SG72866A1 - Device and process for the measurement of objects at selected measurement positions - Google Patents

Device and process for the measurement of objects at selected measurement positions

Info

Publication number
SG72866A1
SG72866A1 SG1998003818A SG1998003818A SG72866A1 SG 72866 A1 SG72866 A1 SG 72866A1 SG 1998003818 A SG1998003818 A SG 1998003818A SG 1998003818 A SG1998003818 A SG 1998003818A SG 72866 A1 SG72866 A1 SG 72866A1
Authority
SG
Singapore
Prior art keywords
measurement
objects
positions
measurement positions
selected measurement
Prior art date
Application number
SG1998003818A
Other languages
English (en)
Inventor
Michael Graf
Kuno Backhaus
Dieter Albrecht
Nora Kratsch
Gunter Flemming
Detlef Wolter
Frank Litzba
Harald Steiner
Original Assignee
Jenoptik Jena Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jenoptik Jena Gmbh filed Critical Jenoptik Jena Gmbh
Publication of SG72866A1 publication Critical patent/SG72866A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
SG1998003818A 1997-11-27 1998-09-24 Device and process for the measurement of objects at selected measurement positions SG72866A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE1997152509 DE19752509C2 (de) 1997-11-27 1997-11-27 Einrichtung und Verfahren zur Vermessung von Objekten an ausgewälten Meßpositionen

Publications (1)

Publication Number Publication Date
SG72866A1 true SG72866A1 (en) 2000-05-23

Family

ID=7849940

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1998003818A SG72866A1 (en) 1997-11-27 1998-09-24 Device and process for the measurement of objects at selected measurement positions

Country Status (4)

Country Link
KR (1) KR19990044836A (de)
DE (1) DE19752509C2 (de)
SG (1) SG72866A1 (de)
TW (1) TW365647B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4469462B2 (ja) 2000-05-25 2010-05-26 株式会社ニコン キャリア形状測定機
JP5079028B2 (ja) * 2010-02-01 2012-11-21 株式会社ニコン キャリア形状測定機
DE102011117273A1 (de) * 2011-10-31 2013-05-02 Torsten Matthias Automatische Strukturbestimmung
DE102012207725A1 (de) 2012-05-09 2012-09-27 Carl Zeiss Ag Ringförmiges Beleuchtungssystem

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI56451C (fi) * 1977-10-20 1980-01-10 Ahlstroem Oy Foerfarande och anordning foer maetning av traevirke
DE3233101C2 (de) * 1982-09-07 1985-05-15 Feinprüf Feinmeß- und Prüfgeräte GmbH, 3400 Göttingen Kolbenmeßmaschine
DE4033588A1 (de) * 1990-10-23 1992-04-30 Tropf Hermann Dr Ing Verfahren und vorrichtung zur kontrastreichen, konturgenauen darstellung, sowie zur vermessung von werkstueckoberflaechen, insbesondere profilquerschnitten, mittels kamera und beleuchtungseinheit
DE29503708U1 (de) * 1995-03-04 1995-05-04 Kliro Anlagenbau GmbH & Co. KG i.K., 51709 Marienheide Vorrichtung zum Messen von rotationssymmetrischen Teilen
DE19624040A1 (de) * 1995-06-15 1996-12-19 Vialog Visuelle Automations An Verfahren zur Ermittlung des Umfangsprofils eines Rotationskörpers

Also Published As

Publication number Publication date
TW365647B (en) 1999-08-01
KR19990044836A (ko) 1999-06-25
DE19752509C2 (de) 1999-09-30
DE19752509A1 (de) 1999-07-01

Similar Documents

Publication Publication Date Title
GB2316749B (en) Body function measuring apparatus
GB2329244B (en) Non-contact measuring apparatus
GB2290918B (en) Distance measurement device
AU4111497A (en) Three-dimensional object measurement process and device
HUT77918A (hu) Berendezés és alkalmazása oxiklórozáshoz
GB2324604B (en) Measuring apparatus
GB9808492D0 (en) Apparatus for the measurement of position
SG72866A1 (en) Device and process for the measurement of objects at selected measurement positions
GB2326772B (en) Electronic device and method for measuring the electronic device
GB2289947B (en) Position and force measuring apparatus
GB2320568B (en) Measuring device
GB2318238B (en) Distance measurement device
GB0013393D0 (en) Device and method for fixing the mutual positions of two objects
GB9524367D0 (en) Measurement device
KR100215107B1 (en) Circularity measuring device
GB9418892D0 (en) Means for setting out and measuring angles
GB2333727B (en) Device for the elimination of scale and/or preventing the formation of scale
GR960200163U (en) Apparatus for measuring objects of various shapes
GB9525671D0 (en) Device for setting out and measuring angles
GB9504214D0 (en) Device for setting out and measuring angles
GB9807029D0 (en) Measuring and fitting apparatus
GB9611153D0 (en) Measuring device
GB9614597D0 (en) Measuring device
GB9626645D0 (en) Measuring device
GB9410791D0 (en) Measuring device