SG148843A1 - System and method for determining and controlling contamination - Google Patents

System and method for determining and controlling contamination

Info

Publication number
SG148843A1
SG148843A1 SG200504302-1A SG2005043021A SG148843A1 SG 148843 A1 SG148843 A1 SG 148843A1 SG 2005043021 A SG2005043021 A SG 2005043021A SG 148843 A1 SG148843 A1 SG 148843A1
Authority
SG
Singapore
Prior art keywords
filter
airstream
species
monitoring
determining
Prior art date
Application number
SG200504302-1A
Other languages
English (en)
Inventor
Oleg P Kishkovich
Devon Kinkead
Mark C Phelps
William M Goodwin
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of SG148843A1 publication Critical patent/SG148843A1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
SG200504302-1A 2001-09-24 2002-09-24 System and method for determining and controlling contamination SG148843A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/961,802 US6620630B2 (en) 2001-09-24 2001-09-24 System and method for determining and controlling contamination

Publications (1)

Publication Number Publication Date
SG148843A1 true SG148843A1 (en) 2009-01-29

Family

ID=25505037

Family Applications (1)

Application Number Title Priority Date Filing Date
SG200504302-1A SG148843A1 (en) 2001-09-24 2002-09-24 System and method for determining and controlling contamination

Country Status (8)

Country Link
US (2) US6620630B2 (ko)
EP (1) EP1438118A1 (ko)
JP (2) JP4754172B2 (ko)
KR (2) KR100911794B1 (ko)
CN (1) CN1289171C (ko)
CA (1) CA2461153A1 (ko)
SG (1) SG148843A1 (ko)
WO (1) WO2003026774A1 (ko)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10061248B4 (de) * 2000-12-09 2004-02-26 Carl Zeiss Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
US7092077B2 (en) * 2001-09-24 2006-08-15 Entegris, Inc. System and method for monitoring contamination
US20040023419A1 (en) * 2001-09-24 2004-02-05 Extraction Systems, Inc System and method for monitoring contamination
US7132011B2 (en) 2003-09-02 2006-11-07 Entegris, Inc. Reactive gas filter
US7479454B2 (en) 2003-09-30 2009-01-20 Tokyo Electron Limited Method and processing system for monitoring status of system components
US7319942B2 (en) * 2003-11-26 2008-01-15 Raytheon Company Molecular contaminant film modeling tool
US7430893B2 (en) * 2003-12-03 2008-10-07 Entegris, Inc. Systems and methods for detecting contaminants
US20050120775A1 (en) * 2003-12-03 2005-06-09 Extraction Systems, Inc. Systems and methods for detecting contaminants
US7020583B2 (en) * 2004-01-30 2006-03-28 Tokyo Electron Limited Method and apparatus for determining chemistry of part's residual contamination
US7087907B1 (en) 2004-02-02 2006-08-08 Advanced Micro Devices, Inc. Detection of contamination in imaging systems by fluorescence and/or absorption spectroscopy
DE102006023061B4 (de) * 2006-05-17 2008-08-14 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Gasdetektor mit akustischer Messzelle und selektiv adsorbierender Oberfläche
EP2076116A4 (en) 2006-10-11 2010-04-07 Gen Hospital Corp COMPOSITIONS, METHODS AND DEVICES FOR THE TREATMENT OF LIVER DISEASES
KR101126339B1 (ko) 2010-10-06 2012-03-22 주식회사 서림 태양전지 오염 방지구조
CN102680649B (zh) * 2012-05-04 2015-01-07 上海华力微电子有限公司 一种测试高纯管道吹扫效果的方法
KR101509861B1 (ko) * 2012-08-24 2015-04-07 현대자동차주식회사 에어컨에서 나는 쉰 냄새의 검출 방법 및 쉰 냄새 재현 방법과 이에 제조된 쉰 냄새 조성물
US11020704B2 (en) 2014-03-19 2021-06-01 Entegris, Inc. System and method for removing airborne molecular contaminants from gas streams
CN107250936B (zh) 2015-02-17 2019-09-20 富士通株式会社 判定装置及判定方法
FR3057390B1 (fr) * 2016-10-11 2018-12-07 Soitec Four vertical avec dispositif de piegeage de contaminants
CN106404957A (zh) * 2016-10-18 2017-02-15 天津七二通信广播股份有限公司 一种挥发性有机污染物治理对比柱箱及使用方法
US10695804B2 (en) * 2018-01-25 2020-06-30 Applied Materials, Inc. Equipment cleaning apparatus and method
CN109444232B (zh) * 2018-12-26 2024-03-12 苏州同阳科技发展有限公司 一种多通道智能化污染气体监测装置与扩散溯源方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5274434A (en) * 1990-04-02 1993-12-28 Hitachi, Ltd. Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line
US5856198A (en) * 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
US6287023B1 (en) * 1997-09-22 2001-09-11 Tokyo Electron Limited Processing apparatus and method
US6290779B1 (en) * 1998-06-12 2001-09-18 Tokyo Electron Limited Systems and methods for dry cleaning process chambers

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3834122A (en) 1972-11-02 1974-09-10 Texaco Inc Method and apparatus for separating hydrocarbons
US4122355A (en) * 1977-05-11 1978-10-24 Turbitt John J Vehicle engine automatic restart circuit
US4170901A (en) 1978-06-15 1979-10-16 The United States Of America As Represented By The Secretary Of The Air Force Sorption tube atmospheric sampling system
GB2085309B (en) 1980-10-10 1984-02-15 Perkin Elmer Ltd Concentrating gas component by condensation
US4645516A (en) 1985-05-24 1987-02-24 Union Carbide Corporation Enhanced gas separation process
CA1292941C (en) 1987-06-30 1991-12-10 Julius S. Csabai Purification system
US5054046A (en) * 1988-01-06 1991-10-01 Jupiter Toy Company Method of and apparatus for production and manipulation of high density charge
US5153901A (en) * 1988-01-06 1992-10-06 Jupiter Toy Company Production and manipulation of charged particles
US4998433A (en) 1989-06-19 1991-03-12 Stumpf David K Method and means for condensing trace air contaminates from gases
US5122355A (en) 1990-06-06 1992-06-16 Union Carbide Industrial Gases Technology Corporation Membrane nitrogen process and system
JPH05312796A (ja) * 1992-05-14 1993-11-22 Kubota Corp 排ガス中のダイオキシン類の代替指標としてのクロロベンゼン類の半連続測定監視装置
EP0692297A3 (en) 1994-07-15 1996-10-23 Praxair Technology Inc Gas pre-cleaning
AUPM707494A0 (en) 1994-07-26 1994-08-18 Crc For Waste Management And Pollution Control Limited A method and apparatus for environmental monitoring of low concentration levels of organic compounds
JP3406968B2 (ja) * 1994-09-28 2003-05-19 学校法人慶應義塾 気体中の窒素酸化物の吸着管、これを用いた捕集・回収方法、及び、これを用いた測定方法及び装置
US5574230A (en) 1994-10-20 1996-11-12 Havelick & Associates, Ltd. Silica gel, Tenax, and carbon media adsorption tube for the sampling of a wide variety of organic compounds in air and gas streams
KR0176152B1 (ko) 1995-05-29 1999-04-15 김광호 반도체 장치의 제조과정에서 발생하는 오염입자의 측정장치, 측정방법 및 그 분석 방법
US6168948B1 (en) * 1995-06-29 2001-01-02 Affymetrix, Inc. Miniaturized genetic analysis systems and methods
JPH09298148A (ja) * 1996-05-08 1997-11-18 Sony Corp 露光方法及び露光装置
US6096267A (en) 1997-02-28 2000-08-01 Extraction Systems, Inc. System for detecting base contaminants in air
DE69816277T2 (de) * 1997-02-28 2004-06-03 Extraction Systems, Inc., Franklin System zum nachweis von aminen und anderen basischen molekularen verumreinigungen in einem gas
JPH1120034A (ja) 1997-06-30 1999-01-26 Nikon Corp 光学部材の製造方法、光学部材及びその光学部材を用いた投影露光装置
JPH1164316A (ja) 1997-08-11 1999-03-05 Fuji Electric Co Ltd クリーンルーム空気中の有機ガス分析方法
JPH1157346A (ja) 1997-08-20 1999-03-02 Nitto Denko Corp ガス分解性フィルター及びその製造法
DE19841814A1 (de) * 1998-09-12 2000-03-16 Sandler Helmut Helsa Werke Filtereinrichtung mit Adsorptionsfilter, Verfahren zum Betrieb einer Filtereinrichtung sowie Verwendung einer Filtereinrichtung und Verwendung eines Sensorarray-Detektors
DE19847697A1 (de) 1998-10-16 2000-04-20 Klaus Rennebeck Druckluft-Membranfaserlumen-Drainage-Trocknungsverfahren ohne Retentat-Betriebsdruckbegrenzung mit Permeatrückflußausschluß bei simultanem Adsorptionswärmegewinn aus Wässerungsreaktion mit Permeat und simultanen Ansaug-Luftfiltern
JP3494934B2 (ja) * 1999-01-12 2004-02-09 株式会社東芝 ガス状物質の分析装置及びガス状物質の分析方法
JP4300671B2 (ja) 2000-03-13 2009-07-22 株式会社島津製作所 航空機用環境制御装置
US6511640B1 (en) 2000-06-29 2003-01-28 The Boc Group, Inc. Purification of gases

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5274434A (en) * 1990-04-02 1993-12-28 Hitachi, Ltd. Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line
US5856198A (en) * 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
US6287023B1 (en) * 1997-09-22 2001-09-11 Tokyo Electron Limited Processing apparatus and method
US6290779B1 (en) * 1998-06-12 2001-09-18 Tokyo Electron Limited Systems and methods for dry cleaning process chambers

Also Published As

Publication number Publication date
JP2005504280A (ja) 2005-02-10
US20030068834A1 (en) 2003-04-10
US6620630B2 (en) 2003-09-16
KR20040044976A (ko) 2004-05-31
EP1438118A1 (en) 2004-07-21
US6759254B2 (en) 2004-07-06
JP5049214B2 (ja) 2012-10-17
US20030113943A1 (en) 2003-06-19
CA2461153A1 (en) 2003-04-03
CN1575194A (zh) 2005-02-02
CN1289171C (zh) 2006-12-13
JP2009010392A (ja) 2009-01-15
KR20090035048A (ko) 2009-04-08
WO2003026774A1 (en) 2003-04-03
JP4754172B2 (ja) 2011-08-24
KR100911794B1 (ko) 2009-08-12

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