SG93234A1 - Improved semiconductor manufacturing system - Google Patents
Improved semiconductor manufacturing systemInfo
- Publication number
- SG93234A1 SG93234A1 SG200001829A SG200001829A SG93234A1 SG 93234 A1 SG93234 A1 SG 93234A1 SG 200001829 A SG200001829 A SG 200001829A SG 200001829 A SG200001829 A SG 200001829A SG 93234 A1 SG93234 A1 SG 93234A1
- Authority
- SG
- Singapore
- Prior art keywords
- processing stations
- manufacturing system
- processing
- semiconductor manufacturing
- tunnel
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Glass Compositions (AREA)
- Noodles (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Ventilation (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/431,151 US6354781B1 (en) | 1999-11-01 | 1999-11-01 | Semiconductor manufacturing system |
Publications (1)
Publication Number | Publication Date |
---|---|
SG93234A1 true SG93234A1 (en) | 2002-12-17 |
Family
ID=23710706
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200001829A SG93234A1 (en) | 1999-11-01 | 2000-03-30 | Improved semiconductor manufacturing system |
Country Status (6)
Country | Link |
---|---|
US (1) | US6354781B1 (ja) |
EP (1) | EP1096550B1 (ja) |
JP (1) | JP2001144160A (ja) |
AT (1) | ATE381776T1 (ja) |
DE (1) | DE60037492T2 (ja) |
SG (1) | SG93234A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000051921A1 (en) | 1999-03-05 | 2000-09-08 | Pri Automation, Inc. | Material handling and transport system and process |
US6491451B1 (en) * | 2000-11-03 | 2002-12-10 | Motorola, Inc. | Wafer processing equipment and method for processing wafers |
CN1996553A (zh) * | 2001-08-31 | 2007-07-11 | 阿赛斯特技术公司 | 用于半导体材料处理系统的一体化机架 |
US6821082B2 (en) * | 2001-10-30 | 2004-11-23 | Freescale Semiconductor, Inc. | Wafer management system and methods for managing wafers |
JP4648190B2 (ja) * | 2003-03-28 | 2011-03-09 | 平田機工株式会社 | 基板搬送システム |
ATE527690T1 (de) * | 2004-08-23 | 2011-10-15 | Murata Machinery Ltd | Werkzeuglade- und pufferungssystem auf liftbasis |
CN109661366B (zh) | 2016-09-09 | 2022-01-14 | 宝洁公司 | 用于独立地引导载具并且将容器和闭合件递送到单元操作站的系统和方法 |
EP3509954B1 (en) | 2016-09-09 | 2021-10-20 | The Procter & Gamble Company | System and method for simultaneously filling containers with different fluent compositions |
EP3509972B1 (en) | 2016-09-09 | 2023-11-15 | The Procter & Gamble Company | Track system for creating finished products |
EP3510457A1 (en) | 2016-09-09 | 2019-07-17 | The Procter and Gamble Company | Methods for simultaneously producing different products on a single production line |
CN109661624B (zh) | 2016-09-09 | 2022-10-25 | 宝洁公司 | 用于独立地引导装载容器的载具以创建不同成品的系统和方法 |
US10221017B2 (en) | 2016-09-09 | 2019-03-05 | The Procter & Gamble Company | Vacuum holder with extensible skirt gasket |
US10558201B2 (en) | 2016-09-09 | 2020-02-11 | The Procter & Gamble Company | System and method for producing products based upon demand |
EP3509953A1 (en) | 2016-09-09 | 2019-07-17 | The Procter and Gamble Company | System and method for simultaneously filling containers of different shapes and/or sizes |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6280134B1 (en) * | 1997-06-17 | 2001-08-28 | Applied Materials, Inc. | Apparatus and method for automated cassette handling |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3845286A (en) | 1973-02-05 | 1974-10-29 | Ibm | Manufacturing control system for processing workpieces |
US4540326A (en) | 1982-09-17 | 1985-09-10 | Nacom Industries, Inc. | Semiconductor wafer transport system |
US4682927A (en) * | 1982-09-17 | 1987-07-28 | Nacom Industries, Incorporated | Conveyor system |
JPS6162739A (ja) * | 1984-09-03 | 1986-03-31 | Sanki Eng Co Ltd | クリ−ントンネル |
US4826360A (en) * | 1986-03-10 | 1989-05-02 | Shimizu Construction Co., Ltd. | Transfer system in a clean room |
US5536128A (en) | 1988-10-21 | 1996-07-16 | Hitachi, Ltd. | Method and apparatus for carrying a variety of products |
JP2565786B2 (ja) * | 1990-03-09 | 1996-12-18 | 三菱電機株式会社 | 自動搬送装置及び方法 |
US5058491A (en) | 1990-08-27 | 1991-10-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Building and method for manufacture of integrated circuits |
US5401212A (en) | 1990-08-29 | 1995-03-28 | Intelligent Enclosures Corporation | Environmental control system |
US5169272A (en) | 1990-11-01 | 1992-12-08 | Asyst Technologies, Inc. | Method and apparatus for transferring articles between two controlled environments |
US5399531A (en) | 1990-12-17 | 1995-03-21 | United Micrpelectronics Corporation | Single semiconductor wafer transfer method and plural processing station manufacturing system |
JP2873761B2 (ja) * | 1992-01-10 | 1999-03-24 | 東京エレクトロン株式会社 | 半導体製造装置 |
FR2697003B1 (fr) * | 1992-10-16 | 1994-11-18 | Commissariat Energie Atomique | Système de manipulation et de confinement d'objets plats dans des boîtes individuelles. |
DE4210960C2 (de) | 1992-04-02 | 1994-03-31 | Ibm | Reinrauminsel und Verfahren zur reinraumgerechten Handhabung von in Behältern gelagerten Gegenständen |
JP3544208B2 (ja) | 1992-07-07 | 2004-07-21 | 株式会社荏原製作所 | 磁気浮上搬送装置 |
JPH06104326A (ja) * | 1992-09-18 | 1994-04-15 | Tokyo Electron Ltd | 処理システム |
US5417537A (en) * | 1993-05-07 | 1995-05-23 | Miller; Kenneth C. | Wafer transport device |
US5544421A (en) | 1994-04-28 | 1996-08-13 | Semitool, Inc. | Semiconductor wafer processing system |
JPH09321120A (ja) * | 1996-03-04 | 1997-12-12 | Applied Materials Inc | 半導体加工部材を処理するシステムおよび方法 |
US5810062A (en) | 1996-07-12 | 1998-09-22 | Asyst Technologies, Inc. | Two stage valve for charging and/or vacuum relief of pods |
JPH1070055A (ja) * | 1996-08-28 | 1998-03-10 | Sony Corp | 半導体装置生産用クリーンルーム |
US5957648A (en) * | 1996-12-11 | 1999-09-28 | Applied Materials, Inc. | Factory automation apparatus and method for handling, moving and storing semiconductor wafer carriers |
US5964561A (en) | 1996-12-11 | 1999-10-12 | Applied Materials, Inc. | Compact apparatus and method for storing and loading semiconductor wafer carriers |
DE19737839C2 (de) | 1997-08-29 | 2001-03-08 | Siemens Ag | Transportsystem |
US6183358B1 (en) * | 1997-11-17 | 2001-02-06 | Texas Instruments Incorporated | Isolated multilevel fabricating facility with two way clean tunnel transport system with each tool having adjacent support skid |
-
1999
- 1999-11-01 US US09/431,151 patent/US6354781B1/en not_active Expired - Lifetime
-
2000
- 2000-03-30 SG SG200001829A patent/SG93234A1/en unknown
- 2000-07-18 DE DE60037492T patent/DE60037492T2/de not_active Expired - Lifetime
- 2000-07-18 AT AT00640009T patent/ATE381776T1/de not_active IP Right Cessation
- 2000-07-18 EP EP00640009A patent/EP1096550B1/en not_active Expired - Lifetime
- 2000-08-16 JP JP2000246792A patent/JP2001144160A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6280134B1 (en) * | 1997-06-17 | 2001-08-28 | Applied Materials, Inc. | Apparatus and method for automated cassette handling |
Also Published As
Publication number | Publication date |
---|---|
EP1096550A1 (en) | 2001-05-02 |
US6354781B1 (en) | 2002-03-12 |
JP2001144160A (ja) | 2001-05-25 |
EP1096550B1 (en) | 2007-12-19 |
DE60037492T2 (de) | 2008-05-21 |
DE60037492D1 (de) | 2008-01-31 |
ATE381776T1 (de) | 2008-01-15 |
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