SG11202006227TA - X-ray inspection device - Google Patents
X-ray inspection deviceInfo
- Publication number
- SG11202006227TA SG11202006227TA SG11202006227TA SG11202006227TA SG11202006227TA SG 11202006227T A SG11202006227T A SG 11202006227TA SG 11202006227T A SG11202006227T A SG 11202006227TA SG 11202006227T A SG11202006227T A SG 11202006227TA SG 11202006227T A SG11202006227T A SG 11202006227TA
- Authority
- SG
- Singapore
- Prior art keywords
- inspection device
- ray inspection
- ray
- inspection
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
- G01N23/20016—Goniometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
- G01N2223/3306—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts object rotates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/33—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts
- G01N2223/3308—Accessories, mechanical or electrical features scanning, i.e. relative motion for measurement of successive object-parts object translates
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/30—Accessories, mechanical or electrical features
- G01N2223/331—Accessories, mechanical or electrical features rocking curve analysis
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/50—Detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/611—Specific applications or type of materials patterned objects; electronic devices
- G01N2223/6116—Specific applications or type of materials patterned objects; electronic devices semiconductor wafer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/645—Specific applications or type of materials quality control
Landscapes
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017253019 | 2017-12-28 | ||
PCT/JP2018/032810 WO2019130663A1 (fr) | 2017-12-28 | 2018-09-05 | Dispositif d'inspection à rayons x |
Publications (1)
Publication Number | Publication Date |
---|---|
SG11202006227TA true SG11202006227TA (en) | 2020-07-29 |
Family
ID=67063355
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11202006227TA SG11202006227TA (en) | 2017-12-28 | 2018-09-05 | X-ray inspection device |
Country Status (8)
Country | Link |
---|---|
US (1) | US11079345B2 (fr) |
EP (1) | EP3734261A4 (fr) |
JP (1) | JP6938054B2 (fr) |
KR (1) | KR102409643B1 (fr) |
CN (1) | CN111527400A (fr) |
SG (1) | SG11202006227TA (fr) |
TW (1) | TWI739034B (fr) |
WO (1) | WO2019130663A1 (fr) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11898971B2 (en) * | 2019-06-24 | 2024-02-13 | Sms Group Gmbh | Controlling process parameters by means of radiographic online determination of material properties when producing metallic strips and sheets |
JP7300718B2 (ja) * | 2019-12-13 | 2023-06-30 | 株式会社リガク | 制御装置、システム、方法およびプログラム |
KR20230090144A (ko) * | 2021-12-14 | 2023-06-21 | 주식회사 엘지에너지솔루션 | 전극조립체의 외경측정장치와 외경측정방법 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0786484B2 (ja) * | 1989-05-17 | 1995-09-20 | 株式会社フジクラ | ゴニオメータヘッド |
GB9216461D0 (en) * | 1992-08-03 | 1992-09-16 | Smith James A | Eucentric goniometer or motion system |
JP2630249B2 (ja) * | 1994-02-16 | 1997-07-16 | 日本電気株式会社 | 全反射蛍光x線分析装置 |
JPH1144662A (ja) * | 1997-07-29 | 1999-02-16 | Rigaku Corp | 微小部x線分析装置 |
JP2000258366A (ja) * | 1999-03-05 | 2000-09-22 | Rigaku Corp | 微小部x線回折装置 |
US6301330B1 (en) * | 1999-07-30 | 2001-10-09 | Hypernex, Inc. | Apparatus and method for texture analysis on semiconductor wafers |
JP2003294657A (ja) * | 2002-03-29 | 2003-10-15 | Asahi Kasei Corp | 結晶歪み度合いの分析方法 |
JP3697246B2 (ja) * | 2003-03-26 | 2005-09-21 | 株式会社リガク | X線回折装置 |
DE602004012562T2 (de) | 2003-06-13 | 2009-04-16 | Osmic, Inc., Auburn Hills | Strahlaufbereitungssystem |
JP3912606B2 (ja) | 2004-10-26 | 2007-05-09 | 株式会社リガク | X線薄膜検査装置と、プロダクトウエーハの薄膜検査装置およびその方法 |
JP4784984B2 (ja) * | 2006-04-10 | 2011-10-05 | 株式会社リガク | X線回折装置とその制御方法 |
JP5963453B2 (ja) * | 2011-03-15 | 2016-08-03 | 株式会社荏原製作所 | 検査装置 |
JP5346057B2 (ja) * | 2011-04-26 | 2013-11-20 | 株式会社リガク | X線分析装置の試料冷却装置及びx線分析装置 |
JP2013231700A (ja) * | 2012-05-01 | 2013-11-14 | Tokyo Electron Ltd | X線検査方法及びx線検査装置 |
JP5998666B2 (ja) * | 2012-06-14 | 2016-09-28 | 富士通株式会社 | X線分析装置及びx線分析方法 |
US9417196B2 (en) * | 2013-10-10 | 2016-08-16 | Bruker Axs Inc. | X-ray diffraction based crystal centering method using an active pixel array sensor in rolling shutter mode |
JP2015184092A (ja) * | 2014-03-24 | 2015-10-22 | 桑原 章二 | X線分析装置 |
US10473598B2 (en) * | 2014-10-14 | 2019-11-12 | Rigaku Corporation | X-ray thin film inspection device |
JP6656519B2 (ja) | 2016-06-15 | 2020-03-04 | 株式会社リガク | X線回折装置 |
US10876978B2 (en) * | 2016-07-15 | 2020-12-29 | Rigaku Corporation | X-ray inspecting device, X-ray thin film inspecting method, and method for measuring rocking curve |
-
2018
- 2018-09-05 CN CN201880084358.3A patent/CN111527400A/zh active Pending
- 2018-09-05 EP EP18893911.0A patent/EP3734261A4/fr active Pending
- 2018-09-05 US US16/958,556 patent/US11079345B2/en active Active
- 2018-09-05 WO PCT/JP2018/032810 patent/WO2019130663A1/fr unknown
- 2018-09-05 SG SG11202006227TA patent/SG11202006227TA/en unknown
- 2018-09-05 KR KR1020207021564A patent/KR102409643B1/ko active IP Right Grant
- 2018-09-05 JP JP2019562739A patent/JP6938054B2/ja active Active
- 2018-09-17 TW TW107132650A patent/TWI739034B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP6938054B2 (ja) | 2021-09-22 |
EP3734261A1 (fr) | 2020-11-04 |
TW201930865A (zh) | 2019-08-01 |
KR20200099597A (ko) | 2020-08-24 |
JPWO2019130663A1 (ja) | 2020-12-17 |
EP3734261A4 (fr) | 2021-09-08 |
WO2019130663A1 (fr) | 2019-07-04 |
TWI739034B (zh) | 2021-09-11 |
US11079345B2 (en) | 2021-08-03 |
CN111527400A (zh) | 2020-08-11 |
US20210063326A1 (en) | 2021-03-04 |
KR102409643B1 (ko) | 2022-06-16 |
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