DE102007020742B8 - Anordnung zum Schalten großer elektrischer Ströme über eine Gasentladung - Google Patents
Anordnung zum Schalten großer elektrischer Ströme über eine Gasentladung Download PDFInfo
- Publication number
- DE102007020742B8 DE102007020742B8 DE102007020742A DE102007020742A DE102007020742B8 DE 102007020742 B8 DE102007020742 B8 DE 102007020742B8 DE 102007020742 A DE102007020742 A DE 102007020742A DE 102007020742 A DE102007020742 A DE 102007020742A DE 102007020742 B8 DE102007020742 B8 DE 102007020742B8
- Authority
- DE
- Germany
- Prior art keywords
- arrangement
- gas discharge
- electrical currents
- large electrical
- currents via
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05G—X-RAY TECHNIQUE
- H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
- H05G2/001—X-ray radiation generated from plasma
- H05G2/003—X-ray radiation generated from plasma being produced from a liquid or gas
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/52—Generating plasma using exploding wires or spark gaps
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007020742A DE102007020742B8 (de) | 2007-04-28 | 2007-04-28 | Anordnung zum Schalten großer elektrischer Ströme über eine Gasentladung |
US12/041,121 US7595594B2 (en) | 2007-04-28 | 2008-03-03 | Arrangement for switching high electric currents by a gas discharge |
JP2008061128A JP4314309B2 (ja) | 2007-04-28 | 2008-03-11 | ガス放電による高電流切り換え装置 |
NL2001452A NL2001452C2 (nl) | 2007-04-28 | 2008-04-07 | Inrichting voor het schakelen van grote elektrische stromen over een gasontlading. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007020742A DE102007020742B8 (de) | 2007-04-28 | 2007-04-28 | Anordnung zum Schalten großer elektrischer Ströme über eine Gasentladung |
Publications (2)
Publication Number | Publication Date |
---|---|
DE102007020742B3 DE102007020742B3 (de) | 2009-01-02 |
DE102007020742B8 true DE102007020742B8 (de) | 2009-06-18 |
Family
ID=39886110
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102007020742A Expired - Fee Related DE102007020742B8 (de) | 2007-04-28 | 2007-04-28 | Anordnung zum Schalten großer elektrischer Ströme über eine Gasentladung |
Country Status (4)
Country | Link |
---|---|
US (1) | US7595594B2 (de) |
JP (1) | JP4314309B2 (de) |
DE (1) | DE102007020742B8 (de) |
NL (1) | NL2001452C2 (de) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8464899B2 (en) * | 2007-12-27 | 2013-06-18 | Talyst Inc. | Zero cross-contamination collector |
US8409459B2 (en) * | 2008-02-28 | 2013-04-02 | Tokyo Electron Limited | Hollow cathode device and method for using the device to control the uniformity of a plasma process |
JP6126466B2 (ja) * | 2013-06-03 | 2017-05-10 | 株式会社Ihi | プラズマ光源 |
CN113126454B (zh) * | 2021-04-28 | 2023-03-28 | 上饶市广丰时代科技有限公司 | 一种半导体光刻机及其使用方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6240163B1 (en) * | 1998-06-19 | 2001-05-29 | Advanced Laser & Fusion Technology | Radiation E.G. X-ray pulse generator mechanisms |
US20030183787A1 (en) * | 2002-03-27 | 2003-10-02 | Mitsuru Ikeuchi | EUV radiation source |
EP1406124A1 (de) * | 2002-10-03 | 2004-04-07 | ASML Netherlands B.V. | Strahlungsquelle, lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
US6728337B2 (en) * | 2001-06-07 | 2004-04-27 | Plex Llc | Star pinch plasma source of photons or neutrons |
DE102005025624A1 (de) * | 2005-06-01 | 2006-12-07 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Gasentladungsplasmas |
US7180081B2 (en) * | 2000-06-09 | 2007-02-20 | Cymer, Inc. | Discharge produced plasma EUV light source |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3699384A (en) * | 1971-09-07 | 1972-10-17 | Hughes Aircraft Co | Offswitching of liquid metal arc switching device by internal current diversion to an auxiliary electrode |
US5126638A (en) * | 1991-05-13 | 1992-06-30 | Maxwell Laboratories, Inc. | Coaxial pseudospark discharge switch |
US5399941A (en) * | 1993-05-03 | 1995-03-21 | The United States Of America As Represented By The Secretary Of The Navy | Optical pseudospark switch |
US5502356A (en) * | 1994-05-02 | 1996-03-26 | Plex Corporation | Stabilized radial pseudospark switch |
DE59710868D1 (de) * | 1996-12-12 | 2003-11-20 | Siemens Ag | Niederdruck-gasentladungsschalter |
US5973447A (en) * | 1997-07-25 | 1999-10-26 | Monsanto Company | Gridless ion source for the vacuum processing of materials |
CN1350698A (zh) * | 1999-05-12 | 2002-05-22 | 熔化照明股份有限公司 | 高亮度微波灯 |
JP4246401B2 (ja) * | 2001-01-18 | 2009-04-02 | 株式会社アドバンテスト | 電子ビーム露光装置及び電子ビーム偏向装置 |
DE10256663B3 (de) * | 2002-12-04 | 2005-10-13 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Gasentladungslampe für EUV-Strahlung |
DE10336273A1 (de) * | 2003-08-07 | 2005-03-10 | Fraunhofer Ges Forschung | Vorrichtung zur Erzeugung von EUV- und weicher Röntgenstrahlung |
DE10342239B4 (de) * | 2003-09-11 | 2018-06-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung oder weicher Röntgenstrahlung |
-
2007
- 2007-04-28 DE DE102007020742A patent/DE102007020742B8/de not_active Expired - Fee Related
-
2008
- 2008-03-03 US US12/041,121 patent/US7595594B2/en not_active Expired - Fee Related
- 2008-03-11 JP JP2008061128A patent/JP4314309B2/ja not_active Expired - Fee Related
- 2008-04-07 NL NL2001452A patent/NL2001452C2/nl not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6240163B1 (en) * | 1998-06-19 | 2001-05-29 | Advanced Laser & Fusion Technology | Radiation E.G. X-ray pulse generator mechanisms |
US7180081B2 (en) * | 2000-06-09 | 2007-02-20 | Cymer, Inc. | Discharge produced plasma EUV light source |
US6728337B2 (en) * | 2001-06-07 | 2004-04-27 | Plex Llc | Star pinch plasma source of photons or neutrons |
US20030183787A1 (en) * | 2002-03-27 | 2003-10-02 | Mitsuru Ikeuchi | EUV radiation source |
EP1406124A1 (de) * | 2002-10-03 | 2004-04-07 | ASML Netherlands B.V. | Strahlungsquelle, lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
DE102005025624A1 (de) * | 2005-06-01 | 2006-12-07 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Gasentladungsplasmas |
Also Published As
Publication number | Publication date |
---|---|
NL2001452C2 (nl) | 2010-07-13 |
US20080265779A1 (en) | 2008-10-30 |
US7595594B2 (en) | 2009-09-29 |
JP4314309B2 (ja) | 2009-08-12 |
NL2001452A1 (nl) | 2008-10-30 |
JP2008277266A (ja) | 2008-11-13 |
DE102007020742B3 (de) | 2009-01-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8396 | Reprint of erroneous front page | ||
8364 | No opposition during term of opposition | ||
R081 | Change of applicant/patentee |
Owner name: USHIO DENKI KABUSHIKI KAISHA, JP Free format text: FORMER OWNER: XTREME TECHNOLOGIES GMBH, 07745 JENA, DE Effective date: 20110712 |
|
R081 | Change of applicant/patentee |
Owner name: USHIO DENKI KABUSHIKI KAISHA, JP Free format text: FORMER OWNER: XTREME TECHNOLOGIES GMBH, 52074 AACHEN, DE Effective date: 20131114 |
|
R082 | Change of representative |
Representative=s name: PATENTANWAELTE OEHMKE UND KOLLEGEN, DE Effective date: 20131114 |
|
R082 | Change of representative |
Representative=s name: PATENTANWAELTE OEHMKE UND KOLLEGEN, DE Representative=s name: GLEIM PETRI OEHMKE PATENT- UND RECHTSANWALTSPA, DE |
|
R082 | Change of representative |
Representative=s name: GLEIM PETRI PATENT- UND RECHTSANWALTSPARTNERSC, DE Representative=s name: GLEIM PETRI OEHMKE PATENT- UND RECHTSANWALTSPA, DE |
|
R082 | Change of representative |
Representative=s name: GLEIM PETRI PATENT- UND RECHTSANWALTSPARTNERSC, DE |
|
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee |