SG11201600524YA - Lock-in thermography method and system for hot spot localization - Google Patents

Lock-in thermography method and system for hot spot localization

Info

Publication number
SG11201600524YA
SG11201600524YA SG11201600524YA SG11201600524YA SG11201600524YA SG 11201600524Y A SG11201600524Y A SG 11201600524YA SG 11201600524Y A SG11201600524Y A SG 11201600524YA SG 11201600524Y A SG11201600524Y A SG 11201600524YA SG 11201600524Y A SG11201600524Y A SG 11201600524YA
Authority
SG
Singapore
Prior art keywords
lock
hot spot
thermography method
spot localization
localization
Prior art date
Application number
SG11201600524YA
Other languages
English (en)
Inventor
Christian Schmidt
Raiko Meinhardt-Wildegger
Frank Altmann
Falk Naumann
Rudolf Schlangen
Original Assignee
Dcg Systems Inc
Fraunhofer Ges Forschung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dcg Systems Inc, Fraunhofer Ges Forschung filed Critical Dcg Systems Inc
Publication of SG11201600524YA publication Critical patent/SG11201600524YA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0066—Radiation pyrometry, e.g. infrared or optical thermometry for hot spots detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0096—Radiation pyrometry, e.g. infrared or optical thermometry for measuring wires, electrical contacts or electronic systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Radiation Pyrometers (AREA)
SG11201600524YA 2013-08-23 2014-05-30 Lock-in thermography method and system for hot spot localization SG11201600524YA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP13181506.0A EP2840387A1 (en) 2013-08-23 2013-08-23 Lock-in thermography method and system for hot spot localization
PCT/EP2014/061232 WO2015024679A1 (en) 2013-08-23 2014-05-30 Lock-in thermography method and system for hot spot localization

Publications (1)

Publication Number Publication Date
SG11201600524YA true SG11201600524YA (en) 2016-02-26

Family

ID=49000875

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201600524YA SG11201600524YA (en) 2013-08-23 2014-05-30 Lock-in thermography method and system for hot spot localization

Country Status (7)

Country Link
US (1) US20160202126A1 (enrdf_load_stackoverflow)
EP (1) EP2840387A1 (enrdf_load_stackoverflow)
JP (1) JP6616302B2 (enrdf_load_stackoverflow)
DE (1) DE112014003881T5 (enrdf_load_stackoverflow)
SG (1) SG11201600524YA (enrdf_load_stackoverflow)
TW (1) TWI563251B (enrdf_load_stackoverflow)
WO (1) WO2015024679A1 (enrdf_load_stackoverflow)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014218136B4 (de) * 2014-09-10 2019-07-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Thermographische Untersuchungseinrichtung sowie Verfahren zur zerstörungsfreien Untersuchung einer oberflächennahen Struktur an einem Prüfobjekt
CN104776918B (zh) * 2015-03-30 2018-06-08 中国人民解放军第二炮兵工程大学 一种相位提取方法
CN104916120B (zh) * 2015-06-12 2018-11-06 深圳市共进电子股份有限公司 一种智能红外发射设备的自动化生产测试系统及方法
EP3282249A1 (de) 2016-08-09 2018-02-14 Saint-Gobain Glass France Verfahren und vorrichtung zur detektion von gasen in kunststoffschichten durch lock-in-infrarotthermographie
JP2018096776A (ja) * 2016-12-12 2018-06-21 国立研究開発法人産業技術総合研究所 導電材料の内部構造、電流分布、抵抗分布を可視化する装置と方法
JP2019193417A (ja) * 2018-04-24 2019-10-31 学校法人日本大学 領域抽出装置
US10607104B1 (en) * 2019-01-31 2020-03-31 Raytheon Company System and method for detecting daytime solar glint using multi-band mid-wave infrared imagery
JP7554052B2 (ja) * 2020-01-31 2024-09-19 浜松ホトニクス株式会社 半導体故障解析装置
CN111665403B (zh) * 2020-04-29 2022-12-23 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） 层叠型电子元件的失效点定位方法、装置和系统
JP7579853B2 (ja) * 2020-05-26 2024-11-08 浜松ホトニクス株式会社 半導体デバイス検査方法及び半導体デバイス検査装置
EP4148438A4 (en) * 2020-05-26 2024-04-17 Hamamatsu Photonics K.K. SEMICONDUCTOR DEVICE INSPECTION METHOD AND SEMICONDUCTOR DEVICE INSPECTION APPARATUS
CN111898333B (zh) * 2020-06-24 2021-12-10 北京智芯仿真科技有限公司 集成电路频率响应频率点提取与响应曲线计算方法及装置
ES2932781A1 (es) * 2021-07-19 2023-01-25 Consejo Superior Investigacion Metodo para la medida cuantitativa de temperatura
WO2023175710A1 (ja) * 2022-03-15 2023-09-21 日本電信電話株式会社 観察装置
CN114858285A (zh) * 2022-04-02 2022-08-05 电子科技大学 一种线性调频红外无损检测系统
CN115541653A (zh) * 2022-12-02 2022-12-30 山东大学 一种3d系统级封装器件的缺陷定位方法及系统
CN117538378B (zh) * 2023-11-24 2024-06-28 山东大学 一种基于方波热源的锁相热成像缺陷快速检测方法
CN119290952A (zh) * 2024-08-29 2025-01-10 北京微电子技术研究所 一种叠层封装半导体器件缺陷检测与定位方法、系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792683A (en) * 1987-01-16 1988-12-20 Hughes Aircraft Company Thermal technique for simultaneous testing of circuit board solder joints
JP2758488B2 (ja) * 1990-07-25 1998-05-28 周次 仲田 電子部品の接合部検査装置
DE19837889C1 (de) * 1998-08-20 2000-12-21 Siemens Ag Thermowellen-Meßverfahren
US6394646B1 (en) * 1999-04-16 2002-05-28 General Electric Company Method and apparatus for quantitative nondestructive evaluation of metal airfoils using high resolution transient thermography
US7709794B2 (en) * 2008-02-05 2010-05-04 Kla-Tencor Corporation Defect detection using time delay lock-in thermography (LIT) and dark field LIT
US8742347B2 (en) * 2010-06-08 2014-06-03 Dcg Systems, Inc. Three-dimensional hot spot localization
TWI460422B (zh) * 2010-10-22 2014-11-11 Dcg Systems Inc 從裝置一側作鎖相熱雷射激發並從另一側取得鎖相熱發散影像

Also Published As

Publication number Publication date
TW201514482A (zh) 2015-04-16
US20160202126A1 (en) 2016-07-14
JP2016534344A (ja) 2016-11-04
JP6616302B2 (ja) 2019-12-04
TWI563251B (en) 2016-12-21
DE112014003881T5 (de) 2016-05-12
EP2840387A1 (en) 2015-02-25
WO2015024679A1 (en) 2015-02-26

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