JPS57177641U - - Google Patents

Info

Publication number
JPS57177641U
JPS57177641U JP1981063270U JP6327081U JPS57177641U JP S57177641 U JPS57177641 U JP S57177641U JP 1981063270 U JP1981063270 U JP 1981063270U JP 6327081 U JP6327081 U JP 6327081U JP S57177641 U JPS57177641 U JP S57177641U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1981063270U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981063270U priority Critical patent/JPS57177641U/ja
Publication of JPS57177641U publication Critical patent/JPS57177641U/ja
Pending legal-status Critical Current

Links

JP1981063270U 1981-04-30 1981-04-30 Pending JPS57177641U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981063270U JPS57177641U (ko) 1981-04-30 1981-04-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981063270U JPS57177641U (ko) 1981-04-30 1981-04-30

Publications (1)

Publication Number Publication Date
JPS57177641U true JPS57177641U (ko) 1982-11-10

Family

ID=29859395

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981063270U Pending JPS57177641U (ko) 1981-04-30 1981-04-30

Country Status (1)

Country Link
JP (1) JPS57177641U (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0776030A2 (en) 1995-11-27 1997-05-28 Shin-Etsu Handotai Company Limited Apparatus and method for double-side polishing semiconductor wafers
KR20020005980A (ko) * 2000-07-10 2002-01-18 엔다 나오또 피연마물 지지재 및 그 제조방법

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555957U (ko) * 1978-10-09 1980-04-16

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555957U (ko) * 1978-10-09 1980-04-16

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0776030A2 (en) 1995-11-27 1997-05-28 Shin-Etsu Handotai Company Limited Apparatus and method for double-side polishing semiconductor wafers
KR20020005980A (ko) * 2000-07-10 2002-01-18 엔다 나오또 피연마물 지지재 및 그 제조방법

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