SG11201801119YA - Lighting device for inspection and inspection system - Google Patents

Lighting device for inspection and inspection system

Info

Publication number
SG11201801119YA
SG11201801119YA SG11201801119YA SG11201801119YA SG11201801119YA SG 11201801119Y A SG11201801119Y A SG 11201801119YA SG 11201801119Y A SG11201801119Y A SG 11201801119YA SG 11201801119Y A SG11201801119Y A SG 11201801119YA SG 11201801119Y A SG11201801119Y A SG 11201801119YA
Authority
SG
Singapore
Prior art keywords
inspection
lighting device
inspection system
lighting
Prior art date
Application number
SG11201801119YA
Other languages
English (en)
Inventor
Shigeki Masumura
Original Assignee
Machine Vision Lighting Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Machine Vision Lighting Inc filed Critical Machine Vision Lighting Inc
Publication of SG11201801119YA publication Critical patent/SG11201801119YA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95623—Inspecting patterns on the surface of objects using a spatial filtering method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
SG11201801119YA 2015-09-22 2015-09-23 Lighting device for inspection and inspection system SG11201801119YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2015186170A JP5866586B1 (ja) 2015-09-22 2015-09-22 検査用照明装置及び検査システム
PCT/JP2015/076824 WO2017051447A1 (ja) 2015-09-22 2015-09-23 検査用照明装置及び検査システム

Publications (1)

Publication Number Publication Date
SG11201801119YA true SG11201801119YA (en) 2018-03-28

Family

ID=55347054

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201801119YA SG11201801119YA (en) 2015-09-22 2015-09-23 Lighting device for inspection and inspection system

Country Status (10)

Country Link
US (1) US10598603B2 (zh)
EP (1) EP3355049B1 (zh)
JP (1) JP5866586B1 (zh)
KR (1) KR101857539B1 (zh)
CN (1) CN107615049B (zh)
DK (1) DK3355049T3 (zh)
ES (1) ES2868928T3 (zh)
IL (1) IL257398B (zh)
SG (1) SG11201801119YA (zh)
WO (1) WO2017051447A1 (zh)

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JP6954142B2 (ja) * 2018-01-17 2021-10-27 オムロン株式会社 画像検査装置および照明装置
US10634618B2 (en) * 2018-01-23 2020-04-28 Hong Kong Applied Science and Technology Research Institute Company Limited Apparatus and a method for inspecting a light transmissible optical component
JP7027926B2 (ja) 2018-02-07 2022-03-02 オムロン株式会社 画像検査装置および照明装置
EP3524967B1 (en) 2018-02-07 2024-01-31 OMRON Corporation Image inspection device and lighting device
JP6939641B2 (ja) 2018-02-23 2021-09-22 オムロン株式会社 画像検査装置および画像検査方法
JP6939640B2 (ja) 2018-02-23 2021-09-22 オムロン株式会社 画像検査装置および画像検査方法
US11941849B2 (en) 2019-02-15 2024-03-26 Nec Corporation Information processing device
WO2020174596A1 (ja) 2019-02-26 2020-09-03 日本電気株式会社 画像撮影装置
JP7178001B2 (ja) * 2019-03-14 2022-11-25 オムロン株式会社 検査装置
TWI705239B (zh) * 2019-07-19 2020-09-21 緯創資通股份有限公司 檢測光源模組與檢測裝置
CN114746716B (zh) * 2019-11-29 2024-06-04 机械视觉照明有限公司 形状复原方法和图像测量装置
KR102361860B1 (ko) 2020-06-14 2022-02-14 머신 비전 라이팅 가부시키가이샤 검사 측정용 조명 장치 및 검사 측정 시스템 및 검사 측정 방식
JP6799272B1 (ja) * 2020-06-14 2020-12-16 マシンビジョンライティング株式会社 検査測定システム及び検査測定方法
JP7206020B2 (ja) 2020-11-17 2023-01-17 マシンビジョンライティング株式会社 画像観察装置及びその照明光学系

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JP2016180591A (ja) * 2013-07-24 2016-10-13 株式会社日立ハイテクノロジーズ 検査装置

Also Published As

Publication number Publication date
KR20180002864A (ko) 2018-01-08
IL257398B (en) 2018-07-31
DK3355049T3 (da) 2021-07-05
KR101857539B1 (ko) 2018-05-14
US20180299386A1 (en) 2018-10-18
JP5866586B1 (ja) 2016-02-17
EP3355049A1 (en) 2018-08-01
CN107615049A (zh) 2018-01-19
EP3355049B1 (en) 2021-03-31
US10598603B2 (en) 2020-03-24
JP2017062120A (ja) 2017-03-30
WO2017051447A1 (ja) 2017-03-30
EP3355049A4 (en) 2018-08-01
ES2868928T3 (es) 2021-10-22
CN107615049B (zh) 2020-11-03

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