WO2005002294A1 - 気体回収装置、テストヘッドおよびｉｃデバイス試験装置 - Google Patents

気体回収装置、テストヘッドおよびｉｃデバイス試験装置

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Publication number
WO2005002294A1
WO2005002294A1 PCT/JP2004/009374 JP2004009374W WO2005002294A1 WO 2005002294 A1 WO2005002294 A1 WO 2005002294A1 JP 2004009374 W JP2004009374 W JP 2004009374W WO 2005002294 A1 WO2005002294 A1 WO 2005002294A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
cover
collecting unit
testing apparatus
test head
Prior art date
Application number
PCT/JP2004/009374
Other languages
English (en)
French (fr)
Other versions
WO2005002294A2 (ja
WO2005002294A3 (ja
Inventor
Koei Nishiura
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/JP2003/008299 external-priority patent/WO2005004571A1/ja
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to JP2005511119A priority Critical patent/JP4275668B2/ja
Priority to EP04746843A priority patent/EP1645318A4/en
Priority to US10/974,724 priority patent/US7072180B2/en
Publication of WO2005002294A2 publication Critical patent/WO2005002294A2/ja
Publication of WO2005002294A1 publication Critical patent/WO2005002294A1/ja
Publication of WO2005002294A3 publication Critical patent/WO2005002294A3/ja

Links

Abstract

　基板４に実装されたＩＣデバイス４４を覆い、内部に冷却液を流通させることによりＩＣデバイス４４に対して冷却液を接触させることのできる発熱素子冷却用カバー５において、発熱素子冷却用カバー５の内部にて気体溜りの発生し易い気体溜り部から、流通する冷却液が気体溜り部よりも下流となる位置まで、空気および冷却液が通過し得る溝５４（バイパス）を設ける。　このような発熱素子冷却用カバー５によれば、気体溜り部の空気はバイパスを通って抜け得るため、気体溜りを効果的に除去することができる。
PCT/JP2004/009374 2003-06-30 2004-06-25 気体回収装置、テストヘッドおよびｉｃデバイス試験装置 WO2005002294A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005511119A JP4275668B2 (ja) 2003-06-30 2004-06-25 気体回収装置、テストヘッドおよびｉｃデバイス試験装置
EP04746843A EP1645318A4 (en) 2003-06-30 2004-06-25 GASSAMMELEINHEIT, TEST HEAD AND IC COMPONENT TEST APPARATUS
US10/974,724 US7072180B2 (en) 2003-06-30 2004-10-28 Gas collecting device, test head and IC device testing apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/JP2003/008299 WO2005004571A1 (ja) 2003-06-30 2003-06-30 発熱素子冷却用カバー、発熱素子実装装置およびテストヘッド
JPPCT/JP03/08299 2003-06-30

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/974,724 Continuation US7072180B2 (en) 2003-06-30 2004-10-28 Gas collecting device, test head and IC device testing apparatus

Publications (3)

Publication Number Publication Date
WO2005002294A2 WO2005002294A2 (ja) 2005-01-06
WO2005002294A1 true WO2005002294A1 (ja) 2005-01-06
WO2005002294A3 WO2005002294A3 (ja) 2005-03-03

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