TW200511923A - Gas collection device, test connector, and testing apparatus for IC device - Google Patents

Gas collection device, test connector, and testing apparatus for IC device

Info

Publication number
TW200511923A
TW200511923A TW093118507A TW93118507A TW200511923A TW 200511923 A TW200511923 A TW 200511923A TW 093118507 A TW093118507 A TW 093118507A TW 93118507 A TW93118507 A TW 93118507A TW 200511923 A TW200511923 A TW 200511923A
Authority
TW
Taiwan
Prior art keywords
gas
coolant
testing apparatus
test connector
gas collection
Prior art date
Application number
TW093118507A
Other languages
English (en)
Chinese (zh)
Other versions
TWI353211B (OSRAM
Inventor
Koei Nishiura
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Publication of TW200511923A publication Critical patent/TW200511923A/zh
Application granted granted Critical
Publication of TWI353211B publication Critical patent/TWI353211B/zh

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K7/00Constructional details common to different types of electric apparatus
    • H05K7/20Modifications to facilitate cooling, ventilating, or heating
    • H05K7/20218Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00Testing or measuring during manufacture or treatment of wafers, substrates or devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/2872Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G01R31/2875Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature related to heating

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)
TW093118507A 2003-06-30 2004-06-25 Gas collection device, test connector, and testing apparatus for IC device TW200511923A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2003/008299 WO2005004571A1 (ja) 2003-06-30 2003-06-30 発熱素子冷却用カバー、発熱素子実装装置およびテストヘッド

Publications (2)

Publication Number Publication Date
TW200511923A true TW200511923A (en) 2005-03-16
TWI353211B TWI353211B (OSRAM) 2011-11-21

Family

ID=33549064

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093118507A TW200511923A (en) 2003-06-30 2004-06-25 Gas collection device, test connector, and testing apparatus for IC device

Country Status (9)

Country Link
US (1) US7072180B2 (OSRAM)
EP (1) EP1645318A4 (OSRAM)
JP (1) JP4275668B2 (OSRAM)
KR (1) KR100813125B1 (OSRAM)
CN (1) CN100556495C (OSRAM)
AU (1) AU2003246165A1 (OSRAM)
MY (1) MY131476A (OSRAM)
TW (1) TW200511923A (OSRAM)
WO (1) WO2005004571A1 (OSRAM)

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JP4889653B2 (ja) 2005-11-17 2012-03-07 株式会社アドバンテスト デバイス実装装置、テストヘッド及び電子部品試験装置
WO2009031415A1 (ja) * 2007-09-06 2009-03-12 Advantest Corporation 電子部品冷却装置、それを備えたテストヘッド及び電子部品試験装置
KR20100040979A (ko) * 2007-09-14 2010-04-21 가부시키가이샤 아드반테스트 기판상의 전자부품을 냉각하기 위한 워터 재킷
JP4703633B2 (ja) * 2007-12-04 2011-06-15 株式会社東芝 冷却プレート構造
JP5683961B2 (ja) * 2008-10-28 2015-03-11 株式会社アドバンテスト 試験装置および回路モジュール
US8289039B2 (en) 2009-03-11 2012-10-16 Teradyne, Inc. Pin electronics liquid cooled multi-module for high performance, low cost automated test equipment
CN103093848B (zh) * 2011-10-28 2015-12-09 原子高科股份有限公司 85Kr源的制备及回收工艺
US20160081220A1 (en) * 2014-09-15 2016-03-17 Cisco Technology, Inc. Reduction of Intake Resistance for Air Flow Enhancement
JP2016188780A (ja) * 2015-03-30 2016-11-04 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
KR20160117082A (ko) 2015-03-31 2016-10-10 최민석 인터넷 검색 시스템
US10309732B2 (en) * 2015-12-11 2019-06-04 Hanon Systems Internal degas feature for plate-fin heat exchangers
JP7412277B2 (ja) * 2020-06-02 2024-01-12 東京エレクトロン株式会社 検査装置及び検査方法
CN112015253A (zh) * 2020-09-14 2020-12-01 深圳比特微电子科技有限公司 一种液冷板散热器和计算设备
CN114705972B (zh) * 2022-05-06 2023-05-09 中国软件评测中心(工业和信息化部软件与集成电路促进中心) 一种集成电路性能测试装置及其测试方法
US20240084821A1 (en) * 2022-09-13 2024-03-14 Us Hybrid Corporation Self-priming cooling jacket
TWI891269B (zh) * 2024-03-05 2025-07-21 英業達股份有限公司 電路板測試系統與電路板測試裝置

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JP3424717B2 (ja) 1996-08-06 2003-07-07 株式会社アドバンテスト 発熱素子実装半導体装置
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US6078187A (en) * 1997-05-23 2000-06-20 Credence Systems Corporation Hemispherical test head for integrated circuit tester employing radially distributed circuit cards
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JP2002280507A (ja) * 2001-03-19 2002-09-27 Advantest Corp 発熱素子冷却装置および発熱素子実装装置
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Also Published As

Publication number Publication date
US7072180B2 (en) 2006-07-04
WO2005002294A2 (ja) 2005-01-06
MY131476A (en) 2007-08-30
JP4275668B2 (ja) 2009-06-10
AU2003246165A1 (en) 2005-01-21
TWI353211B (OSRAM) 2011-11-21
KR20060023569A (ko) 2006-03-14
WO2005002294A3 (ja) 2005-03-03
WO2005004571A1 (ja) 2005-01-13
JPWO2005002294A1 (ja) 2006-08-10
KR100813125B1 (ko) 2008-03-17
EP1645318A2 (en) 2006-04-12
CN100556495C (zh) 2009-11-04
EP1645318A4 (en) 2009-05-13
CN1812826A (zh) 2006-08-02
US20050056102A1 (en) 2005-03-17

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees