SG160303A1 - Arc discharge method, arc discharge apparatus, and fused silica crucible manufacturing apparatus - Google Patents

Arc discharge method, arc discharge apparatus, and fused silica crucible manufacturing apparatus

Info

Publication number
SG160303A1
SG160303A1 SG200906262-1A SG2009062621A SG160303A1 SG 160303 A1 SG160303 A1 SG 160303A1 SG 2009062621 A SG2009062621 A SG 2009062621A SG 160303 A1 SG160303 A1 SG 160303A1
Authority
SG
Singapore
Prior art keywords
arc discharge
fused silica
silica crucible
manufacturing apparatus
crucible manufacturing
Prior art date
Application number
SG200906262-1A
Other languages
English (en)
Inventor
Hiroshi Kishi
Masanori Fukui
Masaki Morikawa
Original Assignee
Japan Super Quartz Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Super Quartz Corp filed Critical Japan Super Quartz Corp
Publication of SG160303A1 publication Critical patent/SG160303A1/en

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B7/00—Heating by electric discharge
    • H05B7/02—Details
    • H05B7/06—Electrodes
    • H05B7/08—Electrodes non-consumable
    • H05B7/085—Electrodes non-consumable mainly consisting of carbon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
    • C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/52—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbon, e.g. graphite
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
SG200906262-1A 2008-09-22 2009-09-22 Arc discharge method, arc discharge apparatus, and fused silica crucible manufacturing apparatus SG160303A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2008242874A JP5142912B2 (ja) 2008-09-22 2008-09-22 アーク放電方法、アーク放電装置、石英ガラスルツボ製造装置

Publications (1)

Publication Number Publication Date
SG160303A1 true SG160303A1 (en) 2010-04-29

Family

ID=41263907

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200906262-1A SG160303A1 (en) 2008-09-22 2009-09-22 Arc discharge method, arc discharge apparatus, and fused silica crucible manufacturing apparatus

Country Status (7)

Country Link
US (1) US8416833B2 (ko)
EP (1) EP2166820B1 (ko)
JP (1) JP5142912B2 (ko)
KR (1) KR101094828B1 (ko)
CN (1) CN101686584B (ko)
SG (1) SG160303A1 (ko)
TW (1) TWI425880B (ko)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5541777B2 (ja) * 2007-11-30 2014-07-09 株式会社Ｓｕｍｃｏ 石英ガラスルツボの製造方法および製造装置
JP5523018B2 (ja) * 2008-08-30 2014-06-18 株式会社Ｓｕｍｃｏ 石英ルツボの製造装置
JP5344423B2 (ja) * 2008-09-26 2013-11-20 株式会社Ｓｕｍｃｏ 炭素電極の製造方法および石英ガラスルツボの製造方法
US8172942B2 (en) * 2008-10-17 2012-05-08 Japan Super Quartz Corporation Arc discharge apparatus, apparatus and method for manufacturing vitreous silica glass crucible, and method for pulling up silicon single crystal
US8240169B2 (en) * 2009-01-08 2012-08-14 Japan Super Quartz Corporation Vitreous silica crucible manufacturing apparatus
JP5500687B2 (ja) * 2010-12-02 2014-05-21 株式会社Ｓｕｍｃｏ シリカガラスルツボの製造方法および製造装置
JP5714476B2 (ja) * 2010-12-31 2015-05-07 株式会社Sumco シリカガラスルツボの製造方法
KR101293525B1 (ko) * 2011-01-28 2013-08-06 쟈판 스파 쿼츠 가부시키가이샤 석영 유리 도가니 제조 장치
US8281620B1 (en) * 2011-04-27 2012-10-09 Japan Super Quartz Corporation Apparatus for manufacturing vitreous silica crucible
KR101293870B1 (ko) * 2012-04-27 2013-08-07 강성인 광물질 용융을 위한 직류 아크로
WO2023143124A1 (zh) * 2022-01-27 2023-08-03 隆基绿能科技股份有限公司 石墨电极、坩埚生产装置及坩埚生产方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8427915D0 (en) * 1984-11-05 1984-12-12 Tsl Thermal Syndicate Plc Vitreous silica products
JPH0812359A (ja) * 1994-06-30 1996-01-16 Shinetsu Quartz Prod Co Ltd 石英ガラスルツボ及びその製造方法
CN1233385A (zh) * 1996-08-30 1999-10-27 梅尔特兰公司 用于在熔炉中定位器件的转动－平移驱动机构
JP4398527B2 (ja) * 1998-05-25 2010-01-13 信越石英株式会社 シリコン単結晶引き上げ用石英ガラスるつぼ
JP4132367B2 (ja) * 1999-03-15 2008-08-13 コバレントマテリアル株式会社 シリコン単結晶引上げ用石英ガラスルツボの製造方法
JP3647688B2 (ja) * 1999-09-21 2005-05-18 東芝セラミックス株式会社 石英ガラスルツボ製造装置および製造方法
JP4290291B2 (ja) * 1999-09-30 2009-07-01 コバレントマテリアル株式会社 石英ガラス溶融用カーボン電極
DE10033632C1 (de) * 2000-07-11 2002-01-03 Heraeus Quarzglas Vorrichtung zur Herstellung rotationssymmetrischer Quarzglastiegel
JP5159002B2 (ja) * 2000-08-29 2013-03-06 ジャパンスーパークォーツ株式会社 高純度炭素電極及びこれを用いた石英ガラスルツボの製造方法
JP4300333B2 (ja) * 2002-03-14 2009-07-22 ジャパンスーパークォーツ株式会社 リング状アークによる石英ガラスルツボの製造方法と装置およびその石英ガラスルツボ
US20050120945A1 (en) * 2003-12-03 2005-06-09 General Electric Company Quartz crucibles having reduced bubble content and method of making thereof
US7556764B2 (en) * 2005-11-09 2009-07-07 Heraeus Shin-Etsu America, Inc. Silica vessel with nozzle and method of making
JP2008242874A (ja) 2007-03-28 2008-10-09 Hitachi Ltd 制御装置及び認証制御システム

Also Published As

Publication number Publication date
CN101686584B (zh) 2012-05-30
JP2010070440A (ja) 2010-04-02
TWI425880B (zh) 2014-02-01
EP2166820A1 (en) 2010-03-24
TW201029522A (en) 2010-08-01
US20100071417A1 (en) 2010-03-25
KR20100033941A (ko) 2010-03-31
KR101094828B1 (ko) 2011-12-16
EP2166820B1 (en) 2013-08-21
CN101686584A (zh) 2010-03-31
JP5142912B2 (ja) 2013-02-13
US8416833B2 (en) 2013-04-09

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