TW200403796A - Fire retardant wafer carrier - Google Patents

Fire retardant wafer carrier Download PDF

Info

Publication number
TW200403796A
TW200403796A TW92118305A TW92118305A TW200403796A TW 200403796 A TW200403796 A TW 200403796A TW 92118305 A TW92118305 A TW 92118305A TW 92118305 A TW92118305 A TW 92118305A TW 200403796 A TW200403796 A TW 200403796A
Authority
TW
Taiwan
Prior art keywords
carrier
patent application
scope
fire
item
Prior art date
Application number
TW92118305A
Other languages
English (en)
Chinese (zh)
Inventor
Sanjiv M Bhatt
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/190,355 external-priority patent/US20040004079A1/en
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200403796A publication Critical patent/TW200403796A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67366—Closed carriers characterised by materials, roughness, coatings or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/14—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor incorporating preformed parts or layers, e.g. injection moulding around inserts or for coating articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
    • B29C45/16—Making multilayered or multicoloured articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
TW92118305A 2002-07-05 2003-07-04 Fire retardant wafer carrier TW200403796A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US39421902P 2002-07-05 2002-07-05
US10/190,355 US20040004079A1 (en) 2002-07-05 2002-07-05 Fire retardant foup wafer carrier

Publications (1)

Publication Number Publication Date
TW200403796A true TW200403796A (en) 2004-03-01

Family

ID=30117808

Family Applications (1)

Application Number Title Priority Date Filing Date
TW92118305A TW200403796A (en) 2002-07-05 2003-07-04 Fire retardant wafer carrier

Country Status (6)

Country Link
EP (1) EP1539614A1 (fr)
JP (1) JP2006505921A (fr)
CN (1) CN1681723A (fr)
AU (1) AU2003249731A1 (fr)
TW (1) TW200403796A (fr)
WO (1) WO2004005163A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI835102B (zh) * 2021-04-01 2024-03-11 德商世創電子材料公司 晶圓輸送設備及輸送半導體晶圓的方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011100983A (ja) 2009-10-07 2011-05-19 Shin Etsu Polymer Co Ltd 基板収納容器
EP3929969B1 (fr) * 2020-06-22 2023-12-06 Siltronic AG Procédé de fabrication d'une cuve de traitement pour pièces à semiconducteur et cuve de traitement

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4929497A (en) * 1989-03-27 1990-05-29 Albany International Corp. Flame retardant rolling door
US5928971A (en) * 1996-02-01 1999-07-27 Southern Mills, Inc. Firefighter's garment
JP3476052B2 (ja) * 1997-09-01 2003-12-10 信越ポリマー株式会社 輸送容器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI835102B (zh) * 2021-04-01 2024-03-11 德商世創電子材料公司 晶圓輸送設備及輸送半導體晶圓的方法

Also Published As

Publication number Publication date
JP2006505921A (ja) 2006-02-16
WO2004005163A1 (fr) 2004-01-15
CN1681723A (zh) 2005-10-12
EP1539614A1 (fr) 2005-06-15
AU2003249731A1 (en) 2004-01-23

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