SG165984A1 - Radial power megasonic transducer - Google Patents

Radial power megasonic transducer

Info

Publication number
SG165984A1
SG165984A1 SG200602465-7A SG2006024657A SG165984A1 SG 165984 A1 SG165984 A1 SG 165984A1 SG 2006024657 A SG2006024657 A SG 2006024657A SG 165984 A1 SG165984 A1 SG 165984A1
Authority
SG
Singapore
Prior art keywords
acoustic energy
substrate
generating means
surface area
energy generating
Prior art date
Application number
SG200602465-7A
Other languages
English (en)
Inventor
Mark J Beck
Richard B Vennerbeck
Raymond Y Lillard
Eric G Liebscher
Original Assignee
Product Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Product Systems Inc filed Critical Product Systems Inc
Publication of SG165984A1 publication Critical patent/SG165984A1/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/32—Sound-focusing or directing, e.g. scanning characterised by the shape of the source
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
SG200602465-7A 2001-11-02 2002-11-01 Radial power megasonic transducer SG165984A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35020601P 2001-11-02 2001-11-02

Publications (1)

Publication Number Publication Date
SG165984A1 true SG165984A1 (en) 2010-11-29

Family

ID=23375669

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200602465-7A SG165984A1 (en) 2001-11-02 2002-11-01 Radial power megasonic transducer

Country Status (13)

Country Link
US (4) US6791242B2 (de)
EP (1) EP1449268B1 (de)
JP (1) JP4156520B2 (de)
KR (1) KR100927493B1 (de)
CN (1) CN100472832C (de)
AT (1) ATE506702T1 (de)
AU (1) AU2002364693A1 (de)
DE (1) DE60239821D1 (de)
HK (1) HK1075541A1 (de)
RU (1) RU2004116689A (de)
SG (1) SG165984A1 (de)
TW (1) TW586974B (de)
WO (1) WO2003047306A2 (de)

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US7287537B2 (en) * 2002-01-29 2007-10-30 Akrion Technologies, Inc. Megasonic probe energy director
US20050054906A1 (en) * 2003-09-08 2005-03-10 Joseph Page Spatial detectors for in-vivo measurement of bio chemistry
JP4633571B2 (ja) * 2005-07-28 2011-02-16 オリンパスメディカルシステムズ株式会社 アレイ型超音波トランスデューサ及びその製造方法
JP4652959B2 (ja) * 2005-11-30 2011-03-16 芝浦メカトロニクス株式会社 基板の処理装置
US9049520B2 (en) 2006-01-20 2015-06-02 Akrion Systems Llc Composite transducer apparatus and system for processing a substrate and method of constructing the same
WO2007085015A2 (en) 2006-01-20 2007-07-26 Akrion Technologies, Inc. Acoustic energy system, method and apparatus for processing flat articles
WO2007085022A2 (en) * 2006-01-20 2007-07-26 Akrion Technologies, Inc. System, apparatus and methods for processing substrates using acoustic energy
US9987666B2 (en) 2006-01-20 2018-06-05 Naura Akrion Inc. Composite transducer apparatus and system for processing a substrate and method of constructing the same
KR100852396B1 (ko) * 2006-10-20 2008-08-14 한국기계연구원 초음파를 이용한 세정장치
CN101610980A (zh) * 2007-02-08 2009-12-23 丰塔纳技术公司 粒子去除方法及化合物
US7958899B2 (en) * 2007-08-21 2011-06-14 Dainippon Screen Mfg. Co., Ltd. Substrate cleaning apparatus and substrate cleaning method
US8957564B1 (en) 2010-06-29 2015-02-17 Silicon Light Machines Corporation Microelectromechanical system megasonic transducer
US9796000B2 (en) * 2011-07-04 2017-10-24 Product Systems Incorporated Uniform fluid manifold for acoustic transducer
US9138861B2 (en) 2012-02-15 2015-09-22 Taiwan Semiconductor Manufacturing Co., Ltd. CMP pad cleaning apparatus
WO2014002286A1 (ja) 2012-06-26 2014-01-03 本多電子株式会社 電気機械変換素子及びその製造方法
US10379324B2 (en) * 2013-08-02 2019-08-13 Honeywell International Inc. Adaptive optical zoom systems and methods
WO2017125242A1 (en) 2016-01-20 2017-07-27 DUSSAULT, Donald Herbert Method and apparatus for cleaning a disc record
CN114054429B (zh) * 2022-01-11 2022-04-01 北京东方金荣超声电器有限公司 大尺寸晶圆兆声清洗系统
KR102542354B1 (ko) * 2022-02-21 2023-06-13 (주)디바이스이엔지 초음파 세정 유닛을 포함하는 기판 처리장치

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WO1998014985A1 (en) * 1996-09-30 1998-04-09 Verteq, Inc. Wafer cleaning system

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Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4178188A (en) * 1977-09-14 1979-12-11 Branson Ultrasonics Corporation Method for cleaning workpieces by ultrasonic energy
WO1998014985A1 (en) * 1996-09-30 1998-04-09 Verteq, Inc. Wafer cleaning system

Also Published As

Publication number Publication date
US20060006766A1 (en) 2006-01-12
HK1075541A1 (en) 2005-12-16
TW586974B (en) 2004-05-11
US20050035689A1 (en) 2005-02-17
JP2005510890A (ja) 2005-04-21
CN1579026A (zh) 2005-02-09
EP1449268A2 (de) 2004-08-25
AU2002364693A1 (en) 2003-06-10
US6946774B2 (en) 2005-09-20
ATE506702T1 (de) 2011-05-15
US7145286B2 (en) 2006-12-05
AU2002364693A8 (en) 2003-06-10
EP1449268A4 (de) 2007-01-24
KR100927493B1 (ko) 2009-11-17
CN100472832C (zh) 2009-03-25
EP1449268B1 (de) 2011-04-20
US6882087B2 (en) 2005-04-19
WO2003047306A3 (en) 2003-10-30
US6791242B2 (en) 2004-09-14
US20050001510A1 (en) 2005-01-06
KR20050045940A (ko) 2005-05-17
WO2003047306A2 (en) 2003-06-05
DE60239821D1 (de) 2011-06-01
RU2004116689A (ru) 2005-02-10
US20030168946A1 (en) 2003-09-11
TW200300369A (en) 2003-06-01
JP4156520B2 (ja) 2008-09-24

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