SG11201606807SA - Electrical discharge inspection device, wire bonding device, and electrical discharge inspection method - Google Patents
Electrical discharge inspection device, wire bonding device, and electrical discharge inspection methodInfo
- Publication number
- SG11201606807SA SG11201606807SA SG11201606807SA SG11201606807SA SG11201606807SA SG 11201606807S A SG11201606807S A SG 11201606807SA SG 11201606807S A SG11201606807S A SG 11201606807SA SG 11201606807S A SG11201606807S A SG 11201606807SA SG 11201606807S A SG11201606807S A SG 11201606807SA
- Authority
- SG
- Singapore
- Prior art keywords
- electrical discharge
- discharge inspection
- wire bonding
- inspection method
- bonding device
- Prior art date
Links
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0092—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring current only
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- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F10/00—Apparatus for measuring unknown time intervals by electric means
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- Testing Relating To Insulation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014027925 | 2014-02-17 | ||
PCT/JP2015/053665 WO2015122411A1 (en) | 2014-02-17 | 2015-02-10 | Electrical discharge inspection device, wire bonding device, and electrical discharge inspection method |
Publications (1)
Publication Number | Publication Date |
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SG11201606807SA true SG11201606807SA (en) | 2016-09-29 |
Family
ID=53800154
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG11201606807SA SG11201606807SA (en) | 2014-02-17 | 2015-02-10 | Electrical discharge inspection device, wire bonding device, and electrical discharge inspection method |
Country Status (7)
Country | Link |
---|---|
US (1) | US10607959B2 (en) |
JP (1) | JP6255585B2 (en) |
KR (1) | KR101897081B1 (en) |
CN (1) | CN106463423B (en) |
SG (1) | SG11201606807SA (en) |
TW (1) | TWI562252B (en) |
WO (1) | WO2015122411A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115458605A (en) * | 2015-12-18 | 2022-12-09 | 罗姆股份有限公司 | Semiconductor device with a plurality of semiconductor chips |
SG11202104391RA (en) * | 2019-03-13 | 2021-05-28 | Shinkawa Kk | Wire non-attachment inspection system, wire non-attachment detection device, and wire non-attachment detection method |
KR20230132535A (en) * | 2021-05-25 | 2023-09-15 | 가부시키가이샤 신가와 | Wire bonding system, inspection device, wire bonding method, and recording medium |
Family Cites Families (23)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS63119540A (en) * | 1986-11-07 | 1988-05-24 | Toshiba Seiki Kk | Ball forming apparatus for wire bonding |
JPS63136640A (en) * | 1986-11-28 | 1988-06-08 | Toshiba Seiki Kk | Ball formation device for wire bonding |
JPH06101491B2 (en) * | 1989-01-07 | 1994-12-12 | 三菱電機株式会社 | Wire bonding method and apparatus |
JPH07116888B2 (en) | 1989-06-14 | 1995-12-18 | ワイケイケイ株式会社 | Window sash |
JP2835989B2 (en) * | 1991-05-24 | 1998-12-14 | 株式会社新川 | Ball forming device for wire bonder |
US5496984A (en) * | 1992-01-07 | 1996-03-05 | Mitsubishi Denki Kabushiki Kaisha | Electrical discharge machine and machining method therefor |
JPH06101491A (en) | 1992-09-21 | 1994-04-12 | Suzuki Motor Corp | Intake device for engine |
JPH0722456A (en) * | 1993-06-30 | 1995-01-24 | Mitsubishi Electric Corp | Ball formation equipment for wire bonding, controlling method therefor, and wire bonder |
JP3370543B2 (en) * | 1997-02-24 | 2003-01-27 | 株式会社新川 | Discharge abnormality detection device and method for wire bonding device |
JPH11102930A (en) * | 1997-09-25 | 1999-04-13 | Kaijo Corp | Ball-forming apparatus in wire bonding |
US6898849B2 (en) * | 2000-09-27 | 2005-05-31 | Texas Instruments Incorporated | Method for controlling wire balls in electronic bonding |
TWI248186B (en) * | 2004-01-09 | 2006-01-21 | Unaxis Internat Tranding Ltd | Method for producing a wedge-wedge wire connection |
JP3786281B2 (en) * | 2004-11-05 | 2006-06-14 | 株式会社カイジョー | Wire bonding equipment |
JP4397326B2 (en) * | 2004-12-27 | 2010-01-13 | 株式会社新川 | Bonding equipment |
CN100365882C (en) * | 2005-10-24 | 2008-01-30 | 中国电子科技集团公司第四十五研究所 | Negative high-voltage electronic striking sparks balling apparatus |
JP4833197B2 (en) * | 2006-10-20 | 2011-12-07 | 三菱電機株式会社 | Power control device for electrical discharge machine |
JP5002329B2 (en) * | 2007-02-21 | 2012-08-15 | 株式会社新川 | Semiconductor device and wire bonding method |
JP2009302141A (en) * | 2008-06-10 | 2009-12-24 | Kaijo Corp | Wire bonding machine |
JP5379586B2 (en) * | 2009-07-16 | 2013-12-25 | 株式会社日本マイクロニクス | Battery short-circuit removing device and method |
JP5741078B2 (en) * | 2011-03-09 | 2015-07-01 | セイコーエプソン株式会社 | Printing device |
JP5662227B2 (en) * | 2011-04-05 | 2015-01-28 | 株式会社新川 | Bonding apparatus and bonding tool cleaning method |
JP2013033726A (en) * | 2011-06-27 | 2013-02-14 | Tokyo Electron Ltd | Abnormality detection device and abnormality detection method |
US9314869B2 (en) * | 2012-01-13 | 2016-04-19 | Asm Technology Singapore Pte. Ltd. | Method of recovering a bonding apparatus from a bonding failure |
-
2014
- 2014-12-18 TW TW103144200A patent/TWI562252B/en active
-
2015
- 2015-02-10 WO PCT/JP2015/053665 patent/WO2015122411A1/en active Application Filing
- 2015-02-10 JP JP2015562829A patent/JP6255585B2/en active Active
- 2015-02-10 KR KR1020167025338A patent/KR101897081B1/en active IP Right Grant
- 2015-02-10 SG SG11201606807SA patent/SG11201606807SA/en unknown
- 2015-02-10 CN CN201580019995.9A patent/CN106463423B/en active Active
-
2016
- 2016-08-17 US US15/238,732 patent/US10607959B2/en active Active
Also Published As
Publication number | Publication date |
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US10607959B2 (en) | 2020-03-31 |
CN106463423A (en) | 2017-02-22 |
JP6255585B2 (en) | 2018-01-10 |
KR101897081B1 (en) | 2018-09-10 |
WO2015122411A1 (en) | 2015-08-20 |
KR20160122805A (en) | 2016-10-24 |
CN106463423B (en) | 2019-10-25 |
JPWO2015122411A1 (en) | 2017-03-30 |
US20160358879A1 (en) | 2016-12-08 |
TWI562252B (en) | 2016-12-11 |
TW201533818A (en) | 2015-09-01 |
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