SG11201606276QA - Stage positioning system and lithographic apparatus - Google Patents

Stage positioning system and lithographic apparatus

Info

Publication number
SG11201606276QA
SG11201606276QA SG11201606276QA SG11201606276QA SG11201606276QA SG 11201606276Q A SG11201606276Q A SG 11201606276QA SG 11201606276Q A SG11201606276Q A SG 11201606276QA SG 11201606276Q A SG11201606276Q A SG 11201606276QA SG 11201606276Q A SG11201606276Q A SG 11201606276QA
Authority
SG
Singapore
Prior art keywords
positioning system
lithographic apparatus
stage positioning
stage
lithographic
Prior art date
Application number
SG11201606276QA
Other languages
English (en)
Inventor
Wilhelmus Henricus Theodorus Maria Aangenent
Lucas Franciscus Koorneef
Theo Anjes Maria Ruijl
Den Berg Stanley Constant Johannes Martinus Van
Der Meulen Stan Henricus Van
Eijk Jan Van
Pieter Hubertus Godefrida Wullms
Lieshout Richard Henricus Adrianus Van
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Publication of SG11201606276QA publication Critical patent/SG11201606276QA/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
    • G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Landscapes

  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Public Health (AREA)
  • Epidemiology (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
SG11201606276QA 2014-01-31 2015-01-20 Stage positioning system and lithographic apparatus SG11201606276QA (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP14153404 2014-01-31
EP14161344 2014-03-24
PCT/EP2015/050950 WO2015113861A1 (en) 2014-01-31 2015-01-20 Stage positioning system and lithographic apparatus

Publications (1)

Publication Number Publication Date
SG11201606276QA true SG11201606276QA (en) 2016-08-30

Family

ID=52444261

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201606276QA SG11201606276QA (en) 2014-01-31 2015-01-20 Stage positioning system and lithographic apparatus

Country Status (10)

Country Link
US (1) US9897926B2 (ja)
EP (1) EP3100115B1 (ja)
JP (1) JP6316973B2 (ja)
KR (1) KR101882824B1 (ja)
CN (1) CN106133608B (ja)
IL (1) IL247013B (ja)
NL (1) NL2014160A (ja)
SG (1) SG11201606276QA (ja)
TW (1) TWI647541B (ja)
WO (1) WO2015113861A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017207211A1 (en) * 2016-05-31 2017-12-07 Asml Netherlands B.V. Stage system, lithographic apparatus and device manufacturing method
KR102232306B1 (ko) * 2017-03-17 2021-03-24 어플라이드 머티어리얼스, 인코포레이티드 기판의 진공 프로세싱을 위한 장치, 기판의 진공 프로세싱을 위한 시스템, 및 진공 챔버 내에서의 기판 캐리어 및 마스크 캐리어의 이송을 위한 방법
EP3667696A1 (en) * 2018-12-14 2020-06-17 ASML Netherlands B.V. Stage apparatus suitable for electron beam inspection apparatus
US10991544B2 (en) * 2019-05-29 2021-04-27 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen
CN113448174B (zh) * 2020-03-26 2023-02-10 上海微电子装备（集团）股份有限公司 一种缓冲结构、掩模台及光刻机
WO2023078788A1 (en) * 2021-11-03 2023-05-11 Asml Netherlands B.V. Lithographic apparatus stage coupling

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5237018A (en) * 1991-08-28 1993-08-17 The United States Of America As Represented By The Secretary Of The Navy Interpenetrating polymer network acoustic damping material
JPH07325628A (ja) * 1994-05-31 1995-12-12 Canon Inc ６自由度剛体振動系のモデリング方法およびその装置
JPH09174373A (ja) * 1995-12-27 1997-07-08 Nikon Corp ステージシステム
AU1204897A (en) * 1996-01-05 1997-08-01 William Alexander Courtney Device incorporating elastic fluids and viscous damping
JPH11154698A (ja) * 1997-11-21 1999-06-08 Nikon Corp テーブル支持装置
JP2001221733A (ja) 2000-02-04 2001-08-17 Olympus Optical Co Ltd 微動機構
JP2003217998A (ja) * 2002-01-18 2003-07-31 Nikon Corp ステージ装置及び露光装置
US20030181584A1 (en) 2002-02-07 2003-09-25 Kraton Polymers U.S. Llc Elastomeric articles prepared from controlled distribution block copolymers
US6906786B2 (en) 2002-06-07 2005-06-14 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
KR101428817B1 (ko) 2005-07-14 2014-08-08 칼 짜이스 에스엠테 게엠베하 광학 요소 진동 감쇄 장치, 대물렌즈, 투사 노출 기계 및 이들을 사용하는 방법
KR101328791B1 (ko) 2005-09-07 2013-11-13 가부시끼가이샤 유니락 방진 장치
FI20065364A0 (fi) 2006-05-30 2006-05-30 Valtion Teknillinen Värähtelyn vaimennusjärjestelmä
DE102007010701A1 (de) * 2007-02-27 2008-08-28 Gerb Schwingungsisolierungen Gmbh & Co Kg Dämpferelement
JP5251869B2 (ja) * 2007-04-23 2013-07-31 株式会社ニコン 光学素子保持装置、鏡筒及び露光装置ならびにデバイスの製造方法
JP5028659B2 (ja) * 2007-08-24 2012-09-19 秋田県 位置決め機構
US8164737B2 (en) 2007-10-23 2012-04-24 Asml Netherlands B.V. Lithographic apparatus having an active damping subassembly
JP5052315B2 (ja) 2007-12-06 2012-10-17 オリンパス株式会社 顕微鏡システム
NL1036544A1 (nl) * 2008-02-21 2009-08-24 Asml Netherlands Bv A lithographic apparatus having a chuck with a visco-elastic damping layer.
EP2221668B1 (en) * 2009-02-24 2021-04-14 ASML Netherlands B.V. Lithographic apparatus and positioning assembly
JP5364462B2 (ja) 2009-06-19 2013-12-11 株式会社日立ハイテクノロジーズ 荷電粒子線装置
EP2469339B1 (en) * 2010-12-21 2017-08-30 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
KR101882824B1 (ko) 2018-07-27
NL2014160A (en) 2015-08-06
JP6316973B2 (ja) 2018-04-25
CN106133608B (zh) 2018-01-12
US9897926B2 (en) 2018-02-20
EP3100115A1 (en) 2016-12-07
CN106133608A (zh) 2016-11-16
IL247013A0 (en) 2016-09-29
IL247013B (en) 2021-07-29
WO2015113861A1 (en) 2015-08-06
US20170010543A1 (en) 2017-01-12
KR20160113286A (ko) 2016-09-28
JP2017509914A (ja) 2017-04-06
EP3100115B1 (en) 2019-11-27
TWI647541B (zh) 2019-01-11
TW201530265A (zh) 2015-08-01

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