TW200501241A - Method for cleaning thin-film forming apparatus - Google Patents

Method for cleaning thin-film forming apparatus

Info

Publication number
TW200501241A
TW200501241A TW093107967A TW93107967A TW200501241A TW 200501241 A TW200501241 A TW 200501241A TW 093107967 A TW093107967 A TW 093107967A TW 93107967 A TW93107967 A TW 93107967A TW 200501241 A TW200501241 A TW 200501241A
Authority
TW
Taiwan
Prior art keywords
forming apparatus
film forming
reaction chamber
cleaning
thin
Prior art date
Application number
TW093107967A
Other languages
English (en)
Other versions
TWI336492B (zh
Inventor
Kazuhide Hasebe
Mitsuhiro Okada
Takashi Chiba
Jun Ogawa
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200501241A publication Critical patent/TW200501241A/zh
Application granted granted Critical
Publication of TWI336492B publication Critical patent/TWI336492B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4408—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber by purging residual gases from the reaction chamber or gas lines
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
TW093107967A 2003-03-25 2004-03-24 Method for cleaning thin-film forming apparatus TW200501241A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003083527 2003-03-25
JP2003371322A JP4430918B2 (ja) 2003-03-25 2003-10-30 薄膜形成装置の洗浄方法及び薄膜形成方法

Publications (2)

Publication Number Publication Date
TW200501241A true TW200501241A (en) 2005-01-01
TWI336492B TWI336492B (zh) 2011-01-21

Family

ID=33100377

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093107967A TW200501241A (en) 2003-03-25 2004-03-24 Method for cleaning thin-film forming apparatus

Country Status (5)

Country Link
US (1) US20060213539A1 (zh)
JP (1) JP4430918B2 (zh)
KR (1) KR100779823B1 (zh)
TW (1) TW200501241A (zh)
WO (1) WO2004086482A1 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI460791B (zh) * 2007-12-05 2014-11-11 Hitachi Int Electric Inc A manufacturing method of a semiconductor device, a substrate processing device, and a method of using the same

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JP4272486B2 (ja) * 2003-08-29 2009-06-03 東京エレクトロン株式会社 薄膜形成装置及び薄膜形成装置の洗浄方法
JP4541864B2 (ja) 2004-12-14 2010-09-08 東京エレクトロン株式会社 シリコン酸窒化膜の形成方法、形成装置及びプログラム
TWI365919B (en) * 2004-12-28 2012-06-11 Tokyo Electron Ltd Film formation apparatus and method of using the same
WO2007026762A1 (ja) 2005-08-31 2007-03-08 Tokyo Electron Limited クリーニング方法
JP4844261B2 (ja) * 2006-06-29 2011-12-28 東京エレクトロン株式会社 成膜方法及び成膜装置並びに記憶媒体
JP4245012B2 (ja) * 2006-07-13 2009-03-25 東京エレクトロン株式会社 処理装置及びこのクリーニング方法
JP4990594B2 (ja) * 2006-10-12 2012-08-01 東京エレクトロン株式会社 ガス供給装置、ガス供給方法、薄膜形成装置の洗浄方法、薄膜形成方法及び薄膜形成装置
JP5008957B2 (ja) * 2006-11-30 2012-08-22 東京エレクトロン株式会社 シリコン窒化膜の形成方法、形成装置、形成装置の処理方法及びプログラム
US20080142046A1 (en) * 2006-12-13 2008-06-19 Andrew David Johnson Thermal F2 etch process for cleaning CVD chambers
JP5554469B2 (ja) * 2007-05-14 2014-07-23 東京エレクトロン株式会社 薄膜形成装置の洗浄方法、薄膜形成方法及び薄膜形成装置
US8080109B2 (en) * 2007-05-14 2011-12-20 Tokyo Electron Limited Film formation apparatus and method for using the same
JP2008283148A (ja) * 2007-05-14 2008-11-20 Tokyo Electron Ltd 薄膜形成装置の洗浄方法、薄膜形成方法及び薄膜形成装置
KR20100071961A (ko) * 2007-09-19 2010-06-29 가부시키가이샤 히다치 고쿠사이 덴키 클리닝 방법 및 기판 처리 장치
JP4918453B2 (ja) * 2007-10-11 2012-04-18 東京エレクトロン株式会社 ガス供給装置及び薄膜形成装置
JP5113705B2 (ja) * 2007-10-16 2013-01-09 東京エレクトロン株式会社 薄膜形成装置の洗浄方法、薄膜形成方法、薄膜形成装置及びプログラム
JP5044579B2 (ja) * 2009-01-27 2012-10-10 東京エレクトロン株式会社 薄膜形成装置の洗浄方法、薄膜形成方法、薄膜形成装置及びプログラム
WO2011001394A2 (en) * 2009-07-02 2011-01-06 L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude Method of removing residual fluorine from deposition chamber
US20110117728A1 (en) * 2009-08-27 2011-05-19 Applied Materials, Inc. Method of decontamination of process chamber after in-situ chamber clean
JP5571233B2 (ja) * 2013-06-19 2014-08-13 東京エレクトロン株式会社 薄膜形成装置の洗浄方法、薄膜形成方法及び薄膜形成装置
KR101516587B1 (ko) * 2014-01-27 2015-05-04 주식회사 엘지실트론 웨이퍼용 열처리 노 세정 방법
JP2015192063A (ja) * 2014-03-28 2015-11-02 東京エレクトロン株式会社 アモルファスシリコン膜形成装置の洗浄方法、アモルファスシリコン膜の形成方法およびアモルファスシリコン膜形成装置
WO2018026509A1 (en) * 2016-08-05 2018-02-08 Applied Materials, Inc. Aluminum fluoride mitigation by plasma treatment
CN109585267B (zh) * 2017-09-29 2023-12-01 住友电气工业株式会社 氮化硅膜的形成方法
JP6956660B2 (ja) * 2018-03-19 2021-11-02 東京エレクトロン株式会社 クリーニング方法及び成膜装置
JP6860537B2 (ja) * 2018-09-25 2021-04-14 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ クリーニング方法、半導体装置の製造方法、基板処理装置、およびプログラム
CN109608056A (zh) * 2018-11-06 2019-04-12 中国神华能源股份有限公司 一种玻璃制油样瓶的净化方法
WO2021159225A1 (en) * 2020-02-10 2021-08-19 Yangtze Memory Technologies Co., Ltd. Metal contamination test apparatus and method
JP7189914B2 (ja) 2020-08-31 2022-12-14 株式会社Kokusai Electric クリーニング方法、半導体装置の製造方法、基板処理装置、およびプログラム

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI460791B (zh) * 2007-12-05 2014-11-11 Hitachi Int Electric Inc A manufacturing method of a semiconductor device, a substrate processing device, and a method of using the same

Also Published As

Publication number Publication date
JP2004311929A (ja) 2004-11-04
KR100779823B1 (ko) 2007-11-28
JP4430918B2 (ja) 2010-03-10
TWI336492B (zh) 2011-01-21
US20060213539A1 (en) 2006-09-28
WO2004086482A1 (ja) 2004-10-07
KR20050109046A (ko) 2005-11-17

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Legal Events

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GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees