SG67884A1 - Screened capacitive sensor - Google Patents

Screened capacitive sensor

Info

Publication number
SG67884A1
SG67884A1 SG1996001663A SG1996001663A SG67884A1 SG 67884 A1 SG67884 A1 SG 67884A1 SG 1996001663 A SG1996001663 A SG 1996001663A SG 1996001663 A SG1996001663 A SG 1996001663A SG 67884 A1 SG67884 A1 SG 67884A1
Authority
SG
Singapore
Prior art keywords
screened
capacitive sensor
capacitive
sensor
screened capacitive
Prior art date
Application number
SG1996001663A
Other languages
English (en)
Inventor
Roger L Frick
Original Assignee
Rosemount Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rosemount Inc filed Critical Rosemount Inc
Publication of SG67884A1 publication Critical patent/SG67884A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2417—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying separation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
SG1996001663A 1993-09-24 1994-08-15 Screened capacitive sensor SG67884A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/126,364 US5424650A (en) 1993-09-24 1993-09-24 Capacitive pressure sensor having circuitry for eliminating stray capacitance

Publications (1)

Publication Number Publication Date
SG67884A1 true SG67884A1 (en) 1999-10-19

Family

ID=22424428

Family Applications (1)

Application Number Title Priority Date Filing Date
SG1996001663A SG67884A1 (en) 1993-09-24 1994-08-15 Screened capacitive sensor

Country Status (9)

Country Link
US (1) US5424650A (fr)
EP (1) EP0740777B1 (fr)
JP (1) JP3448060B2 (fr)
CN (1) CN1131983A (fr)
CA (1) CA2169823A1 (fr)
DE (1) DE69423004T2 (fr)
RU (1) RU2144680C1 (fr)
SG (1) SG67884A1 (fr)
WO (1) WO1995008752A2 (fr)

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US6756095B2 (en) 2001-01-10 2004-06-29 Avery Dennison Corporation Heat-sealable laminate
WO2002075331A1 (fr) * 2001-03-16 2002-09-26 Nils Aage Juul Eilersen Circuit de mesure de la capacitance
US6761829B2 (en) 2001-04-26 2004-07-13 Rockwell Automation Technologies, Inc. Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void
US6756310B2 (en) 2001-09-26 2004-06-29 Rockwell Automation Technologies, Inc. Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques
US6815243B2 (en) 2001-04-26 2004-11-09 Rockwell Automation Technologies, Inc. Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate
US6794271B2 (en) * 2001-09-28 2004-09-21 Rockwell Automation Technologies, Inc. Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge
US6768628B2 (en) 2001-04-26 2004-07-27 Rockwell Automation Technologies, Inc. Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap
US6516672B2 (en) 2001-05-21 2003-02-11 Rosemount Inc. Sigma-delta analog to digital converter for capacitive pressure sensor and process transmitter
JP4789357B2 (ja) * 2001-06-27 2011-10-12 京セラ株式会社 圧力検出装置用パッケージ
US6664786B2 (en) 2001-07-30 2003-12-16 Rockwell Automation Technologies, Inc. Magnetic field sensor using microelectromechanical system
DE10143034B4 (de) * 2001-09-01 2004-11-11 Infineon Technologies Ag Vorrichtung zum Messen von Störkapazitäten auf einer integrierten Schaltung
US6773653B2 (en) * 2001-10-05 2004-08-10 Avery Dennison Corporation In-mold labeling method
US6690178B2 (en) 2001-10-26 2004-02-10 Rockwell Automation Technologies, Inc. On-board microelectromechanical system (MEMS) sensing device for power semiconductors
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US6716501B2 (en) 2002-07-18 2004-04-06 Avery Dennison Corporation Multilayered film
WO2004072836A1 (fr) * 2003-02-06 2004-08-26 Southwest Research Institute Interface de locomotion pour systeme de realite virtuelle faisant appel a un tapis manosensible
US6975193B2 (en) * 2003-03-25 2005-12-13 Rockwell Automation Technologies, Inc. Microelectromechanical isolating circuit
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EP1617990A4 (fr) * 2003-05-01 2006-08-09 Avery Dennison Corp Film multicouche
JP4356003B2 (ja) * 2003-09-30 2009-11-04 アイシン精機株式会社 静電容量検出装置
JP2005140657A (ja) * 2003-11-07 2005-06-02 Denso Corp 静電容量型センサの容量変化検出回路
JP3930862B2 (ja) * 2004-02-13 2007-06-13 東京エレクトロン株式会社 容量型センサ
US8487231B2 (en) 2007-03-05 2013-07-16 Arokia Nathan Sensor pixels, arrays and array systems and methods therefor
JP5496446B2 (ja) * 2007-07-12 2014-05-21 東海ゴム工業株式会社 静電容量型センサ
CN103221795B (zh) * 2010-09-20 2015-03-11 快捷半导体公司 包括参考电容器的微机电压力传感器
DE102011078557A1 (de) * 2011-07-01 2013-01-03 Endress + Hauser Gmbh + Co. Kg Verfahren zum Betreiben eines Absolut- oder Relativdrucksensors mit einem kapazitiven Wandler
US8943895B2 (en) 2012-09-07 2015-02-03 Dynisco Instruments Llc Capacitive pressure sensor
US9103738B2 (en) 2012-09-07 2015-08-11 Dynisco Instruments Llc Capacitive pressure sensor with intrinsic temperature compensation
US8984952B2 (en) 2012-09-07 2015-03-24 Dynisco Instruments Llc Capacitive pressure sensor
US10107773B2 (en) * 2012-10-29 2018-10-23 MEMS-Vision International Inc. Methods and systems for humidity and pressure sensor overlay integration with electronics
CN104614583A (zh) * 2015-02-11 2015-05-13 中国科学院空间科学与应用研究中心 一种悬浮电位监测系统
US9628104B2 (en) * 2015-03-13 2017-04-18 Rosemount Inc. High resolution sigma delta modulator for capacitance sensor terminal displacement measurement
CN104828263B (zh) * 2015-04-07 2018-02-13 中国科学院空间科学与应用研究中心 一种用于航天器表面带电效应的监测装置

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Also Published As

Publication number Publication date
JPH09503294A (ja) 1997-03-31
WO1995008752A2 (fr) 1995-03-30
RU2144680C1 (ru) 2000-01-20
US5424650A (en) 1995-06-13
EP0740777B1 (fr) 2000-02-09
WO1995008752A3 (fr) 1995-06-01
CA2169823A1 (fr) 1995-03-30
EP0740777A1 (fr) 1996-11-06
DE69423004T2 (de) 2000-09-14
JP3448060B2 (ja) 2003-09-16
DE69423004D1 (de) 2000-03-16
CN1131983A (zh) 1996-09-25

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