SG11201907543XA - Joint and fluid control device - Google Patents

Joint and fluid control device

Info

Publication number
SG11201907543XA
SG11201907543XA SG11201907543XA SG11201907543XA SG11201907543XA SG 11201907543X A SG11201907543X A SG 11201907543XA SG 11201907543X A SG11201907543X A SG 11201907543XA SG 11201907543X A SG11201907543X A SG 11201907543XA SG 11201907543X A SG11201907543X A SG 11201907543XA
Authority
SG
Singapore
Prior art keywords
block
joint
control device
fluid control
passage
Prior art date
Application number
SG11201907543XA
Other languages
English (en)
Inventor
Yusuke Shibata
Kazuhiro Fujine
Hidehiro Doya
Original Assignee
Fujikin Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Kk filed Critical Fujikin Kk
Publication of SG11201907543XA publication Critical patent/SG11201907543XA/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted
    • F16L41/025—Branch units, e.g. made in one piece, welded, riveted with rectangular cross-section
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/10—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with two or more closure members not moving as a unit
    • F16K11/105—Three-way check or safety valves with two or more closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L41/00—Branching pipes; Joining pipes to walls
    • F16L41/02—Branch units, e.g. made in one piece, welded, riveted
    • F16L41/03—Branch units, e.g. made in one piece, welded, riveted comprising junction pieces for four or more pipe members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L47/00—Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics
    • F16L47/26—Connecting arrangements or other fittings specially adapted to be made of plastics or to be used with pipes made of plastics for branching pipes; for joining pipes to walls; Adaptors therefor
    • F16L47/28—Joining pipes to walls or to other pipes, the axis of the joined pipe being perpendicular to the wall or to the axis of the other pipe
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17D—PIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00—Pipe-line systems
    • F17D1/02—Pipe-line systems for gases or vapours
    • F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Valve Housings (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Pipeline Systems (AREA)
SG11201907543XA 2017-03-15 2018-03-06 Joint and fluid control device SG11201907543XA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017050482 2017-03-15
PCT/JP2018/008452 WO2018168559A1 (ja) 2017-03-15 2018-03-06 継手および流体制御装置

Publications (1)

Publication Number Publication Date
SG11201907543XA true SG11201907543XA (en) 2019-09-27

Family

ID=63522128

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201907543XA SG11201907543XA (en) 2017-03-15 2018-03-06 Joint and fluid control device

Country Status (8)

Country Link
US (1) US11493162B2 (ja)
JP (1) JP7061808B2 (ja)
KR (1) KR20190116372A (ja)
CN (1) CN110234924B (ja)
IL (1) IL268542A (ja)
SG (1) SG11201907543XA (ja)
TW (1) TWI669460B (ja)
WO (1) WO2018168559A1 (ja)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018079288A1 (ja) * 2016-10-24 2018-05-03 株式会社フジキン 流体制御装置およびこの流体制御装置を用いた製品製造方法
JP2022529263A (ja) * 2019-04-15 2022-06-20 ラム リサーチ コーポレーション ガス送給用のモジュール式構成要素システム
JP7372664B2 (ja) * 2019-09-30 2023-11-01 株式会社フジキン 継手ブロックアセンブリおよび流体制御装置
WO2022186971A1 (en) 2021-03-03 2022-09-09 Ichor Systems, Inc. Fluid flow control system comprising a manifold assembly
CN114183615A (zh) * 2021-12-01 2022-03-15 江苏天毅冷镦股份有限公司 一种冷镦钎焊组合式多通金属接头及其制造工艺

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5178191A (en) * 1990-09-05 1993-01-12 Newmatic Controls Inc. Modular pneumatic control systems
JP2922453B2 (ja) * 1996-01-05 1999-07-26 シーケーディ株式会社 ガス供給集積ユニット
JP4022696B2 (ja) * 1996-11-20 2007-12-19 忠弘 大見 遮断開放器
JP3737869B2 (ja) * 1997-05-13 2006-01-25 シーケーディ株式会社 プロセスガス供給ユニット
US6152175A (en) * 1997-06-06 2000-11-28 Ckd Corporation Process gas supply unit
JP3766760B2 (ja) * 1999-02-19 2006-04-19 シーケーディ株式会社 バルブユニット
US6125887A (en) * 1999-09-20 2000-10-03 Pinto; James V. Welded interconnection modules for high purity fluid flow control applications
JP2002349797A (ja) 2001-05-23 2002-12-04 Fujikin Inc 流体制御装置
CN1280564C (zh) * 2001-06-21 2006-10-18 旭有机材工业株式会社 多路阀
AU2003262953A1 (en) * 2002-08-27 2004-03-19 Celerity Group, Inc. Modular substrate gas panel having manifold connections in a common plane
JP4283653B2 (ja) * 2003-12-04 2009-06-24 シーケーディ株式会社 ガス供給ユニット用ブロック
US7048008B2 (en) * 2004-04-13 2006-05-23 Ultra Clean Holdings, Inc. Gas-panel assembly
JP2006083959A (ja) * 2004-09-16 2006-03-30 Fujikin Inc センサ付き継手部材
JP4780555B2 (ja) * 2005-09-12 2011-09-28 株式会社フジキン 流体制御装置
JP4818835B2 (ja) * 2006-07-04 2011-11-16 東京エレクトロン株式会社 気体供給ユニット
JP2008210982A (ja) * 2007-02-26 2008-09-11 Tokyo Electron Ltd 半導体製造装置のガス供給システム及びガス供給集積ユニット
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
JP5868219B2 (ja) * 2012-02-29 2016-02-24 株式会社フジキン 流体制御装置
US9651467B2 (en) * 2013-05-09 2017-05-16 Tokushima University Raw material fluid density detector
JP6147113B2 (ja) * 2013-06-27 2017-06-14 株式会社フジキン 流体制御装置用継手および流体制御装置
TWI646278B (zh) * 2013-12-05 2019-01-01 Ｃｋｄ股份有限公司 Piping joint, fluid supply control device, and piping connection structure
US20210125842A1 (en) * 2017-03-29 2021-04-29 Fujikin Incorporated Conversion Joint, Integrated Fluid Supply Device Having Said Conversion Joint, and Method for Mounting a Fluid Part

Also Published As

Publication number Publication date
JP7061808B2 (ja) 2022-05-02
IL268542A (en) 2019-10-31
WO2018168559A1 (ja) 2018-09-20
CN110234924A (zh) 2019-09-13
JPWO2018168559A1 (ja) 2020-01-16
US20190390811A1 (en) 2019-12-26
KR20190116372A (ko) 2019-10-14
CN110234924B (zh) 2021-06-25
TWI669460B (zh) 2019-08-21
TW201835475A (zh) 2018-10-01
US11493162B2 (en) 2022-11-08

Similar Documents

Publication Publication Date Title
SG11201907543XA (en) Joint and fluid control device
MY194459A (en) Fluid delivery system
TWD177386S (zh) 流體控制閥之部分
TWD170098S (zh) 流量控制閥之部分
WO2011102669A3 (ko) 분기용 배관
GB2562956A (en) Clapper valve
WO2014209805A3 (en) Drain valve
WO2016057366A8 (en) Integrated orifice plate assembly
MX2013005837A (es) Aparato de valvula.
TWD194679S (zh) 流量控制閥
MX2018015881A (es) Dispositivo de ajuste a presion.
MY182035A (en) Connection device for connecting two fluid circuits
MX2016016034A (es) Regulador de fluido que posee un tubo de deteccion de presion inclinado.
MX2019001460A (es) Sistema y metodo para suministrar una sustancia fluida y sellar un pozo.
PL417875A1 (pl) Zespół elastycznego przewodu do przepływu płynów i sposób kształtowania zespołu elastycznego przewodu do przepływu płynów
WO2014177942A3 (en) High integrity pressure protection system (hipps) manifold system and method
MY181937A (en) Valve assembly
SG10201803854VA (en) Drain valve with rotatable angled outlet
TWD167570S (zh) 分支管接頭之部分
WO2016004920A3 (de) Ventil, insbesondere hydraulikventil
TWD221634S (zh) 鼻高流量（ｎｈｆ）單元端連接件及管件
MX2019015032A (es) Bolsa abatible para aplicaciones de válvula de burbuja.
WO2019089249A8 (en) Adsorbent system
MY176348A (en) Downhole ball valve
MX2018007443A (es) Sistemas de riego.