DE3844648C2
(tr)
*
|
1987-06-23 |
1992-02-20 |
Taiyo Sanso Co. Ltd., Osaka, Jp |
|
JPH02130921A
(ja)
*
|
1988-11-11 |
1990-05-18 |
Taiyo Sanso Co Ltd |
固体表面洗浄装置
|
US4962891A
(en)
*
|
1988-12-06 |
1990-10-16 |
The Boc Group, Inc. |
Apparatus for removing small particles from a substrate
|
US5018667A
(en)
*
|
1989-02-08 |
1991-05-28 |
Cold Jet, Inc. |
Phase change injection nozzle
|
EP0423259A1
(en)
*
|
1989-02-08 |
1991-04-24 |
Cold Jet, Inc. |
Phase change injection nozzle
|
US5001873A
(en)
*
|
1989-06-26 |
1991-03-26 |
American Air Liquide |
Method and apparatus for in situ cleaning of excimer laser optics
|
US5062898A
(en)
*
|
1990-06-05 |
1991-11-05 |
Air Products And Chemicals, Inc. |
Surface cleaning using a cryogenic aerosol
|
US5125979A
(en)
*
|
1990-07-02 |
1992-06-30 |
Xerox Corporation |
Carbon dioxide snow agglomeration and acceleration
|
US5111984A
(en)
*
|
1990-10-15 |
1992-05-12 |
Ford Motor Company |
Method of cutting workpieces having low thermal conductivity
|
US5222332A
(en)
*
|
1991-04-10 |
1993-06-29 |
Mains Jr Gilbert L |
Method for material removal
|
US5599223A
(en)
*
|
1991-04-10 |
1997-02-04 |
Mains Jr.; Gilbert L. |
Method for material removal
|
US5108512A
(en)
*
|
1991-09-16 |
1992-04-28 |
Hemlock Semiconductor Corporation |
Cleaning of CVD reactor used in the production of polycrystalline silicon by impacting with carbon dioxide pellets
|
US5315793A
(en)
*
|
1991-10-01 |
1994-05-31 |
Hughes Aircraft Company |
System for precision cleaning by jet spray
|
US5613509A
(en)
*
|
1991-12-24 |
1997-03-25 |
Maxwell Laboratories, Inc. |
Method and apparatus for removing contaminants and coatings from a substrate using pulsed radiant energy and liquid carbon dioxide
|
US5782253A
(en)
*
|
1991-12-24 |
1998-07-21 |
Mcdonnell Douglas Corporation |
System for removing a coating from a substrate
|
JPH07508686A
(ja)
*
|
1992-06-22 |
1995-09-28 |
ミネソタ マイニング アンド マニュファクチャリング カンパニー |
フロプティカル媒体からの廃棄物の除去方法及び装置
|
WO1995027591A1
(en)
*
|
1992-07-08 |
1995-10-19 |
Cold Jet, Inc. |
Method and apparatus for producing carbon dioxide pellets
|
US5409418A
(en)
*
|
1992-09-28 |
1995-04-25 |
Hughes Aircraft Company |
Electrostatic discharge control during jet spray
|
US5294261A
(en)
*
|
1992-11-02 |
1994-03-15 |
Air Products And Chemicals, Inc. |
Surface cleaning using an argon or nitrogen aerosol
|
US5545073A
(en)
*
|
1993-04-05 |
1996-08-13 |
Ford Motor Company |
Silicon micromachined CO2 cleaning nozzle and method
|
US5472369A
(en)
*
|
1993-04-29 |
1995-12-05 |
Martin Marietta Energy Systems, Inc. |
Centrifugal accelerator, system and method for removing unwanted layers from a surface
|
US5354384A
(en)
*
|
1993-04-30 |
1994-10-11 |
Hughes Aircraft Company |
Method for cleaning surface by heating and a stream of snow
|
US5486132A
(en)
*
|
1993-06-14 |
1996-01-23 |
International Business Machines Corporation |
Mounting apparatus for cryogenic aerosol cleaning
|
US5377911A
(en)
*
|
1993-06-14 |
1995-01-03 |
International Business Machines Corporation |
Apparatus for producing cryogenic aerosol
|
US5366156A
(en)
*
|
1993-06-14 |
1994-11-22 |
International Business Machines Corporation |
Nozzle apparatus for producing aerosol
|
US5364474A
(en)
*
|
1993-07-23 |
1994-11-15 |
Williford Jr John F |
Method for removing particulate matter
|
US5730806A
(en)
*
|
1993-08-30 |
1998-03-24 |
The United States Of America As Represented By The Administrator Of The National Aeronautics & Space Administration |
Gas-liquid supersonic cleaning and cleaning verification spray system
|
US5390450A
(en)
*
|
1993-11-08 |
1995-02-21 |
Ford Motor Company |
Supersonic exhaust nozzle having reduced noise levels for CO2 cleaning system
|
US5514024A
(en)
*
|
1993-11-08 |
1996-05-07 |
Ford Motor Company |
Nozzle for enhanced mixing in CO2 cleaning system
|
US5405283A
(en)
*
|
1993-11-08 |
1995-04-11 |
Ford Motor Company |
CO2 cleaning system and method
|
US5378312A
(en)
*
|
1993-12-07 |
1995-01-03 |
International Business Machines Corporation |
Process for fabricating a semiconductor structure having sidewalls
|
US5637027A
(en)
*
|
1993-12-23 |
1997-06-10 |
Hughes Aircraft Company |
CO2 jet spray system employing a thermal CO2 snow plume sensor
|
US5779523A
(en)
*
|
1994-03-01 |
1998-07-14 |
Job Industies, Ltd. |
Apparatus for and method for accelerating fluidized particulate matter
|
US5931721A
(en)
|
1994-11-07 |
1999-08-03 |
Sumitomo Heavy Industries, Ltd. |
Aerosol surface processing
|
US5967156A
(en)
*
|
1994-11-07 |
1999-10-19 |
Krytek Corporation |
Processing a surface
|
US6173916B1
(en)
|
1994-12-15 |
2001-01-16 |
Eco-Snow Systems, Inc. |
CO2jet spray nozzles with multiple orifices
|
DE69510025T2
(de)
*
|
1994-12-15 |
1999-12-09 |
He Holdings Inc., Los Angeles |
CO2-Sprühdüse mit Mehrfachöffnung
|
US5611491A
(en)
*
|
1995-02-27 |
1997-03-18 |
Hughes Aircraft Company |
Modular CO2 jet spray device
|
US5706842A
(en)
*
|
1995-03-29 |
1998-01-13 |
The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration |
Balanced rotating spray tank and pipe cleaning and cleanliness verification system
|
US5679062A
(en)
*
|
1995-05-05 |
1997-10-21 |
Ford Motor Company |
CO2 cleaning nozzle and method with enhanced mixing zones
|
US5765578A
(en)
*
|
1995-09-15 |
1998-06-16 |
Eastman Kodak Company |
Carbon dioxide jet spray polishing of metal surfaces
|
DE69614627T2
(de)
*
|
1995-09-25 |
2001-12-06 |
Eco-Snow Systems, Inc. |
System und Verfahren zum Polieren von Weichmetallflächen mittels CO2-Schnee
|
US5846338A
(en)
*
|
1996-01-11 |
1998-12-08 |
Asyst Technologies, Inc. |
Method for dry cleaning clean room containers
|
US5616067A
(en)
*
|
1996-01-16 |
1997-04-01 |
Ford Motor Company |
CO2 nozzle and method for cleaning pressure-sensitive surfaces
|
US5810942A
(en)
*
|
1996-09-11 |
1998-09-22 |
Fsi International, Inc. |
Aerodynamic aerosol chamber
|
US6039059A
(en)
*
|
1996-09-30 |
2000-03-21 |
Verteq, Inc. |
Wafer cleaning system
|
US5942037A
(en)
*
|
1996-12-23 |
1999-08-24 |
Fsi International, Inc. |
Rotatable and translatable spray nozzle
|
US5989355A
(en)
*
|
1997-02-26 |
1999-11-23 |
Eco-Snow Systems, Inc. |
Apparatus for cleaning and testing precision components of hard drives and the like
|
US5853128A
(en)
*
|
1997-03-08 |
1998-12-29 |
Bowen; Howard S. |
Solid/gas carbon dioxide spray cleaning system
|
FR2764215B1
(fr)
*
|
1997-06-04 |
1999-07-16 |
Carboxyque Francaise |
Lance et appareil de production d'un jet de c02 liquide, et son application a une installation de nettoyage de surfaces
|
US5961732A
(en)
*
|
1997-06-11 |
1999-10-05 |
Fsi International, Inc |
Treating substrates by producing and controlling a cryogenic aerosol
|
US6036786A
(en)
*
|
1997-06-11 |
2000-03-14 |
Fsi International Inc. |
Eliminating stiction with the use of cryogenic aerosol
|
US5789505A
(en)
*
|
1997-08-14 |
1998-08-04 |
Air Products And Chemicals, Inc. |
Surfactants for use in liquid/supercritical CO2
|
FR2771953B1
(fr)
*
|
1997-12-05 |
2000-01-14 |
Carboxyque Francaise |
Dispositif de distribution de co2 et procedes de traitement d'un effluent et de nettoyage de surface l'utilisant
|
US6048369A
(en)
*
|
1998-06-03 |
2000-04-11 |
North Carolina State University |
Method of dyeing hydrophobic textile fibers with colorant materials in supercritical fluid carbon dioxide
|
DE19860084B4
(de)
*
|
1998-12-23 |
2005-12-22 |
Infineon Technologies Ag |
Verfahren zum Strukturieren eines Substrats
|
US6740247B1
(en)
|
1999-02-05 |
2004-05-25 |
Massachusetts Institute Of Technology |
HF vapor phase wafer cleaning and oxide etching
|
WO2000046838A2
(en)
*
|
1999-02-05 |
2000-08-10 |
Massachusetts Institute Of Technology |
Hf vapor phase wafer cleaning and oxide etching
|
DE19950016C5
(de)
*
|
1999-10-18 |
2012-05-24 |
Linde Ag |
CO2-Partikel-Düse
|
NL1013978C2
(nl)
*
|
1999-12-29 |
2001-07-02 |
Huibert Konings |
Inrichting voor het bewerken van oppervlakken met koolzuurkristallen in een koolzuurgasstraal.
|
US6327872B1
(en)
|
2000-01-05 |
2001-12-11 |
The Boc Group, Inc. |
Method and apparatus for producing a pressurized high purity liquid carbon dioxide stream
|
US6261326B1
(en)
|
2000-01-13 |
2001-07-17 |
North Carolina State University |
Method for introducing dyes and other chemicals into a textile treatment system
|
US6719613B2
(en)
*
|
2000-08-10 |
2004-04-13 |
Nanoclean Technologies, Inc. |
Methods for cleaning surfaces substantially free of contaminants utilizing filtered carbon dioxide
|
US6543462B1
(en)
|
2000-08-10 |
2003-04-08 |
Nano Clean Technologies, Inc. |
Apparatus for cleaning surfaces substantially free of contaminants
|
US6530823B1
(en)
|
2000-08-10 |
2003-03-11 |
Nanoclean Technologies Inc |
Methods for cleaning surfaces substantially free of contaminants
|
US6500758B1
(en)
|
2000-09-12 |
2002-12-31 |
Eco-Snow Systems, Inc. |
Method for selective metal film layer removal using carbon dioxide jet spray
|
US6676710B2
(en)
|
2000-10-18 |
2004-01-13 |
North Carolina State University |
Process for treating textile substrates
|
FR2820665A1
(fr)
*
|
2001-02-12 |
2002-08-16 |
Kaddour Raissi |
Buse a jet plat pour le traitement de surface par impact particulaire
|
US6578369B2
(en)
*
|
2001-03-28 |
2003-06-17 |
Fsi International, Inc. |
Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices
|
NL1018280C2
(nl)
*
|
2001-06-13 |
2002-12-16 |
Huibert Konings |
Straalelement voor het bewerken van oppervlakken met cryogene deeltjes.
|
JP4210045B2
(ja)
*
|
2001-06-25 |
2009-01-14 |
横河電機株式会社 |
洗浄装置
|
TWI312067B
(en)
*
|
2002-01-22 |
2009-07-11 |
Praxair Technology Inc |
Method for analyzing impurities in carbon dioxide
|
FR2842123B1
(fr)
*
|
2002-07-11 |
2004-08-27 |
Carboxyque Francaise |
Procede et dispositif d'injection de co2 diphasique dans un milieu gazeux en transfert
|
US7297286B2
(en)
*
|
2002-07-29 |
2007-11-20 |
Nanoclean Technologies, Inc. |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
|
US6764385B2
(en)
*
|
2002-07-29 |
2004-07-20 |
Nanoclean Technologies, Inc. |
Methods for resist stripping and cleaning surfaces substantially free of contaminants
|
US7134941B2
(en)
*
|
2002-07-29 |
2006-11-14 |
Nanoclean Technologies, Inc. |
Methods for residue removal and corrosion prevention in a post-metal etch process
|
US7101260B2
(en)
*
|
2002-07-29 |
2006-09-05 |
Nanoclean Technologies, Inc. |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
|
US7066789B2
(en)
*
|
2002-07-29 |
2006-06-27 |
Manoclean Technologies, Inc. |
Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants
|
ES2260691T3
(es)
*
|
2002-09-20 |
2006-11-01 |
Jens-Werner Kipp |
Procedimiento y dispositivo de limpieza por proyeccion.
|
US6889508B2
(en)
*
|
2002-10-02 |
2005-05-10 |
The Boc Group, Inc. |
High pressure CO2 purification and supply system
|
US6960242B2
(en)
*
|
2002-10-02 |
2005-11-01 |
The Boc Group, Inc. |
CO2 recovery process for supercritical extraction
|
DE10259132B4
(de)
*
|
2002-12-18 |
2004-09-23 |
Messer Griesheim Gmbh |
Verfahren zur Strahlreinigung von Werkstoffoberflächen
|
US8192555B2
(en)
*
|
2002-12-31 |
2012-06-05 |
Micron Technology, Inc. |
Non-chemical, non-optical edge bead removal process
|
US20050006310A1
(en)
*
|
2003-07-10 |
2005-01-13 |
Rajat Agrawal |
Purification and recovery of fluids in processing applications
|
DE102004018133B3
(de)
*
|
2004-04-08 |
2005-08-25 |
Frenzel-Bau Gmbh & Co. Kg |
Anordnung zur Erzeugung eines Trockeneispartikel-Strahls sowie deren Verwendung
|
KR20040101948A
(ko)
*
|
2004-05-31 |
2004-12-03 |
(주)케이.씨.텍 |
표면세정용 승화성 고체입자 분사용 노즐 및 이를 이용한 세정방법
|
US7385670B2
(en)
*
|
2004-10-05 |
2008-06-10 |
Asml Netherlands B.V. |
Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
|
TW200631666A
(en)
*
|
2004-11-12 |
2006-09-16 |
Fsi Int Inc |
Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices
|
KR100740827B1
(ko)
*
|
2004-12-31 |
2007-07-19 |
주식회사 케이씨텍 |
분사 노즐 및 이를 이용한 세정 시스템
|
US7389941B2
(en)
*
|
2005-10-13 |
2008-06-24 |
Cool Clean Technologies, Inc. |
Nozzle device and method for forming cryogenic composite fluid spray
|
GB0522316D0
(en)
*
|
2005-11-01 |
2005-12-07 |
Boc Group Plc |
Weld cooling
|
GB0522317D0
(en)
*
|
2005-11-01 |
2005-12-07 |
Boc Group Plc |
Nozzle
|
DE102006019544A1
(de)
*
|
2005-12-01 |
2007-06-06 |
Sms Demag Ag |
Verfahren und Vorrichtung zur Entzunderung von Dünnbrammen und Bändern in Warmbandstraßen, Bandbehandlungsanlagen oder dergleichen
|
JP2007160244A
(ja)
*
|
2005-12-15 |
2007-06-28 |
Itec Co Ltd |
ドライアイス噴射装置
|
US20070175232A1
(en)
*
|
2006-01-30 |
2007-08-02 |
Honeywell International Inc. |
Ice build-up preventor for thermal chamber ports
|
US7784477B2
(en)
*
|
2006-02-14 |
2010-08-31 |
Raytheon Company |
Automated non-contact cleaning
|
TWI352628B
(en)
*
|
2006-07-21 |
2011-11-21 |
Akrion Technologies Inc |
Nozzle for use in the megasonic cleaning of substr
|
US20080216870A1
(en)
*
|
2007-01-19 |
2008-09-11 |
Air Liquid Industrial U.S. Lp |
Dry Ice Blasting With Ozone-Containing Carrier Gas
|
DE102007018338B4
(de)
*
|
2007-04-13 |
2010-09-23 |
Technische Universität Berlin |
Vorrichtung und Verfahren zum Partikelstrahlen mittels gefrorener Gaspartikel
|
JP5065078B2
(ja)
*
|
2008-02-19 |
2012-10-31 |
エア・ウォーター株式会社 |
ドライアイススノー洗浄装置および方法
|
JP5180679B2
(ja)
*
|
2008-05-19 |
2013-04-10 |
昭和電工ガスプロダクツ株式会社 |
ドライアイス粒子の噴射装置
|
US20090307868A1
(en)
*
|
2008-06-12 |
2009-12-17 |
Lee Tai-Cheung |
Cleaning assembly for a surface of a roller
|
US20100015354A1
(en)
*
|
2008-07-16 |
2010-01-21 |
Lee Tai-Cheung |
Method of making rollers with a fine pattern
|
US8454409B2
(en)
|
2009-09-10 |
2013-06-04 |
Rave N.P., Inc. |
CO2 nozzles
|
JP5605939B2
(ja)
*
|
2010-03-30 |
2014-10-15 |
昭和電工ガスプロダクツ株式会社 |
ドライアイス粒子の噴射装置
|
JP2011207664A
(ja)
*
|
2010-03-30 |
2011-10-20 |
Showa Tansan Co Ltd |
ドライアイス粒子の噴射装置
|
CN102527660A
(zh)
*
|
2012-02-15 |
2012-07-04 |
上海鸣华化工科技有限公司 |
液态二氧化碳单独或与压缩气体混合作为清洗剂均匀稳定喷射的清洗方法
|
CN102580940A
(zh)
*
|
2012-02-15 |
2012-07-18 |
上海鸣华化工科技有限公司 |
均匀稳定喷射的液态二氧化碳清洗用喷枪
|
WO2014009583A1
(es)
*
|
2012-07-10 |
2014-01-16 |
Consejo Superior De Investigaciones Científicas (Csic) |
Dispositivo y método para limpiar superficies con haz de gases en vacío y ultra alto vacío
|
US8920570B2
(en)
*
|
2012-11-05 |
2014-12-30 |
Trc Services, Inc. |
Methods and apparatus for cleaning oilfield tools
|
US9272313B2
(en)
*
|
2012-11-05 |
2016-03-01 |
Trc Services, Inc. |
Cryogenic cleaning methods for reclaiming and reprocessing oilfield tools
|
KR101305256B1
(ko)
*
|
2012-12-18 |
2013-09-06 |
포항공과대학교 산학협력단 |
초고속 균일 나노 입자 생성 노즐, 생성 장치 및 생성 방법
|
US9931639B2
(en)
|
2014-01-16 |
2018-04-03 |
Cold Jet, Llc |
Blast media fragmenter
|
US20150354403A1
(en)
*
|
2014-06-05 |
2015-12-10 |
General Electric Company |
Off-line wash systems and methods for a gas turbine engine
|
US10014191B2
(en)
|
2014-10-06 |
2018-07-03 |
Tel Fsi, Inc. |
Systems and methods for treating substrates with cryogenic fluid mixtures
|
US10625280B2
(en)
|
2014-10-06 |
2020-04-21 |
Tel Fsi, Inc. |
Apparatus for spraying cryogenic fluids
|
TWI678721B
(zh)
*
|
2014-10-06 |
2019-12-01 |
美商東京威力科創Fsi股份有限公司 |
以低溫流體混合物處理基板的系統及方法
|
US10081091B2
(en)
|
2015-06-12 |
2018-09-25 |
Postech Academy-Industry Foundation |
Nozzle, device, and method for high-speed generation of uniform nanoparticles
|
WO2018004678A1
(en)
*
|
2016-06-29 |
2018-01-04 |
Tel Fsi, Inc. |
Systems and methods for treating substrates with cryogenic fluid mixtures
|
EP3648898B1
(en)
|
2017-04-04 |
2022-02-09 |
Hitachi High-Tech Corporation |
Passive electrostatic co2 composite spray applicator and corresponding method
|
US10738151B2
(en)
|
2017-06-23 |
2020-08-11 |
University Of Florida Research Foundation, Inc. |
Biorenewable, water-degradable polymers and co-polymers
|
KR20200066294A
(ko)
*
|
2017-08-18 |
2020-06-09 |
티이엘 매뉴팩처링 앤드 엔지니어링 오브 아메리카, 인크. |
극저온 유체들을 분사하기 위한 장치
|
US11624556B2
(en)
|
2019-05-06 |
2023-04-11 |
Messer Industries Usa, Inc. |
Impurity control for a high pressure CO2 purification and supply system
|
US11441974B2
(en)
|
2019-08-01 |
2022-09-13 |
Applied Materials, Inc. |
Detection of surface particles on chamber components with carbon dioxide
|
CN115283369A
(zh)
*
|
2022-09-06 |
2022-11-04 |
林峡 |
一种二氧化碳状态控制系统及方法
|