SG11202006380UA - Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use - Google Patents
Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of useInfo
- Publication number
- SG11202006380UA SG11202006380UA SG11202006380UA SG11202006380UA SG11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA
- Authority
- SG
- Singapore
- Prior art keywords
- short
- detection system
- gas sampling
- sampling detection
- sensor gas
- Prior art date
Links
- 239000007789 gas Substances 0.000 title 2
- 238000001514 detection method Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000005070 sampling Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
- G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
- G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Electrochemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Drying Of Semiconductors (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762593721P | 2017-12-01 | 2017-12-01 | |
US201862646867P | 2018-03-22 | 2018-03-22 | |
PCT/US2018/063124 WO2019108831A2 (en) | 2017-12-01 | 2018-11-29 | Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202006380UA true SG11202006380UA (en) | 2020-08-28 |
Family
ID=66657951
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202006380UA SG11202006380UA (en) | 2017-12-01 | 2018-11-29 | Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use |
Country Status (8)
Country | Link |
---|---|
US (2) | US11262340B2 (en) |
EP (1) | EP3717899A4 (en) |
JP (2) | JP7387618B2 (en) |
KR (2) | KR20230163571A (en) |
CN (1) | CN111556966A (en) |
SG (1) | SG11202006380UA (en) |
TW (1) | TWI805654B (en) |
WO (1) | WO2019108831A2 (en) |
Families Citing this family (4)
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CA2827035A1 (en) | 2004-11-08 | 2006-05-18 | Adaptive Computing Enterprises, Inc. | System and method of providing system jobs within a compute environment |
KR20230163571A (en) | 2017-12-01 | 2023-11-30 | 엠케이에스 인스트루먼츠 인코포레이티드 | Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use |
US11521839B2 (en) * | 2019-11-27 | 2022-12-06 | Applied Materials, Inc. | Inline measurement of process gas dissociation using infrared absorption |
US20230187169A1 (en) * | 2021-12-13 | 2023-06-15 | Applied Materials, Inc | Method to measure radical ion flux using a modified pirani vacuum gauge architecture |
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-
2018
- 2018-11-29 KR KR1020237039408A patent/KR20230163571A/en active Search and Examination
- 2018-11-29 EP EP18882863.6A patent/EP3717899A4/en active Pending
- 2018-11-29 CN CN201880077787.8A patent/CN111556966A/en active Pending
- 2018-11-29 US US16/205,064 patent/US11262340B2/en active Active
- 2018-11-29 KR KR1020207018766A patent/KR20200092375A/en not_active IP Right Cessation
- 2018-11-29 SG SG11202006380UA patent/SG11202006380UA/en unknown
- 2018-11-29 WO PCT/US2018/063124 patent/WO2019108831A2/en unknown
- 2018-11-29 JP JP2020545585A patent/JP7387618B2/en active Active
- 2018-11-30 TW TW107142934A patent/TWI805654B/en active
-
2022
- 2022-01-25 US US17/583,712 patent/US11733224B2/en active Active
-
2023
- 2023-11-15 JP JP2023194286A patent/JP2024020407A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
JP7387618B2 (en) | 2023-11-28 |
US20190170715A1 (en) | 2019-06-06 |
US11733224B2 (en) | 2023-08-22 |
WO2019108831A3 (en) | 2019-08-29 |
EP3717899A2 (en) | 2020-10-07 |
KR20200092375A (en) | 2020-08-03 |
TW201937154A (en) | 2019-09-16 |
JP2021517638A (en) | 2021-07-26 |
WO2019108831A2 (en) | 2019-06-06 |
JP2024020407A (en) | 2024-02-14 |
CN111556966A (en) | 2020-08-18 |
KR20230163571A (en) | 2023-11-30 |
US11262340B2 (en) | 2022-03-01 |
EP3717899A4 (en) | 2021-08-04 |
US20220214321A1 (en) | 2022-07-07 |
TWI805654B (en) | 2023-06-21 |
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