CN100365882C - Negative high-voltage electronic striking sparks balling apparatus - Google Patents

Negative high-voltage electronic striking sparks balling apparatus Download PDF

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Publication number
CN100365882C
CN100365882C CNB2005102006412A CN200510200641A CN100365882C CN 100365882 C CN100365882 C CN 100365882C CN B2005102006412 A CNB2005102006412 A CN B2005102006412A CN 200510200641 A CN200510200641 A CN 200510200641A CN 100365882 C CN100365882 C CN 100365882C
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control circuit
circuit
voltage
current
signal
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CN1773786A (en
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任绍彬
张琦
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Beijing Semiconductor Equipment Institute
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Beijing Semiconductor Equipment Institute
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Abstract

The present invention relates to a negative high-voltage electronic fire striking and balling device which is connected with a fire striking discharge loop. The present invention comprises a logic control circuit, a negative high-voltage control circuit, a negative low-voltage control circuit, a high-voltage high-frequency transformer, a low-voltage high-frequency transformer, a D/A converter, a constant current control circuit, a current sampling circuit and a detection feedback circuit, wherein the logical control circuit is connected with an interface circuit and is based on a complex programmable logic device (CPLD). The present invention achieves the purpose of controlling the dimension of balls struck by fire strictly, namely, the present invention achieves the purpose of precisely controlling the discharge time and the current intensity of the electronic fire striking balling device. The present invention can automatically monitor the working process of fire striking and balling and can return states in time. Therefore, the normal operation of the entire equipment system can be ensured. The present invention can ensure that fire can be struck and balled stably and reliably at a high speed.

Description

Negative high-voltage electronic striking sparks balling apparatus
Technical field
The present invention relates to a kind of electronic striking balling head.
Background technology
In the ball bonding apparatus, the electronic striking balling head important device that is absolutely necessary, the process of electronic striking balling-up is a high-voltage tip discharging process.High pressure between gold thread and the igniting needle is kept certain electric current after with air breakdown between the two, the fusing that will go between, and liquid metal forms the required free air ball of first bonding under capillary effect.Require the diameters difference of different and lead-in wire according to the device technology of bonding, the size of balling-up is also had different demands.Existing electronic striking balling head can not can not carry out accurate control to the time and the electric current of discharge to the strict control of balling-up size, and therefore, stability and reliability are not high, influence the quality of electronic striking balling-up, influence carrying out smoothly of bonding process.
Summary of the invention
The objective of the invention is provides a kind of negative high-voltage electronic striking sparks balling apparatus for the ball bonding apparatus, solve the problem of strict control sparking balling-up size, just to solve the discharge time of accurate control electronic striking balling head and the problem of current strength, realization is to the automatic monitoring of the whole sparking balling-up course of work, state is in time fed back, to guarantee that the entire equipment system can normally move, guarantee that the electronic striking balling-up is stable, reliably, at a high speed.
Technical scheme of the present invention is as follows:
This negative high-voltage electronic striking sparks balling apparatus is connected with the sparking discharge loop, it is characterized in that comprising in this device:
Logic control circuit that is connected with the order data communication interface based on programmable logic device (CPLD);
A negative high voltage control circuit is imported the negative high voltage control signal of above-mentioned logic control circuit output to it;
A negative low-voltage control circuit is imported the negative low-voltage control signal of above-mentioned logic control circuit output to it;
A high voltage high frequency transformer, it receives the pulse signal of above-mentioned negative high voltage control circuit output, and it is to negative high voltage of sparking discharge loop output;
A low pressure high frequency transformer, it receives the high-frequency oscillation signal of above-mentioned negative low-voltage control circuit output, and it is to negative low pressure of sparking discharge loop output;
A D/A converter, the digital signal that it will bear low-voltage control circuit output is converted to analog signal;
A constant-current control circuit, it imports the low pressure high frequency transformer with the analog electrical signal of D/A converter output after constant current;
A current sampling circuit, it gathers the current signal of sparking discharge loop output;
One is detected feedback circuit, and it is imported the signal of telecommunication of above-mentioned current sampling circuit output, and to above-mentioned logic control circuit input feedback signal.
The mentioned order data communication interface is usb circuit, common serial interface circuit or ethernet interface circuit.
This negative high-voltage electronic striking sparks balling apparatus, it is characterized in that: produce control signal and feedback signal is carried out judgment processing by logic control circuit based on programmable logic device (CPLD), produce negative high voltage and negative low pressure respectively by two high frequency transformers, carry out Current Control by constant-current control circuit, current sampling circuit is arranged in the loop and detect feedback circuit.
Use the application process of negative high-voltage electronic striking sparks balling apparatus, it is characterized in that:
Transmit control data and order by the order data communication interface, comprising sparking discharge time value, current value, data and order such as start and stop, after time value, the current value setting of sparking discharge are finished, starting command will make this device enter the work period of a sparking discharge;
Produce the pulse signal that a broad-adjustable pulse signal control negative high voltage control circuit produces a narrower in width by the time value of the sparking discharge of setting by logic control circuit and control high voltage high frequency transformer moment conducting air breakdown based on programmable logic device (CPLD), the negative low-voltage control circuit of the broad-adjustable pulse signal control of this of logic control circuit generation simultaneously produces the higher-order of oscillation, the adjustable pulse signal width that time span equals to produce, by the ON time of its control low pressure high frequency transformer, realize the sparking strictness control of discharge time;
Produce an analog signal by the current value of setting through eight D/A converters simultaneously and come the control of limit circuit electric current realization to discharging current by constant-current control circuit, by regulating the size of current setting value decision electric current, 256 grades of precision are adjustable; Control by sparking discharge time and electric current just can realize the accurate control to the balling-up size;
Sparking discharge loop between igniting needle and wire forms negative high voltage with air breakdown; the sparking discharge process of negative low voltage sustain discharging current; be converted to a magnitude of voltage after the treated amplification of current value in loop in the whole sparking discharge process of current sampling circuit real-time sampling; by detecting feedback circuit this magnitude of voltage is compared; its result feeds back to logic control circuit the operating state in the whole process is carried out real-time analysis; judge three kinds of states that may occur in the sparking discharge process; normally; open circuit or short circuit; and under the abnormal conditions of open circuit or short circuit, in time make a response; broad-adjustable pulse control signal shutoff is made low pressure high frequency transformer stop conducting; discharge condition timely so just is through with; realization is to the protection of whole device; again whole status of processes is sent to the order data communication interface at last, finish the whole control process of electronic striking discharge.
The present invention designs for negative high voltage, can monitor the whole sparking balling-up course of work simultaneously, state is in time fed back to guarantee that the entire equipment system can normally move,, can improve Metal Ball size Control and raising chopper life-span because ion flow is to leave Metal Ball (chopper) and flow to igniting needle.For the consistency that guarantees the balling-up size and dimension to electronic striking discharge time and electric current carrying out precision control, use high-precision crystal oscillator behind frequency division, to realize accurate control to discharge time by counter.Can realize that by changing the counter preset value output area 0~32ms is adjustable continuously,, adopt negative high-low pressure design in the discharge process simultaneously in order to realize High Accuracy Control to discharging current.Produce by two high frequency transformers respectively, negative high voltage be-4.8KV~-5.2KV, bear low pressure and be-700V about.In the sparking process at first by the negative high voltage pulse with air breakdown, again by negative low voltage sustain discharging current.Current value can be adjustable continuously in the scope of 8mA~70mA.In order to improve the response speed of electronic striking, all logical signals are handled and are all finished by hardware, can satisfy the needs of high speed bonding apparatus fully.The present invention carries out complete monitoring to the state of electronic striking balling-up, has designed perfect sampling, detection and feedback circuit, and the user can in time grasp the state after the sparking.If electronic striking failure meeting feedback error information makes main frame or user make corresponding processing and in time finish discharge condition when unusual according to feedback information, protective device is not damaged.Be widely used in various ball bonding apparatus.
Description of drawings
Fig. 1 is a theory diagram of the present invention.
Embodiment
Embodiment is referring to Fig. 1, and this negative high-voltage electronic striking sparks balling apparatus is connected with the sparking discharge loop, and it comprises:
Logic control circuit 2 that is connected with order data communication interface 1 based on programmable logic device (CPLD);
A negative high voltage control circuit 3 is imported the negative high voltage control signal of above-mentioned logic control circuit output to it;
A negative low-voltage control circuit 4 is imported the negative low-voltage control signal of above-mentioned logic control circuit output to it;
A high voltage high frequency transformer 5, it receives the pulse signal of above-mentioned negative high voltage control circuit output, and it is to negative high voltage of sparking discharge loop 9 outputs;
A low pressure high frequency transformer 6, it receives the high-frequency oscillation signal of above-mentioned negative low-voltage control circuit output, and it is to negative low pressure of sparking discharge loop 9 outputs;
A D/A converter 7, the digital signal that it will bear low-voltage control circuit output is converted to analog signal;
A constant-current control circuit 8, it imports the low pressure high frequency transformer with the analog electrical signal of D/A converter output after constant current;
A current sampling circuit 10, it gathers the current signal of sparking discharge loop 9 outputs;
One is detected feedback circuit 11, and it is imported the signal of telecommunication of above-mentioned current sampling circuit output, and to above-mentioned logic control circuit input feedback signal.
Mentioned order data communication interface 1 is usb circuit, common serial interface circuit or ethernet interface circuit.
The present invention is transmitted control data and order by order data communication interface 1, comprising sparking discharge time value, current value, data and order such as start and stop.Time value in the sparking discharge, after current value is set and is finished, starting command will make this device enter the work period of a sparking discharge, its process is: the time value by the sparking discharge of setting is controlled high voltage high frequency transformer 4 moment conducting with air breakdown by the pulse signal that the logic control circuit 2 based on programmable logic device (CPLD) produces broad-adjustable pulse signal control negative high voltage control circuit 3 generations one narrower in width, the 2 negative low-voltage control circuits 5 of this broad-adjustable pulse signal control that produce produce the higher-order of oscillation simultaneously, time span equals the 2 adjustable pulse signal width that produce, by the ON time of its control low pressure high frequency transformer 6, realize the sparking strictness control of discharge time.Produce an analog signal by the current value of setting through eight D/A converters 7 simultaneously and come the control of limit circuit electric current realization to discharging current by constant-current control circuit 8, by regulating the size of current setting value decision electric current, 256 grades of precision are adjustable.Control by sparking discharge time and electric current just can realize the accurate control to the balling-up size.Sparking discharge loop 9 between igniting needle and wire forms negative high voltage with air breakdown; the sparking discharge process of negative low voltage sustain discharging current; be converted to a magnitude of voltage after the treated amplification of current value in loop in the whole sparking discharge process of current sampling circuit 10 real-time samplings; by detecting feedback circuit 11 this magnitude of voltage is compared; the operating state that its result feeds back in 2 pairs of whole processes of logic control circuit is carried out real-time analysis; judge three kinds of states that may occur in the sparking discharge process; normally; open circuit or short circuit; and under the abnormal conditions of open circuit or short circuit, in time make a response; broad-adjustable pulse control signal shutoff is made low pressure high frequency transformer 6 stop conductings; discharge condition timely so just is through with; realization is to the protection of whole device; again whole status of processes is sent to order data communication interface 1 at last, finish the whole control process of electronic striking discharge.

Claims (3)

1. a negative high-voltage electronic striking sparks balling apparatus is connected with the sparking discharge loop, it is characterized in that comprising in this device:
Logic control circuit that is connected with the order data communication interface based on programmable logic device (CPLD);
A negative high voltage control circuit is imported the negative high voltage control signal of above-mentioned logic control circuit output to it;
A negative low-voltage control circuit is imported the negative low-voltage control signal of above-mentioned logic control circuit output to it;
A high voltage high frequency transformer, it receives the pulse signal of above-mentioned negative high voltage control circuit output, and it is to negative high voltage of sparking discharge loop output;
A low pressure high frequency transformer, it receives the high-frequency oscillation signal of above-mentioned negative low-voltage control circuit output, and it is to negative low pressure of sparking discharge loop output;
A D/A converter, the digital signal that it will bear low-voltage control circuit output is converted to analog signal;
A constant-current control circuit, it imports the low pressure high frequency transformer with the analog electrical signal of D/A converter output after constant current;
A current sampling circuit, it gathers the current signal of sparking discharge loop output;
One is detected feedback circuit, and it is imported the signal of telecommunication of above-mentioned current sampling circuit output, and to above-mentioned logic control circuit input feedback signal;
Produce control signal and feedback signal is carried out judgment processing by logic control circuit, carry out Current Control by constant-current control circuit based on programmable logic device (CPLD).
2. negative high-voltage electronic striking sparks balling apparatus according to claim 1 is characterized in that: the mentioned order data communication interface is usb circuit, common serial interface circuit or ethernet interface circuit.
3. the application process of negative high-voltage electronic striking sparks balling apparatus according to claim 1 is characterized in that:
Transmit time value, current value, the control data that starts and stop and the order of sparking discharge by the order data communication interface, after time value, the current value setting of sparking discharge are finished, starting command will make this device enter the work period of a sparking discharge;
Produce pulse signal that a broad-adjustable pulse signal control negative high voltage control circuit produces a narrower in width by the time value of the sparking discharge of setting by logic control circuit and control high voltage high frequency transformer moment based on programmable logic device (CPLD)
Conducting is with air breakdown, the negative low-voltage control circuit of the broad-adjustable pulse signal control of this of logic control circuit generation simultaneously produces the higher-order of oscillation, the adjustable pulse signal width that time span equals to produce, by the ON time of its control low pressure high frequency transformer, realize the sparking strictness control of discharge time;
Produce an analog signal by the current value of setting through eight D/A converters simultaneously and come the control of limit circuit electric current realization to discharging current by constant-current control circuit, by regulating the size of current setting value decision electric current, 256 grades of precision are adjustable; Control by sparking discharge time and electric current just can realize the accurate control to the balling-up size;
Sparking discharge loop between igniting needle and wire forms negative high voltage with air breakdown; the sparking discharge process of negative low voltage sustain discharging current; be converted to a magnitude of voltage after the treated amplification of current value in loop in the whole sparking discharge process of current sampling circuit real-time sampling; by detecting feedback circuit this magnitude of voltage is compared; its result feeds back to logic control circuit the operating state in the whole process is carried out real-time analysis; judge three kinds of states that may occur in the sparking discharge process; normally; open circuit or short circuit; and under the abnormal conditions of open circuit or short circuit, in time make a response; broad-adjustable pulse control signal shutoff is made low pressure high frequency transformer stop conducting; discharge condition timely so just is through with; realization is to the protection of whole device; again whole status of processes is sent to the order data communication interface at last, finish the whole control process of electronic striking discharge.
CNB2005102006412A 2005-10-24 2005-10-24 Negative high-voltage electronic striking sparks balling apparatus Expired - Fee Related CN100365882C (en)

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Application Number Priority Date Filing Date Title
CNB2005102006412A CN100365882C (en) 2005-10-24 2005-10-24 Negative high-voltage electronic striking sparks balling apparatus

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CN100365882C true CN100365882C (en) 2008-01-30

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI562252B (en) * 2014-02-17 2016-12-11 Shinkawa Kk Detecting discharging device, wire bonding device and detecting discharging method
CN108614484A (en) * 2018-05-11 2018-10-02 大族激光科技产业集团股份有限公司 A kind of electric current burns the control method and its burning ball control system of ball
CN111715976B (en) * 2019-03-18 2024-04-26 深圳市德沃先进自动化有限公司 LED wire bonding machine
CN114643394A (en) * 2022-05-19 2022-06-21 深圳市大族封测科技股份有限公司 Ball welding current control method, controller and EFO system

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CN1667892A (en) * 2004-03-09 2005-09-14 库力索法投资公司 Wire bonding apparatus having actuated flame-off wand

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
US5773780A (en) * 1993-11-16 1998-06-30 Formfactor, Inc. Method of severing bond wires and forming balls at their ends
US6065667A (en) * 1997-01-15 2000-05-23 National Semiconductor Corporation Method and apparatus for fine pitch wire bonding
US6898849B2 (en) * 2000-09-27 2005-05-31 Texas Instruments Incorporated Method for controlling wire balls in electronic bonding
CN1667892A (en) * 2004-03-09 2005-09-14 库力索法投资公司 Wire bonding apparatus having actuated flame-off wand
US20050199677A1 (en) * 2004-03-09 2005-09-15 Kulicke And Soffa Industries Inc. Wire bonding apparatus having actuated flame-off wand

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Moldelling of Free Air Ball for Copper Wire Bonding. Jonathan Tan,Boon Hoe Toh and Hong Meng Ho.Electronics Packaging Technology Conference. 2004 *
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GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract

Assignee: CETC Beijing Electronic Equipment Co., Ltd.

Assignor: No.45 Inst., China Electronic science and Technology Group Corp.

Contract fulfillment period: 2007.3.1 to 2014.12.29 contract change

Contract record no.: 2009990000523

Denomination of invention: Negative high-voltage electronic striking sparks balling apparatus

Granted publication date: 20080130

License type: Exclusive license

Record date: 2009.5.18

LIC Patent licence contract for exploitation submitted for record

Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2007.3.1 TO 2014.12.29; CHANGE OF CONTRACT

Name of requester: BEIJING ZHONGDIAN SCIENCE ELECTRONIC EQUIPMENT CO.

Effective date: 20090518

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20080130

Termination date: 20141024

EXPY Termination of patent right or utility model