SG72609A1 - A semiconductor device for fabrication process - Google Patents

A semiconductor device for fabrication process

Info

Publication number
SG72609A1
SG72609A1 SG1996001250A SG1996001250A SG72609A1 SG 72609 A1 SG72609 A1 SG 72609A1 SG 1996001250 A SG1996001250 A SG 1996001250A SG 1996001250 A SG1996001250 A SG 1996001250A SG 72609 A1 SG72609 A1 SG 72609A1
Authority
SG
Singapore
Prior art keywords
semiconductor device
fabrication process
fabrication
semiconductor
Prior art date
Application number
SG1996001250A
Other languages
English (en)
Inventor
Richard Anthony Alex Rodrigues
Ewen Gillespie
Original Assignee
Seagate Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seagate Technology filed Critical Seagate Technology
Publication of SG72609A1 publication Critical patent/SG72609A1/en

Links

Classifications

    • H10W10/30
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/0112Integrating together multiple components covered by H10D8/00, H10D10/00 or H10D18/00, e.g. integrating multiple BJTs
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01Manufacture or treatment
    • H10D84/02Manufacture or treatment characterised by using material-based technologies
    • H10D84/03Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
    • H10P76/40
    • H10W10/031
    • H10W20/021
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/01Bipolar transistors-ion implantation
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/163Thick-thin oxides
SG1996001250A 1989-10-04 1990-10-04 A semiconductor device for fabrication process SG72609A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8922331A GB2237445B (en) 1989-10-04 1989-10-04 A semiconductor device fabrication process

Publications (1)

Publication Number Publication Date
SG72609A1 true SG72609A1 (en) 2000-09-19

Family

ID=10664022

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996001250A SG72609A1 (en) 1989-10-04 1990-10-04 A semiconductor device for fabrication process

Country Status (7)

Country Link
US (1) US5679586A (enExample)
EP (1) EP0447522B1 (enExample)
JP (1) JPH0732164B2 (enExample)
DE (1) DE69025916T2 (enExample)
GB (1) GB2237445B (enExample)
SG (1) SG72609A1 (enExample)
WO (1) WO1991005365A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6017785A (en) * 1996-08-15 2000-01-25 Integrated Device Technology, Inc. Method for improving latch-up immunity and interwell isolation in a semiconductor device
US6001701A (en) * 1997-06-09 1999-12-14 Lucent Technologies Inc. Process for making bipolar having graded or modulated collector
KR100374243B1 (ko) * 1998-10-08 2003-03-03 미쓰비시덴키 가부시키가이샤 반도체장치 및 그의 제조방법과 반도체장치 보호회로
US6716363B1 (en) 1999-04-20 2004-04-06 Seagate Technology Llc Electrode patterning for a differential PZT activator

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE72967C (de) * TH. HELLER in Berlin S.O., Obmgasse 5 a Form zur Herstellung von Glasstöpseln für Tropfgläser
DE244607C (enExample) *
US3928081A (en) * 1973-10-26 1975-12-23 Signetics Corp Method for fabricating semiconductor devices using composite mask and ion implantation
US3928082A (en) * 1973-12-28 1975-12-23 Texas Instruments Inc Self-aligned transistor process
US3933528A (en) * 1974-07-02 1976-01-20 Texas Instruments Incorporated Process for fabricating integrated circuits utilizing ion implantation
US4151019A (en) * 1974-12-27 1979-04-24 Tokyo Shibaura Electric Co., Ltd. Method of manufacturing integrated injection logic semiconductor devices utilizing self-aligned double-diffusion techniques
US4018627A (en) * 1975-09-22 1977-04-19 Signetics Corporation Method for fabricating semiconductor devices utilizing oxide protective layer
US4021270A (en) * 1976-06-28 1977-05-03 Motorola, Inc. Double master mask process for integrated circuit manufacture
JPS5413779A (en) * 1977-07-04 1979-02-01 Toshiba Corp Semiconductor integrated circuit device
IT1166587B (it) * 1979-01-22 1987-05-05 Ates Componenti Elettron Processo per la fabbricazione di transistori mos complementari ad alta integrazione per tensioni elevate
US4403395A (en) * 1979-02-15 1983-09-13 Texas Instruments Incorporated Monolithic integration of logic, control and high voltage interface circuitry
JPS57157541A (en) * 1981-03-24 1982-09-29 Toshiba Corp Manufacture of semiconductor device
US4382827A (en) * 1981-04-27 1983-05-10 Ncr Corporation Silicon nitride S/D ion implant mask in CMOS device fabrication
DE3133468A1 (de) * 1981-08-25 1983-03-17 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von hochintegrierten komplementaeren mos-feldeffekttransistorschaltungen in siliziumgate-technologie
JPS5955054A (ja) * 1982-09-24 1984-03-29 Hitachi Ltd 半導体装置の製造方法
JPS60175451A (ja) * 1984-02-20 1985-09-09 Matsushita Electronics Corp 半導体装置の製造方法
US4577391A (en) * 1984-07-27 1986-03-25 Monolithic Memories, Inc. Method of manufacturing CMOS devices
US4648909A (en) * 1984-11-28 1987-03-10 Fairchild Semiconductor Corporation Fabrication process employing special masks for the manufacture of high speed bipolar analog integrated circuits
US4717678A (en) * 1986-03-07 1988-01-05 International Business Machines Corporation Method of forming self-aligned P contact
JPH0812918B2 (ja) * 1986-03-28 1996-02-07 株式会社東芝 半導体装置の製造方法
US4760033A (en) * 1986-04-08 1988-07-26 Siemens Aktiengesellschaft Method for the manufacture of complementary MOS field effect transistors in VLSI technology
US5141881A (en) * 1989-04-20 1992-08-25 Sanyo Electric Co., Ltd. Method for manufacturing a semiconductor integrated circuit
JPH06101540B2 (ja) * 1989-05-19 1994-12-12 三洋電機株式会社 半導体集積回路の製造方法

Also Published As

Publication number Publication date
JPH0732164B2 (ja) 1995-04-10
DE69025916D1 (de) 1996-04-18
EP0447522A1 (en) 1991-09-25
US5679586A (en) 1997-10-21
EP0447522B1 (en) 1996-03-13
GB2237445A (en) 1991-05-01
GB2237445B (en) 1994-01-12
JPH0732164B1 (enExample) 1995-04-10
DE69025916T2 (de) 1996-09-26
GB8922331D0 (en) 1989-11-22
WO1991005365A1 (en) 1991-04-18

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