SG11202006380UA - Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use - Google Patents

Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use

Info

Publication number
SG11202006380UA
SG11202006380UA SG11202006380UA SG11202006380UA SG11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA
Authority
SG
Singapore
Prior art keywords
short
detection system
gas sampling
sampling detection
sensor gas
Prior art date
Application number
SG11202006380UA
Other languages
English (en)
Inventor
Johannes Chiu
Xing Chen
Chiu-Ying Tai
Michael Harris
Atul Gupta
Original Assignee
Mks Instr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr filed Critical Mks Instr
Publication of SG11202006380UA publication Critical patent/SG11202006380UA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
    • G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
    • G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure, temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
SG11202006380UA 2017-12-01 2018-11-29 Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use SG11202006380UA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201762593721P 2017-12-01 2017-12-01
US201862646867P 2018-03-22 2018-03-22
PCT/US2018/063124 WO2019108831A2 (en) 2017-12-01 2018-11-29 Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use

Publications (1)

Publication Number Publication Date
SG11202006380UA true SG11202006380UA (en) 2020-08-28

Family

ID=66657951

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11202006380UA SG11202006380UA (en) 2017-12-01 2018-11-29 Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use

Country Status (8)

Country Link
US (2) US11262340B2 (zh)
EP (1) EP3717899A4 (zh)
JP (2) JP7387618B2 (zh)
KR (2) KR20200092375A (zh)
CN (1) CN111556966A (zh)
SG (1) SG11202006380UA (zh)
TW (1) TWI805654B (zh)
WO (1) WO2019108831A2 (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8271980B2 (en) 2004-11-08 2012-09-18 Adaptive Computing Enterprises, Inc. System and method of providing system jobs within a compute environment
KR20200092375A (ko) 2017-12-01 2020-08-03 엠케이에스 인스트루먼츠 인코포레이티드 라디칼 가스 및 단기 분자를 위한 다중 센서 가스 샘플링 검출 시스템 및 사용 방법
US20230187169A1 (en) * 2021-12-13 2023-06-15 Applied Materials, Inc Method to measure radical ion flux using a modified pirani vacuum gauge architecture

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3718437A (en) 1970-12-28 1973-02-27 P Paloniemi Isothermal calorimeter
US4333735A (en) 1981-03-16 1982-06-08 Exxon Research & Engineering Co. Process and apparatus for measuring gaseous fixed nitrogen species
JPS6321832A (ja) * 1986-07-15 1988-01-29 Mitsubishi Electric Corp プラズマアツシング装置
EP0274868A1 (en) 1986-12-13 1988-07-20 A.s. Clausen, Kaldager & Co. Measuring apparatus
US5032435A (en) 1989-03-27 1991-07-16 The United States Of America As Represented By The United States Department Of Energy UV absorption control of thin film growth
US5261452A (en) 1991-03-01 1993-11-16 American Air Liquide Critical orifice dilution system and method
JP3533583B2 (ja) * 1994-07-25 2004-05-31 富士通株式会社 水素プラズマダウンフロー装置の洗浄方法
US5663488A (en) 1995-05-31 1997-09-02 Hewlett-Packard Co. Thermal isolation system in an analytical instrument
FR2773879B1 (fr) * 1998-01-20 2001-01-26 Auxitrol Sa Capteur de mesure d'une temperature
US6421127B1 (en) 1999-07-19 2002-07-16 American Air Liquide, Inc. Method and system for preventing deposition on an optical component in a spectroscopic sensor
US6818894B2 (en) 2001-04-30 2004-11-16 The Board Of Trustees Of The University Of Illinois Method and apparatus for characterization of ultrathin silicon oxide films using mirror-enhanced polarized reflectance fourier transform infrared spectroscopy
JP3657535B2 (ja) * 2001-05-29 2005-06-08 株式会社日本トリム 水素ラジカルの検出方法及び定量分析方法
JP3655569B2 (ja) 2001-09-06 2005-06-02 大陽日酸株式会社 ガス成分濃度測定方法及び装置
US6686594B2 (en) 2001-10-29 2004-02-03 Air Products And Chemicals, Inc. On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring
US6800134B2 (en) * 2002-03-26 2004-10-05 Micron Technology, Inc. Chemical vapor deposition methods and atomic layer deposition methods
US7734439B2 (en) 2002-06-24 2010-06-08 Mattson Technology, Inc. System and process for calibrating pyrometers in thermal processing chambers
US20040045577A1 (en) 2002-09-10 2004-03-11 Bing Ji Cleaning of processing chambers with dilute NF3 plasmas
JP4385086B2 (ja) 2003-03-14 2009-12-16 パナソニック株式会社 Ｃｖｄ装置のクリーニング装置およびｃｖｄ装置のクリーニング方法
US7999003B2 (en) * 2003-08-26 2011-08-16 Mannatech, Incorporated Antioxidant compositions and methods thereto
US7628860B2 (en) 2004-04-12 2009-12-08 Mks Instruments, Inc. Pulsed mass flow delivery system and method
US7642222B1 (en) 2004-11-30 2010-01-05 Los Alamos National Security, Llc Method for improving performance of high temperature superconductors within a magnetic field
JP4475517B2 (ja) * 2004-12-10 2010-06-09 シャープ株式会社 プラスチック廃材の再資源化方法、プラスチック成形体の製造方法およびプラスチック成形体、ならびにプラスチック再資源化装置
US7376520B2 (en) 2005-03-16 2008-05-20 Lam Research Corporation System and method for gas flow verification
US7735452B2 (en) 2005-07-08 2010-06-15 Mks Instruments, Inc. Sensor for pulsed deposition monitoring and control
US20070021935A1 (en) 2005-07-12 2007-01-25 Larson Dean J Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber
US7691204B2 (en) 2005-09-30 2010-04-06 Applied Materials, Inc. Film formation apparatus and methods including temperature and emissivity/pattern compensation
JP2007327272A (ja) 2006-06-08 2007-12-20 Miwa Lock Co Ltd 施錠装置用補助錠
CN101523222B (zh) * 2006-10-19 2012-09-19 积水化学工业株式会社 微量分析测定装置及使用该装置的微量分析测定方法
CN1959390B (zh) * 2006-11-01 2010-10-13 浙江大学 低温等离子体放电产生瞬态自由基的捕集方法与装置
WO2008060522A2 (en) * 2006-11-10 2008-05-22 The Regents Of The University Of California Atmospheric pressure plasma-induced graft polymerization
US7572052B2 (en) 2007-07-10 2009-08-11 Applied Materials, Inc. Method for monitoring and calibrating temperature in semiconductor processing chambers
US7651269B2 (en) 2007-07-19 2010-01-26 Lam Research Corporation Temperature probes having a thermally isolated tip
JP4967162B2 (ja) 2007-08-20 2012-07-04 Ｎｅｃエナジーデバイス株式会社 二次電池パック
GB2463521B (en) * 2008-09-17 2012-11-28 Creo Medical Ltd A plasma system that produces hydroxyl radicals for sterilisation
US8154714B2 (en) * 2008-11-06 2012-04-10 Li-Cor, Inc. Gas analyzer
CN101482545A (zh) * 2009-01-20 2009-07-15 广州大学 低温等离子体降解有机废气中oh自由基的测定方法
CN101530777B (zh) * 2009-03-06 2012-02-01 西安交通大学 一种等离子体化学反应装置
JP5781286B2 (ja) 2010-09-30 2015-09-16 芝浦メカトロニクス株式会社 プラズマ処理方法及びプラズマ処理装置
JP5509026B2 (ja) 2010-10-15 2014-06-04 株式会社アルバック ラジカルの測定方法
RU2454641C1 (ru) * 2010-10-21 2012-06-27 Государственное образовательное учреждение высшего профессионального образования "Сибирская государственная геодезическая академия" (ГОУ ВПО "СГГА") Дифференциальный массивный калориметр и способ определения теплоты адсорбции и химических реакций газов
US9558928B2 (en) 2014-08-29 2017-01-31 Lam Research Corporation Contact clean in high-aspect ratio structures
WO2016054138A1 (en) 2014-10-01 2016-04-07 Advanced Polymer Monitoring Technologies, Inc. Systems and methods for control of polymer reactions and processing using automatic continuous online monitoring
US20170276527A1 (en) * 2016-03-25 2017-09-28 General Electric Company System and method for metering gas
KR20200092375A (ko) 2017-12-01 2020-08-03 엠케이에스 인스트루먼츠 인코포레이티드 라디칼 가스 및 단기 분자를 위한 다중 센서 가스 샘플링 검출 시스템 및 사용 방법

Also Published As

Publication number Publication date
US20220214321A1 (en) 2022-07-07
CN111556966A (zh) 2020-08-18
EP3717899A2 (en) 2020-10-07
TWI805654B (zh) 2023-06-21
WO2019108831A2 (en) 2019-06-06
US20190170715A1 (en) 2019-06-06
US11262340B2 (en) 2022-03-01
KR20200092375A (ko) 2020-08-03
TW201937154A (zh) 2019-09-16
JP7387618B2 (ja) 2023-11-28
WO2019108831A3 (en) 2019-08-29
JP2024020407A (ja) 2024-02-14
EP3717899A4 (en) 2021-08-04
KR20230163571A (ko) 2023-11-30
US11733224B2 (en) 2023-08-22
JP2021517638A (ja) 2021-07-26

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