) 選擇性 (Ti/TEOS) A 否 273 2023 4190 7.41 15.35 1 是 79 2340 4328 29.62 54.78
如以上表1中所示，加入酸性研磨劑改良組合物之選擇 性。特別地，加入酸性煙霧矽石使試驗1之組合物相對於 TEOS對鶴之選擇性自比較試驗A中的7 41改良到29 62。類 似地’加入酸性煙霧矽石使試驗1之組合物相對於TE〇s對 欽之選擇性自比較試驗A中的15.35改良到54.78。在試驗A 至試驗1中’加入酸性煙霧矽石使TE〇s移除自273埃/分有效 抑制到79埃/分。 實例2 本试驗檢驗鶴和鈦相對於半導體晶圓上TEOS之選擇 性。特別檢測僅於酸性pH處理的煙霧矽石之表面積相對於 TEOS對鶴和鈦之選擇性之影響。換言之，實例2之煙霧石夕 石研磨劑未在製程期間於任何點於鹼性溶液中分散或稀 釋。實例2之溶液包含3重量％之煙霧矽石研磨劑。所有其 他試驗條件與實例1者相同。 100298.doc 200532009
、表2中所示，僅經酸性pH處理的研磨劑之表面積影 響組合物之選擇性。特別地，加入具有大於90米V克表面積
之S义〖生煙霧矽石改良組合物相對於TE〇s對鎢和鈦之選擇 性。例如’當表面積自9〇米2/克增加到U0米2/克時，試驗2 刀别對鶴和鈦提供23.26和49.19之增加的選擇性，在比較試 驗B中分別對鎢和鈦提供3.4〇和7 37之選擇性。同樣，在試 驗B至試驗2中自90米2/克到130米V克的增加表面積使 TEOS移除速率自㈣埃/分抑制到崎/分。此外，在試驗B 至試驗3中自90米V克到米2/克的增加表面積使te〇s移 除速率自61G埃/分抑制到47埃/分。試驗2和3提供優良鈦移 除0 因此，本發明提供一種製造用於使半導體晶圓上的鎢和 钦拋光之煙霧_石之方法。該方法包括提供預定體積水及 提供預定濃度煙霧石夕石之操作，丨中該煙霧石夕石之濃度為 該體積水之至少35重量％。另外，本發明提供以下操作， 將酸混入該體積水，以使水酸化，其中該酸之濃度為該濃 度煙務矽石之0.001 〇至〇 5重量％，並使煙霧矽石分散進入 經酸化的水。此外’本發明提供稀釋㈣度煙霧石夕石，其 中孩水之pH為1至7，並收集該煙霧矽石。 100298.doc -16-
Claims (1)
- 200532009 十、申請專利範圍： 1· 種製造用於使半導體晶圓上的鶴和鈇拋光之煙霧石夕石 之方法，該方法包括： 提供預定體積水； 提供預定濃度之煙霧矽石，其中該濃度為該水體積之 至少35重量％ ;將酸混入該體積水，以使該水酸化，其中該酸之濃度 為該濃度煙霧矽石之0.001 〇至0.5重量〇/〇 ; 使該煙霧矽石分散於該經酸化的水中； 稀釋該濃度煙霧矽石，其中該水具有丨至7之pH ;及 收集該煙霧石夕石。 2·如請求項1之方法，其中該水之pH為1.5至5 ·5。 3·如請求項}之方法，其中該分散係於小於6〇它之溫度進 行0 4·如明求項1之方法，其中該煙霧矽石之濃度係於該體積水 之4 0至6 〇重量％之間。 5·如明求項1之方法，其中該酸之濃度為該濃度煙霧矽石之 〇·〇2至 〇·ΐ5 重量 〇/〇。 6·如請求们之方法，其中該煙霧石夕石具有大於9〇米2/克之 ° 如請求項6之方法’其中該煙霧矽石具有大於咖米"克之 表面積。 8. 一種用於使半導體晶圓上的 中該煙霧矽石具有大於90米 鎢和鈦拋光之煙霧矽石，其 /克之表面積且已完全於酸 100298.doc 200532009 性PH分散及稀釋。 其中該煙霧矽石具有大於130米' 9·如請求項8之煙霧矽石 克之表面積。 1 〇·—種用於使半導體晶圓上的鶴和鈦拋光之組合物，該組 合物包含—種研磨劑，其中該研磨劑為具有大於90米2/ 克之表面積且已完全於酸性pH分散及稀釋之煙霧矽石。100298.doc 200532009 七、指定代表圖： (一) 本案指定代表圖為：（無）。 (二) 本代表圖之元件符號簡單說明： ^ 八、本案若有化學式時，請揭示最能顯示發明特徵的化學式： (無）100298.doc 200532009 kw 明專利說明書 (本說明書格式 '順序及^^字，請勿任意更動，※記號部分請勿填寫） ※申請案號： ※申請曰期： · · xipc分類匕L 9 一、 發明名稱：（中文/英文） 上c/ B》 用於鎢及鈦之化學機械平整化之研磨劑及組合物 ABRASIVES AND COMPOSITIONS FOR CHEMICAL MECHANICAL PLANARIZATION OF TUNGSTEN AND TITANIUM 二、 申請人··（共1人） 姓名或名稱··（中文/英文） 羅門哈斯電子材料CMP控股公司 ROHM AND HAAS ELECTRONIC MATERIALS CMP HOLDINGS, INC. 代表人：（中文/英文） 班德門布萊克T BIEDERMAN, BLAKE T. 住居所或營業所地址：（中文/英文） 美國•德拉瓦州19899 ·威明頓•北區市集街1105號1300室 ^105 North Market Street, Suite 1300, Wilmington, DE 19899, U. S. A. 國籍：（中文/英文） 美國 / U.S.A. ] 930S2L
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| US10/811,640 US20050214191A1 (en) | 2004-03-29 | 2004-03-29 | Abrasives and compositions for chemical mechanical planarization of tungsten and titanium |
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| US (1) | US20050214191A1 (zh) |
| JP (1) | JP2005286336A (zh) |
| KR (1) | KR20060044831A (zh) |
| CN (1) | CN1676566A (zh) |
| TW (1) | TW200532009A (zh) |
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| US8125018B2 (en) * | 2005-01-12 | 2012-02-28 | Spansion Llc | Memory device having trapezoidal bitlines and method of fabricating same |
| WO2007024556A2 (en) | 2005-08-19 | 2007-03-01 | Houghton Metal Finishing Company | Methods and compositions for acid treatment of a metal surface |
| JP5084134B2 (ja) | 2005-11-21 | 2012-11-28 | 日本電気株式会社 | 表示装置及びこれらを用いた機器 |
| US7732393B2 (en) * | 2006-03-20 | 2010-06-08 | Cabot Microelectronics Corporation | Oxidation-stabilized CMP compositions and methods |
| US20080096385A1 (en) * | 2006-09-27 | 2008-04-24 | Hynix Semiconductor Inc. | Slurry composition for forming tungsten pattern and method for manufacturing semiconductor device using the same |
| US8974655B2 (en) * | 2008-03-24 | 2015-03-10 | Micron Technology, Inc. | Methods of planarization and electro-chemical mechanical polishing processes |
| US20150156519A1 (en) * | 2012-07-10 | 2015-06-04 | Sharp Kabushiki Kaisha | Playing device, playing method, delivery device, delivery method, delivery program, playing program, recording medium, and metadata |
| CN103146307B (zh) * | 2013-03-28 | 2014-12-10 | 天津理工大学 | 一种化学机械抛光用纳米抛光液 |
| KR200482628Y1 (ko) | 2016-07-22 | 2017-02-14 | 하승원 | 애완동물 견인기 |
| CN109728158B (zh) * | 2017-10-27 | 2023-07-07 | 华邦电子股份有限公司 | 电阻式存储器及其制造方法与化学机械研磨制程 |
| CN113122148A (zh) * | 2021-04-07 | 2021-07-16 | 云南合义德新材料有限公司 | 一种晶体硅碱抛光添加剂及使用方法 |
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| US5246624A (en) * | 1989-03-21 | 1993-09-21 | Cabot Corporation | Aqueous colloidal dispersion of fumed silica, acid and stabilizer |
| US5340370A (en) * | 1993-11-03 | 1994-08-23 | Intel Corporation | Slurries for chemical mechanical polishing |
| US5958288A (en) * | 1996-11-26 | 1999-09-28 | Cabot Corporation | Composition and slurry useful for metal CMP |
| US5916855A (en) * | 1997-03-26 | 1999-06-29 | Advanced Micro Devices, Inc. | Chemical-mechanical polishing slurry formulation and method for tungsten and titanium thin films |
| US5993685A (en) * | 1997-04-02 | 1999-11-30 | Advanced Technology Materials | Planarization composition for removing metal films |
| US6001269A (en) * | 1997-05-20 | 1999-12-14 | Rodel, Inc. | Method for polishing a composite comprising an insulator, a metal, and titanium |
| TW510917B (en) * | 1998-02-24 | 2002-11-21 | Showa Denko Kk | Abrasive composition for polishing semiconductor device and method for manufacturing semiconductor device using same |
| US6313246B1 (en) * | 1999-07-07 | 2001-11-06 | Nalco Chemical Company | High molecular weight zwitterionic polymers |
| JP3721497B2 (ja) * | 1999-07-15 | 2005-11-30 | 株式会社フジミインコーポレーテッド | 研磨用組成物の製造方法 |
| US20050211952A1 (en) * | 2004-03-29 | 2005-09-29 | Timothy Mace | Compositions and methods for chemical mechanical planarization of tungsten and titanium |
-
2004
- 2004-03-29 US US10/811,640 patent/US20050214191A1/en not_active Abandoned
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2005
- 2005-03-23 TW TW094108885A patent/TW200532009A/zh unknown
- 2005-03-28 CN CNA2005100624716A patent/CN1676566A/zh active Pending
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| US20050214191A1 (en) | 2005-09-29 |
| JP2005286336A (ja) | 2005-10-13 |
| CN1676566A (zh) | 2005-10-05 |
| KR20060044831A (ko) | 2006-05-16 |
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