DE60239821D1 - Radialleistungs-megasonic-wandler - Google Patents

Radialleistungs-megasonic-wandler

Info

Publication number
DE60239821D1
DE60239821D1 DE60239821T DE60239821T DE60239821D1 DE 60239821 D1 DE60239821 D1 DE 60239821D1 DE 60239821 T DE60239821 T DE 60239821T DE 60239821 T DE60239821 T DE 60239821T DE 60239821 D1 DE60239821 D1 DE 60239821D1
Authority
DE
Germany
Prior art keywords
acoustic energy
generating means
substrate
energy generating
surface area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60239821T
Other languages
English (en)
Inventor
Mark J Beck
Richard B Vennerbeck
Raymond Y Lillard
Eric G Liebscher
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Product Systems (ProSys) Inc
Original Assignee
Product Systems (ProSys) Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Product Systems (ProSys) Inc filed Critical Product Systems (ProSys) Inc
Application granted granted Critical
Publication of DE60239821D1 publication Critical patent/DE60239821D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/32—Sound-focusing or directing, e.g. scanning characterised by the shape of the source
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Compositions Of Oxide Ceramics (AREA)
DE60239821T 2001-11-02 2002-11-01 Radialleistungs-megasonic-wandler Expired - Lifetime DE60239821D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35020601P 2001-11-02 2001-11-02
PCT/US2002/035044 WO2003047306A2 (en) 2001-11-02 2002-11-01 Radial power megasonic transducer

Publications (1)

Publication Number Publication Date
DE60239821D1 true DE60239821D1 (de) 2011-06-01

Family

ID=23375669

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60239821T Expired - Lifetime DE60239821D1 (de) 2001-11-02 2002-11-01 Radialleistungs-megasonic-wandler

Country Status (13)

Country Link
US (4) US6791242B2 (de)
EP (1) EP1449268B1 (de)
JP (1) JP4156520B2 (de)
KR (1) KR100927493B1 (de)
CN (1) CN100472832C (de)
AT (1) ATE506702T1 (de)
AU (1) AU2002364693A1 (de)
DE (1) DE60239821D1 (de)
HK (1) HK1075541A1 (de)
RU (1) RU2004116689A (de)
SG (1) SG165984A1 (de)
TW (1) TW586974B (de)
WO (1) WO2003047306A2 (de)

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US7287537B2 (en) * 2002-01-29 2007-10-30 Akrion Technologies, Inc. Megasonic probe energy director
US20050054906A1 (en) * 2003-09-08 2005-03-10 Joseph Page Spatial detectors for in-vivo measurement of bio chemistry
JP4633571B2 (ja) * 2005-07-28 2011-02-16 オリンパスメディカルシステムズ株式会社 アレイ型超音波トランスデューサ及びその製造方法
JP4652959B2 (ja) * 2005-11-30 2011-03-16 芝浦メカトロニクス株式会社 基板の処理装置
US9049520B2 (en) 2006-01-20 2015-06-02 Akrion Systems Llc Composite transducer apparatus and system for processing a substrate and method of constructing the same
KR101369197B1 (ko) * 2006-01-20 2014-03-27 아크리온 테크놀로지즈 인코포레이티드 평평한 물품을 처리하는 음향 에너지 시스템, 방법 및 장치
US9987666B2 (en) 2006-01-20 2018-06-05 Naura Akrion Inc. Composite transducer apparatus and system for processing a substrate and method of constructing the same
WO2007085022A2 (en) * 2006-01-20 2007-07-26 Akrion Technologies, Inc. System, apparatus and methods for processing substrates using acoustic energy
KR100852396B1 (ko) * 2006-10-20 2008-08-14 한국기계연구원 초음파를 이용한 세정장치
SG192313A1 (en) * 2007-02-08 2013-08-30 Fontana Technology Particle removal method and composition
US7958899B2 (en) * 2007-08-21 2011-06-14 Dainippon Screen Mfg. Co., Ltd. Substrate cleaning apparatus and substrate cleaning method
US8957564B1 (en) 2010-06-29 2015-02-17 Silicon Light Machines Corporation Microelectromechanical system megasonic transducer
US9796000B2 (en) * 2011-07-04 2017-10-24 Product Systems Incorporated Uniform fluid manifold for acoustic transducer
US9138861B2 (en) 2012-02-15 2015-09-22 Taiwan Semiconductor Manufacturing Co., Ltd. CMP pad cleaning apparatus
KR101417699B1 (ko) 2012-06-26 2014-07-09 혼다덴시 가부시키가이샤 전기기계 변환소자 및 그 제조방법
US10379324B2 (en) * 2013-08-02 2019-08-13 Honeywell International Inc. Adaptive optical zoom systems and methods
WO2017125242A1 (en) 2016-01-20 2017-07-27 DUSSAULT, Donald Herbert Method and apparatus for cleaning a disc record
CN114054429B (zh) * 2022-01-11 2022-04-01 北京东方金荣超声电器有限公司 大尺寸晶圆兆声清洗系统
KR102542354B1 (ko) * 2022-02-21 2023-06-13 (주)디바이스이엔지 초음파 세정 유닛을 포함하는 기판 처리장치

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US13355A (en) * 1855-07-31 Machine for compressing ptjddlers balls and other masses op iron
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US190608A (en) * 1877-05-08 Improvement in mounted maps
US15216A (en) * 1856-07-01 Machine fob sawing fellies
US96189A (en) * 1869-10-26 Improved show-counter
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Also Published As

Publication number Publication date
EP1449268A4 (de) 2007-01-24
WO2003047306A2 (en) 2003-06-05
US20050001510A1 (en) 2005-01-06
JP2005510890A (ja) 2005-04-21
CN1579026A (zh) 2005-02-09
US20050035689A1 (en) 2005-02-17
HK1075541A1 (en) 2005-12-16
JP4156520B2 (ja) 2008-09-24
US20060006766A1 (en) 2006-01-12
EP1449268A2 (de) 2004-08-25
US6946774B2 (en) 2005-09-20
RU2004116689A (ru) 2005-02-10
EP1449268B1 (de) 2011-04-20
AU2002364693A1 (en) 2003-06-10
KR20050045940A (ko) 2005-05-17
CN100472832C (zh) 2009-03-25
AU2002364693A8 (en) 2003-06-10
TW200300369A (en) 2003-06-01
KR100927493B1 (ko) 2009-11-17
US6882087B2 (en) 2005-04-19
ATE506702T1 (de) 2011-05-15
US20030168946A1 (en) 2003-09-11
US7145286B2 (en) 2006-12-05
US6791242B2 (en) 2004-09-14
SG165984A1 (en) 2010-11-29
TW586974B (en) 2004-05-11
WO2003047306A3 (en) 2003-10-30

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