SG85707A1 - Liquid discharge head, manufacturing method thereof, and microeletromechanical device - Google Patents
Liquid discharge head, manufacturing method thereof, and microeletromechanical deviceInfo
- Publication number
- SG85707A1 SG85707A1 SG200003100A SG200003100A SG85707A1 SG 85707 A1 SG85707 A1 SG 85707A1 SG 200003100 A SG200003100 A SG 200003100A SG 200003100 A SG200003100 A SG 200003100A SG 85707 A1 SG85707 A1 SG 85707A1
- Authority
- SG
- Singapore
- Prior art keywords
- microeletromechanical
- manufacturing
- liquid discharge
- discharge head
- head
- Prior art date
Links
- 239000007788 liquid Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14153—Structures including a sensor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/14048—Movable member in the chamber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14354—Sensor in each pressure chamber
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15882199 | 1999-06-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
SG85707A1 true SG85707A1 (en) | 2002-01-15 |
Family
ID=15680121
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG200003100A SG85707A1 (en) | 1999-06-04 | 2000-06-02 | Liquid discharge head, manufacturing method thereof, and microeletromechanical device |
Country Status (9)
Country | Link |
---|---|
US (1) | US6402302B1 (ko) |
EP (1) | EP1057639B1 (ko) |
KR (1) | KR100340272B1 (ko) |
CN (1) | CN1136098C (ko) |
AU (1) | AU774272B2 (ko) |
CA (1) | CA2311143C (ko) |
DE (1) | DE60034269T2 (ko) |
SG (1) | SG85707A1 (ko) |
TW (1) | TW513349B (ko) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7022250B2 (en) | 1997-07-15 | 2006-04-04 | Silverbrook Research Pty Ltd | Method of fabricating an ink jet printhead chip with differential expansion actuators |
US6648453B2 (en) | 1997-07-15 | 2003-11-18 | Silverbrook Research Pty Ltd | Ink jet printhead chip with predetermined micro-electromechanical systems height |
JP4095368B2 (ja) * | 2001-08-10 | 2008-06-04 | キヤノン株式会社 | インクジェット記録ヘッドの作成方法 |
TW552201B (en) * | 2001-11-08 | 2003-09-11 | Benq Corp | Fluid injection head structure and method thereof |
JP3970119B2 (ja) * | 2002-07-19 | 2007-09-05 | キヤノン株式会社 | インクジェット記録ヘッドおよび該インクジェット記録ヘッドを用いた記録装置 |
JP3974096B2 (ja) * | 2002-09-20 | 2007-09-12 | キヤノン株式会社 | 圧電体素子及びインクジェット記録ヘッド |
KR100499141B1 (ko) * | 2003-01-15 | 2005-07-04 | 삼성전자주식회사 | 유체의 상변화에 의해 구동되는 마이크로 펌프 |
JP4776154B2 (ja) * | 2003-09-03 | 2011-09-21 | キヤノン株式会社 | 圧電体素子、インクジェット記録ヘッド、圧電体素子の製造方法 |
US7344218B2 (en) * | 2003-11-06 | 2008-03-18 | Canon Kabushiki Kaisha | Printhead driving method, printhead substrate, printhead, head cartridge and printing apparatus |
TWI267446B (en) * | 2003-11-06 | 2006-12-01 | Canon Kk | Printhead substrate, printhead using the substrate, head cartridge including the printhead, method of driving the printhead, and printing apparatus using the printhead |
JP4537246B2 (ja) * | 2004-05-06 | 2010-09-01 | キヤノン株式会社 | インクジェット記録ヘッド用基体の製造方法及び該方法により製造された前記基体を用いた記録ヘッドの製造方法 |
CN100364770C (zh) * | 2004-06-07 | 2008-01-30 | 旺宏电子股份有限公司 | 用于使用微机电系统的喷墨头的流体排出装置及其制造方法与操作方法 |
US7629111B2 (en) * | 2004-06-28 | 2009-12-08 | Canon Kabushiki Kaisha | Liquid discharge head manufacturing method, and liquid discharge head obtained using this method |
DE602005022448D1 (de) * | 2004-06-28 | 2010-09-02 | Canon Kk | Ekopfs und unter verwendung dieses verfahrens erhaltener flüssigkeitsausgabekopf |
JP4182035B2 (ja) * | 2004-08-16 | 2008-11-19 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
JP4137027B2 (ja) * | 2004-08-16 | 2008-08-20 | キヤノン株式会社 | インクジェットヘッド用基板、該基板の製造方法および前記基板を用いるインクジェットヘッド |
TWI259424B (en) * | 2004-09-27 | 2006-08-01 | Au Optronics Corp | Method and device for adjusting driving voltage of microelectromechanical optical device and display using the same |
US7195341B2 (en) * | 2004-09-30 | 2007-03-27 | Lexmark International, Inc. | Power and ground buss layout for reduced substrate size |
JP4630680B2 (ja) * | 2005-01-31 | 2011-02-09 | キヤノン株式会社 | 半導体素子の製造方法およびインクジェット記録ヘッドの製造方法 |
US7472975B2 (en) * | 2005-07-08 | 2009-01-06 | Canon Kabushiki Kaisha | Substrate for ink jet printing head, ink jet printing head, ink jet printing apparatus, and method of blowing fuse element of ink jet printing head |
JP5311975B2 (ja) * | 2007-12-12 | 2013-10-09 | キヤノン株式会社 | 液体吐出ヘッド用基体及びこれを用いる液体吐出ヘッド |
US11060400B1 (en) | 2020-05-20 | 2021-07-13 | Halliburton Energy Services, Inc. | Methods to activate downhole tools |
US11255189B2 (en) | 2020-05-20 | 2022-02-22 | Halliburton Energy Services, Inc. | Methods to characterize subterranean fluid composition and adjust operating conditions using MEMS technology |
US11255191B2 (en) * | 2020-05-20 | 2022-02-22 | Halliburton Energy Services, Inc. | Methods to characterize wellbore fluid composition and provide optimal additive dosing using MEMS technology |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5619177A (en) * | 1995-01-27 | 1997-04-08 | Mjb Company | Shape memory alloy microactuator having an electrostatic force and heating means |
US5838351A (en) * | 1995-10-26 | 1998-11-17 | Hewlett-Packard Company | Valve assembly for controlling fluid flow within an ink-jet pen |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3896309A (en) * | 1973-05-21 | 1975-07-22 | Westinghouse Electric Corp | Radiation detecting device |
JP3402661B2 (ja) * | 1992-07-06 | 2003-05-06 | キヤノン株式会社 | カンチレバー型プローブ、及びこれを用いた情報処理装置 |
US6154237A (en) | 1995-12-05 | 2000-11-28 | Canon Kabushiki Kaisha | Liquid ejecting method, liquid ejecting head and liquid ejecting apparatus in which motion of a movable member is controlled |
US5693545A (en) * | 1996-02-28 | 1997-12-02 | Motorola, Inc. | Method for forming a semiconductor sensor FET device |
JP3706715B2 (ja) | 1996-07-09 | 2005-10-19 | キヤノン株式会社 | 液体吐出ヘッド,液体吐出方法,ヘッドカートリッジ,液体吐出装置,プリントシステムならびに回復処理方法 |
US5903380A (en) * | 1997-05-01 | 1999-05-11 | Rockwell International Corp. | Micro-electromechanical (MEM) optical resonator and method |
US6213589B1 (en) * | 1997-07-15 | 2001-04-10 | Silverbrook Research Pty Ltd. | Planar thermoelastic bend actuator ink jet printing mechanism |
-
2000
- 2000-06-01 US US09/584,784 patent/US6402302B1/en not_active Expired - Fee Related
- 2000-06-02 CA CA002311143A patent/CA2311143C/en not_active Expired - Fee Related
- 2000-06-02 CN CNB001201786A patent/CN1136098C/zh not_active Expired - Fee Related
- 2000-06-02 SG SG200003100A patent/SG85707A1/en unknown
- 2000-06-02 EP EP00112012A patent/EP1057639B1/en not_active Expired - Lifetime
- 2000-06-02 DE DE60034269T patent/DE60034269T2/de not_active Expired - Fee Related
- 2000-06-02 AU AU37863/00A patent/AU774272B2/en not_active Ceased
- 2000-06-03 TW TW089110885A patent/TW513349B/zh not_active IP Right Cessation
- 2000-06-05 KR KR1020000030703A patent/KR100340272B1/ko not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5619177A (en) * | 1995-01-27 | 1997-04-08 | Mjb Company | Shape memory alloy microactuator having an electrostatic force and heating means |
US5838351A (en) * | 1995-10-26 | 1998-11-17 | Hewlett-Packard Company | Valve assembly for controlling fluid flow within an ink-jet pen |
US5897789A (en) * | 1995-10-26 | 1999-04-27 | Hewlett-Packard Company | Valve assembly for controlling fluid flow within an ink-jet pen |
Also Published As
Publication number | Publication date |
---|---|
CA2311143C (en) | 2003-03-25 |
DE60034269D1 (de) | 2007-05-24 |
AU3786300A (en) | 2000-12-07 |
KR20010007234A (ko) | 2001-01-26 |
DE60034269T2 (de) | 2008-03-20 |
US6402302B1 (en) | 2002-06-11 |
EP1057639A2 (en) | 2000-12-06 |
CN1136098C (zh) | 2004-01-28 |
EP1057639A3 (en) | 2001-05-02 |
CA2311143A1 (en) | 2000-12-04 |
EP1057639B1 (en) | 2007-04-11 |
TW513349B (en) | 2002-12-11 |
CN1276295A (zh) | 2000-12-13 |
AU774272B2 (en) | 2004-06-24 |
KR100340272B1 (ko) | 2002-06-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
SG85707A1 (en) | Liquid discharge head, manufacturing method thereof, and microeletromechanical device | |
SG89380A1 (en) | Fluid discharge device and fluid discharge method | |
EP1300823A4 (en) | DISPLAY DEVICE AND METHOD | |
EP1205252A4 (en) | METHOD AND DEVICE FOR FORMING A QUANTITY LIQUID DROPLET IN A TRACE STATE | |
ZA200203367B (en) | Antidiabetic formulation and method. | |
HUP0200884A2 (en) | Injector device and method for its operation | |
GB0114685D0 (en) | Dispensing apparatus and method | |
AU2002227414A8 (en) | Infusion devices and method | |
EP1146555A4 (en) | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF | |
HK1064982A1 (en) | Droplets discharging method and device for discharging constant-volume droplets | |
EP1395248A4 (en) | FLUID DISPENSING DEVICE AND ASSOCIATED METHOD | |
ZA200108217B (en) | Application apparatus and method. | |
EP1143773A4 (en) | ELECTROLUMINESCENT DEVICE AND CORRESPONDING MANUFACTURING METHOD, AND DISPLAY AND LIGHTING DEVICE COMPRISING SAID DEVICE | |
HK1053012A1 (en) | Semiconductor device and forming method thereof | |
IL161893A0 (en) | 5-Phenylpyrimidines, agents comprising the same, method for production and use thereof | |
DE69936025D1 (de) | Flüssigkeitsausstosskopf, Flüssigkeitsausstossverfahren und Flüssigkeitsausstossvorrichtung | |
GB2357197B (en) | Discharge device | |
AU4947001A (en) | Dispenser apparatus and method | |
EP0976561B8 (en) | Liquid discharge head, and liquid discharge apparatus | |
HK1063024A1 (en) | Liquid ejecting device and method for operating anejecting device | |
DE69940298D1 (de) | Flüssigkeitsausstosskopf, Flüssigkeitsausstossverfahren und Flüssigkeitsausstossdruckgerät | |
EP1170784A4 (en) | SEMICONDUCTOR DEVICE AND ASSOCIATED PRODUCTION METHOD | |
HK1036780A1 (en) | Label production device and the method thereof. | |
GB2350746B (en) | Email-reception indication device and method | |
SG84603A1 (en) | Method of manufacturing a liquid discharge head, liquid discharge head manufactured by the same method, and method of manufacturing a minute mechanical apparatus |