ATE506702T1 - Radialleistungs-megasonic-wandler - Google Patents

Radialleistungs-megasonic-wandler

Info

Publication number
ATE506702T1
ATE506702T1 AT02803970T AT02803970T ATE506702T1 AT E506702 T1 ATE506702 T1 AT E506702T1 AT 02803970 T AT02803970 T AT 02803970T AT 02803970 T AT02803970 T AT 02803970T AT E506702 T1 ATE506702 T1 AT E506702T1
Authority
AT
Austria
Prior art keywords
acoustic energy
generating means
substrate
energy generating
surface area
Prior art date
Application number
AT02803970T
Other languages
English (en)
Inventor
Mark Beck
Richard Vennerbeck
Raymond Lillard
Eric Liebscher
Original Assignee
Product Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Product Systems Inc filed Critical Product Systems Inc
Application granted granted Critical
Publication of ATE506702T1 publication Critical patent/ATE506702T1/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • G—PHYSICS
    • G10—MUSICAL INSTRUMENTS; ACOUSTICS
    • G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18—Methods or devices for transmitting, conducting or directing sound
    • G10K11/26—Sound-focusing or directing, e.g. scanning
    • G10K11/32—Sound-focusing or directing, e.g. scanning characterised by the shape of the source
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/04—Cleaning involving contact with liquid
    • B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
    • B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS
    • H04R23/00—Transducers other than those covered by groups H04R9/00 - H04R21/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AT02803970T 2001-11-02 2002-11-01 Radialleistungs-megasonic-wandler ATE506702T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US35020601P 2001-11-02 2001-11-02
PCT/US2002/035044 WO2003047306A2 (en) 2001-11-02 2002-11-01 Radial power megasonic transducer

Publications (1)

Publication Number Publication Date
ATE506702T1 true ATE506702T1 (de) 2011-05-15

Family

ID=23375669

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02803970T ATE506702T1 (de) 2001-11-02 2002-11-01 Radialleistungs-megasonic-wandler

Country Status (12)

Country Link
US (4) US6791242B2 (de)
EP (1) EP1449268B1 (de)
JP (1) JP4156520B2 (de)
KR (1) KR100927493B1 (de)
CN (1) CN100472832C (de)
AT (1) ATE506702T1 (de)
AU (1) AU2002364693A1 (de)
DE (1) DE60239821D1 (de)
RU (1) RU2004116689A (de)
SG (1) SG165984A1 (de)
TW (1) TW586974B (de)
WO (1) WO2003047306A2 (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6291180B1 (en) * 1999-09-29 2001-09-18 American Registry Of Pathology Ultrasound-mediated high-speed biological reaction and tissue processing
KR100927493B1 (ko) * 2001-11-02 2009-11-17 프로덕트 시스템즈 인코포레이티드 방사출력 메가소닉 변환기
US7287537B2 (en) * 2002-01-29 2007-10-30 Akrion Technologies, Inc. Megasonic probe energy director
WO2004112093A2 (en) 2003-06-06 2004-12-23 P.C.T. Systems, Inc. Method and apparatus to process substrates with megasonic energy
US20050054906A1 (en) * 2003-09-08 2005-03-10 Joseph Page Spatial detectors for in-vivo measurement of bio chemistry
JP4633571B2 (ja) * 2005-07-28 2011-02-16 オリンパスメディカルシステムズ株式会社 アレイ型超音波トランスデューサ及びその製造方法
JP4652959B2 (ja) * 2005-11-30 2011-03-16 芝浦メカトロニクス株式会社 基板の処理装置
US9049520B2 (en) 2006-01-20 2015-06-02 Akrion Systems Llc Composite transducer apparatus and system for processing a substrate and method of constructing the same
WO2007085022A2 (en) * 2006-01-20 2007-07-26 Akrion Technologies, Inc. System, apparatus and methods for processing substrates using acoustic energy
KR101369197B1 (ko) * 2006-01-20 2014-03-27 아크리온 테크놀로지즈 인코포레이티드 평평한 물품을 처리하는 음향 에너지 시스템, 방법 및 장치
US9987666B2 (en) 2006-01-20 2018-06-05 Naura Akrion Inc. Composite transducer apparatus and system for processing a substrate and method of constructing the same
KR100852396B1 (ko) * 2006-10-20 2008-08-14 한국기계연구원 초음파를 이용한 세정장치
CN101610980A (zh) * 2007-02-08 2009-12-23 丰塔纳技术公司 粒子去除方法及化合物
US7958899B2 (en) * 2007-08-21 2011-06-14 Dainippon Screen Mfg. Co., Ltd. Substrate cleaning apparatus and substrate cleaning method
US8957564B1 (en) 2010-06-29 2015-02-17 Silicon Light Machines Corporation Microelectromechanical system megasonic transducer
US9796000B2 (en) 2011-07-04 2017-10-24 Product Systems Incorporated Uniform fluid manifold for acoustic transducer
US9138861B2 (en) 2012-02-15 2015-09-22 Taiwan Semiconductor Manufacturing Co., Ltd. CMP pad cleaning apparatus
WO2014002286A1 (ja) * 2012-06-26 2014-01-03 本多電子株式会社 電気機械変換素子及びその製造方法
US10379324B2 (en) * 2013-08-02 2019-08-13 Honeywell International Inc. Adaptive optical zoom systems and methods
EP3405952A1 (de) 2016-01-20 2018-11-28 Dussault, Donald Herbert Verfahren und vorrichtung zur reinigung einer festplattenaufnahme
JP7402698B2 (ja) * 2020-01-21 2023-12-21 東京エレクトロン株式会社 基板洗浄装置及び基板洗浄方法
CN114054429B (zh) * 2022-01-11 2022-04-01 北京东方金荣超声电器有限公司 大尺寸晶圆兆声清洗系统
KR102542354B1 (ko) * 2022-02-21 2023-06-13 (주)디바이스이엔지 초음파 세정 유닛을 포함하는 기판 처리장치
KR102540172B1 (ko) * 2022-08-31 2023-06-05 (주) 디바이스이엔지 세정 성능이 개선된 초음파 세정 유닛 및 이를 포함하는 기판 세정 장치

Family Cites Families (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US13355A (en) * 1855-07-31 Machine for compressing ptjddlers balls and other masses op iron
US153806A (en) * 1874-08-04 Improvement in elevated railways
US166569A (en) * 1875-08-10 Improvement in letter-scales
US96189A (en) * 1869-10-26 Improved show-counter
US10356A (en) * 1853-12-20 John o
US15216A (en) * 1856-07-01 Machine fob sawing fellies
US185155A (en) * 1876-12-12 Improvement in pitman-joints
US190608A (en) * 1877-05-08 Improvement in mounted maps
US29788A (en) * 1860-08-28 Chase b
US24547A (en) * 1859-06-28 Fukbtace
US32657A (en) * 1861-06-25 Sash-holdeb
US2485722A (en) * 1945-01-31 1949-10-25 Gen Motors Corp Crystal
US3179823A (en) * 1962-01-30 1965-04-20 Nesh Florence Transducer for dissipation and detection of high frequency vibratory energy
US3736533A (en) 1971-12-15 1973-05-29 Rca Corp Apparatus for efficiently converting acoustic energy into electrical energy
US4178188A (en) * 1977-09-14 1979-12-11 Branson Ultrasonics Corporation Method for cleaning workpieces by ultrasonic energy
JPS55143817A (en) * 1979-04-26 1980-11-10 Noto Denshi Kogyo Kk Piezo-resonator
US4326553A (en) 1980-08-28 1982-04-27 Rca Corporation Megasonic jet cleaner apparatus
US4401131A (en) 1981-05-15 1983-08-30 Gca Corporation Apparatus for cleaning semiconductor wafers
US4549533A (en) * 1984-01-30 1985-10-29 University Of Illinois Apparatus and method for generating and directing ultrasound
JPS6146608A (ja) * 1984-08-10 1986-03-06 Murata Mfg Co Ltd 圧電振動子
JP2632173B2 (ja) * 1988-02-15 1997-07-23 本多電子株式会社 超音波駆動装置
US4848643A (en) 1988-09-19 1989-07-18 Honeywell Inc. Process of bonding plates
US5090432A (en) 1990-10-16 1992-02-25 Verteq, Inc. Single wafer megasonic semiconductor wafer processing system
US5276376A (en) * 1992-06-09 1994-01-04 Ultrasonic Power Corporation Variable frequency ultrasonic generator with constant power output
KR940019363A (ko) * 1993-02-22 1994-09-14 요시히데 시바노 초음파세정에 있어서의 초음파진동자의 발진방법
US5700180A (en) 1993-08-25 1997-12-23 Micron Technology, Inc. System for real-time control of semiconductor wafer polishing
JP3465427B2 (ja) 1995-07-28 2003-11-10 ソニー株式会社 圧電アクチュエーター及びその製造方法
DE19629705A1 (de) 1996-07-24 1998-01-29 Joachim Dr Scheerer Verfahren und Vorrichtung zur Reinigung von scheibenförmigen Gegenständen, insbesondere Wafern, mit Ultraschall und Wasser als Spülmedium
US6039059A (en) * 1996-09-30 2000-03-21 Verteq, Inc. Wafer cleaning system
US5980647A (en) * 1997-07-15 1999-11-09 International Business Machines Corporation Metal removal cleaning process and apparatus
JPH1154471A (ja) 1997-08-05 1999-02-26 Tokyo Electron Ltd 処理装置及び処理方法
US6057632A (en) * 1998-06-09 2000-05-02 Acuson Corporation Frequency and bandwidth controlled ultrasound transducer
US6343609B1 (en) 1998-08-13 2002-02-05 International Business Machines Corporation Cleaning with liquified gas and megasonics
US20010013355A1 (en) 1998-10-14 2001-08-16 Busnaina Ahmed A. Fast single-article megasonic cleaning process for single-sided or dual-sided cleaning
US6021789A (en) 1998-11-10 2000-02-08 International Business Machines Corporation Wafer cleaning system with progressive megasonic wave
DE19917429A1 (de) * 1999-04-19 2000-10-26 Sonident Anstalt Vaduz Impulsschallwandler
US6217530B1 (en) * 1999-05-14 2001-04-17 University Of Washington Ultrasonic applicator for medical applications
US6276370B1 (en) 1999-06-30 2001-08-21 International Business Machines Corporation Sonic cleaning with an interference signal
US6904921B2 (en) 2001-04-23 2005-06-14 Product Systems Incorporated Indium or tin bonded megasonic transducer systems
US6222305B1 (en) * 1999-08-27 2001-04-24 Product Systems Incorporated Chemically inert megasonic transducer system
US6313567B1 (en) 2000-04-10 2001-11-06 Motorola, Inc. Lithography chuck having piezoelectric elements, and method
US6539952B2 (en) 2000-04-25 2003-04-01 Solid State Equipment Corp. Megasonic treatment apparatus
EP1149637B1 (de) * 2000-04-28 2007-02-28 Kao Corporation Horn für eine Vorrichtung zur Ultraschallreinigung
US7451774B2 (en) 2000-06-26 2008-11-18 Applied Materials, Inc. Method and apparatus for wafer cleaning
JP3453366B2 (ja) 2001-01-25 2003-10-06 株式会社半導体先端テクノロジーズ 基板の洗浄装置および洗浄方法
EP1238715A1 (de) 2001-03-05 2002-09-11 Prokic Miodrag Multifrequenz-Ultraschall-Betätigungsvorrichtung für Aufbaukomponente
US7105985B2 (en) * 2001-04-23 2006-09-12 Product Systems Incorporated Megasonic transducer with focused energy resonator
US20020166569A1 (en) 2001-05-10 2002-11-14 Speedfam-Ipec Corporation Method and apparatus for semiconductor wafer cleaning
US6928751B2 (en) 2001-06-12 2005-08-16 Goldfinger Technologies, Llc Megasonic cleaner and dryer system
US6730176B2 (en) 2001-07-09 2004-05-04 Birol Kuyel Single wafer megasonic cleaner method, system, and apparatus
US6684890B2 (en) 2001-07-16 2004-02-03 Verteq, Inc. Megasonic cleaner probe system with gasified fluid
US20030020377A1 (en) * 2001-07-30 2003-01-30 Ngk Insulators, Ltd. Piezoelectric/electrostrictive element and piezoelectric/electrostrictive device and production method thereof
US6859116B2 (en) * 2001-07-30 2005-02-22 Kyocera Corporation Piezoelectric resonator
US6679272B2 (en) 2001-08-03 2004-01-20 Verteq, Inc. Megasonic probe energy attenuator
KR100927493B1 (ko) * 2001-11-02 2009-11-17 프로덕트 시스템즈 인코포레이티드 방사출력 메가소닉 변환기
JP2003305419A (ja) * 2002-04-15 2003-10-28 Nec Tokin Corp 超音波洗浄装置と圧電振動子の配置方法

Also Published As

Publication number Publication date
TW586974B (en) 2004-05-11
EP1449268A4 (de) 2007-01-24
JP2005510890A (ja) 2005-04-21
CN100472832C (zh) 2009-03-25
RU2004116689A (ru) 2005-02-10
US6791242B2 (en) 2004-09-14
CN1579026A (zh) 2005-02-09
TW200300369A (en) 2003-06-01
JP4156520B2 (ja) 2008-09-24
KR20050045940A (ko) 2005-05-17
SG165984A1 (en) 2010-11-29
AU2002364693A8 (en) 2003-06-10
DE60239821D1 (de) 2011-06-01
AU2002364693A1 (en) 2003-06-10
US6882087B2 (en) 2005-04-19
EP1449268A2 (de) 2004-08-25
HK1075541A1 (zh) 2005-12-16
EP1449268B1 (de) 2011-04-20
WO2003047306A2 (en) 2003-06-05
WO2003047306A3 (en) 2003-10-30
US20050035689A1 (en) 2005-02-17
US6946774B2 (en) 2005-09-20
US7145286B2 (en) 2006-12-05
US20060006766A1 (en) 2006-01-12
KR100927493B1 (ko) 2009-11-17
US20030168946A1 (en) 2003-09-11
US20050001510A1 (en) 2005-01-06

Similar Documents

Publication Publication Date Title
ATE506702T1 (de) Radialleistungs-megasonic-wandler
US5645681B1 (en) Stacked rotary acoustic horn
AR011920A1 (es) Dispositivo acustico y un metodo para realizar un panel de o para el mismo
ZA200308183B (en) Apparatus for skin absorption enhancement.
ATE297265T1 (de) Ultraschallgerät
DE69902670D1 (de) Akustische vorrichtung mit biegewellenmoden
DE69832401D1 (de) System zum erwärmen von festem gewebe
MXPA02006606A (es) Pieza manual ultrasonica torsional.
YU50700A (sh) Akustični uređaj koji sadrži membranu koja se zasniva na delovanju savojnih talasa
IL140997A0 (en) Loudspeaker drive unit having a resonant panel-form member
AR018832A1 (es) Dispositivo acustico
DE50014572D1 (de) Piezoelektrischer antrieb
EP1602331A4 (de) Ultraschallsonde
WO2008081610A1 (ja) 超音波流量計
ATE299757T1 (de) Ultraschallreinigung
ATA2652001A (de) Elektroakustische kapsel
DE102004040112A1 (de) Schallabsorbierendes Element
WO2005036898A3 (en) A single phase unidirectional surface acoustic wave transducer and improved reflectors
AU2002352166A1 (en) Ultrasound transducer for application in extreme climatic conditions
WO2004103014A3 (en) Advanced ceramics in ultrasonic transducerized devices
IL173681A (en) Oscillator with acoustic surface wave resonator
WO2006031991A3 (en) System and method of powering a sonic energy source and use of the same to process substrates
US7262542B2 (en) Ultrasound radiation device into a material
PT1303238E (pt) Utensilio ultra-sonico
WO2007006034A3 (en) Method of optimizing an ultrasound transducer

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 1449268

Country of ref document: EP