TW200503045A - Gas discharge lamp for EUV radiation - Google Patents

Gas discharge lamp for EUV radiation

Info

Publication number
TW200503045A
TW200503045A TW092133834A TW92133834A TW200503045A TW 200503045 A TW200503045 A TW 200503045A TW 092133834 A TW092133834 A TW 092133834A TW 92133834 A TW92133834 A TW 92133834A TW 200503045 A TW200503045 A TW 200503045A
Authority
TW
Taiwan
Prior art keywords
discharge lamp
gas discharge
euv radiation
anode
hollow cathode
Prior art date
Application number
TW092133834A
Other languages
English (en)
Inventor
Guenther Hans Derra
Joseph Robert Rene Pankert
Willi Neff
Klaus Bergmann
Jeroen Jonkers
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Publication of TW200503045A publication Critical patent/TW200503045A/zh

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—X-ray radiation generated from plasma
    • H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/09—Hollow cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • X-Ray Techniques (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Discharge Lamp (AREA)
  • Electron Sources, Ion Sources (AREA)
TW092133834A 2002-12-04 2003-12-02 Gas discharge lamp for EUV radiation TW200503045A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10256663A DE10256663B3 (de) 2002-12-04 2002-12-04 Gasentladungslampe für EUV-Strahlung

Publications (1)

Publication Number Publication Date
TW200503045A true TW200503045A (en) 2005-01-16

Family

ID=32403701

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092133834A TW200503045A (en) 2002-12-04 2003-12-02 Gas discharge lamp for EUV radiation

Country Status (8)

Country Link
US (1) US7397190B2 (zh)
EP (1) EP1570507A2 (zh)
JP (1) JP4594101B2 (zh)
CN (1) CN100375219C (zh)
AU (1) AU2003302551A1 (zh)
DE (1) DE10256663B3 (zh)
TW (1) TW200503045A (zh)
WO (1) WO2004051698A2 (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10238096B3 (de) * 2002-08-21 2004-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasentladungslampe
US6770895B2 (en) 2002-11-21 2004-08-03 Asml Holding N.V. Method and apparatus for isolating light source gas from main chamber gas in a lithography tool
US6919573B2 (en) 2003-03-20 2005-07-19 Asml Holding N.V Method and apparatus for recycling gases used in a lithography tool
DE10359464A1 (de) * 2003-12-17 2005-07-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen von insbesondere EUV-Strahlung und/oder weicher Röntgenstrahlung
DE102005025624B4 (de) * 2005-06-01 2010-03-18 Xtreme Technologies Gmbh Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Gasentladungsplasmas
JP4932185B2 (ja) * 2005-06-30 2012-05-16 浜松ホトニクス株式会社 ガス放電管、光源装置及び液体クロマトグラフ
US7825390B2 (en) * 2007-02-14 2010-11-02 Asml Netherlands B.V. Apparatus with plasma radiation source and method of forming a beam of radiation and lithographic apparatus
DE102007020742B8 (de) * 2007-04-28 2009-06-18 Xtreme Technologies Gmbh Anordnung zum Schalten großer elektrischer Ströme über eine Gasentladung
US8493548B2 (en) * 2007-08-06 2013-07-23 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US7872244B2 (en) * 2007-08-08 2011-01-18 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
DE102007060807B4 (de) * 2007-12-18 2009-11-26 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasentladungsquelle, insbesondere für EUV-Strahlung
US20100045160A1 (en) * 2008-08-20 2010-02-25 Manhattan Technologies Ltd. Multibeam doubly convergent electron gun
US8304973B2 (en) * 2010-08-23 2012-11-06 Hamamatsu Photonics K.K. Flash lamp
DE102011113681A1 (de) * 2011-09-20 2013-03-21 Heraeus Noblelight Gmbh Lampeneinheit für die Erzeugung optischer Strahlung
DE102013001940B4 (de) * 2013-02-05 2021-10-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur Erzeugung von EUV-und/oder weicher Röntgenstrahlung
RU2593147C1 (ru) * 2015-05-14 2016-07-27 Общество С Ограниченной Ответственностью "Эуф Лабс" Устройство и способ для получения высокотемпературной плазмы и эуф излучения

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Publication number Priority date Publication date Assignee Title
CA1239486A (en) * 1985-10-03 1988-07-19 Rajendra P. Gupta Gas discharge derived annular plasma pinch x-ray source
US5126638A (en) * 1991-05-13 1992-06-30 Maxwell Laboratories, Inc. Coaxial pseudospark discharge switch
US5502356A (en) * 1994-05-02 1996-03-26 Plex Corporation Stabilized radial pseudospark switch
US5467362A (en) * 1994-08-03 1995-11-14 Murray; Gordon A. Pulsed gas discharge Xray laser
DE19547813C2 (de) * 1995-12-20 1997-10-16 Heraeus Noblelight Gmbh Elektrodenlose Entladungslampe mit Blendenkörper
DE19753696A1 (de) * 1997-12-03 1999-06-17 Fraunhofer Ges Forschung Vorrichtung und Verfahren zur Erzeugung von Extrem-Ultraviolettstrahlung und weicher Röntgenstrahlung aus einer Gasentladung
CN1331836A (zh) * 1998-12-07 2002-01-16 纳幕尔杜邦公司 用于产生等离子体的空心阴极阵列
DE19962160C2 (de) * 1999-06-29 2003-11-13 Fraunhofer Ges Forschung Vorrichtungen zur Erzeugung von Extrem-Ultraviolett- und weicher Röntgenstrahlung aus einer Gasentladung
TWI246872B (en) * 1999-12-17 2006-01-01 Asml Netherlands Bv Radiation source for use in lithographic projection apparatus
US6469310B1 (en) * 1999-12-17 2002-10-22 Asml Netherlands B.V. Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus
US6421421B1 (en) * 2000-05-22 2002-07-16 Plex, Llc Extreme ultraviolet based on colliding neutral beams
DE10025443A1 (de) 2000-05-23 2001-12-06 Siemens Ag Vorrichtung zum Bestücken von Substraten mit elektrischen Bauteilen
US6804327B2 (en) * 2001-04-03 2004-10-12 Lambda Physik Ag Method and apparatus for generating high output power gas discharge based source of extreme ultraviolet radiation and/or soft x-rays
DE10139677A1 (de) * 2001-04-06 2002-10-17 Fraunhofer Ges Forschung Verfahren und Vorrichtung zum Erzeugen von extrem ultravioletter Strahlung und weicher Röntgenstrahlung
TW589924B (en) * 2001-04-06 2004-06-01 Fraunhofer Ges Forschung Process and device for producing extreme ultraviolet ray/weak x-ray
US6714624B2 (en) * 2001-09-18 2004-03-30 Euv Llc Discharge source with gas curtain for protecting optics from particles
DE10238096B3 (de) * 2002-08-21 2004-02-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasentladungslampe

Also Published As

Publication number Publication date
EP1570507A2 (de) 2005-09-07
WO2004051698A3 (de) 2004-09-10
CN100375219C (zh) 2008-03-12
CN1720600A (zh) 2006-01-11
AU2003302551A1 (en) 2004-06-23
WO2004051698A2 (de) 2004-06-17
DE10256663B3 (de) 2005-10-13
JP4594101B2 (ja) 2010-12-08
JP2006509330A (ja) 2006-03-16
US20060138960A1 (en) 2006-06-29
AU2003302551A8 (en) 2010-12-09
WO2004051698A8 (de) 2010-11-11
US7397190B2 (en) 2008-07-08

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