TW200412430A - Glass substrate inspecting system - Google Patents

Glass substrate inspecting system Download PDF

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Publication number
TW200412430A
TW200412430A TW092130249A TW92130249A TW200412430A TW 200412430 A TW200412430 A TW 200412430A TW 092130249 A TW092130249 A TW 092130249A TW 92130249 A TW92130249 A TW 92130249A TW 200412430 A TW200412430 A TW 200412430A
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Taiwan
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glass substrate
inspection system
item
air
scope
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TW092130249A
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Chinese (zh)
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TWI250277B (en
Inventor
Chang-Ha Lee
Kee-Sung Cho
Sung-Cheal Kim
Kyung-Chae Bae
Jung-Hun Hwang
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Samsung Corning Prec Glass Co
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Publication of TW200412430A publication Critical patent/TW200412430A/en
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Publication of TWI250277B publication Critical patent/TWI250277B/en

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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
    • G02F2201/58—Arrangements comprising a monitoring photodetector
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/69—Arrangements or methods for testing or calibrating a device

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Textile Engineering (AREA)
  • Immunology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention discloses a glass substrate inspection system for inspecting a defect of a glass substrate. The glass substrate inspection system includes a motion frame moving between a transferring position and an inspecting position which are arranged on a base frame installed on a glass substrate transferring line, an operating means for moving the motion frame, a main transferring means for taking a glass substrate from the glass substrate transferring line and transporting it, which is provided to be positioned in the transferring position and the inspecting position, a sub-transferring means for taking the glass substrate from the transferring line and transporting it, which is provided to be arranged in the inspecting position, and a first illuminating means for illuminating the glass substrate, arranged at one side of the main transferring means. The glass substrate inspection system can be installed on the transferring line and follow-up glass substrates can be transported without delay even if the inspection is being processed so that efficiency and productivity of sampling inspection can be enhanced. Further, a various size of glass substrate can be inspected efficiently by a simple job changing and large size of glass substrate can be transported without making defects.

Description

200412430 玖、發明說明： I：發明戶斤屬之技術領域3 發明領域 本發明涉及用於檢查玻璃基板的缺陷的玻璃基板的檢 5 查系統。 L先前技術3 發明背景 衆所周知，用於TFT-LCD(薄膜電晶體-液晶顯示器）、 PDP(等離子顯示板）、EL(電致發光元件）等平面顯示器的製 10 造領域中的玻璃基板通過以平面狀使由玻璃熔爐熔解的熔 解玻璃成形的形成工序以及一次性按規格切斷的切斷工序 製造出後，在加工線上運輸並加工。在玻璃基板的加工線 上，將玻璃基板再次切斷爲符合平面顯示器規格的尺寸， 對通過切斷形成的鋒利的玻璃基板的4個邊緣進行研磨，在 15 4個邊緣處分別對切角（Corner_cut)以及定位標記 (Orientation mark)進行加工。 在這種玻璃基板的成形、切斷、研磨以及操縱等一連 串的製造過程中，在玻璃基板中，因各種因素會産生氣泡 、石子等異物的混入、污損、劃傷、斜面碎屑、切屑、裂 20 紋等多種缺陷。因此，爲了製造高品質的平面顯示器，應 對玻璃基板中存在的缺陷進檢查，區別合格品和不合格品 ，尋找在製造工序中不良因素，查明其産生的原因以進行 糾正。另一方面，玻璃基板的檢查者同時進行檢查人員的 目視檢查以及利用照相機、顯微鏡等的光學檢查。之後， 5 在對玻璃基板整體進行總體檢查後，爲了確保檢查的正確 性以及可罪性’一般要進行抽樣檢查。 另一方面’檢查者對破璃基板缺陷的目視檢查是在與 玻璃基板的輸送線分別設置的檢查站處進行的，檢查者通 過機械手卸下輸送線上的玻璃基板並將其裝在檢查站上， 通過設置在檢查站上的螢光燈、鹵素燈等的照明來檢查玻 璃基板的缺陷。但是，其缺點在於：非常擔心通過因機械 手造成玻璃基板裝卸時的物理接觸以及衝擊而導致玻璃基 板劃傷、裂紋等’並且還存在所需的停滯時間較長以致降 低生産率的問題。特別是，由於通過玻璃基板的大型化以 及薄型化會增加卸下玻璃基板的難度，因此在檢查中還存 在需要大量的時間和人力以致效率非常低的問題。 以往’作爲用於檢查玻璃基板缺陷的檢查系統的其他 例子，參見韓國公開專利公報第2001-7563號，其中，玻璃 基板的下端由運輸台的槽形支援工具支承輸送，氣動工作 臺在玻璃基板的後面吹出空氣以使玻璃基板傾斜並浮動以 便不發生物理接觸。並且，由照相機的拍攝獲得通過照明 裝置的照明投影出的玻璃基板的缺陷作爲圖像資料，通過 電腦的程式處理從照相機獲得的圖像資料，從而將玻璃基 板區分爲合格品和不合格品。但是，這種技術的檢查系統 由於必須要通過機械手裝卸玻璃基板以便通過運輸台的槽 形支援工具支承輸送玻璃基板的下端，因此，具有難於以 呈直線狀設置在玻璃基板的輸送線上的缺陷。另外，雖然 要製造玻璃基板尺寸不同的各種玻璃基板，但是由於運輸 台以及氣動工作臺的設計結構僅能檢查單一種類的玻璃基 板’因此，向能夠檢查多種玻璃基板的靈活的生産系統轉 換是非常困難的。 C發明内容】 發明概要 本發明是爲了解決前面所述的現有技術的各種問題而 提出的，因此，本發明的目的在於提供一種玻璃基板的檢 查系統’其以直線狀設置在玻璃基板的輸送線上，從而能 夠簡早、有效地貫施玻璃基板的檢查。 本發明的另一個目的在於提供一種玻璃基板的檢查系 統’其即使在玻璃基板的檢查中，也能將後面跟進的玻璃 基板連續輸送至輸送線上，並且能夠大大提高抽樣檢查的 效率以及生産率。 本發明的另一個目的在於提供一種玻璃基板的檢查系 統，其通過簡單的工作轉變就能非常簡單、有效地向靈活 性生産系統轉換。 本發明的另一個目的在於提供一種玻璃基板的檢查系 統，其能夠使與大型玻璃基板的物理接觸達到最小，通過 能實現穩定輸送的結構，能夠在檢查中有效地防止缺陷的 産生° 本發明的另一個目的在於提供一種玻璃基板的檢查系 統，在适種糸統中’檢查者能夠通過_素燈和榮光燈的照 明，迅速、正確地檢查出存在於玻璃基板中的缺陷。 用於實現上述目的的本發明的特徵在於：玻璃基板的 200412430 檢查系統，其特徵在於，該系統設有：以直線狀設置在玻 璃基板的輸送線上的底架；移動架，在所述底架上部，其 可運動地被設置在與所述玻璃基板的輸送線直線對準的所 述玻璃基板的輸送位置和檢查位置之間；在所述玻璃基板 5 的輸送位置和檢查位置之間驅動所述移動架的驅動裝置； 主輸送裝置，該裝置以在所述底架的前方，通過所述底架 的運動能分別與所述玻璃基板的輸送位置和檢查位置直線 對準的方式設置，並且在所述玻璃基板的輸送位置處，從 所述玻璃基板的輸送線接受並輸送所述玻璃基板；次輸送 ίο 裝置，該裝置以在所述底架的後方，通過所述底架的運動 能與所述玻璃基板的輸送位置直線對準的方式設置，並且 在所述玻璃基板的輸送位置處，從所述玻璃基板的輸送線 接受並輸送所述玻璃基板；第1照明裝置，其設置在所述主 輸送裝置一側且用於照亮所述玻璃基板。 15 此外，還設有第2照明裝置，所述第2照明裝置設置在 所述主輸送裝置的前方並對所述玻璃基板投射前光，該第2 照明裝置由設置在所述主輸送裝置前方的多盞鹵素燈、以 及正交座標運動裝置構成，其中，所述正交座標運動裝置 具有設置在所述主輸送裝置上以便能夠使所述_素燈沿X 20 軸方向運動的X軸線性運動導引件、以及設置在所述X軸線 性運動導引件上以便能夠使所述齒素燈沿Z軸方向運動的Z 軸線性運動導引件。 發明的效果 對於本發明的玻璃基板的檢查系統而言，由於通過以 8 直線狀設置在玻璃基板的輸送線上，能夠非常簡單、有效 地進行玻璃基板的檢查，即使在玻璃基板的檢查中，也能 將後面跟進的玻璃基板連續輸送至輸送線上，因此，能夠 大大提咼抽樣檢查的效率以及生産率。另外，由於通過簡 單的工作轉換就能非常簡單、有效地向能夠檢查出各種尺 寸玻璃基板的靈活性生産系統轉換，並使與大型玻璃基板 的物理接觸達δ丨最小，因此，通過能實現穩定輸送的結構 月b夠在檢查中有效地防止缺陷的産生。另外，檢查者能夠 通過_素燈和肇紐的照明迅速、正4檢查出存在於破璃 基板中的缺陷。 圖式簡單說明 圖爲顯示涉及本發明的檢查系統結構的主視圖。 第圖爲側視圖，其顯示了在涉及本發明的檢查系統中 使2輪运裝置與輸送位置直線對準的結構。 #圖爲側視圖，其顯示了在涉及本發明的檢查系統中 使二輸适裝置與輸送位置直線對準的結構。 #圖爲俯視圖，其顯示了在涉及本發明的檢查系統中 ，丫购生運動促動器的結構。 Μ β爲”’、員示在涉及本發明的檢查系統中，次輸送裝置 結構的主視圖。 第Α圖爲顯不在涉及本發明的檢查系統中，氣浮裝置 以及，^裝置的吹氣管的主視圖。 、 ’爲顯示在涉及本發明的檢查系統巾，氣浮裝置 以及後^裝置的吹氣管的剖視圖。 第7ffim部分顯示在涉及本發明的檢查系統中，導引裝 置結構的剖視圖。 第81U部分顯示在涉及本發明的檢查系統中，導引裝 置動作的俯視圖。 p第9_A圖爲用於說明在涉及本發明的檢查系統中，第1 月:置的螢光燈以及快門機構動作的剖視圖。 π第9·Β®爲用於說明在涉及本發明的檢查系統中，第i 月:置的螢光燈以及快門機構動作的剖視圖。 第1〇圖爲部分顯示在涉及本發明的檢查系統中，第2 照日«置以及正交座標運動裝置主視圖。 第11圖爲部分顯示在涉及本發明的檢查系統中，第1鹵 第以元件的仰視圖。 第12圖爲顯示在涉及本發明的檢查系統中，第素燈 以及第2軸元件的結構的俯視圖。 I：實施方式】 較佳實施例之詳細說明 下面’利用附圖詳細說明涉及本發明的玻璃基板的檢 查系統的最佳實施例。 首先參見第1以及5圖，本發明的檢查系統能夠檢查 例士、縱向（mm)X4頁向（_)的尺寸爲谓X稱〜^斷^麵 左右、厚度舄〇·4〜Umm左右的玻璃基板1的缺陷。本發明 的有底架2G ’所述底架呈直線狀設置在連續輸 运玻璃基板1的輪送線1G上。本發明的檢查系統可設置在例 如爲了進行破螭基板1的抽樣檢查而以各個區域區分玻璃 200412430 基板1的缺陷以便進行檢查的檢查站的下游，檢查站由暗室 的無塵室（clean room)構成。在設置在檢查系統下游的玻 璃基板1的輸送線10上，可形成用於除去不合格産品的玻璃 基板1的取出站（takeout station)以及包裝合格玻璃基板1的 5 包裝站（packing station) 〇 參見第2以及3圖，在底架20的上部設有移動架（motion fmme)30,以便在由輸送線1〇定位且可以連續輸送玻璃基板 1的輸送位置P1和用於檢查玻璃基板1的缺陷的檢查位置p2 之間能夠作直線往復運動。輸送位置P1由底架2〇的中央提 10供，檢查位置P2由底架20的前方提供。檢查者在底架2〇的 前方檢查位於檢查位置P2處的玻璃基板丨。在底架2〇的前方 ，设有檢查者能夠搭乘的衆所周知的升降機，以便能夠對 大型玻璃基板1進行簡單地檢查，升降機的結構應能由腳踏 開關進行控制。 15 參見第1〜4圖，移動架30的結構應確保能夠通過驅動 裝置的Y軸線性運動促動器40的驅動、在輸送位置(ρι)和檢 查位置(P2)之間作直線往復運動。丫軸線性運動促動器4〇由 安裝在底架20上並提供驅動力的伺服電機41，可通過所述 词服電機41的駆動力轉動地安裳的絲桿(1_ ·〜)42，沿 20絲桿42螺旋運動地安裝的滾珠軸套(ball bush)43,安裝在移 動架30的下面並固定滾珠軸套们的支架44，以及導引支架 44的直線運動的Y軸線性運動導向件45構成。，線性運動 導向件45由平行安裝在底架2〇上面的_對導軌物，沿所述 導軌45a滑動地安裝在支架44下面的—騎動件咖構成。 11 200412430 在本實施例中，代替γ軸線性運動促動器40，也可採用由具 有導執以及滑動件的線性運動導執以及内置於滑動件中且 使滑動件沿導執滑動的線性馬達構成的線性馬達導向器。 如第4圖所示，γ軸線性運動促動器40的伺服電機41由 5傳感裝置46控制。傳感裝置46由安裝在支架44一側的探測 稽塊(sensing dog)47，爲了檢測探測檔塊47以便控制伺服電 機41的驅動而設置在底架2〇上的第i感測器48a，第2感測器 48b以及第3感測器48c構成。第1感測器48a根據探測檔塊47 的檢測，控制伺服電機41的驅動以便在輸送位置!^處使移 10動架30定位，第2感測器48b根據探測檔塊47的檢測，控制 伺服電機41的驅動以便在檢測位置P2處使移動架3〇定位。 女衣在與弟1感測裔48a鄰接位置處的第3感測器48c控制饲 服電機41的驅動，以便在根據探測檔塊47的檢測、從檢測 位置P2返回輸送位置Pi時，降低移動架3〇的輸送速度。第j 15〜第3感測器48a〜48c可以由衆所周知的鄰接感測器以及 光耦合器構成。在與第1感測器48a上游鄰接的位置以及與 第2感測器48b下游鄰接的位置的底架2〇上，安裝有檢測探 測槽塊47的第1限位元開關49a以及第2限位元開關49b。第1 以及第2限位元開關49a，49b通過探測檔塊47的檢測，即使 20 在第1以及第2感測器48a，48b産生故障時，也能夠正確地 控制移動架30的運動範圍。 參見第1〜3以及5圖，本發明的檢查系統設有主輸送裝 置50以及次輸送裝置60，這些裝置在移動架30的前方與玻 璃基板1的輸送線10對準並可以連續輸送玻璃基板1。主輸 12 200412430 送裝置50以及次輸送裝置60由分別在移動架30的前後以規 定角度傾斜設置的方形前傾斜邊緣51(front slant rim)以及 後傾斜邊緣(rear slant rim)61，設置在前、後傾斜邊緣51、 61下部並支承輸送由玻璃基板1的輸送線10接受的玻璃基 5 板1下端的前輸送機52以及後輸送機62構成。主輸送裝置50 以及次輸送裝置60中的各個前、後傾斜邊緣51、61向底架 20的後方以大約5°左右的角度傾斜設置，並以尺寸不能覆 蓋玻璃基板1的各邊緣的相同結構設計而成。 主輸送裝置50以及次輸送裝置60中的各前、後輸送機 10 52、62由安裝在前、後傾斜邊緣51、61下部的安裝架52a、 62a，安裝在安裝架52a、62a—端並提供驅動力的馬達52b、 62b，通過馬達52b、62b的驅動可轉動地安裝的驅動皮帶輪 52c、62c，可轉動地安裝在安裝架52a、62a另一端的從動 皮帶輪52d、62d以及繞掛在驅動皮帶輪52c、62c和從動皮 15 帶輪52d、62d上的皮帶52e、62e構成。驅動皮帶輪52c、62c 和從動皮帶輪52d、62d以在前、後傾斜邊緣51、61外側突 出的方式設置。在驅動皮帶輪52c、62c和從動皮帶輪52d、 62d之間的安裝架52a、62a上，設有使皮帶52e、62e的運行 穩定並對它們進行支承的支承導執52f、62f。在本實施例中， 20 代替支承導軌52f、62f，在驅動皮帶輪52c、62c和從動皮帶 輪52d、62d之間的安裝架52a、62a上裝配中間導軌，以便 能夠支承皮帶52e、62e的運行。 參見第1，2以及5圖，前、後輸送機52、62中的各個馬 達52b、62b通過檢測玻璃基板1的輸送頂端的前傳感裝置53 13 200412430 以及後傳感裝置63控制。前、後傳感裝置53、63由分別通 過安裝托架54、64沿玻璃基板1的輸送方向安裝在安裝架 52a、62a上的第1感測器55a、65a以及第2感測器55b、65b 構成。若通過前、後傳感裝置53、63中的各第1感測器55a、 5 65a檢測到玻璃基板1的輸送方向頂端，則控制馬達52b、62b 的驅動，從而減小由前、後輸送機52、62産生的玻璃基板1 的輸送速度。若前、後傳感裝置53、63中的各第2感測器 55b、65b檢測到玻璃基板1的輸送方向頂端，則停止馬達 52b、62b的驅動，從而使玻璃基板1停止在設定位置處。 10 參見第1，2，6-A以及6-B圖，在主輸送裝置50以及次 輸送裝置60中的各個前、後傾斜邊緣51、61中，設置使玻 璃基板1由前、後傾斜邊緣51、61浮動的前氣浮裝置(fr 〇 n t a i r floating unit)56以及後氣浮裝置66。前、後氣浮裝置56、66 分別在前、後傾斜邊緣51、61的前方，沿玻璃基板的輸送 15 方向水平設置且設置多根吹氣管57、67，這些吹氣管沿縱 向設有多個在玻璃基板1後面噴出空氣的喷嘴孔57a、67a。 雖然在第1以及2圖中，設置了兩根主輸送裝置5〇的吹氣管 5 7 ’以便能夠在玻璃基板1的大致中央以及在中央和下段之 間吹出空氣，在第2圖中，設置兩根次輸送裝置60的吹氣管 20 57,以便能夠在玻璃基板1的大致中央以及在中央和上端之 間吹出空氣，但是不應局限於所示的例子，吹氣管57、67 的數量以及位置均可適當地改變，以便能夠使玻璃基板1從 前、後傾斜邊緣51、61穩定浮動。 如第6-B圖所示，使提供空氣的空氣供給裝置7〇的吹氣 14 200412430 裝置71與前、後氣浮裝置56、66的各根吹氣管57、67相連 ，由吹氣裝置71提供的空氣通過空氣篩檢程式乃過濾並分 別被供給至吹氣管57、67。設定通過吹氣管57、67中的噴 嘴孔57a、67a喷射的空氣力，以便能夠使玻璃基板丨的後部 5與吹氣管57、67相距一定距離、例如以大約0.5mm左右浮 動。在本實施例中，代替空氣供給裝置7〇的吹氣裝置71， 也可採用産生壓縮空氣的空氣壓縮機，以及控制從空氣壓 縮機供給的壓縮空氣的壓力以及流量的空氣調節裝置。另 一方面，玻璃基板1的輸送線10由結構與次輸送裝置6〇的後 10傾斜邊緣61、後輸送機62、吹氣管67相同的傾斜邊緣u、 傳送帶12、吹氣管13構成，以便能夠在輸送位置？1處，與 主、次輸送裝置50，60中的前、後傾斜邊緣51，61，前、 後輸送機52、62以及吹氣管57，67協動來連續輸送玻璃基 板1。 15 參見第1以及2圖，主輸送裝置50具有多個氣滑動式汽 缸叫^1丨(16〇71丨11(161〇58，這些汽缸能夠分別沿2軸的方向， 即沿豎直方向使多根吹氣管57上下運動。氣滑動式汽缸58 的缸體58a沿Z轴方向固定在前傾斜邊緣51上，以便與吹氣 管57中相應的兩端鄰接，使沿安裝在缸體58a的導軌58c滑 20 動的滑動件58d與活塞桿58b相連。並且，將吹氣管57的兩 端分別固定在氣滑動式汽缸58的滑動件58d上。若通過氣滑 動式汽缸58的驅動，使滑動件58d前進或後退，則與活塞桿 58b相連的滑動件58d—邊沿導執58c滑動，一邊在使玻璃基 板1穩定並浮動的最佳位置處，使吹氣管57中相應的兩個端 15 200412430 部同時上升或下降。 參見第1，2以及7圖，本發明的主輸送裝置5〇設有導引 裝置80，該裝置以支承並導引玻璃基板丨上端的方式設置。 導引裝置80由支承桿81，多個圓錐輥以及氣滑動式汽缸85 5構成，其中，所述支承桿81可升降運動地沿玻璃基板1的輸 送方向水平安裝在前傾斜邊緣51的上部；所述多個圓錐輥 84以相專的間隔設置，以便在支承桿81的下部，以軸82的 軸承83爲中心轉動並支承玻璃基板1的上端；所述氣滑動式 汽缸85使支承桿81上下運動。在氣滑動式汽缸85的滑動件 10 85d中，吹氣管57的兩端分別固定在氣滑動式汽缸85的滑動 件85d上。分別固定吹氣管57的兩端。若通過氣滑動式汽缸 85的驅動，使活塞桿85b前進或後退，則與活塞桿85b相連 的滑動件85d—邊沿導執85c滑動，一邊通過圓錐輥84穩定 支承玻璃基板1的上端，在可導引的最佳位置處使支承桿81 15 相應的兩個端部同時上升或下降。這種導引裝置8〇也可設 置在玻璃基板1的輸送線10上。 參見第1以及8圖，本發明的主輸送裝置50設有夾緊玻 璃基板1的一側端部的夾緊裝置90。夾緊裝置90由抓取機械 手92以及汽缸93構成，其中，所述抓取機械手9〇的安裝方 20 式爲在前傾斜邊緣51的一側以樞軸91爲中心轉動以能夾緊 玻璃基板1的一側端部，所述汽缸93使抓取機械手92以樞軸 91爲中心轉動以便能夾緊或釋放玻璃基板丨。汽缸93的缸體 93a通過樞軸94與前傾斜邊緣51相連，活塞桿93b通過樞軸 95與抓取機械手92的一側相連。在第1圖中，雖然以能吏緊 16 200412430 大型，例如（縱向（mm)x橫向（mm)的尺寸大於730x920)玻璃 基板1的輸送方向頂端上部的方式設置了 一個夾緊裝置 90，但是不應局限於所示的例子，夾緊裝置9〇的數量以及 位置均可通過玻璃基板1的尺寸作適當地改變。 5 參見第1，2，9-A以及9-B圖，本發明的檢查系統100 設有用於對玻璃基板1進行照明的第1照明裝置。第1照明裝 置100由多個螢光燈101，後掩護(back screen)102以及多個 快門機構103構成，其中，所述多個螢光燈ιοί用於對玻璃 基板1投射背光(back light)且設置在主輸送裝置50後方；所 10 述後掩護1〇2形成多個與螢光燈101對準的投射窗i〇2a ;多 個快門機構103用於可選擇地遮斷通過後掩護1〇2的投射窗 102a的榮光燈101的光線。在後掩護102的前面塗布黑色塗 料。在第9-A以及9-B圖中，雖然水平設置了 4盞螢光燈101 ，但是，不應局限於所給出的例子，螢光燈101的數量以及 15 位置可作適當的改變。另外，代替第1照明裝置100的螢光 燈101，也可以使用水銀燈，白色發光二極體(white light emitting diode)等。 如第9-A以及9-B圖詳細描述的那樣，快門機構i〇3由快 ΡΠ〇4以及汽缸1〇5構成，其中，快門104的安裝方式應能確 20 保在螢光燈1〇1和後掩護1〇2之間開閉後掩護102的投射窗 102a，並形成與後掩護1〇2的投射窗102a對準的投射窗104a ;汽缸105使快門104在遮斷後掩護102的投射窗102a的關閉 位置和打開投射窗l〇2a的打開位置之間運動。在快門104的 前面，與後掩護102相同塗布黑色塗料。汽缸105的缸體105a 17 200412430 的結構應能沿固定在移動架30上的一對活塞桿i〇5b上下運 動，將快門104固定在缸體l〇5a上。在第9-A以及9-B圖中， 2個快門機構1〇3應能在1個位置處遮住以前傾斜邊緣51的 中央爲基準、設置在上方的2盞螢光燈1〇1以及設置在下方 5 的2盞螢光燈1〇1，它們爲縮小快門104的尺寸、減小汽缸1〇5 行程的裝置。在快門機構103的快門104中形成1個投射窗 104a。如第9-A圖所示，若快門104的投射窗104a以及後掩 護102的投射窗i〇2a中的1個對準，則快門104的一端與後掩 護102中剩餘的投射窗102a偏置，後掩護102的投射窗102a 10 全部打開。如第9-B圖所示，快門104的投射窗104a與後掩 護102中的一個投射窗1〇2&偏置，後掩護1〇2的投射窗l〇2a 由快門104完全遮蔽。 參見第1，2以及10圖，本發明的檢查系統設有用於對 玻璃基板1進行照明的第2照明裝置110。第2照明裝置110由 15 用於對玻璃基板1投射前光（front light)的設置在主輸送裝 置50前方的第1鹵素燈hi以及第2鹵素燈112，控制第1以及 第2i素燈111，112電源的電源113以及正交座標運動裝置 120構成，其中，正交座標運動裝置120使第1以及第2鹵素 燈111，112以及電源113相對於玻璃基板1、沿玻璃基板1的 20 輸送方向，即X軸方向以及Z軸方向作正交座標運動。第1 鹵素燈111由線形鹵素燈構成，第2鹵素燈112由圓形鹵素燈 構成。雖然第1鹵素燈111設置一個，第2鹵素燈112設置兩 個，但是第1以及第2鹵素燈111，112的數量可作適當地變 化0 18 電源113根據通過檢查者的操作從控制面板ιΐ4輸入的 ^虎’控制作用於螢光燈以及第2_素燈⑴，ιΐ2 Μ電源。控制面板114裝配在正交座標運動裝置12〇的支架 5 上，控制面板114由能夠控制第！照明装置議的螢光燈 夸〇2 ’汽紅1〇5以及第2照明裝置的螢光燈U0的第！和第2函 。燈川、112的衆所周知的開關、按知以及觸摸面板構成。 見第1 2，1〇〜12圖’正交座標運動裝置120的X軸 相運動導引件⑽由平行於X軸方向安裝在前傾斜邊緣Μ 上下部的上部導執131以及下部導軌132，可沿所述上部以 及下部導軌⑶、132滑動安裝的上部滑動件133以及下部滑 動件134 ’橫切前傾斜邊緣51且與上部和下部滑動件⑺， 134相連的運動標桿135構成。代歓軸線性運動導引件13〇 的上部以及下部導軌13卜132以及上部和下部滑動件⑺， 134’也可以使用安裝在前傾斜邊緣51的上下部上的導桿以 15及沿所述導杯滑動的滾珠軸套。正交座標運動裝置120的Z 軸線性運動導引件丨4 〇由沿χ軸線性運動導引件丨3 〇的運動 標桿135安裝的導轨141 ’沿導軌141上下運動安裝的滑動件 I42 ’固定在滑動件H2上且裝载了第丄以及第2函素燈lu， 112的支架143構成。 20 另/方面，正交座標運動裴置120設有固定裝置150， 其用於在除去牽引力時，將通過檢查者的牽引力升降的支 架143固定就位。固定裝置150設有一端與支架143上部相連 的鋼絲151，没置在運動標桿135的上部以便捲繞所述鋼絲 151並進打導引的皮帶輪152,在運動標桿135下部與運動標 19 200412430 桿135平行地安裝在缸體153a上且具有與鋼絲15ι另一端相 連的活塞桿153b的汽缸153，通過汽缸153的活塞桿15讣前 進或後退來控制汽缸153的空氣壓力的調節器154構成。調 節器154爲供給空氣的裝置且與空氣壓縮機155相連。調節 5器154根據活塞桿153b的前進或後退來控制汽缸153的空氣 壓力，通過在除去檢查者的牵引力時，約束活塞桿153b的 驅動’將掛在鋼絲151上的支架143固定就位。200412430 (1) Description of the invention: I: Technical field of the inventors 3 Field of the invention The present invention relates to an inspection system 5 for inspecting glass substrates for defects in glass substrates. L Prior Art 3 Background of the Invention It is well known that glass substrates are used in the manufacture of flat displays such as TFT-LCD (thin-film transistor-liquid crystal display), PDP (plasma display panel), and EL (electroluminescence element). After the manufacturing step of forming the molten glass melted from the glass melting furnace in a planar shape and the cutting step of once cutting according to specifications, it is manufactured and then transported and processed on a processing line. On the glass substrate processing line, the glass substrate is cut again to a size that meets the specifications of a flat panel display. The four edges of the sharp glass substrate formed by cutting are polished, and the corners are cut at 15 edges (Corner_cut). ) And orientation mark (Orientation mark) for processing. During a series of manufacturing processes such as forming, cutting, grinding, and manipulating such glass substrates, air bubbles, stones, and other foreign materials are mixed in the glass substrate due to various factors, contamination, scratches, bevel chips, and chips. , Crack 20 lines and other defects. Therefore, in order to manufacture high-quality flat-panel displays, defects in glass substrates should be inspected to distinguish between qualified and unqualified products, look for undesirable factors in the manufacturing process, and find out their causes for correction. On the other hand, the inspector of the glass substrate performs both a visual inspection by the inspector and an optical inspection using a camera, a microscope, or the like. After that, after the overall inspection of the entire glass substrate, in order to ensure the correctness and guilt of the inspection, a sample inspection is generally performed. On the other hand, the inspector's visual inspection of the broken glass substrate defect is performed at an inspection station separately from the glass substrate conveying line. The inspector removes the glass substrate on the conveying line by a robot and installs it at the inspection station. In the above, defects of the glass substrate are inspected by illumination of a fluorescent lamp, a halogen lamp, or the like provided at the inspection station. However, it has disadvantages in that it is very worried that the glass substrate may be scratched, cracked, etc. due to physical contact and impact during the loading and unloading of the glass substrate due to the manipulator, and there is also a problem that a long dwell time is required to reduce productivity. In particular, the increase in the size and thickness of the glass substrate makes it difficult to remove the glass substrate. Therefore, a large amount of time and labor are required during the inspection, resulting in a very low efficiency. In the past, as another example of an inspection system for inspecting defects on a glass substrate, see Korean Laid-Open Patent Publication No. 2001-7563, in which the lower end of the glass substrate is supported and transported by a groove-shaped support tool of a transport table, and a pneumatic table is on the glass substrate. Air is blown out from behind to tilt and float the glass substrate so that no physical contact occurs. In addition, the defects of the glass substrate projected by the illumination of the lighting device are obtained by the shooting of the camera as image data, and the image data obtained from the camera are processed by a computer program to distinguish the glass substrate into a qualified product and a defective product. However, the inspection system of this technique requires a robot to load and unload the glass substrate to support the lower end of the conveyance of the glass substrate by the groove-shaped support tool of the transport table. Therefore, it has a defect that it is difficult to install the glass substrate in a straight line on the glass substrate conveying line. . In addition, although various glass substrates with different glass substrate sizes are to be manufactured, the design structure of the transportation table and the pneumatic table can only inspect a single type of glass substrate. Therefore, the transition to a flexible production system capable of inspecting multiple glass substrates is very important. difficult. C Summary of the Invention The present invention is proposed to solve various problems of the prior art described above. Therefore, an object of the present invention is to provide a glass substrate inspection system 'which is arranged linearly on a glass substrate conveying line , So that the inspection of the glass substrate can be carried out early and efficiently. Another object of the present invention is to provide a glass substrate inspection system, which can continuously convey glass substrates that are followed to the conveyor line even during the inspection of the glass substrate, and can greatly improve the efficiency and productivity of sampling inspection. . Another object of the present invention is to provide an inspection system for glass substrates, which can be converted to a flexible production system very simply and efficiently through a simple work transition. Another object of the present invention is to provide an inspection system for a glass substrate, which can minimize physical contact with a large glass substrate, and through a structure capable of achieving stable transportation, can effectively prevent the occurrence of defects during inspection. Another object is to provide a glass substrate inspection system. In an appropriate system, the inspector can quickly and accurately detect defects existing in the glass substrate through the illumination of a prime lamp and a glare lamp. The present invention for achieving the above-mentioned object is characterized in that the 200412430 inspection system for glass substrates is characterized in that the system is provided with: a bottom frame that is linearly arranged on the glass substrate conveying line; a moving frame on the bottom frame The upper part is movably disposed between a conveyance position and an inspection position of the glass substrate aligned linearly with the conveyance line of the glass substrate; and a drive unit is driven between the conveyance position and the inspection position of the glass substrate 5. A driving device of the moving frame; a main conveying device provided in a manner such that the movement of the bottom frame can be linearly aligned with the conveying position and the inspection position of the glass substrate in front of the bottom frame, and At the transport position of the glass substrate, the glass substrate is received and transported from the transport line of the glass substrate; a secondary transport device is provided behind the chassis through the kinetic energy of the chassis It is provided in a linear alignment with the conveyance position of the glass substrate, and at the conveyance position of the glass substrate, the conveyance line from the glass substrate Receiving and transporting said glass substrate; a first illumination device is provided in a side of said main conveyor means for the glass substrate and illuminated. 15 In addition, a second lighting device is provided in front of the main conveying device and projects front light on the glass substrate. The second lighting device is provided in front of the main conveying device. Is composed of a plurality of halogen lamps and an orthogonal coordinate movement device, wherein the orthogonal coordinate movement device has an X-axis property provided on the main conveying device so as to enable the _ prime lamp to move in the X 20 axis direction. A motion guide and a Z-axis linear motion guide provided on the X-axis linear motion guide so as to enable the tooth lamp to move in the Z-axis direction. ADVANTAGEOUS EFFECTS OF THE INVENTION The glass substrate inspection system of the present invention can be very easily and efficiently inspected on a glass substrate by being arranged on a glass substrate conveying line in a straight line, even when inspecting a glass substrate. The following glass substrate can be continuously conveyed to the conveying line, so the efficiency and productivity of sampling inspection can be greatly improved. In addition, it is possible to switch to a flexible production system capable of inspecting glass substrates of various sizes through a simple work conversion, and to minimize physical contact with large glass substrates. Therefore, stability can be achieved through The conveyed structure month b is enough to effectively prevent the occurrence of defects during inspection. In addition, the inspector can quickly and positively detect the defects existing in the broken glass substrate through the illumination of the prime lamp and Zhao Niu. BRIEF DESCRIPTION OF THE DRAWINGS The figure is a front view showing the structure of an inspection system according to the present invention. Fig. 1 is a side view showing a configuration in which a two-wheel transport device is linearly aligned with a transport position in the inspection system according to the present invention. #Figure is a side view showing a structure in which the two-pass adapting device is linearly aligned with the conveying position in the inspection system according to the present invention. # 图 is a top view showing the structure of a motion actuator in the inspection system related to the present invention. M β is “', and the front view of the structure of the secondary conveying device in the inspection system related to the present invention is shown. FIG. A is a view showing the air-floating device and the air blowing pipe of the device in the inspection system related to the present invention. Front view. '' Is a cross-sectional view showing the air duct of the inspection system towel, air flotation device, and rear device related to the present invention. Section 7ffim is a cross-sectional view showing the structure of the guide device in the inspection system related to the present invention. The part 81U is a top view showing the operation of the guide device in the inspection system related to the present invention. P FIG. 9_A is a diagram for explaining the operation of the installed fluorescent lamp and shutter mechanism in the inspection system related to the present invention in January: Sectional view. Π9 · B® is a cross-sectional view for explaining the operation of the installed fluorescent lamp and shutter mechanism in the inspection system related to the present invention, i.th: Fig. 10 is a part showing the inspection related to the present invention. In the system, the front view of the second photon and the orthogonal coordinate movement device. Fig. 11 is a bottom view of the first halogen element in the inspection system related to the present invention. Fig. 12 A plan view showing the structure of the first lamp and the second axis element in the inspection system according to the present invention. I: Embodiments] Detailed description of the preferred embodiment The following will describe the inspection of the glass substrate according to the present invention in detail using the drawings. The preferred embodiment of the system: First, referring to Figs. 1 and 5, the inspection system of the present invention can check the size of the sample, the length (mm) X4 page direction (_), the size is called X, and the thickness is about ^ section ^ plane. Defects of the glass substrate 1 of about 4 to Umm. The underframe 2G according to the present invention is linearly arranged on a carousel 1G that continuously transports the glass substrate 1. The inspection system of the present invention can be set For example, in order to perform a sampling inspection of the broken substrate 1, the inspection station of the glass 200412430 substrate 1 is inspected for the defects of the substrate 1 and inspected. The inspection station is a clean room in a dark room. The inspection system is installed in the inspection system. On the conveying line 10 of the glass substrate 1 downstream, a take-out station for removing the glass substrate 1 for removing defective products and a packing staging 5 for packaging the qualified glass substrate 1 may be formed. ation) 〇 Referring to FIGS. 2 and 3, a motion frame 30 is provided on the upper part of the bottom frame 20 so as to be positioned at the conveying position P1 by the conveying line 10 and capable of continuously conveying the glass substrate 1 and for inspecting the glass The inspection position p2 of the defect of the substrate 1 can be linearly reciprocated. The conveying position P1 is provided by the center 10 of the chassis 20, and the inspection position P2 is provided in front of the chassis 20. The inspector is in front of the chassis 20 Inspect the glass substrate at the inspection position P2. In front of the base frame 20, there is a well-known lift that the inspector can board in order to enable simple inspection of the large glass substrate 1. The structure of the lift should be Foot switch for control. 15 Referring to FIGS. 1 to 4, the structure of the moving frame 30 should ensure that the Y-axis linear motion actuator 40 of the driving device can drive the linear reciprocating motion between the conveying position (ρ) and the inspection position (P2). The Y-axis linear motion actuator 40 is a servo motor 41 installed on the chassis 20 and providing a driving force. The servo motor 41 can rotate the screw (1_ ~~) 42 of Ansang by the power of the servo motor 41. A ball bush 43 mounted helically along a 20-threaded rod 42, a bracket 44 mounted under the moving frame 30 and fixing the ball bushes, and a Y-axis linear motion guide for guiding the linear movement of the bracket 44 Piece 45 is composed. The linear motion guide 45 is constituted by a pair of guide rails mounted on the bottom frame 20 in parallel, and is mounted on the underside of the bracket 44 along the guide rail 45a-a rider coffee. 11 200412430 In this embodiment, instead of the γ-axis linear motion actuator 40, a linear motion guide having a guide and a slider, and a linear motor built in the slide and sliding the slider along the guide may be used. Constructed linear motor guide. As shown in FIG. 4, the servo motor 41 of the γ-axis linear motion actuator 40 is controlled by a five-sensor device 46. The sensing device 46 is a sensing dog 47 installed on the side of the bracket 44, and an i-th sensor 48 a provided on the chassis 20 in order to detect the detection stop 47 in order to control the driving of the servo motor 41, The second sensor 48b and the third sensor 48c are configured. The first sensor 48a controls the driving of the servo motor 41 to position the moving frame 30 at the conveying position according to the detection of the detection stop 47, and the second sensor 48b controls based on the detection of the detection stop 47 The servo motor 41 is driven to position the moving frame 30 at the detection position P2. The third sensor 48c of the women's clothing adjacent to the sensor 48a of the brother 1 controls the driving of the feeding motor 41 so as to reduce the movement when returning to the conveying position Pi from the detection position P2 based on the detection of the detection stop 47. Conveying speed of rack 30. The j 15th to third sensors 48a to 48c may be composed of a well-known adjacency sensor and a photocoupler. On the chassis 20 adjacent to the upstream of the first sensor 48a and downstream of the second sensor 48b, the first limit switch 49a and the second limit of the detection groove block 47 are installed. Bit switch 49b. The detection of the first and second limit switch 49a, 49b by the detection stopper 47 can accurately control the moving range of the moving frame 30 even when the first and second sensors 48a, 48b fail. Referring to FIGS. 1 to 3 and 5, the inspection system of the present invention is provided with a primary conveying device 50 and a secondary conveying device 60. These devices are aligned with the conveying line 10 of the glass substrate 1 in front of the moving frame 30 and can continuously convey the glass substrate. 1. Main input 12 200412430 The sending device 50 and the secondary conveying device 60 are formed by a square front slant rim 51 and a rear slant rim 61 which are inclined at a predetermined angle in front of and behind the moving frame 30, respectively. A front conveyor 52 and a rear conveyor 62 which are lower than the rear inclined edges 51 and 61 and support and convey the lower end of the glass substrate 5 plate 1 received by the conveyance line 10 of the glass substrate 1 are supported. Each of the front and rear inclined edges 51 and 61 in the main conveying device 50 and the sub conveying device 60 is inclined toward the rear of the chassis 20 at an angle of about 5 °, and the same structure cannot cover each edge of the glass substrate 1 in a size Designed. Each of the front and rear conveyors 10 52 and 62 in the main conveying device 50 and the sub-conveying device 60 is installed at the lower ends of the front and rear inclined edges 51 and 61 by mounting brackets 52a and 62a, and is installed at the ends of the mounting brackets 52a and 62a. Motors 52b and 62b which provide driving force, driving pulleys 52c and 62c rotatably mounted by driving of the motors 52b and 62b, driven pulleys 52d and 62d rotatably mounted on the other ends of the mounting brackets 52a and 62a, and wound on The drive pulleys 52c, 62c and the belts 52e, 62e on the driven leather 15 pulleys 52d, 62d are configured. The driving pulleys 52c, 62c and the driven pulleys 52d, 62d are provided so as to protrude outside the front and rear inclined edges 51, 61. Mounting brackets 52a, 62a between the driving pulleys 52c, 62c and the driven pulleys 52d, 62d are provided with support guides 52f, 62f that stabilize the operation of the belts 52e, 62e and support them. In this embodiment, 20 instead of the support rails 52f, 62f, an intermediate rail is mounted on the mounting brackets 52a, 62a between the driving pulleys 52c, 62c and the driven pulleys 52d, 62d so as to be able to support the operation of the belts 52e, 62e. Referring to Figs. 1, 2 and 5, each of the motors 52b, 62b of the front and rear conveyors 52, 62 is controlled by a front sensor 53 13 200412430 and a rear sensor 63 which detect the conveyance tip of the glass substrate 1. The front and rear sensor devices 53 and 63 are respectively mounted on the first and second sensors 55a and 65a and 55b on the mounting brackets 52a and 62a in the conveying direction of the glass substrate 1 through the mounting brackets 54 and 64, respectively. 65b composition. When the top ends of the glass substrate 1 in the conveying direction are detected by the first sensors 55a and 565a of the front and rear sensing devices 53, 63, the driving of the motors 52b and 62b is controlled to reduce the front and rear conveyance. The conveyance speed of the glass substrate 1 by the machines 52 and 62. If the second sensors 55b, 65b of the front and rear sensing devices 53, 63 detect the top end of the glass substrate 1 in the conveying direction, the driving of the motors 52b, 62b is stopped, and the glass substrate 1 is stopped at the set position. . 10 Referring to FIGS. 1, 2, 6 -A and 6 -B, in each of the front and rear inclined edges 51 and 61 of the main conveying device 50 and the secondary conveying device 60, the glass substrate 1 is provided with front and rear inclined edges. 51 and 61 are floating front air floating units 56 and rear air floating units 66. The front and rear air flotation devices 56, 66 are located in front of the front and rear inclined edges 51, 61, respectively, and a plurality of air blowing pipes 57 and 67 are horizontally arranged in the direction of conveying 15 of the glass substrate. Nozzle holes 57a and 67a for ejecting air behind the glass substrate 1. Although in FIG. 1 and FIG. 2, two blow pipes 5 7 ′ of the main conveying device 50 are provided so that air can be blown out approximately at the center of the glass substrate 1 and between the center and the lower section, in FIG. The blow pipes 20 57 of the two secondary conveying devices 60 so as to be able to blow air in the approximate center of the glass substrate 1 and between the center and the upper end, but it should not be limited to the example shown, the number and position of the blow pipes 57, 67 Both can be appropriately changed so that the glass substrate 1 can stably float from the front and rear inclined edges 51 and 61. As shown in FIG. 6-B, the blower 14 200412430 of the air supply device 70 for supplying air is connected to each of the blow pipes 57 and 67 of the front and rear air floating devices 56, 66, and the blower 71 The supplied air is filtered through an air screening program and supplied to the blow pipes 57, 67, respectively. The air force sprayed through the nozzle holes 57a, 67a in the air blowing pipes 57, 67 is set so that the rear portion 5 of the glass substrate 丨 and the air blowing pipes 57, 67 can float at a certain distance, for example, about 0.5 mm. In this embodiment, instead of the air blowing device 71 of the air supply device 70, an air compressor that generates compressed air and an air conditioning device that controls the pressure and flow rate of the compressed air supplied from the air compressor may be used. On the other hand, the conveying line 10 of the glass substrate 1 is composed of an inclined edge u, a conveyor belt 12, and an air blowing tube 13 having the same structure as the rear 10 inclined edge 61, the rear conveyor 62, and the air blowing tube 67 of the secondary conveying device 60, so that In the transport position? At one place, the glass substrate 1 is continuously conveyed in cooperation with the front and rear inclined edges 51, 61, the front and rear conveyors 52, 62, and the blowing pipes 57, 67 of the main and sub conveying devices 50, 60. 15 Referring to FIGS. 1 and 2, the main conveying device 50 has a plurality of air-sliding cylinders called ^ 1 丨 (16〇71 丨 11 (161〇58). These cylinders can be respectively used in the direction of 2 axes, that is, in the vertical direction. A plurality of blowing pipes 57 move up and down. The cylinder 58a of the air sliding cylinder 58 is fixed to the front inclined edge 51 in the Z axis direction so as to abut the corresponding two ends of the blowing pipe 57 so as to follow the guide rail mounted on the cylinder 58a. The 58c sliding 20d sliding member 58d is connected to the piston rod 58b. Moreover, the two ends of the air blowing pipe 57 are respectively fixed to the sliding member 58d of the air sliding cylinder 58. If the air sliding cylinder 58 is driven, the sliding member 58d 58d forwards or backwards, the slider 58d connected to the piston rod 58b-the edge guide 58c slides, while at the best position to stabilize and float the glass substrate 1, the corresponding two ends 15 of the blower pipe 57 200412430 At the same time, it is raised or lowered. Referring to FIGS. 1, 2 and 7, the main conveying device 50 of the present invention is provided with a guide device 80 which is provided to support and guide the upper end of the glass substrate. The guide device 80 is supported by the support. Rod 81, multiple conical rollers and air slide The cylinder 85 5 is configured, wherein the support rod 81 is horizontally mounted on the upper portion of the front inclined edge 51 in the conveying direction of the glass substrate 1, and the plurality of cone rollers 84 are arranged at specific intervals so as to support the support rod 81. The lower part of the rod 81 rotates around the bearing 83 of the shaft 82 as a center and supports the upper end of the glass substrate 1; the air slide cylinder 85 moves the support rod 81 up and down. In the slider 10 85d of the air slide cylinder 85, The two ends of the air pipe 57 are respectively fixed to the slider 85d of the air sliding cylinder 85. The two ends of the air blowing pipe 57 are respectively fixed. If the piston rod 85b is moved forward or backward by the drive of the air sliding cylinder 85, it is connected with the piston rod 85b connected slider 85d-while sliding along the guide 85c, the upper end of the glass substrate 1 is stably supported by the conical roller 84, and the corresponding two ends of the support rod 81 15 are simultaneously raised or lowered at the optimal guideable position Such a guide device 80 may also be provided on the conveying line 10 of the glass substrate 1. Referring to Figs. 1 and 8, the main conveying device 50 of the present invention is provided with a clamp for clamping one end portion of the glass substrate 1. Device 90. Clamping device 90 It is composed of a grasping robot 92 and a cylinder 93, wherein the installation method 20 of the grasping robot 90 is to pivot on the side of the front inclined edge 51 about the pivot 91 to clamp the glass substrate 1 At one end, the cylinder 93 rotates the grasping robot 92 around the pivot 91 to clamp or release the glass substrate. The cylinder 93a of the cylinder 93 is connected to the front inclined edge 51 through the pivot 94, and the piston The rod 93b is connected to one side of the grasping robot 92 through a pivot 95. Although in FIG. 1, it can be large 16 200412430, for example, (the length (mm) x width (mm) is larger than 730x920) glass substrate A clamping device 90 is provided in the manner of the upper end of the conveying direction of 1, but it should not be limited to the example shown. The number and position of the clamping devices 90 can be appropriately changed by the size of the glass substrate 1. 5 Referring to FIGS. 1, 2, 9-A, and 9-B, the inspection system 100 of the present invention is provided with a first illumination device for illuminating the glass substrate 1. The first lighting device 100 includes a plurality of fluorescent lamps 101, a back screen 102, and a plurality of shutter mechanisms 103. The plurality of fluorescent lamps are used to project a backlight on the glass substrate 1. And arranged behind the main conveying device 50; the rear cover 102 described above forms a plurality of projection windows 102 aligned with the fluorescent lamp 101; multiple shutter mechanisms 103 are used to selectively block the rear cover 1 Light of the glare lamp 101 of the projection window 102a. The front face of the rear cover 102 is coated with a black paint. In FIGS. 9-A and 9-B, although four fluorescent lamps 101 are arranged horizontally, it should not be limited to the example given. The number of fluorescent lamps 101 and 15 positions can be changed appropriately. Further, instead of the fluorescent lamp 101 of the first lighting device 100, a mercury lamp, a white light emitting diode, or the like may be used. As detailed in Figs. 9-A and 9-B, the shutter mechanism 〇3 is composed of a fast ΠΠ04 and a cylinder 105, in which the installation method of the shutter 104 can be ensured to be 20 to the fluorescent lamp 10. The projection window 102a of the rear cover 102 is opened and closed between 1 and the rear cover 102, and a projection window 104a aligned with the projection window 102a of the rear cover 102 is formed; the cylinder 105 makes the shutter 104 cover the projection window of the cover 102 after being blocked Move between the closed position of 102a and the open position of the projection window 102a. In front of the shutter 104, black paint is applied in the same manner as the rear cover 102. The structure of the cylinder block 105a 17 200412430 of the cylinder 105 should be able to move up and down along a pair of piston rods i05b fixed on the moving frame 30 to fix the shutter 104 on the cylinder block 105a. In Figs. 9-A and 9-B, the two shutter mechanisms 10 should be able to cover the center of the previously slanted edge 51 as a reference at one position, and the two fluorescent lamps 10 and 1 provided above should be Two fluorescent lamps 101 are provided at the bottom 5 and are devices for reducing the size of the shutter 104 and reducing the stroke of the cylinder 105. One shutter window 104a is formed in the shutter 104 of the shutter mechanism 103. As shown in FIG. 9-A, if one of the projection window 104a of the shutter 104 and the projection window 102a of the rear cover 102 is aligned, one end of the shutter 104 is offset from the remaining projection window 102a in the rear cover 102. The projection windows 102a 10 of the rear cover 102 are all opened. As shown in FIG. 9-B, the projection window 104a of the shutter 104 is offset from one of the projection windows 102 and 102 of the rear cover 102, and the projection window 102a of the rear cover 102 is completely blocked by the shutter 104. Referring to Figs. 1, 2 and 10, the inspection system of the present invention is provided with a second illumination device 110 for illuminating the glass substrate 1. The second illuminating device 110 controls the first and second elementary lamps 111 from 15 first halogen lamps hi and second halogen lamps 112 provided in front of the main conveying device 50 for projecting front light on the glass substrate 1. The power source 113 of the 112 power source and the orthogonal coordinate movement device 120 are configured, wherein the orthogonal coordinate movement device 120 causes the first and second halogen lamps 111, 112 and the power source 113 to be conveyed to and from the glass substrate 1 and 20 along the glass substrate 1. Direction, that is, the X-axis direction and the Z-axis direction make orthogonal coordinate movement. The first halogen lamp 111 is composed of a linear halogen lamp, and the second halogen lamp 112 is composed of a circular halogen lamp. Although one first halogen lamp 111 is provided and two second halogen lamps 112 are provided, the number of the first and second halogen lamps 111 and 112 may be appropriately changed. 0 18 The power source 113 is controlled from the control panel by an inspector's operation. 4 The input 'Tiger' control acts on the fluorescent lamp and the 2nd prime lamp, and the 2M power supply. The control panel 114 is mounted on the bracket 5 of the orthogonal coordinate motion device 120. The control panel 114 is capable of controlling the first! The fluorescent lamp of the lighting device is exaggerated 〇 2 ′ steam red 105 and the fluorescent lamp U0 of the second lighting device! And 2nd letter. Dengchuan, 112 is a well-known switch, push button, and touch panel configuration. See Figs. 12, 10 ~ 12. The X-axis phase movement guide of the orthogonal coordinate movement device 120 is composed of an upper guide 131 and a lower guide rail 132 mounted on the upper and lower portions of the front inclined edge M parallel to the X-axis direction. The upper slider 133 and the lower slider 134 ′, which can be slidably mounted along the upper and lower guide rails ⑶, 132, constitute a movement benchmark 135 that crosses the front inclined edge 51 and is connected to the upper and lower sliders ⑺, 134. On behalf of the upper and lower guides of the linear motion guide 130, 132 and 132, and the upper and lower sliders 134 ', a guide rod mounted on the upper and lower portions of the front inclined edge 51 may also be used along with 15 and Ball bearing sleeve with guide cup sliding. Z-axis linear motion guide of the orthogonal coordinate motion device 120 4 〇 The guide rail 141 mounted by the motion rod 135 along the χ-axis linear motion guide 丨 3 ′ The slider I42 mounted on the guide rail 141 to move up and down The bracket 143 which is fixed to the slider H2 and mounts the first and second letter lamps lu, 112 is configured. 20 On the other hand, the orthogonal coordinate motion Pei 120 is provided with a fixing device 150, which is used to fix the support 143 raised and lowered by the inspector's traction when the traction is removed. The fixing device 150 is provided with a wire 151 connected to the upper part of the bracket 143 at one end, and is not placed on the upper part of the movement standard 135 so as to wind the wire 151 and guide the pulley 152. The lower part of the movement standard 135 is connected with the movement standard 19 200412430 lever 135. The cylinder 153, which is mounted on the cylinder block 153a in parallel and has a piston rod 153b connected to the other end of the steel wire, is composed of a regulator 154 that controls the air pressure of the cylinder 153 by the forward or backward movement of the piston rod 15 of the cylinder 153. The regulator 154 is a device for supplying air and is connected to an air compressor 155. The adjuster 154 controls the air pressure of the cylinder 153 according to the forward or backward movement of the piston rod 153b, and by restraining the driving of the piston rod 153b while removing the traction of the inspector, the bracket 143 hanging on the wire 151 is fixed in place.

如第1，10以及11圖所示，第2照明裝置11〇的第1鹵素 燈111通過第1軸元件160可實現多自由度運動地設置在正 10父座“運動裝置120的支架143上。第1軸元件160由可轉動 地垂直安裝在支架143上的第1軸161，可向左右轉動地水平 女瓜在弟1轴161上端的第2軸162 ’可轉動地傾斜安裝在第$ 轴162末端的第3軸163，以及可轉動地安裝在第3軸163末端 且固疋了苐1鹵素燈111的第4轴164構成。檢查者可以使第1 15 轴元件160的第1〜第4軸161〜164轉動並將第1鹵素燈^ 的照明位置調整至適於檢查的位置處。 如第1，10以及12圖所示，第2照明裝置110的第2鹵素 燈112通過第2軸元件170可實現多自由度運動地設置在正 交座標運動裝置120的支架143上。第2軸元件170由可轉動 20地垂直安裝在支架M3上的第1軸171，可向左右轉動地水平 安I在弟1轴171上部的第2轴172，以及可轉動地傾斜安聲 在第2軸172末端的第3軸173構成。檢查者可以使第2軸元件 170的第1〜第3軸171〜173轉動並將第2鹵素燈112的照明 位置調整至適於檢查的最佳位置處於。在本實施例中，在 20 200412430 正交座標運動裝置120的支架143上，設有獲得通過第丨照明 裝置1〇〇的照明由玻璃基板丨投影産生的缺陷的圖像的ccd 照相機（電荷耦合裝置照相機)和放大缺陷圖像的顯微鏡。通 過CCD照相機獲得的缺陷圖像由電腦的程式處理，從而能 5夠將玻璃基板1區分爲合格品和不合格品，作爲CCD照相機 ，最好使用白色發光二極體。 如第2圖所示，本發明的檢查系統設有爲進行系統控制 而設置在檢查位置P2處的控制裝置的控制器18〇，控制器 180通過可編程式邏輯控制來控制γ軸線性運動促動器4〇， 10次輸送裝置60,空氣供給裝置70以及電源113等系統的工作 。控制器180與電腦190對接，電腦190設有監視器191，打 印表機等輸出裝置以及微處理器、鍵盤等輸入裝置。電腦 190可通過由玻璃基板1的輸送線1〇以及生產線構成的多台 電腦和網路構成。 15 下面，對具有所述結構的本發明玻璃基板的檢查系統 的工作進行說明。 首先，參見第1以及2圖，若檢查者操縱控制面板114設 定檢查模式，則使主輸送裝置50的前輸送機52對準玻璃基 板1的輸送位置P1。若驅動前輸送機52的馬達52b並使驅動 20 皮帶輪52c轉動，則使掛繞在驅動皮帶輪52c以及從動皮帶 輪52d上的皮帶52e運動，將沿設置在主輸送裝置50上游的 輸送線10輸送的玻璃基板1輸送至與輸送位置？1對準的前 輪送機52的皮帶52e上。 參見第1，2，6-A以及6-B圖，若驅動空氣供給裝置70 21 200412430 的吹氣裝置71，將空氣供給至氣浮裝置56的吹氣管57，則 通過吹氣管57的喷嘴孔57a向前傾斜邊緣51的前方喷出空 氣。通過吹氣管57的噴嘴孔57a喷射的空氣力，使通過前輸 送機52的皮帶52e輸送的玻璃基板1從前傾斜邊緣51浮動例 5 如大約〇.5mm。因此，可在不産生物理接觸的狀態下輸送 除玻璃基板1下端以外的前面、後面、上端、左右側端，從 而能夠有效地防止因物理接觸而在玻璃基板丨中産生的缺 陷，例如刮痕、裂紋等。另外，由於前傾斜邊緣51具有大 約5°左右的斜度，因此在前輸送機52工作時，由於能夠以 10 傾斜狀態輸送玻璃基板1，所以能夠有效地防止玻璃基板！ 從前輸送機52的皮帶52e落下。 接著，如第1圖所示，通過前傳感裝置53的第1感測器 55a檢測放置在前輸送機52的皮帶52e上輸送的玻璃基板1 的輸送方向的頂端，第1感測器55a輸出高信號並將其輸入 15 控制器180中。控制器180根據從第1感測器55a輸入的高信 號控制前輸送機52的馬達52b，從而降低皮帶52e的運行速 度。通過前傳感裝置53的第2感測器55b檢測裝載在前輸送 機52的皮帶52e上並由其輸送的玻璃基板1的輸送方向頂 端，第2感測器55b輸出高信號並將其輸入控制器180中。控 20 制器180根據從第2感測器5 5b輸入的高信號使前輸送機52 的馬達52b停止，從而使玻璃基板1停止在前傾斜邊緣51的 規定位置，即玻璃基板1的上端以及左右側端不被前傾斜邊 緣51覆蓋的位置處，從而結束玻璃基板1的載入。另一方 面，在檢查者操縱控制面板114來設定通過模式(Pass mode) 22 200412430 的情況下，通過控制器180的控制不使前輸送機52的馬達 52b停止，繼續驅動以將玻璃基板1輸送至設置在主輸送裝 置50下游的輸送線10。 參見第2〜4圖’在主輸送裝置5〇的前輸送機52上，結 5 束玻璃基板1的載入後’右檢查者麵縱控制面板114以驅動γ 軸線性運動促動器40的伺服電機41，則滾珠軸套43沿通過 伺服電機41的驅動而轉動的絲桿42作螺旋運動，如第3圖中 箭頭“A”所示’使移動架30從輸送位置pi移動至檢查位置 P2。此處，線性運動導向件45的滑動件45b—邊沿導執45a 10滑動，一邊導引移動架30的輸送。若通過第2感測器48b探 測到傳感裝置46的探測檔塊47，則控制器180使γ軸線性運 動促動為、40的伺服電機41停止。若使γ軸線性運動促動器4〇 的伺服電機41停止，則主輸送裝置50的前輸送機52對準檢 查位置P2，次輸送裝置60的後輸送機62對準輸送位置P1。 15 如第35以及6圖所示，驅動與玻璃基板丨的輸送位置 P1對準的後輸送機62的馬達62b以使繞掛在驅動皮帶輪62c 和《動皮帶輪62d上的皮帶62e運行，在通過吹氣管67的喷 嘴孔67a噴出空氣的檢查模式的設定狀態下，將沿玻璃基板 1的輸送線10輸送的玻璃基板丨運送至後輸送機62的皮帶 20 6以上。控制器180根據從後傳感裝置63的第丨以及第2感測 器65a，65b輸入的高信號控制馬達62的驅動，使玻璃基板丄 停止在後傾斜邊緣61的規定位置處。另一方面，在通過模 式狀態下，通過控制器180的控制不使後輸送機62的馬達 62b停止，繼續驅動以將玻璃基板丨輸送至設置在次輸送裝 23 200412430 置60下游的輸送線10。這樣’即使在玻璃基板丨的檢查工作 中，由於仍能通過次輸送裝置60持續保持玻璃基板丨的流 動，因此，能夠提高玻璃基板1的生産率。 參見第1，3，9-B以及10圖，檢查者對裝載在主輸送裝 5 置50的前輸送機52上並被運送至檢查位置p2的玻璃基板1 的缺陷進行檢查。首先，檢查者爲了發現玻璃基板1的缺 陷，如第9-B圖所示，利用快門104完全遮斷形成於快門機 構103的後掩護102上的投射窗102a，使形成玻璃基板1的後 方形成於黑暗的背景視野中。檢查者點亮第1以及第2鹵素 10 燈111，112以便使前光投射至玻璃基板1上，從而發現通過 第1以及第2鹵素燈111，112的光從玻璃基板1投影出的異 物、污物、刮痕、斜面碎屑、切屑、裂紋等缺陷。由於通 過高輝度的第1鹵素燈111以及第2鹵素燈112清楚地照射出 玻璃基板1的缺陷，因此，檢查者能夠容易地發現玻璃基板 15 1的缺陷。 在通過第2照明裝置110的第1鹵素燈111以及第2鹵素 燈112進行玻璃基板1的檢查的情況下，檢查者一邊使正交 座標運動裝置120相對於玻璃基板1沿X軸方向以及Z軸方 向作正交座標運動，一邊通過第li素燈ill以及第2i素燈 20 112的光發現玻璃基板1的缺陷。若檢查者使支架143沿X軸 方向運動，則上部以及下部滑動件133、134沿X軸線性運動 導引件130的上部以及下部導執131，132滑動，與上部以及 下部滑動件133、134相連的運動標桿135—邊沿X軸方向運 動，一邊允許支架143的X軸方向運動。 24 200412430 如第10圖所示，若檢查者使支架143沿Z軸方向運動， 則一邊使滑動件142沿Z軸線性運動導引件140的導軌141運 動’ 一邊允許支架143的Z軸方向運動。因此，檢查者通過 正交座標運動裝置12〇，使第2照明裝置no的第1鹵素燈in 5以及第2鹵素燈112移動至任意的位置處，從而能夠簡單有 效地檢查玻璃基板1。此處，通過線形第1鹵素燈111對玻璃 基板1的較寬區域進行掃描以便能夠簡單對其進行檢查，通 過圓形第2 _素燈112能夠詳細地檢查玻璃基板1的局部區 域0 10 另一方面，通過檢查者的牽引力，如第10圖中箭頭“B，， 所不，根據支架143的上升或下降，使通過鋼絲151與支架 143相連的汽缸153的活塞桿15儿前進或後退。在檢查者除 去支架143的牽引力的情況下，調節器154根據活塞桿153b 的丽進或後退控制汽缸153的空氣壓力，以便約束活塞桿 15 153b的動作，由此固定掛在鋼絲151上的支架143。因此， 铋查者在行動上不會受到制約，從而能夠自由地通過第工鹵 素燈111以及第素燈112進行對玻璃基板1的檢查。另外 ，通過與汽缸153的活塞桿1531)前進或後退保持一致，調節 杰154控制汽缸153的空氣壓力，能夠順利地進行由檢查者 2〇牽引産生的支架143的上升動作以及下降動作。 接著，核查者若通過第素燈111以及第2幽素燈112 的照明發現缺陷，則熄滅第1鹵素燈111以及第2鹵素燈 112，點亮螢光燈ι〇1。若驅動快門機構1〇3的汽缸1〇5並使 體105a/o活基桿i〇5b運動，則如第9·Α圖中箭頭“c，，所 25 200412430 示’與缸體105a同時運動的快門104的投射窗l〇4a與後掩護 102的投射窗i〇2a對準，使通過快門1〇4遮斷的後掩護1〇2的 投射窗102a全部打開。通過後掩護1〇2的投射窗i〇2a，螢光 燈102的光作爲背照光投射至玻璃基板1上，檢查者利用眼 5睛觀察來檢查由螢光燈1〇1的光投影出的缺陷，判斷滿足玻 璃基板1的品質的合格品或不合格品。一般情況下，若通過 第1鹵素燈111以及第2鹵素燈112的照明發現的玻璃基板1 的缺陷，例如異物的含有通過螢光燈1〇1的照明而産生變形 並被投射出，則檢查者判定爲不合格品，若異物的含有未 10變形，按原樣投射，則判定爲合格品。另外，若通過螢光 燈101的照明發現污物、刮痕、斜面碎屑、切屑、裂紋等缺 陷，則判定爲不合格品，若未發現缺陷，則判定爲合格品。 如第1，2以及4圖所示，檢查者在將玻璃基板丨的檢查 結果輸入電腦190之後，通過控制面板114的操作驅動γ軸線 15性運動促動器4〇的伺服電機41，使檢查位置P2的移動架3〇 移動至輸送位置P1。若通過第！感測器48b檢測到傳感裝置 46的探測檔塊47 ’則控制器18〇使γ軸線性運動促動器4〇的 伺服電機41停止。若使Y軸線性運動促動器4〇的伺服電機41 停止，則主輸送裝置50的前輸送機52與輸送位置P1對準。 2〇若通過前輸送機52的馬達52b的驅動，使驅動皮帶輪52c轉 動，則繞掛在驅動皮帶輪52c和從動皮帶輪52d上的皮帶52e 運行，從而在設置於主輸送裝置50下游的輸送線1〇上輸送 玻璃基板1。在設置於主輸送裝置5〇下游的輸送線1〇上，從 輸送線10上除去通過電腦190的資料判定爲不合格品的玻 26 200412430 璃基板1，並對判定爲合格品的玻璃基板1進行包裝。之後， 設置在本發明的檢查系統上游的檢查系統的檢查者或生產 線的作業者能夠以實際時間確認在整個網路中共有的電腦 190的資料以便立刻糾正玻璃基板1的檢查誤差或製造不 5良’結果，能夠製造出高品質的玻璃基板1。As shown in FIGS. 1, 10 and 11, the first halogen lamp 111 of the second lighting device 110 can be mounted on the bracket 143 of the positive 10 parent seat “movement device 120” through the first axis element 160 in a multi-degree of motion. The first shaft element 160 is rotatably mounted vertically on the first shaft 161 on the bracket 143, and can be rotated horizontally to the left and right. The second shaft 162 on the upper end of the first shaft 161 is rotatably installed on the first shaft. The third shaft 163 at the end of the shaft 162 and the fourth shaft 164 rotatably mounted on the end of the third shaft 163 and fixed with the 苐 1 halogen lamp 111. The inspector can make the first to the first 15th shaft elements 160 to The fourth axis 161 to 164 rotates and adjusts the lighting position of the first halogen lamp ^ to a position suitable for inspection. As shown in FIGS. 1, 10, and 12, the second halogen lamp 112 of the second lighting device 110 passes through the first The two-axis element 170 can be mounted on the bracket 143 of the orthogonal coordinate motion device 120 in a multi-degree-of-freedom motion. The second axis element 170 is a first axis 171 which is vertically mounted on the bracket M3 and can be rotated 20 places, and can be rotated left and right The ground level I is the second axis 172 above the first axis 171, and the rotatable tilt sound at the end of the second axis 172 It consists of three axes 173. The inspector can rotate the first to third axes 171 to 173 of the second axis element 170 and adjust the lighting position of the second halogen lamp 112 to the optimal position suitable for inspection. In this embodiment In the bracket 143 of the 2004200430 orthogonal coordinate motion device 120, a ccd camera (charge-coupled device camera) that obtains an image of a defect generated by a glass substrate and projected by the illumination of the 100th illumination device 100 is provided. A microscope that magnifies the defect image. The defect image obtained by the CCD camera is processed by a computer program, so that the glass substrate 1 can be divided into qualified and unqualified products. As a CCD camera, it is best to use a white light-emitting diode. As shown in FIG. 2, the inspection system of the present invention is provided with a controller 18 of a control device provided at the inspection position P2 for system control, and the controller 180 controls the γ-axis linear motion through programmable logic control. Actuator 40, 10 times the operation of conveying device 60, air supply device 70, and power supply 113. The controller 180 is connected to a computer 190, which has a monitor 191 and a printer And other input devices such as microprocessors, keyboards, etc. The computer 190 may be constituted by a plurality of computers and networks including a transmission line 10 and a production line of the glass substrate 1. 15 Next, the glass of the present invention having the above-mentioned structure will be described. The operation of the substrate inspection system will be described. First, referring to FIGS. 1 and 2, if the inspector manipulates the control panel 114 to set the inspection mode, the front conveyor 52 of the main transport device 50 is aligned with the transport position P1 of the glass substrate 1. When the motor 52b of the front conveyor 52 is driven and the drive 20 pulley 52c is rotated, the belt 52e wound on the driving pulley 52c and the driven pulley 52d is moved, and the conveyor 52e is conveyed along the conveying line 10 provided upstream of the main conveyor 50 Glass substrate 1 is transported to and from the transport position? 1 is aligned on the belt 52e of the front carousel 52. Referring to FIGS. 1,2, 6-A, and 6-B, if the blowing device 71 of the air supply device 70 21 200412430 is driven to supply air to the blowing pipe 57 of the air floating device 56, the nozzle hole of the blowing pipe 57 is passed through 57a blows air in front of the forward inclined edge 51. The air force sprayed through the nozzle hole 57a of the air blowing pipe 57 causes the glass substrate 1 conveyed by the belt 52e of the front conveyor 52 to float from the front inclined edge 51, for example, about 0.5 mm. Therefore, the front, back, upper, and left and right side ends other than the lower end of the glass substrate 1 can be conveyed without physical contact, so that defects such as scratches on the glass substrate due to physical contact can be effectively prevented , Cracks, etc. In addition, since the front inclined edge 51 has a slope of about 5 °, the glass substrate 1 can be conveyed in an inclined state when the front conveyor 52 is in operation, so that the glass substrate can be effectively prevented! The belt 52e of the front conveyor 52 is dropped. Next, as shown in FIG. 1, the first sensor 55 a of the front sensor device 53 detects the top end of the glass substrate 1 in the conveying direction placed on the belt 52 e of the front conveyor 52, and the first sensor 55 a outputs High signal and input it into 15 controller 180. The controller 180 controls the motor 52b of the front conveyor 52 based on the high signal input from the first sensor 55a, thereby reducing the running speed of the belt 52e. The second sensor 55b of the front sensor device 53 detects the top end of the glass substrate 1 loaded on the belt 52e of the front conveyor 52 and conveyed by the second sensor 55b. The second sensor 55b outputs a high signal and inputs it to the control.器 180 中。 In the device 180. The controller 20 stops the motor 52b of the front conveyor 52 according to the high signal input from the second sensor 5 5b, thereby stopping the glass substrate 1 at a predetermined position of the front inclined edge 51, that is, the upper end of the glass substrate 1 and At positions where the left and right side ends are not covered by the front inclined edge 51, the loading of the glass substrate 1 is ended. On the other hand, when the inspector manipulates the control panel 114 to set the pass mode 22 200412430, the control of the controller 180 does not stop the motor 52b of the front conveyor 52 and continues driving to convey the glass substrate 1 To the transport line 10 provided downstream of the main transport device 50. Referring to FIGS. 2 to 4 'on the front conveyor 52 of the main conveying device 50, after the loading of 5 bundles of glass substrates 1' is performed, the right inspector faces the vertical control panel 114 to drive the y-axis linear motion actuator 40 As for the servo motor 41, the ball bushing 43 makes a helical movement along the screw rod 42 which is driven by the drive of the servo motor 41. As shown by the arrow “A” in FIG. P2. Here, the slider 45 b of the linear motion guide 45-the edge guide 45 a 10 slides while guiding the conveyance of the moving frame 30. When the detection stopper 47 of the sensor device 46 is detected by the second sensor 48b, the controller 180 stops the servo motor 41 whose γ axis linear motion is 40. When the servo motor 41 of the γ-axis linear motion actuator 40 is stopped, the front conveyor 52 of the main conveyor 50 is aligned with the inspection position P2, and the rear conveyor 62 of the secondary conveyor 60 is aligned with the conveyor position P1. 15 As shown in FIGS. 35 and 6, the motor 62b of the rear conveyor 62 aligned with the conveying position P1 of the glass substrate 丨 is driven to run around the belt 62e on the driving pulley 62c and the moving belt 62d. In the setting state of the inspection mode in which the nozzle hole 67a of the air blowing pipe 67 ejects air, the glass substrate 丨 conveyed along the conveyance line 10 of the glass substrate 1 is conveyed to the belt 20 6 of the rear conveyor 62 or more. The controller 180 controls the driving of the motor 62 based on the high signals input from the first and second sensors 65a and 65b of the rear sensor 63, so that the glass substrate 丄 stops at a predetermined position of the rear inclined edge 61. On the other hand, in the pass-through mode, the control of the controller 180 does not stop the motor 62b of the rear conveyor 62, and continues driving to convey the glass substrate to the conveying line 10 provided downstream of the secondary conveying device 23 200412430 60 . In this way, even when the glass substrate 丨 is inspected, the flow of the glass substrate 丨 can be continuously maintained by the sub-conveyor 60, so that the productivity of the glass substrate 1 can be improved. Referring to Figs. 1, 3, 9-B, and 10, the inspector inspects the defects of the glass substrate 1 loaded on the front conveyor 52 of the main conveyance device 50 and transported to the inspection position p2. First, in order to find defects of the glass substrate 1, as shown in FIG. 9-B, the inspector completely blocks the projection window 102a formed on the rear cover 102 of the shutter mechanism 103 with the shutter 104, so that the rear of the glass substrate 1 is formed. On a dark background. The inspector lights up the first and second halogen 10 lamps 111 and 112 so that the front light is projected onto the glass substrate 1 and finds foreign objects projected from the glass substrate 1 by the light passing through the first and second halogen lamps 111 and 112, Defects such as dirt, scratches, bevel chips, chips, cracks, etc. Since the defects of the glass substrate 1 are clearly irradiated by the high-luminance first halogen lamp 111 and the second halogen lamp 112, the inspector can easily find the defects of the glass substrate 151. When the glass substrate 1 is inspected by the first halogen lamp 111 and the second halogen lamp 112 of the second lighting device 110, the inspector makes the orthogonal coordinate movement device 120 with respect to the glass substrate 1 along the X-axis direction and Z Defects of the glass substrate 1 were discovered while moving in the axis direction with orthogonal coordinates while passing through the light of the li prime lamp ill and the 2i prime lamp 20 112. When the examiner moves the bracket 143 in the X-axis direction, the upper and lower sliders 133 and 134 linearly move the upper and lower guides 131 and 132 of the guide 130 along the X-axis and slide with the upper and lower sliders 133 and 134. The connected sports rods 135—while moving in the X-axis direction, allow the holder 143 to move in the X-axis direction. 24 200412430 As shown in FIG. 10, if the examiner moves the bracket 143 in the Z-axis direction, the slider 142 is allowed to move in the Z-axis direction of the bracket 143 while moving the slider 142 along the Z-axis linear movement guide 140 of the guide 140. . Therefore, the inspector can move the first halogen lamp in 5 and the second halogen lamp 112 of the second illuminating device no to the arbitrary positions by the orthogonal coordinate movement device 120, and the glass substrate 1 can be easily and efficiently inspected. Here, a wide area of the glass substrate 1 is scanned by the linear first halogen lamp 111 so that it can be easily inspected, and a partial area of the glass substrate 1 can be inspected in detail by the circular second lamp 112. On the one hand, the piston rod 15 of the cylinder 153 connected to the bracket 143 through the wire 151 is moved forward or backward by the traction force of the inspector, as indicated by the arrow “B” in FIG. When the inspector removes the traction of the bracket 143, the adjuster 154 controls the air pressure of the cylinder 153 according to the forward or backward movement of the piston rod 153b to restrain the movement of the piston rod 15 153b, thereby fixing the bracket hanging on the wire 151 143. Therefore, the bismuth inspector will not be restricted in action, and can freely inspect the glass substrate 1 through the first halogen lamp 111 and the second lamp 112. In addition, the piston rod 1531 is forwarded with the cylinder 153) Or the backward movement is consistent, and the air pressure of the control cylinder 153 is controlled by the adjustment 154, which can smoothly perform the ascending and descending actions of the bracket 143 produced by the inspector 20 traction. Next, if the inspector finds a defect through the illumination of the first and second lamp 111 and 112, the first halogen lamp 111 and the second halogen lamp 112 are turned off and the fluorescent lamp ι01 is turned on. If the shutter mechanism 1 is driven The cylinder 105 of 〇3 moves the 105a / o base rod i05b, as shown by the arrow "c" in Fig. 9A, so 25 200412430 shows the projection of the shutter 104 moving at the same time as the cylinder 105a. The window 104a is aligned with the projection window 102a of the rear cover 102, so that the projection window 102a of the rear cover 102 blocked by the shutter 104 is fully opened. The light from the fluorescent lamp 102 is projected on the glass substrate 1 as a back light through a projection window i02a of the rear cover 102, and the inspector inspects the light projected by the light of the fluorescent lamp 101 with his eyes. Defects are judged as acceptable products or defective products that satisfy the quality of the glass substrate 1. In general, if a defect of the glass substrate 1 discovered by the illumination of the first halogen lamp 111 and the second halogen lamp 112, for example, a foreign object is deformed and projected by the illumination of the fluorescent lamp 101, the inspection is performed. This is judged as a defective product, and if the foreign matter content is not deformed and projected as it is, it is judged as a defective product. In addition, if defects such as dirt, scratches, bevel chips, chips, and cracks are found by the illumination of the fluorescent lamp 101, it is determined as a defective product, and if no defect is found, it is determined as a defective product. As shown in FIGS. 1, 2 and 4, after the inspector inputs the inspection result of the glass substrate 丨 into the computer 190, the inspector drives the servo motor 41 of the γ-axis 15 sexual motion actuator 40 through the operation of the control panel 114 to perform the inspection. The moving frame 30 at the position P2 moves to the conveying position P1. If you pass the first! The sensor 48b detects the detection stop 47 'of the sensor device 46, and the controller 18 stops the y-axis linear motion actuator 40's servo motor 41. When the servo motor 41 of the Y-axis linear motion actuator 40 is stopped, the front conveyor 52 of the main conveyor 50 is aligned with the conveyance position P1. 20 If the driving pulley 52c is rotated by the drive of the motor 52b of the front conveyor 52, the belt 52e is hung around the driving pulley 52c and the driven pulley 52d, so that the conveyor 52 is located downstream of the main conveyor 50. 10 conveys the glass substrate 1. On the conveying line 10 provided downstream of the main conveying device 50, the glass substrate 1 2004 200430 which is determined as a defective product by the data of the computer 190 is removed from the conveying line 10, and the glass substrate 1 which is determined as a qualified product is removed. Packing. After that, the inspector or the operator of the production line of the inspection system installed upstream of the inspection system of the present invention can confirm the data of the computer 190 shared in the entire network in real time in order to immediately correct the inspection errors or manufacturing errors of the glass substrate 1. As a result, a high-quality glass substrate 1 can be manufactured.

參見第1以及2圖，在通過本發明的檢查系統改變並檢 查玻璃基板1的尺寸時，配合玻璃基板丨的尺寸，進行改變 氣浮裝置56的吹氣管57以及導引裝置80位置的變換工作。 若通過氣滑動式汽缸58的驅動使活塞桿58b前進或後退，則 10與活塞桿58b相連的滑動件58d沿滑動導執58c滑動，同時使 氣浮裝置56的吹氣管57上升或下降，並移動至適於玻璃基 板1的浮動的最佳位置。Referring to FIGS. 1 and 2, when the size of the glass substrate 1 is changed and inspected by the inspection system of the present invention, in accordance with the size of the glass substrate 丨, the work of changing the position of the air blowing pipe 57 of the air floatation device 56 and the position of the guide device 80 is performed. . If the piston rod 58b is moved forward or backward by the drive of the air-sliding cylinder 58, the slider 58d connected to the piston rod 58b slides along the slide guide 58c, and at the same time, the blowing pipe 57 of the air-floating device 56 is raised or lowered, and Move to the optimal position suitable for floating of the glass substrate 1.

參見第1 ’ 2以及7圖，若通過氣滑動式汽缸85的驅動使 活塞桿85b前進或後退，則與活塞桿85b相連的滑動件85d沿 15…動導軌85c滑動，同時使安裝在導引裝置80的支承桿81上 的圓錐輥84上升或下降，並移動至適於玻璃基板丨浮動的最 仏位置。由於圓錐輥84支承了大型玻璃基板丨的上端，因 此，能夠穩定並維持通過由吹氣管57的噴射産生的大型玻 璃基板1的序動以及輸送。這樣，通過配合玻璃基板i的尺 20寸改變氣洋裝置56的吹氣管57以及導引裝置.置的變換 工作能夠非常簡單、有效地進行向靈活性生産祕的轉換。 如上所述，雖然利用最佳實施例對本發明進行了說 明，但是本領域技術人員應理解：在不脫離本發明申請專 利範圍的情況下，可作出各種改進。 27 200412430 t圖式簡單說明3 第1圖爲顯示涉及本發明的檢查系統結構的主視圖。 第2圖爲側視圖，其顯示了在涉及本發明的檢查系統中 ，使主輸送裝置與輸送位置直線對準的結構。 5 第3圖爲側視圖，其顯示了在涉及本發明的檢查系統中 ，使次輸送裝置與輸送位置直線對準的結構。 第4圖爲俯視圖，其顯示了在涉及本發明的檢查系統中 ，Y軸線性運動促動器的結構。 第5圖爲顯示在涉及本發明的檢查系統中，次輸送裝置 10 結構的主視圖。 第6-A圖爲顯示在涉及本發明的檢查系統中，氣浮裝置 以及後氣浮裝置的吹氣管的主視圖。 第6-B圖爲顯示在涉及本發明的檢查系統中，氣浮裝置 以及後氣浮裝置的吹氣管的剖視圖。 15 第7圖爲部分顯示在涉及本發明的檢查系統中，導引裝 置結構的剖視圖。 第8圖爲部分顯示在涉及本發明的檢查系統中，導引裝 置動作的俯視圖。 第9-A圖爲用於說明在涉及本發明的檢查系統中，第1 20 照明裝置的螢光燈以及快門機構動作的剖視圖。 第9-B圖爲用於說明在涉及本發明的檢查系統中，第1 照明裝置的螢光燈以及快門機構動作的剖視圖。 第10圖爲部分顯示在涉及本發明的檢查系統中，第2 照明裝置以及正交座標運動裝置主視圖。 28 200412430 第11圖爲部分顯示在涉及本發明的檢查系統中，第1鹵 素燈以及第1軸元件的仰視圖。 第12圖爲顯示在涉及本發明的檢查系統中，第2鹵素燈 以及第2軸元件的結構的俯視圖。 5 【圖式之主要元件代表符號表】 1…玻璃基板 48c…第3感測器 10…輸送線 49a…第1限位元開關 11…傾斜邊緣 49b…第2限位元開關 12…傳送帶 50…主輸送裝置 13…吹氣管 51…前傾斜邊緣 20…底架 52…前輸送裝置 30…移動架 52a，62a…安裝架 40…促動器 52b，62b…馬達 41…伺服電機 52c，62c…驅動皮帶輪 42…絲桿 52d，62d···從動皮帶輪 43…滾珠套軸 52e，62e…支承皮帶 44…導引支架 52f，62f···支承導軌 45…導向件 53…前傳感裝置 45a…導執 54,64…安裝托架 45b···滑動件 55a，65a…第1感測器 46…傳感裝置 55b，65b…第2感測器 47…探測檔塊 56…前氣浮裝置 48a…第1感測器 57,67…吹氣管 48b…第2感測器 57a，67a…喷嘴孔 29 200412430 58…氣滑動式汽缸 93…汽缸 58a···缸體 93a···缸體 58b…活塞桿 93b…活塞桿 58c…導軌 94…樞軸 58d···滑動件 95…枢轴 60…次輸送裝置 100…檢查糸統 61…後傾斜邊緣 101…螢光燈 62…後輸送裝置 102…後掩護 63…後傳感裝置 102a…投射窗 66…後氣浮裝置 103…快門機構 70…空氣供給裝置 104…快門 71…吹氣裝置 104a···投射窗 80…導引裝置 105···汽缸 81…支承桿 105a…缸體 82…轴 105b…活塞桿 83…轴承 110···第2照明裝置 84…圓錐幸昆 111···第1鹵素燈 85…氣滑動式汽缸 112···第2鹵素燈 85b…活塞桿 113…電源 85c…導軌 114…控制面板 85d···滑動件 120…正交座標運動裝置 90…夾緊裝置 130···Χ軸線性運動導引件 91…枢轴 131…上部導軌 92…機械手 132···下部導執 30 200412430 133…上部滑動件 154…調節器 134···下部滑動件 161…第1轴 135…運動標桿 162…第2軸 140···Ζ軸線性運動導引件 163…第3軸 141…導執 164…第4轴 142···滑動件 170…第2軸元件 143…支架 171…第1軸 150···固定裝置 172…第2軸 151…鋼絲 173…第3軸 152···皮帶輪 180…控制器 153…汽缸 190…電腦 153a···缸體 191…監視器 153b…活塞桿 31Referring to FIGS. 1 '2 and 7, if the piston rod 85 b is moved forward or backward by the driving of the air-sliding cylinder 85, the slider 85 d connected to the piston rod 85 b slides along the 15 ... moving guide 85 c, and at the same time makes the mounting on the guide The conical roller 84 on the support rod 81 of the device 80 rises or falls, and moves to the highest position suitable for the glass substrate to float. Since the tapered roller 84 supports the upper end of the large-sized glass substrate 丨, it is possible to stabilize and maintain the sequential movement and transportation of the large-sized glass substrate 1 generated by the ejection of the blow pipe 57. In this way, by changing the size of the blower pipe 57 and the guide device of the gas ocean device 56 by matching the size 20 inches of the glass substrate i, the conversion to the flexible production method can be performed very simply and efficiently. As described above, although the present invention has been described using the preferred embodiment, those skilled in the art will understand that various modifications can be made without departing from the scope of the patent application of the present invention. 27 200412430 tSchematic description 3 Figure 1 is a front view showing the structure of an inspection system according to the present invention. Fig. 2 is a side view showing a configuration in which the main conveying device and the conveying position are aligned linearly in the inspection system according to the present invention. 5 FIG. 3 is a side view showing a configuration in which the secondary conveying device and the conveying position are aligned linearly in the inspection system according to the present invention. Fig. 4 is a plan view showing the structure of the Y-axis linear motion actuator in the inspection system according to the present invention. Fig. 5 is a front view showing the structure of the secondary conveying device 10 in the inspection system according to the present invention. Fig. 6-A is a front view showing the air blowing pipe of the air floatation device and the rear air floatation device in the inspection system according to the present invention. Fig. 6-B is a cross-sectional view showing a blow pipe of an air floatation device and a rear air floatation device in the inspection system according to the present invention. 15 FIG. 7 is a sectional view partially showing the structure of a guide device in the inspection system according to the present invention. Fig. 8 is a plan view partially showing the operation of the guide device in the inspection system according to the present invention. Fig. 9-A is a cross-sectional view for explaining the operation of the fluorescent lamp and the shutter mechanism of the 120th illuminating device in the inspection system according to the present invention. Fig. 9-B is a cross-sectional view for explaining the operation of the fluorescent lamp and the shutter mechanism of the first illuminating device in the inspection system according to the present invention. Fig. 10 is a front view partially showing a second illuminating device and an orthogonal coordinate motion device in the inspection system according to the present invention. 28 200412430 Fig. 11 is a bottom view showing a first halogen lamp and a first shaft element in an inspection system according to the present invention. Fig. 12 is a plan view showing the configuration of a second halogen lamp and a second axis element in the inspection system according to the present invention. 5 [Representative symbols for main components of the figure] 1 ... glass substrate 48c ... third sensor 10 ... conveying line 49a ... first limit switch 11 ... inclined edge 49b ... second limit switch 12 ... conveyor 50 ... main conveying device 13 ... blowing pipe 51 ... front inclined edge 20 ... underframe 52 ... front conveying device 30 ... moving frames 52a, 62a ... mounting frame 40 ... actuators 52b, 62b ... motors 41 ... servo motors 52c, 62c ... Drive pulley 42 ... Screws 52d, 62d ... Driven pulley 43 ... Ball sleeve shafts 52e, 62e ... Support belt 44 ... Guide bracket 52f, 62f ... Support guide 45 ... Guide 53 ... Front sensor 45a ... Guides 54, 64 ... Mounting brackets 45b ... Sliders 55a, 65a ... First sensor 46 ... Sensor device 55b, 65b ... Second sensor 47 ... Detection stop 56 ... Front air-float device 48a … The first sensor 57 and 67… the blow pipe 48b… the second sensor 57a and 67a… the nozzle hole 29 200412430 58… the air-sliding cylinder 93… the cylinder 58a ··· the cylinder block 93a ··· the cylinder block 58b… Piston rod 93b ... Piston rod 58c ... Rail 94 ... Pivot 58d ... Slider 95 ... Pivot 60 ... times Sending device 100 ... inspection system 61 ... rear slanting edge 101 ... fluorescent lamp 62 ... rear conveying device 102 ... rear cover 63 ... rear sensing device 102a ... projection window 66 ... rear air floating device 103 ... shutter mechanism 70 ... air supply Device 104 ... Shutter 71 ... Air blowing device 104a ... Projection window 80 ... Guide device 105 ... Cylinder 81 ... Support rod 105a ... Cylinder block 82 ... Shaft 105b ... Piston rod 83 ... Bearing 110 ... Second lighting Device 84 ... conical Xingkun 111 ... 1st halogen lamp 85 ... pneumatic sliding cylinder 112 ... 2nd halogen lamp 85b ... piston rod 113 ... power supply 85c ... guide rail 114 ... control panel 85d ... slider 120 ... Orthogonal coordinate movement device 90 ... clamping device 130 ... X-axis linear motion guide 91 ... pivot 131 ... upper guide 92 ... manipulator 132 ... lower guide 30 200412430 133 ... upper slide 154 ... adjustment 134 ... Lower slider 161 ... 1st shaft 135 ... Movement benchmark 162 ... 2nd shaft 140 ... Z axis linear motion guide 163 ... 3rd shaft 141 ... Guidance 164 ... 4th shaft 142 ... · Slider 170 ... Second shaft element 143 ... Support 171 ... First shaft 150 ··· Fixing device 172 ... Second shaft 151 ... Wire 173 ... Third shaft 152 ... Pulley 180 ... Control unit 153 ... Cylinder 190 ... Computer 153a ... Cylinder block 191 ... Monitor 153b ... Piston rod 31

Claims (1)

200412430 拾、申請專利範圍： 1·玻璃基板的檢查系統，其特徵在於，該系統設有： 以直線狀設置在玻璃基板的輸送線上的底架； 移動架，在所述底架上部，其可移動地被設置在與 5 所述玻璃基板的輸送線直線對準的所述玻璃基板的輸 送位置和檢查位置之間；200412430 Patent application scope: 1. The inspection system for glass substrates, characterized in that the system is provided with: a bottom frame that is linearly arranged on the glass substrate conveying line; a moving frame, on the upper part of the bottom frame, which can Movably provided between a conveyance position of the glass substrate and an inspection position aligned linearly with the conveyance line of the glass substrate; 驅動裝置，其在所述玻璃基板的輸送位置和檢查位 置之間使所述移動架移動； 主輸送裝置’該裝置被設置在所述移動架的前方， 10 以便通過所述移動架的運動能分別與所述玻璃基板的 輸送位置和檢查位置直線對準，並且在所述玻璃基板的 輸送位置處，從所述玻璃基板的輸送線接受並輸送所述 玻璃基板； 次輸送裝置，該裝置被設置在所述移動架的後方， 15 以便通過所述移動架的運動能與所述玻璃基板的輸送A driving device that moves the moving frame between a conveying position of the glass substrate and an inspection position; a main conveying device, which is provided in front of the moving frame, 10 so as to pass the kinetic energy of the moving frame Straightly align with the glass substrate transport position and inspection position, respectively, and at the glass substrate transport position, receive and transport the glass substrate from the glass substrate transport line; a secondary transport device, the device is 15 is arranged behind the moving frame so that the movement of the moving frame and the conveyance of the glass substrate 位置直線對準，並且在所述玻璃基板的輸送位置處，從 所述玻璃基板的輸送線接受並輸送所述玻璃基板； 弟1知、明裝置’其設置在所述主輸送裝置一側且用 於照亮所述玻璃基板。 20 2·如申請專利範圍第1項所述的玻璃基板的檢查系統，其 特徵在於··所述驅動裝置由使所述移動架作直線往復運 動的γ軸線性運動促動器構成，所述γ轴線性運動促動 為’由被安裝在所述底架上以提供驅動力的伺服電機、 可通過所述伺服電機的驅動而可旋轉地被安裝的絲桿 32 200412430 、沿所述絲桿可螺旋運動地被安裝在所述移動架上的滾 珠軸套、相對於所述底架導引所述移動架的直線往復運 動的線性運動導向件構成。 3.如申請專利範圍弟1項所述的破璃基板的檢查系統，其 5 特徵在於：所述主輸送裝置由以下部件構成，即，傾斜 設置在所述移動架前方的前傾斜邊緣；以能在前傾斜邊 緣下部、支承立輸送所述玻璃基板下端的方式設置的前 輪送機；從所述前傾斜邊緣、通過空氣的喷射使所述玻 璃基板浮動的氣浮裝置。 10 4.如申請專利範圍第3項所述的玻璃基板的檢查系統，其 特徵在於：所述氣浮裝置由多根吹氣管和多個氣滑動式 汽缸構成，其中’所述多根吹氣管沿所述玻璃基板的輸 送方向水平設置在所述前傾斜邊緣的前方且沿長度方 向形成多個在所述玻璃基板的後面喷出空氣的喷嘴 15 孔，所述多個氣滑動式汽缸用於使所述多根吹氣管分別 相對於所述前傾斜邊緣上下升降運動。 5·如申請專利範圍第3項所述的玻璃基板的檢查系統，其 特徵在於：還設有第1感測器以及第2感測器，這些感測 器沿所述玻璃基板的輸送方向設置在所述主輸送裝置 20 的前傾斜邊緣上，以便能夠檢測出所述玻璃基板的輸送 從而控制所述前輸送機的運動。 6·如申請專利範圍第3或4項所述的玻璃基板的檢查系 統，其特徵在於：其還設有導引裝置，所述導引裝置能 夠在所述前傾斜邊緣的上部，支承並導引所述玻璃基板 33 200412430 的上端。 7·如申請專利範圍第6項所述的玻璃基板的檢查系統，其 特徵在於：由支承桿，多個圓錐輥以及多個氣滑動式汽 缸構成，其中，所述支承桿可升降運動地沿所述玻璃基 5 板的輸送方向被水平設置在所述前傾斜邊緣上部，所述 多個圓錐輥能夠在所述支承桿的下部，以轴爲中心轉動 來支承所述玻璃基板的上端的方式而被設置；所述多個 氣滑動式汽缸用於使所述支承桿相對於所述前傾斜邊 緣升降運動。 10 8·如申請專利範圍第3或4項所述的玻璃基板的檢查系 統，其特徵在於··還設有夾緊裝置，所述夾緊裝置能夠 在所述前傾斜邊緣的一側，夹緊所述玻璃基板的一側端 部。 9·如申請專利範圍第8項所述的玻璃基板的檢查系統，其 15 特徵在於：所述夾緊裝置由抓取機械手以及汽缸構成， 其中，所述抓取機械手以樞軸爲中心轉動以能夾緊所述 玻璃基板的一側端部的方式被設置在所述前傾斜邊緣 的一側；所述汽缸被設置在所述前傾斜邊緣上，且具有 活塞桿，所述活塞桿使所述抓取機械手以樞軸爲中心轉 20 動以便能夠夹緊所述玻璃基板。 10·如申請專利範圍第1項所述的玻璃基板的檢查系統，其 特徵在於：所述次輸送裝置由以下部件構成，即 傾斜設置在所述移動架後方的後傾斜邊緣； 以在後傾斜邊緣下部，支承並輸送所述玻璃基板下 34 200412430 端的方式設置的後輸送機； 多根吹氣官’這些吹氣管沿所述玻璃基板的輸送方 向水平設置在所述後傾斜邊緣的前方，並沿長度方向形 成在所述玻璃基板的後面喷出空氣的多個喷嘴孔； 第1以及第2感測器，這些感測器沿所述玻璃基板的 輸送方向設置在所述後傾斜邊上，以便能夠檢測出所述 玻璃基板來控制所述後輸送機的動作。The position is linearly aligned, and at the transport position of the glass substrate, the glass substrate is received and transported from the transport line of the glass substrate; the device is known on the main transport device side and For illuminating the glass substrate. 20 2. The inspection system for a glass substrate according to item 1 of the scope of patent application, characterized in that the driving device is constituted by a γ-axis linear motion actuator that linearly reciprocates the moving frame. The γ-axis linear motion is actuated by a servo motor mounted on the chassis to provide a driving force, a screw rod rotatably mounted by driving the servo motor 32 200412430, along the screw rod A ball sleeve which is rotatably mounted on the moving frame is constituted by a linear motion guide which guides the linear reciprocating motion of the moving frame with respect to the base frame. 3. The inspection system for broken glass substrates according to item 1 of the scope of patent application, characterized in that the main conveying device is composed of the following components, that is, the front inclined edge disposed obliquely in front of the moving frame; A front conveyor that can be installed to support the lower end of the glass substrate at the lower part of the front inclined edge; and an air-floating device that floats the glass substrate from the front inclined edge by air spray. 10 4. The inspection system for a glass substrate according to item 3 of the scope of application for a patent, wherein the air floatation device is composed of a plurality of blow pipes and a plurality of air sliding cylinders, wherein the plurality of blow pipes A plurality of nozzle holes 15 are provided horizontally in front of the front inclined edge along the conveying direction of the glass substrate, and a plurality of nozzles for ejecting air behind the glass substrate are formed along the length direction. The plurality of air sliding cylinders are used for The plurality of air blowing tubes are moved up and down with respect to the front inclined edge, respectively. 5. The inspection system for a glass substrate according to item 3 of the scope of patent application, further comprising a first sensor and a second sensor, and these sensors are provided along the conveying direction of the glass substrate. On the front inclined edge of the main conveying device 20 so as to be able to detect the conveyance of the glass substrate and control the movement of the front conveyor. 6. The inspection system for a glass substrate according to item 3 or 4 of the scope of patent application, further comprising a guiding device, which can support and guide the upper part of the front inclined edge. Lead the upper end of the glass substrate 33 200412430. 7. The inspection system for a glass substrate according to item 6 of the scope of patent application, characterized in that it is composed of a support rod, a plurality of tapered rollers, and a plurality of air-sliding cylinders, wherein the support rod is movable along a vertical direction. The conveying direction of the glass-based 5 plate is horizontally provided at the upper part of the front inclined edge, and the plurality of tapered rollers can rotate at the lower part of the support rod around a shaft to support the upper end of the glass substrate. And is provided; the plurality of air sliding cylinders are used for moving the support rod up and down relative to the front inclined edge. 10 8 · The inspection system for a glass substrate according to item 3 or 4 of the scope of patent application, further comprising a clamping device, which can be clamped on one side of the front inclined edge. Tighten one end of the glass substrate. 9. The inspection system for a glass substrate according to item 8 of the scope of patent application, characterized in that the clamping device is composed of a gripping robot and a cylinder, wherein the gripping robot is centered on a pivot axis The rotation is provided on one side of the front inclined edge so as to be able to clamp one end of the glass substrate; the cylinder is provided on the front inclined edge and has a piston rod, the piston rod The gripping manipulator is caused to rotate about 20 about a pivot axis so as to be able to clamp the glass substrate. 10. The inspection system for a glass substrate according to item 1 of the scope of patent application, wherein the secondary conveying device is composed of the following components, that is, a rear inclined edge disposed obliquely behind the moving frame; The lower part of the edge supports and conveys the rear conveyor provided in the manner of the end of the glass substrate 34 200412430; a plurality of air blowers' these blowers are horizontally arranged in front of the rear inclined edge along the conveying direction of the glass substrate, and A plurality of nozzle holes for spraying air on the rear surface of the glass substrate are formed along the length direction; first and second sensors are provided on the rear inclined side along the conveying direction of the glass substrate, So that the glass substrate can be detected to control the operation of the rear conveyor. 11·如申請專利範圍第1項所述的玻璃基板的檢查系統，其 特徵在於：所述第1照明裝置由以下部件構成，即：設 置在所述主輸送裝置後方的多盞螢光燈； 後掩護，其設置方式爲在所述主輸送裝置和螢光燈 之間形成黑暗的背景視野，並形成有與所述螢光燈直線 對準的多個投射窗； 多個快門裝置，這些快門裝置用於選擇性地遮斷通 過所述後掩護的投射窗的所述螢光燈的光。11. The inspection system for a glass substrate according to item 1 of the scope of patent application, wherein the first lighting device is composed of the following components, that is, a plurality of fluorescent lamps disposed behind the main conveying device; The rear cover is arranged in such a manner that a dark background field of view is formed between the main conveying device and the fluorescent lamp, and a plurality of projection windows aligned with the fluorescent lamp are formed linearly; a plurality of shutter devices, and these shutters The device is used for selectively blocking the light of the fluorescent lamp passing through the rear-shielded projection window. 12. 如申請專利範圍第1項所述的玻璃基板的檢查系統，其 特徵在於：所述快門裝置由以下部件構成，即：安裝在 所述螢光燈和後掩護之間以便能夠開閉所述後掩護的 投射窗的快門，以及汽缸，其用於在遮斷所述後掩護的 投射窗的關閉位置和打開所述後掩護的投射窗的打開 位置之間，使所述快門運動。 13. 如申請專利範圍第1項所述的玻璃基板的檢查系統，其 特徵在於：還設有第2照明裝置，所述第2照明裝置設置 在所述主輸送裝置的前方旅對所述玻璃基板投射前光。 35 200412430 14.如申清專利範圍第13項所述的玻璃基板的檢查系統，^ 特徵在於··所述第2照明裝置由設置在所述主輪送裝置 前方的多盞鹵素燈、以及正交座標運動裝置構成，其中 ’所述正交座標運動裝置具有設置在所述主輪送裝置上 以便能夠使所述i素燈沿X軸方向運動的X軸線性 導引件、以及設置在所述X軸線性運動導引件上以便能 夠使所述齒素燈沿Z軸方向運動的Z軸線性運動導引件。 15·如申請專利範圍第14項所述的玻璃基板的檢查系統，其 特徵在於：所述X軸線性運動導引件由以下部件構成， 即：沿X軸方向被安裝在所述主輸送裝置下部的導桿； 可沿所述導桿滑動運動地安裝的下部滑動件； 與所述導桿平行地沿X軸方向安裝在所述主輸送裝 置上部的導軌； 可沿所述導執滑動運動地安裝的上部滑動件； 與所述下部滑動件和上部滑動件相連的運動標桿。 16·如申請專利範圍第14項所述的玻璃基板的檢查系統，其 特徵在於··所述Z軸線性運動導引件由以下部件構成， 即：沿構成所述X轴線性運動導引件的運動標桿安裝的 導執； ' 可沿所述導軌升降運動地安裝的滑動件； 被固定在所述滑動件上並裝載所述多盞_素燈的 支架。 17.如申請專利範圍第14或16項所述的玻璃基板的檢查系 統，其特徵在於：所述多盞画素燈由可作多自由度運動 36 200412430 地被安裝在所述支架上的線形鹵素燈以及圓形鹵素燈 構成。 18. 如申請專利範圍第16項所述的玻璃基板的檢查系統，其 特徵在於：還設有固定裝置，在除去牽引力時，能夠使 裝載所述多盞A素燈的所述支架固定在其位置上。 19. 如申请專利範圍第18項所述的玻璃基板的檢查系統，其 特徵在於··所述固定裝置由以下部件構成，即：一端與 所述支架的上部相連結的鋼絲； 皮帶輪，其以能夠卷掛、導引所述鋼絲的方式被安 裝在構成所述X軸線性運動導引件的運動標桿的上部； 汽缸，其與所述運動標桿平行地被安裝在所述運動 標桿的下部且具有與所述鋼絲另一端相連結的活塞桿； 調節器，其通過所述汽缸的活塞桿前進或後退來控 制所述汽缸的空氣壓力。 15 3712. The inspection system for a glass substrate according to item 1 of the scope of patent application, wherein the shutter device is composed of the following components, that is, installed between the fluorescent lamp and the rear cover so that the shutter can be opened and closed A shutter of a rear-shielded projection window, and a cylinder for moving the shutter between a closed position that blocks the rear-shielded projection window and an open position that opens the rear-shielded projection window. 13. The inspection system for a glass substrate according to item 1 of the scope of patent application, further comprising a second lighting device, the second lighting device being provided in front of the main conveying device to the glass. The substrate projects front light. 35 200412430 14. The inspection system for a glass substrate according to item 13 of the patent claim, characterized in that the second lighting device comprises a plurality of halogen lamps provided in front of the main carousel, and A cross-coordinate motion device, wherein the orthogonal coordinate motion device has an X-axis linear guide provided on the main rotation device so that the i prime lamp can be moved in the X-axis direction, and the A Z-axis linear motion guide on the X-axis linear motion guide so that the toothed lamp can move in the Z-axis direction. 15. The inspection system for a glass substrate according to item 14 of the scope of application for a patent, wherein the X-axis linear motion guide is composed of the following components, that is, mounted on the main conveying device along the X-axis direction A lower guide rod; a lower slide member slidably mounted along the guide rod; a guide rail mounted on the upper portion of the main conveying device parallel to the guide rod along the X-axis direction; and slidably moved along the guide rod A ground-mounted upper slider; a sports benchmark connected to the lower slider and the upper slider. 16. The inspection system for a glass substrate according to item 14 of the scope of patent application, characterized in that the Z-axis linear motion guide is composed of the following components, that is, the X-axis linear motion guide is formed along the X-axis linear motion guide A guide for the installation of a sports benchmark; a slider that can be moved up and down along the guide rail; a bracket that is fixed to the slider and is loaded with the plurality of prime lights. 17. The inspection system for a glass substrate according to item 14 or 16 of the scope of application for a patent, characterized in that the plurality of pixel lamps are linear halogens mounted on the bracket by multi-degree of freedom 36 200412430. Lamp and round halogen lamp. 18. The inspection system for a glass substrate according to item 16 of the scope of patent application, further comprising a fixing device capable of fixing the bracket on which the plurality of A prime lights are mounted when removing the traction force. Location. 19. The inspection system for a glass substrate according to item 18 of the scope of application for a patent, wherein the fixing device is composed of the following components: a wire connected at one end to the upper portion of the bracket; a pulley, which A manner capable of winding and guiding the steel wire is installed on an upper part of a sports bar constituting the X-axis linear motion guide; a cylinder is installed in parallel with the sports bar on a lower part of the sports bar and There is a piston rod connected to the other end of the steel wire; an adjuster that controls the air pressure of the cylinder by advancing or retreating the piston rod of the cylinder. 15 37
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