SG11202006380UA - Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use - Google Patents
Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of useInfo
- Publication number
- SG11202006380UA SG11202006380UA SG11202006380UA SG11202006380UA SG11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA SG 11202006380U A SG11202006380U A SG 11202006380UA
- Authority
- SG
- Singapore
- Prior art keywords
- short
- detection system
- gas sampling
- sampling detection
- sensor gas
- Prior art date
Links
- 239000007789 gas Substances 0.000 title 2
- 238000001514 detection method Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 238000005070 sampling Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K17/00—Measuring quantity of heat
- G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/75—Systems in which material is subjected to a chemical reaction, the progress or the result of the reaction being investigated
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
- G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0011—Sample conditioning
- G01N33/0016—Sample conditioning by regulating a physical variable, e.g. pressure or temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Plasma & Fusion (AREA)
- Electrochemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Drying Of Semiconductors (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762593721P | 2017-12-01 | 2017-12-01 | |
| US201862646867P | 2018-03-22 | 2018-03-22 | |
| PCT/US2018/063124 WO2019108831A2 (en) | 2017-12-01 | 2018-11-29 | Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11202006380UA true SG11202006380UA (en) | 2020-08-28 |
Family
ID=66657951
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11202006380UA SG11202006380UA (en) | 2017-12-01 | 2018-11-29 | Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US11262340B2 (en) |
| EP (1) | EP3717899A4 (en) |
| JP (2) | JP7387618B2 (en) |
| KR (2) | KR20200092375A (en) |
| CN (1) | CN111556966A (en) |
| SG (1) | SG11202006380UA (en) |
| TW (1) | TWI805654B (en) |
| WO (1) | WO2019108831A2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2586763C (en) | 2004-11-08 | 2013-12-17 | Cluster Resources, Inc. | System and method of providing system jobs within a compute environment |
| CN111556966A (en) | 2017-12-01 | 2020-08-18 | Mks仪器公司 | Multi-sensor gas sampling detection system for free radical gases and short-lived molecules and method of use |
| US20230187169A1 (en) * | 2021-12-13 | 2023-06-15 | Applied Materials, Inc | Method to measure radical ion flux using a modified pirani vacuum gauge architecture |
Family Cites Families (44)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3718437A (en) | 1970-12-28 | 1973-02-27 | P Paloniemi | Isothermal calorimeter |
| US4333735A (en) | 1981-03-16 | 1982-06-08 | Exxon Research & Engineering Co. | Process and apparatus for measuring gaseous fixed nitrogen species |
| JPS6321832A (en) * | 1986-07-15 | 1988-01-29 | Mitsubishi Electric Corp | Plasma ashing apparatus |
| EP0274868A1 (en) * | 1986-12-13 | 1988-07-20 | A.s. Clausen, Kaldager & Co. | Measuring apparatus |
| US5032435A (en) | 1989-03-27 | 1991-07-16 | The United States Of America As Represented By The United States Department Of Energy | UV absorption control of thin film growth |
| US5261452A (en) | 1991-03-01 | 1993-11-16 | American Air Liquide | Critical orifice dilution system and method |
| JP3533583B2 (en) * | 1994-07-25 | 2004-05-31 | 富士通株式会社 | Cleaning method for hydrogen plasma down flow device |
| US5663488A (en) | 1995-05-31 | 1997-09-02 | Hewlett-Packard Co. | Thermal isolation system in an analytical instrument |
| FR2773879B1 (en) * | 1998-01-20 | 2001-01-26 | Auxitrol Sa | TEMPERATURE MEASUREMENT SENSOR |
| US6421127B1 (en) | 1999-07-19 | 2002-07-16 | American Air Liquide, Inc. | Method and system for preventing deposition on an optical component in a spectroscopic sensor |
| US6818894B2 (en) | 2001-04-30 | 2004-11-16 | The Board Of Trustees Of The University Of Illinois | Method and apparatus for characterization of ultrathin silicon oxide films using mirror-enhanced polarized reflectance fourier transform infrared spectroscopy |
| JP3657535B2 (en) * | 2001-05-29 | 2005-06-08 | 株式会社日本トリム | Hydrogen radical detection method and quantitative analysis method |
| JP3655569B2 (en) | 2001-09-06 | 2005-06-02 | 大陽日酸株式会社 | Gas component concentration measuring method and apparatus |
| US6686594B2 (en) | 2001-10-29 | 2004-02-03 | Air Products And Chemicals, Inc. | On-line UV-Visible light halogen gas analyzer for semiconductor processing effluent monitoring |
| US6800134B2 (en) * | 2002-03-26 | 2004-10-05 | Micron Technology, Inc. | Chemical vapor deposition methods and atomic layer deposition methods |
| US7734439B2 (en) | 2002-06-24 | 2010-06-08 | Mattson Technology, Inc. | System and process for calibrating pyrometers in thermal processing chambers |
| US20040045577A1 (en) * | 2002-09-10 | 2004-03-11 | Bing Ji | Cleaning of processing chambers with dilute NF3 plasmas |
| JP4385086B2 (en) * | 2003-03-14 | 2009-12-16 | パナソニック株式会社 | CVD apparatus cleaning apparatus and CVD apparatus cleaning method |
| US7999003B2 (en) * | 2003-08-26 | 2011-08-16 | Mannatech, Incorporated | Antioxidant compositions and methods thereto |
| US7628860B2 (en) | 2004-04-12 | 2009-12-08 | Mks Instruments, Inc. | Pulsed mass flow delivery system and method |
| US7642222B1 (en) | 2004-11-30 | 2010-01-05 | Los Alamos National Security, Llc | Method for improving performance of high temperature superconductors within a magnetic field |
| JP4475517B2 (en) * | 2004-12-10 | 2010-06-09 | シャープ株式会社 | Plastic waste material recycling method, plastic molded body manufacturing method and plastic molded body, and plastic recycling apparatus |
| US7376520B2 (en) | 2005-03-16 | 2008-05-20 | Lam Research Corporation | System and method for gas flow verification |
| US7735452B2 (en) | 2005-07-08 | 2010-06-15 | Mks Instruments, Inc. | Sensor for pulsed deposition monitoring and control |
| US20070021935A1 (en) | 2005-07-12 | 2007-01-25 | Larson Dean J | Methods for verifying gas flow rates from a gas supply system into a plasma processing chamber |
| US7691204B2 (en) | 2005-09-30 | 2010-04-06 | Applied Materials, Inc. | Film formation apparatus and methods including temperature and emissivity/pattern compensation |
| JP2007327272A (en) | 2006-06-08 | 2007-12-20 | Miwa Lock Co Ltd | Auxiliary lock for locking device |
| ATE553387T1 (en) | 2006-10-19 | 2012-04-15 | Sekisui Chemical Co Ltd | MICROANALYSIS MEASURING APPARATUS AND MICROANALYSIS MEASURING METHOD USING THEREOF |
| CN1959390B (en) * | 2006-11-01 | 2010-10-13 | 浙江大学 | Method and device for capturing free radicals in transient state generated by discharge of plasma in low temperature |
| CA2668925A1 (en) * | 2006-11-10 | 2008-05-22 | The Regents Of The University Of California | Atmospheric pressure plasma-induced graft polymerization |
| US7572052B2 (en) | 2007-07-10 | 2009-08-11 | Applied Materials, Inc. | Method for monitoring and calibrating temperature in semiconductor processing chambers |
| US7651269B2 (en) | 2007-07-19 | 2010-01-26 | Lam Research Corporation | Temperature probes having a thermally isolated tip |
| JP4967162B2 (en) | 2007-08-20 | 2012-07-04 | Ｎｅｃエナジーデバイス株式会社 | Secondary battery pack |
| GB2463521B (en) * | 2008-09-17 | 2012-11-28 | Creo Medical Ltd | A plasma system that produces hydroxyl radicals for sterilisation |
| US8154714B2 (en) | 2008-11-06 | 2012-04-10 | Li-Cor, Inc. | Gas analyzer |
| CN101482545A (en) * | 2009-01-20 | 2009-07-15 | 广州大学 | Measuring method for OH free radical in low-temperature plasma degradation organic waste gas |
| CN101530777B (en) * | 2009-03-06 | 2012-02-01 | 西安交通大学 | Plasma chemical reaction unit |
| JP5781286B2 (en) * | 2010-09-30 | 2015-09-16 | 芝浦メカトロニクス株式会社 | Plasma processing method and plasma processing apparatus |
| JP5509026B2 (en) * | 2010-10-15 | 2014-06-04 | 株式会社アルバック | Radical measurement method |
| RU2454641C1 (en) * | 2010-10-21 | 2012-06-27 | Государственное образовательное учреждение высшего профессионального образования "Сибирская государственная геодезическая академия" (ГОУ ВПО "СГГА") | Differential massive calorimeter and method of determining heat of adsorption and chemical reactions of gases |
| US9558928B2 (en) * | 2014-08-29 | 2017-01-31 | Lam Research Corporation | Contact clean in high-aspect ratio structures |
| WO2016054138A1 (en) * | 2014-10-01 | 2016-04-07 | Advanced Polymer Monitoring Technologies, Inc. | Systems and methods for control of polymer reactions and processing using automatic continuous online monitoring |
| US20170276527A1 (en) * | 2016-03-25 | 2017-09-28 | General Electric Company | System and method for metering gas |
| CN111556966A (en) | 2017-12-01 | 2020-08-18 | Mks仪器公司 | Multi-sensor gas sampling detection system for free radical gases and short-lived molecules and method of use |
-
2018
- 2018-11-29 CN CN201880077787.8A patent/CN111556966A/en active Pending
- 2018-11-29 WO PCT/US2018/063124 patent/WO2019108831A2/en unknown
- 2018-11-29 SG SG11202006380UA patent/SG11202006380UA/en unknown
- 2018-11-29 JP JP2020545585A patent/JP7387618B2/en active Active
- 2018-11-29 US US16/205,064 patent/US11262340B2/en active Active
- 2018-11-29 KR KR1020207018766A patent/KR20200092375A/en not_active IP Right Cessation
- 2018-11-29 EP EP18882863.6A patent/EP3717899A4/en active Pending
- 2018-11-29 KR KR1020237039408A patent/KR20230163571A/en active Search and Examination
- 2018-11-30 TW TW107142934A patent/TWI805654B/en active
-
2022
- 2022-01-25 US US17/583,712 patent/US11733224B2/en active Active
-
2023
- 2023-11-15 JP JP2023194286A patent/JP2024020407A/en active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20190170715A1 (en) | 2019-06-06 |
| WO2019108831A2 (en) | 2019-06-06 |
| EP3717899A2 (en) | 2020-10-07 |
| TWI805654B (en) | 2023-06-21 |
| TW201937154A (en) | 2019-09-16 |
| KR20230163571A (en) | 2023-11-30 |
| US20220214321A1 (en) | 2022-07-07 |
| EP3717899A4 (en) | 2021-08-04 |
| JP2021517638A (en) | 2021-07-26 |
| WO2019108831A3 (en) | 2019-08-29 |
| JP2024020407A (en) | 2024-02-14 |
| US11733224B2 (en) | 2023-08-22 |
| JP7387618B2 (en) | 2023-11-28 |
| KR20200092375A (en) | 2020-08-03 |
| US11262340B2 (en) | 2022-03-01 |
| CN111556966A (en) | 2020-08-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| SG11202006240UA (en) | Gas pipeline leakage detection method and apparatus | |
| IL282550A (en) | Exhaust gas processing system and method | |
| EP3583253A4 (en) | Gas detection system and gas detection method | |
| EP3674689A4 (en) | Gas analyzer and gas analyzing method | |
| EP3477068A4 (en) | Exhaust gas purification system and exhaust gas purification method | |
| GB201716534D0 (en) | A gas detection system and method | |
| EP3881243A4 (en) | Method of anomaly detection and system thereof | |
| EP3344962A4 (en) | Method and apparatus for the spectroscopic detection of low concentrations of hydrogen sulfide gas | |
| SG11202006380UA (en) | Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use | |
| EP3368882A4 (en) | Method and apparatus for measuring aerosol particles of exhaust gas | |
| EP3474743C0 (en) | Method and system for detection and analysis of cognitive flow | |
| ZA202006473B (en) | Detection system for measuring pipeline size parameters and detection method therefor | |
| IL277394A (en) | System and method for generation of gases | |
| EP3341596A4 (en) | Method and exhaust treatment system for treatment of an exhaust gas stream | |
| GB201513313D0 (en) | Gas detection apparatus and method | |
| GB201602835D0 (en) | Method and appratus for detection of document tampering | |
| EP3721219A4 (en) | System and method for gas sensing and monitoring | |
| GB2541510B (en) | Systems and methods for verification and anomaly detection using a mixture of hidden markov models | |
| GB201412507D0 (en) | Amperometric electrochemical gas sensing apparatus and method for measuring oxidising gases | |
| EP3561502A4 (en) | Gas concentration measuring device and method of calibrating same | |
| EP3341597A4 (en) | Method and system for treatment of an exhaust gas stream | |
| GB202300525D0 (en) | Gas detection system and detection method | |
| PL3445955T3 (en) | System and method for oxidation of hydrocarbon gases | |
| GB201820979D0 (en) | Gas purification apparatus and trace substance detection device | |
| EP3570018A4 (en) | Gas detector and gas detection method |