SG99915A1 - Holder for polished work and manufacturing method thereof - Google Patents

Holder for polished work and manufacturing method thereof

Info

Publication number
SG99915A1
SG99915A1 SG200104076A SG200104076A SG99915A1 SG 99915 A1 SG99915 A1 SG 99915A1 SG 200104076 A SG200104076 A SG 200104076A SG 200104076 A SG200104076 A SG 200104076A SG 99915 A1 SG99915 A1 SG 99915A1
Authority
SG
Singapore
Prior art keywords
holder
manufacturing
polished work
polished
work
Prior art date
Application number
SG200104076A
Other languages
English (en)
Inventor
Nanjo Motoyuki
Uchihata Koji
Uzawa Akihiko
Kanai Kuniyuki
Original Assignee
Sumitomo Bakelite Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000208289A external-priority patent/JP3439726B2/ja
Application filed by Sumitomo Bakelite Co filed Critical Sumitomo Bakelite Co
Publication of SG99915A1 publication Critical patent/SG99915A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00—Component parts such as frames, beds, carriages, headstocks
    • B24B41/06—Work supports, e.g. adjustable steadies
    • B24B41/067—Work supports, e.g. adjustable steadies radially supporting workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/27—Work carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Injection Moulding Of Plastics Or The Like (AREA)
SG200104076A 2000-07-10 2001-07-09 Holder for polished work and manufacturing method thereof SG99915A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000208289A JP3439726B2 (ja) 2000-07-10 2000-07-10 被研磨物保持材及びその製造方法

Publications (1)

Publication Number Publication Date
SG99915A1 true SG99915A1 (en) 2003-11-27

Family

ID=29695697

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200104076A SG99915A1 (en) 2000-07-10 2001-07-09 Holder for polished work and manufacturing method thereof

Country Status (4)

Country Link
KR (1) KR20020005980A (ko)
MY (1) MY118114A (ko)
SG (1) SG99915A1 (ko)
TW (1) TW544367B (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6792106B2 (ja) * 2017-03-30 2020-11-25 スピードファム株式会社 ワークキャリア及びワークキャリアの製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0887152A2 (en) * 1997-06-25 1998-12-30 Shin-Etsu Handotai Co., Ltd. Carrier for double-side polishing
JP2000015565A (ja) * 1998-06-30 2000-01-18 Toshiba Ceramics Co Ltd キャリア
JP2001105303A (ja) * 1999-10-04 2001-04-17 U T K Syst:Kk 両面研磨用キャリア

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57177641U (ko) * 1981-04-30 1982-11-10
JPS584349U (ja) * 1981-06-30 1983-01-12 日立金属株式会社 両面研摩機用キヤリヤ
JPH0727747U (ja) * 1993-10-18 1995-05-23 直江津電子工業株式会社 半導体ウエハ等の研磨用キャリア
JPH09155729A (ja) * 1995-12-08 1997-06-17 Seiko Epson Corp 平面研磨板及びこれを用いた平面研磨装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0887152A2 (en) * 1997-06-25 1998-12-30 Shin-Etsu Handotai Co., Ltd. Carrier for double-side polishing
JP2000015565A (ja) * 1998-06-30 2000-01-18 Toshiba Ceramics Co Ltd キャリア
JP2001105303A (ja) * 1999-10-04 2001-04-17 U T K Syst:Kk 両面研磨用キャリア

Also Published As

Publication number Publication date
KR20020005980A (ko) 2002-01-18
MY118114A (en) 2004-08-30
TW544367B (en) 2003-08-01

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