SG11201606276QA - Stage positioning system and lithographic apparatus - Google Patents
Stage positioning system and lithographic apparatusInfo
- Publication number
- SG11201606276QA SG11201606276QA SG11201606276QA SG11201606276QA SG11201606276QA SG 11201606276Q A SG11201606276Q A SG 11201606276QA SG 11201606276Q A SG11201606276Q A SG 11201606276QA SG 11201606276Q A SG11201606276Q A SG 11201606276QA SG 11201606276Q A SG11201606276Q A SG 11201606276QA
- Authority
- SG
- Singapore
- Prior art keywords
- positioning system
- lithographic apparatus
- stage positioning
- stage
- lithographic
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Toxicology (AREA)
- Atmospheric Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP14153404 | 2014-01-31 | ||
| EP14161344 | 2014-03-24 | ||
| PCT/EP2015/050950 WO2015113861A1 (en) | 2014-01-31 | 2015-01-20 | Stage positioning system and lithographic apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201606276QA true SG11201606276QA (en) | 2016-08-30 |
Family
ID=52444261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201606276QA SG11201606276QA (en) | 2014-01-31 | 2015-01-20 | Stage positioning system and lithographic apparatus |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US9897926B2 (he) |
| EP (1) | EP3100115B1 (he) |
| JP (1) | JP6316973B2 (he) |
| KR (1) | KR101882824B1 (he) |
| CN (1) | CN106133608B (he) |
| IL (1) | IL247013B (he) |
| NL (1) | NL2014160A (he) |
| SG (1) | SG11201606276QA (he) |
| TW (1) | TWI647541B (he) |
| WO (1) | WO2015113861A1 (he) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL2018847A (en) | 2016-05-31 | 2017-12-04 | Asml Netherlands Bv | Stage system, lithographic apparatus and device manufacturing method |
| WO2018166636A1 (en) * | 2017-03-17 | 2018-09-20 | Applied Materials, Inc. | Apparatus for vacuum processing of a substrate, system for vacuum processing of a substrate, and method for transportation of a substrate carrier and a mask carrier in a vacuum chamber |
| EP3667696A1 (en) * | 2018-12-14 | 2020-06-17 | ASML Netherlands B.V. | Stage apparatus suitable for electron beam inspection apparatus |
| US10991544B2 (en) * | 2019-05-29 | 2021-04-27 | ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH | Charged particle beam device, objective lens module, electrode device, and method of inspecting a specimen |
| CN113448174B (zh) * | 2020-03-26 | 2023-02-10 | 上海微电子装备（集团）股份有限公司 | 一种缓冲结构、掩模台及光刻机 |
| CN118176462A (zh) * | 2021-11-03 | 2024-06-11 | Asml荷兰有限公司 | 光刻设备平台联接件 |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5237018A (en) * | 1991-08-28 | 1993-08-17 | The United States Of America As Represented By The Secretary Of The Navy | Interpenetrating polymer network acoustic damping material |
| JPH07325628A (ja) | 1994-05-31 | 1995-12-12 | Canon Inc | ６自由度剛体振動系のモデリング方法およびその装置 |
| JPH09174373A (ja) | 1995-12-27 | 1997-07-08 | Nikon Corp | ステージシステム |
| WO1997025551A2 (en) * | 1996-01-05 | 1997-07-17 | William Alexander Courtney | Device incorporating elastic fluids and viscous damping |
| JPH11154698A (ja) * | 1997-11-21 | 1999-06-08 | Nikon Corp | テーブル支持装置 |
| JP2001221733A (ja) | 2000-02-04 | 2001-08-17 | Olympus Optical Co Ltd | 微動機構 |
| JP2003217998A (ja) | 2002-01-18 | 2003-07-31 | Nikon Corp | ステージ装置及び露光装置 |
| US20030181584A1 (en) | 2002-02-07 | 2003-09-25 | Kraton Polymers U.S. Llc | Elastomeric articles prepared from controlled distribution block copolymers |
| KR100522885B1 (ko) | 2002-06-07 | 2005-10-20 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피장치 및 디바이스제조방법 |
| WO2007006577A1 (en) | 2005-07-14 | 2007-01-18 | Carl Zeiss Smt Ag | Optical element |
| DE102006041434B4 (de) | 2005-09-07 | 2017-12-28 | Unirock Co., Ltd. | Schwingungsisolatiosvorrichtung |
| FI20065364A0 (fi) | 2006-05-30 | 2006-05-30 | Valtion Teknillinen | Värähtelyn vaimennusjärjestelmä |
| DE102007010701A1 (de) * | 2007-02-27 | 2008-08-28 | Gerb Schwingungsisolierungen Gmbh & Co Kg | Dämpferelement |
| KR101506358B1 (ko) | 2007-04-23 | 2015-03-26 | 가부시키가이샤 니콘 | 광학 소자 유지 장치, 렌즈 배럴 및 노광 장치 |
| JP5028659B2 (ja) | 2007-08-24 | 2012-09-19 | 秋田県 | 位置決め機構 |
| US8164737B2 (en) | 2007-10-23 | 2012-04-24 | Asml Netherlands B.V. | Lithographic apparatus having an active damping subassembly |
| JP5052315B2 (ja) | 2007-12-06 | 2012-10-17 | オリンパス株式会社 | 顕微鏡システム |
| NL1036544A1 (nl) | 2008-02-21 | 2009-08-24 | Asml Netherlands Bv | A lithographic apparatus having a chuck with a visco-elastic damping layer. |
| EP2221668B1 (en) * | 2009-02-24 | 2021-04-14 | ASML Netherlands B.V. | Lithographic apparatus and positioning assembly |
| JP5364462B2 (ja) | 2009-06-19 | 2013-12-11 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
| EP2469339B1 (en) | 2010-12-21 | 2017-08-30 | ASML Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
2015
- 2015-01-20 JP JP2016549473A patent/JP6316973B2/ja active Active
- 2015-01-20 KR KR1020167023789A patent/KR101882824B1/ko active IP Right Grant
- 2015-01-20 EP EP15702165.0A patent/EP3100115B1/en active Active
- 2015-01-20 NL NL2014160A patent/NL2014160A/en unknown
- 2015-01-20 CN CN201580013489.9A patent/CN106133608B/zh active Active
- 2015-01-20 SG SG11201606276QA patent/SG11201606276QA/en unknown
- 2015-01-20 US US15/115,876 patent/US9897926B2/en active Active
- 2015-01-20 WO PCT/EP2015/050950 patent/WO2015113861A1/en active Application Filing
- 2015-01-27 TW TW104102748A patent/TWI647541B/zh active
-
2016
- 2016-07-28 IL IL247013A patent/IL247013B/he unknown
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160113286A (ko) | 2016-09-28 |
| WO2015113861A1 (en) | 2015-08-06 |
| EP3100115B1 (en) | 2019-11-27 |
| NL2014160A (en) | 2015-08-06 |
| IL247013A0 (he) | 2016-09-29 |
| JP2017509914A (ja) | 2017-04-06 |
| EP3100115A1 (en) | 2016-12-07 |
| US9897926B2 (en) | 2018-02-20 |
| US20170010543A1 (en) | 2017-01-12 |
| TW201530265A (zh) | 2015-08-01 |
| CN106133608B (zh) | 2018-01-12 |
| CN106133608A (zh) | 2016-11-16 |
| KR101882824B1 (ko) | 2018-07-27 |
| IL247013B (he) | 2021-07-29 |
| TWI647541B (zh) | 2019-01-11 |
| JP6316973B2 (ja) | 2018-04-25 |
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