SG181266A1 - Improved method for making a pattern from sidewall image transfer - Google Patents

Improved method for making a pattern from sidewall image transfer Download PDF

Info

Publication number
SG181266A1
SG181266A1 SG2011086600A SG2011086600A SG181266A1 SG 181266 A1 SG181266 A1 SG 181266A1 SG 2011086600 A SG2011086600 A SG 2011086600A SG 2011086600 A SG2011086600 A SG 2011086600A SG 181266 A1 SG181266 A1 SG 181266A1
Authority
SG
Singapore
Prior art keywords
etching mask
etching
covering layer
layer
pattern
Prior art date
Application number
SG2011086600A
Other languages
English (en)
Inventor
Sebastien Barnola
Jerome Belledent
Original Assignee
Commissariat Energie Atomique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat Energie Atomique filed Critical Commissariat Energie Atomique
Publication of SG181266A1 publication Critical patent/SG181266A1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
    • H10P76/4085—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes characterised by the processes involved to create the masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/80—Etching

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Semiconductor Memories (AREA)
SG2011086600A 2010-11-30 2011-11-22 Improved method for making a pattern from sidewall image transfer SG181266A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1004655A FR2968122B1 (fr) 2010-11-30 2010-11-30 Procédé de réalisation amélioré d'un motif a partir du transfert par espaceurs latéraux

Publications (1)

Publication Number Publication Date
SG181266A1 true SG181266A1 (en) 2012-06-28

Family

ID=44276342

Family Applications (1)

Application Number Title Priority Date Filing Date
SG2011086600A SG181266A1 (en) 2010-11-30 2011-11-22 Improved method for making a pattern from sidewall image transfer

Country Status (7)

Country Link
US (1) US8669188B2 (https=)
EP (1) EP2458621B1 (https=)
JP (1) JP5959833B2 (https=)
KR (1) KR101881594B1 (https=)
FR (1) FR2968122B1 (https=)
SG (1) SG181266A1 (https=)
TW (1) TWI529777B (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2990794B1 (fr) * 2012-05-16 2016-11-18 Commissariat Energie Atomique Procede de realisation d'un substrat muni de zones actives variees et de transistors planaires et tridimensionnels
US8735296B2 (en) * 2012-07-18 2014-05-27 International Business Machines Corporation Method of simultaneously forming multiple structures having different critical dimensions using sidewall transfer
US8716133B2 (en) * 2012-08-23 2014-05-06 International Business Machines Corporation Three photomask sidewall image transfer method
US9040371B2 (en) 2013-08-07 2015-05-26 International Business Machines Corporation Integration of dense and variable pitch fin structures
US9293345B2 (en) 2013-08-16 2016-03-22 Globalfoundries Inc. Sidewall image transfer with a spin-on hardmask
US9064901B1 (en) 2013-12-23 2015-06-23 International Business Machines Corporation Fin density control of multigate devices through sidewall image transfer processes
US9252243B2 (en) 2014-02-07 2016-02-02 International Business Machines Corporation Gate structure integration scheme for fin field effect transistors
CN106373880B (zh) * 2015-07-22 2021-05-25 联华电子股份有限公司 半导体元件及其形成方法
CN112768351B (zh) * 2019-11-06 2022-06-10 长鑫存储技术有限公司 一种图形形成方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7151040B2 (en) * 2004-08-31 2006-12-19 Micron Technology, Inc. Methods for increasing photo alignment margins
US7615445B2 (en) * 2006-09-21 2009-11-10 Sandisk Corporation Methods of reducing coupling between floating gates in nonvolatile memory
US7479429B2 (en) * 2007-01-31 2009-01-20 Freescale Semiconductor, Inc. Split game memory cell method
KR100966976B1 (ko) * 2007-12-28 2010-06-30 주식회사 하이닉스반도체 반도체 소자의 제조 방법
US9330934B2 (en) * 2009-05-18 2016-05-03 Micron Technology, Inc. Methods of forming patterns on substrates

Also Published As

Publication number Publication date
US8669188B2 (en) 2014-03-11
US20120132616A1 (en) 2012-05-31
KR20120059426A (ko) 2012-06-08
FR2968122B1 (fr) 2012-12-07
EP2458621A1 (fr) 2012-05-30
FR2968122A1 (fr) 2012-06-01
EP2458621B1 (fr) 2015-02-25
TWI529777B (en) 2016-04-11
TW201222627A (en) 2012-06-01
JP2012138570A (ja) 2012-07-19
KR101881594B1 (ko) 2018-07-24
JP5959833B2 (ja) 2016-08-02

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