SG11201909172UA - Method for slicing workpiece - Google Patents

Method for slicing workpiece

Info

Publication number
SG11201909172UA
SG11201909172UA SG11201909172UA SG11201909172UA SG 11201909172U A SG11201909172U A SG 11201909172UA SG 11201909172U A SG11201909172U A SG 11201909172UA SG 11201909172U A SG11201909172U A SG 11201909172UA
Authority
SG
Singapore
Prior art keywords
slicing
workpiece
slicing workpiece
Prior art date
Application number
Inventor
Shiro Toyoda
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Publication of SG11201909172UA publication Critical patent/SG11201909172UA/en

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/007Use, recovery or regeneration of abrasive mediums
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • B24B27/0633Grinders for cutting-off using a cutting wire
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • B28D5/045Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools by cutting with wires or closed-loop blades
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23DPLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D57/00Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00
    • B23D57/0007Sawing machines or sawing devices not covered by one of the preceding groups B23D45/00 - B23D55/00 using saw wires
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/06Grinders for cutting-off
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00Devices or means for dressing or conditioning abrasive surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/04Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304Mechanical treatment, e.g. grinding, polishing, cutting
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
SG11201909172U 2017-04-04 2018-03-06 Method for slicing workpiece SG11201909172UA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017074779A JP6693460B2 (en) 2017-04-04 2017-04-04 Work cutting method
PCT/JP2018/008451 WO2018186087A1 (en) 2017-04-04 2018-03-06 Workpiece cutting method

Publications (1)

Publication Number Publication Date
SG11201909172UA true SG11201909172UA (en) 2019-11-28

Family

ID=63712585

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201909172U SG11201909172UA (en) 2017-04-04 2018-03-06 Method for slicing workpiece

Country Status (8)

Country Link
US (1) US11389991B2 (en)
JP (1) JP6693460B2 (en)
KR (1) KR102471435B1 (en)
CN (1) CN110461543B (en)
DE (1) DE112018001286T5 (en)
SG (1) SG11201909172UA (en)
TW (1) TWI753128B (en)
WO (1) WO2018186087A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019117796A1 (en) * 2019-07-02 2021-01-07 WIKUS-Sägenfabrik Wilhelm H. Kullmann GmbH & Co. KG Cutting tool with buffer particles
US11717930B2 (en) * 2021-05-31 2023-08-08 Siltronic Corporation Method for simultaneously cutting a plurality of disks from a workpiece
CN113352154B (en) * 2021-07-04 2022-04-26 兴化市富翔不锈钢制品有限公司 Novel terrace die blade repairing and forming device
JP2023089451A (en) * 2021-12-16 2023-06-28 信越半導体株式会社 Workpiece cutting method and wire saw

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53114583A (en) * 1977-03-17 1978-10-06 Sony Corp Method of cutting ingot
JPH029186A (en) * 1988-06-28 1990-01-12 Tanaka Kikinzoku Kogyo Kk Manufacture of square type block
JPH1128654A (en) 1997-07-04 1999-02-02 Tokyo Seimitsu Co Ltd Dressing method and device of fixed abrasive grain wire saw
JP3593451B2 (en) * 1998-04-01 2004-11-24 株式会社日平トヤマ Ingot slicing method
JP2000158319A (en) * 1998-11-27 2000-06-13 Fujikoshi Mach Corp Diamond wire saw and cutting method
JP2005095993A (en) 2003-09-22 2005-04-14 Kanai Hiroaki Method and device for dressing abrasive grain stuck wire in fixed abrasive grain type wire saw
JP4991229B2 (en) * 2006-09-22 2012-08-01 信越半導体株式会社 Cutting method and epitaxial wafer manufacturing method
KR20090038502A (en) * 2007-10-16 2009-04-21 주식회사 실트론 Method for polishing of wafer
JP5263536B2 (en) * 2009-07-14 2013-08-14 信越半導体株式会社 Work cutting method
KR101625709B1 (en) * 2010-02-08 2016-05-30 토요 어드밴스드 테크놀로지스 컴퍼니 리미티드 Method of cutting workpiece with wire saw and wire saw
DE102011082366B3 (en) 2011-09-08 2013-02-28 Siltronic Ag Single-layer winding of saw wire with fixed cutting grain for wire saws for separating slices from a workpiece
TWI583468B (en) 2012-12-04 2017-05-21 梅耶博格(瑞士)股份有限公司 Wire management system,wire saw and cutting method
KR20140090906A (en) * 2013-01-10 2014-07-18 주식회사 엘지실트론 Wire saw and method for slicing ingot using the same
JP5791642B2 (en) * 2013-01-10 2015-10-07 信越半導体株式会社 How to resume wire saw operation
JP6235295B2 (en) * 2013-10-07 2017-11-22 株式会社安永 Fixed abrasive wire saw apparatus and wafer manufacturing method using the same
KR101551764B1 (en) * 2014-05-13 2015-09-10 한국생산기술연구원 Apparatus for dressing wire
JP6172053B2 (en) * 2014-05-28 2017-08-02 信越半導体株式会社 Fixed abrasive wire, wire saw and workpiece cutting method
EP3357642A4 (en) * 2015-09-30 2019-05-29 Furukawa Electric Co. Ltd. Abrasive diamond grain for wire tool and wire tool
JP6270796B2 (en) * 2015-10-28 2018-01-31 株式会社リード Fixed abrasive wire saw and fixed abrasive wire dressing method
CN107775828B (en) * 2017-10-31 2019-04-12 南通皋鑫电子股份有限公司 A kind of folded technique of Buddha's warrior attendant wire cutting silicon

Also Published As

Publication number Publication date
TWI753128B (en) 2022-01-21
US20200016791A1 (en) 2020-01-16
CN110461543B (en) 2021-07-16
JP2018176301A (en) 2018-11-15
KR20190136006A (en) 2019-12-09
JP6693460B2 (en) 2020-05-13
CN110461543A (en) 2019-11-15
TW201836745A (en) 2018-10-16
US11389991B2 (en) 2022-07-19
DE112018001286T5 (en) 2020-01-16
WO2018186087A1 (en) 2018-10-11
KR102471435B1 (en) 2022-11-28

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