SG98427A1 - Multilayer piezoelectric device and method of producing same - Google Patents

Multilayer piezoelectric device and method of producing same

Info

Publication number
SG98427A1
SG98427A1 SG200005588A SG200005588A SG98427A1 SG 98427 A1 SG98427 A1 SG 98427A1 SG 200005588 A SG200005588 A SG 200005588A SG 200005588 A SG200005588 A SG 200005588A SG 98427 A1 SG98427 A1 SG 98427A1
Authority
SG
Singapore
Prior art keywords
piezoelectric device
multilayer piezoelectric
producing same
internal electrode
electrode layers
Prior art date
Application number
SG200005588A
Other languages
English (en)
Inventor
Kojima Tatsuya
Horino Kenji
Original Assignee
Tdk Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tdk Corp filed Critical Tdk Corp
Publication of SG98427A1 publication Critical patent/SG98427A1/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/178—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of a laminated structure of multiple piezoelectric layers with inner electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/05—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053—Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead-based oxides
    • H10N30/8554—Lead-zirconium titanate [PZT] based

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Micromachines (AREA)
  • Fuel-Injection Apparatus (AREA)
  • Laminated Bodies (AREA)
SG200005588A 1999-09-30 2000-09-28 Multilayer piezoelectric device and method of producing same SG98427A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP28001699 1999-09-30
JP2000190654A JP3397753B2 (ja) 1999-09-30 2000-06-26 積層型圧電素子およびその製造方法

Publications (1)

Publication Number Publication Date
SG98427A1 true SG98427A1 (en) 2003-09-19

Family

ID=26553578

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200005588A SG98427A1 (en) 1999-09-30 2000-09-28 Multilayer piezoelectric device and method of producing same

Country Status (5)

Country Link
US (1) US6384517B1 (zh)
JP (1) JP3397753B2 (zh)
CN (1) CN1188916C (zh)
HK (1) HK1040568B (zh)
SG (1) SG98427A1 (zh)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4683689B2 (ja) * 2000-03-29 2011-05-18 京セラ株式会社 積層型圧電素子及び圧電アクチュエータ並びに噴射装置
DE10205928A1 (de) * 2001-02-21 2002-08-22 Ceramtec Ag Verfahren zur Herstellung piezokeramischer Vielschichtaktoren
JP3975840B2 (ja) * 2002-06-27 2007-09-12 株式会社村田製作所 積層型圧電トランス
DE10326040A1 (de) * 2003-06-10 2004-12-30 Robert Bosch Gmbh Verfahren zur Herstellung von keramischen Grünfolien für keramische Bauteile
JP4771649B2 (ja) * 2003-07-28 2011-09-14 京セラ株式会社 積層型電子部品の製造方法
WO2005011009A1 (ja) * 2003-07-28 2005-02-03 Kyocera Corporation 積層型電子部品とその製造方法及び積層型圧電素子
JP4593912B2 (ja) * 2003-12-24 2010-12-08 京セラ株式会社 積層型圧電素子およびその製法、並びに噴射装置
JP2005243677A (ja) * 2004-02-24 2005-09-08 Kyocera Corp 積層型電子部品とその製造方法およびこれを用いた噴射装置
JP4610215B2 (ja) * 2004-03-19 2011-01-12 株式会社ノリタケカンパニーリミテド 導体ペースト
JP4881062B2 (ja) 2006-05-15 2012-02-22 キヤノン株式会社 積層圧電素子、その製造方法および振動波駆動装置
KR100852162B1 (ko) 2006-08-23 2008-08-13 주식회사 이노칩테크놀로지 압전 진동 소자
DE102007004813B4 (de) * 2007-01-31 2016-01-14 Continental Automotive Gmbh Verfahren zur Herstellung eines piezokeramischen Vielschichtaktors
JP5006354B2 (ja) * 2009-01-29 2012-08-22 日本碍子株式会社 圧電／電歪共振子
JP6026530B2 (ja) * 2012-06-21 2016-11-16 日本碍子株式会社 圧電／電歪セラミックス組成物及び変位発生装置
JP5679010B2 (ja) * 2013-05-07 2015-03-04 Tdk株式会社 圧電素子およびその製造方法
CN103579492A (zh) * 2013-11-19 2014-02-12 中国第一汽车股份有限公司无锡油泵油嘴研究所 压电执行元件

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347137A (ja) * 1986-08-15 1988-02-27 松下電工株式会社 圧電セラミツク体の製法
JPH03155178A (ja) * 1989-11-14 1991-07-03 Hitachi Metals Ltd 積層型変位素子
JPH0496286A (ja) * 1990-08-03 1992-03-27 Toyota Motor Corp 積層型圧電体の製造方法
US5252883A (en) * 1991-01-30 1993-10-12 Nec Corporation Laminated type piezoelectric actuator
US5277723A (en) * 1990-09-19 1994-01-11 Hitachi, Ltd. Method for producing multilayer ceramic body with convex side faces
JPH06314828A (ja) * 1993-04-28 1994-11-08 Mitsubishi Kasei Corp 積層型素子の製造方法
JPH1056354A (ja) * 1996-08-09 1998-02-24 Fuji Electric Co Ltd 弾性表面波フィルタおよびその製造方法
US5935485A (en) * 1996-10-31 1999-08-10 Kabushiki Kaisha Toyota Chuo Kenkyusho Piezoelectric material and piezoelectric element
GB2353408A (en) * 1999-08-19 2001-02-21 Murata Manufacturing Co Method for manufacturing a monolithic ceramic electronic component

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4988909A (en) * 1989-01-20 1991-01-29 Mitsui Toatsu Chemicals, Inc. Piezoelectric element with giant electrostrictive effect and ceramic composition for preparing same
JPH05110157A (ja) 1991-10-14 1993-04-30 Nec Corp 積層圧電アクチユエータ
US5645753A (en) * 1994-05-19 1997-07-08 Kyocera Corporation Piezo-electric ceramic composition
US6140746A (en) * 1995-04-03 2000-10-31 Seiko Epson Corporation Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film
JPH09261978A (ja) 1996-03-25 1997-10-03 Nippon Cement Co Ltd 積層体素子および振動駆動装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6347137A (ja) * 1986-08-15 1988-02-27 松下電工株式会社 圧電セラミツク体の製法
JPH03155178A (ja) * 1989-11-14 1991-07-03 Hitachi Metals Ltd 積層型変位素子
JPH0496286A (ja) * 1990-08-03 1992-03-27 Toyota Motor Corp 積層型圧電体の製造方法
US5277723A (en) * 1990-09-19 1994-01-11 Hitachi, Ltd. Method for producing multilayer ceramic body with convex side faces
US5252883A (en) * 1991-01-30 1993-10-12 Nec Corporation Laminated type piezoelectric actuator
JPH06314828A (ja) * 1993-04-28 1994-11-08 Mitsubishi Kasei Corp 積層型素子の製造方法
JPH1056354A (ja) * 1996-08-09 1998-02-24 Fuji Electric Co Ltd 弾性表面波フィルタおよびその製造方法
US5935485A (en) * 1996-10-31 1999-08-10 Kabushiki Kaisha Toyota Chuo Kenkyusho Piezoelectric material and piezoelectric element
GB2353408A (en) * 1999-08-19 2001-02-21 Murata Manufacturing Co Method for manufacturing a monolithic ceramic electronic component

Also Published As

Publication number Publication date
CN1313641A (zh) 2001-09-19
US6384517B1 (en) 2002-05-07
CN1188916C (zh) 2005-02-09
JP2001168408A (ja) 2001-06-22
JP3397753B2 (ja) 2003-04-21
HK1040568B (zh) 2005-09-30
HK1040568A1 (en) 2002-06-14

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