SG11202110483XA - Mounting apparatus - Google Patents

Mounting apparatus

Info

Publication number
SG11202110483XA
SG11202110483XA SG11202110483XA SG11202110483XA SG11202110483XA SG 11202110483X A SG11202110483X A SG 11202110483XA SG 11202110483X A SG11202110483X A SG 11202110483XA SG 11202110483X A SG11202110483X A SG 11202110483XA SG 11202110483X A SG11202110483X A SG 11202110483XA
Authority
SG
Singapore
Prior art keywords
mounting apparatus
mounting
Prior art date
Application number
SG11202110483XA
Other languages
English (en)
Inventor
Hijiri Hayashi
Tetsuya Utano
Kohei Seyama
Original Assignee
Shinkawa Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Kk filed Critical Shinkawa Kk
Publication of SG11202110483XA publication Critical patent/SG11202110483XA/en

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    • HELECTRICITY
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    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67126Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/75Apparatus for connecting with bump connectors or layer connectors
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    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67144Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
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  • Robotics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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JP5120017B2 (ja) * 2007-05-15 2013-01-16 東京エレクトロン株式会社 プローブ装置
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JP5478565B2 (ja) * 2011-07-15 2014-04-23 東京エレクトロン株式会社 接合システム
JP5815345B2 (ja) * 2011-09-16 2015-11-17 ファスフォードテクノロジ株式会社 ダイボンダ及びボンディング方法
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AT16645U1 (de) * 2012-05-30 2020-04-15 Ev Group E Thallner Gmbh Vorrichtung und Verfahren zum Bonden von Substraten
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CN105164799B (zh) * 2013-03-15 2020-04-07 应用材料公司 基板沉积系统、机械手移送设备及用于电子装置制造的方法
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JP6046007B2 (ja) * 2013-08-29 2016-12-14 東京エレクトロン株式会社 接合システム
TWI641458B (zh) * 2014-01-05 2018-11-21 美商應用材料股份有限公司 用於傳輸電子裝置製造中之基板之機器人設備、驅動組件,及方法
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JP6573289B2 (ja) * 2016-01-06 2019-09-11 ヤマハモーターロボティクスホールディングス株式会社 電子部品実装装置
JP6670713B2 (ja) * 2016-09-20 2020-03-25 東京エレクトロン株式会社 基板処理装置及び基板搬送方法
KR20210027503A (ko) * 2016-10-18 2021-03-10 베이징 이타운 세미컨덕터 테크놀로지 컴퍼니 리미티드 워크피스 처리를 위한 시스템 및 방법
TWI668789B (zh) * 2017-02-03 2019-08-11 日商新川股份有限公司 接合裝置
KR102000079B1 (ko) * 2017-07-19 2019-07-18 세메스 주식회사 다이 본딩 장치
US10049904B1 (en) * 2017-08-03 2018-08-14 Applied Materials, Inc. Method and system for moving a substrate
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JP7129793B2 (ja) * 2018-03-06 2022-09-02 シャープ株式会社 接合装置
KR102630226B1 (ko) * 2021-09-23 2024-01-29 한화정밀기계 주식회사 하이브리드 본딩 장치 및 이를 이용하는 하이브리드 본딩 방법

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