SG11202003327UA - Ceramic, probe guiding member, probe card, and socket for package inspection - Google Patents

Ceramic, probe guiding member, probe card, and socket for package inspection

Info

Publication number
SG11202003327UA
SG11202003327UA SG11202003327UA SG11202003327UA SG11202003327UA SG 11202003327U A SG11202003327U A SG 11202003327UA SG 11202003327U A SG11202003327U A SG 11202003327UA SG 11202003327U A SG11202003327U A SG 11202003327UA SG 11202003327U A SG11202003327U A SG 11202003327UA
Authority
SG
Singapore
Prior art keywords
probe
socket
ceramic
guiding member
package inspection
Prior art date
Application number
SG11202003327UA
Inventor
Wataru Yamagishi
Kazumasa Mori
Shunichi Eto
Original Assignee
Ferrotec Material Tech Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferrotec Material Tech Corporation filed Critical Ferrotec Material Tech Corporation
Publication of SG11202003327UA publication Critical patent/SG11202003327UA/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • C—CHEMISTRY; METALLURGY
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
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    • C04B35/48—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zirconium or hafnium oxides, zirconates, zircon or hafnates
    • C04B35/486—Fine ceramics
    • C04B35/488—Composites
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    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
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    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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    • G01R31/2896—Testing of IC packages; Test features related to IC packages
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    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/94—Products characterised by their shape
    • C04B2235/945—Products containing grooves, cuts, recesses or protusions
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
    • C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
    • C04B2235/9607—Thermal properties, e.g. thermal expansion coefficient
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07371—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate card or back card with apertures through which the probes pass
SG11202003327UA 2017-10-20 2018-10-19 Ceramic, probe guiding member, probe card, and socket for package inspection SG11202003327UA (en)

Applications Claiming Priority (2)

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JP2017203052 2017-10-20
PCT/JP2018/039052 WO2019078364A1 (en) 2017-10-20 2018-10-19 Ceramic, probe-guiding part, probe card and socket for inspecting package

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JP (1) JP6961008B2 (en)
KR (1) KR102419954B1 (en)
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PH (1) PH12020550262A1 (en)
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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7148472B2 (en) * 2019-09-27 2022-10-05 株式会社フェローテックマテリアルテクノロジーズ Ceramic part and method for manufacturing ceramic part
WO2021206148A1 (en) * 2020-04-10 2021-10-14 株式会社フェローテックマテリアルテクノロジーズ Ceramic, probe-guiding part, probe card and socket for inspecting package
KR102453341B1 (en) 2020-06-15 2022-10-11 현대모비스 주식회사 Vehicle battery mount structure
KR102606892B1 (en) * 2021-06-15 2023-11-29 (주)포인트엔지니어링 Supporting plate for electrical test socket, socket pin for electrical test socket, and electrical test socket

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1289712C2 (en) * 1965-08-11 1973-12-13 Kempten Elektroschmelz Gmbh Evaporator for vacuum evaporation of metal layers on materials
JPS59152269A (en) * 1983-02-08 1984-08-30 九州耐火煉瓦株式会社 Silicon nitride composite refractories
JPS60260197A (en) * 1984-06-07 1985-12-23 島田理化工業株式会社 Microwave absorber
JP2621896B2 (en) * 1988-01-13 1997-06-18 黒崎窯業株式会社 Silicon nitride-based composite ceramics and method for producing the same
DE3824849A1 (en) * 1988-07-21 1990-01-25 Kempten Elektroschmelz Gmbh PRESSURIZED POLYCRYSTALLINE MIXING MATERIALS BASED ON HEXAGONAL BORNITRIDE, OXIDES AND CARBIDES
JP3175483B2 (en) 1994-06-30 2001-06-11 日本鋼管株式会社 Boron nitride-containing material and method for producing the same
IT1284201B1 (en) 1996-07-31 1998-05-08 Sviluppo Materiali Spa PLATES WITH ANTI-WEAR CERAMIC FILLINGS FOR MACHINES FOR CONNTINUAL CASTING OF THIN FLAT BODIES AND PROCEDURE FOR THEIR
JP3697942B2 (en) * 1999-05-13 2005-09-21 住友金属工業株式会社 Ceramic processed parts and manufacturing method thereof
US6669871B2 (en) 2000-11-21 2003-12-30 Saint-Gobain Ceramics & Plastics, Inc. ESD dissipative ceramics
CN1311594C (en) 2001-04-03 2007-04-18 株式会社吴羽 IC socket
JP4400360B2 (en) * 2003-09-25 2010-01-20 株式会社フェローテックセラミックス Free-cutting ceramics, manufacturing method thereof, and probe guide parts
TWI276618B (en) * 2003-09-25 2007-03-21 Sumitomo Metal Ind Machinable ceramic
JP4927318B2 (en) 2004-02-16 2012-05-09 株式会社クレハ Material for machining
WO2006050201A2 (en) * 2004-10-28 2006-05-11 Saint-Gobain Corporation Ceramic igniters
JP2006169015A (en) * 2004-12-13 2006-06-29 National Institute Of Advanced Industrial & Technology Boron nitride dispersed composite ceramic and method of manufacturing the same
JP5036271B2 (en) 2006-10-16 2012-09-26 株式会社ニッカトー Zirconia conductive sintered body
JP4371158B2 (en) * 2007-08-10 2009-11-25 株式会社フェローテックセラミックス Black-based free-cutting ceramics and their production and use
JP5506246B2 (en) * 2009-05-28 2014-05-28 日本発條株式会社 Ceramic member, probe holder, and method for manufacturing ceramic member
JP5750243B2 (en) * 2010-07-14 2015-07-15 日本発條株式会社 Ceramic member, probe holder, and method for manufacturing ceramic member
JP5670806B2 (en) 2011-04-01 2015-02-18 日本特殊陶業株式会社 Ceramic substrate and manufacturing method thereof
JP5998787B2 (en) 2011-12-02 2016-09-28 Toto株式会社 Semiconductive ceramic sintered body
CN103626498B (en) * 2013-12-13 2015-07-08 山东鹏程陶瓷新材料科技有限公司 Boron nitride based ceramic nozzle and preparation method thereof
WO2015137270A1 (en) 2014-03-10 2015-09-17 住友大阪セメント株式会社 Dielectric material and electrostatic chucking device

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EP3699160A1 (en) 2020-08-26
KR102419954B1 (en) 2022-07-12
US11940466B2 (en) 2024-03-26
CN111247115A (en) 2020-06-05
CN115626828A (en) 2023-01-20
TWI683796B (en) 2020-02-01
PH12020550262A1 (en) 2021-03-01
EP3699160A4 (en) 2021-08-18
US20200241047A1 (en) 2020-07-30
WO2019078364A1 (en) 2019-04-25
TW201922673A (en) 2019-06-16
JP6961008B2 (en) 2021-11-05
KR20200072524A (en) 2020-06-22
JPWO2019078364A1 (en) 2020-11-19

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