SG11201510423YA - Method and device for producing a photovoltaic element with stabilized efficiency - Google Patents
Method and device for producing a photovoltaic element with stabilized efficiencyInfo
- Publication number
- SG11201510423YA SG11201510423YA SG11201510423YA SG11201510423YA SG11201510423YA SG 11201510423Y A SG11201510423Y A SG 11201510423YA SG 11201510423Y A SG11201510423Y A SG 11201510423YA SG 11201510423Y A SG11201510423Y A SG 11201510423YA SG 11201510423Y A SG11201510423Y A SG 11201510423YA
- Authority
- SG
- Singapore
- Prior art keywords
- producing
- photovoltaic element
- stabilized efficiency
- stabilized
- efficiency
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/128—Annealing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/06—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated
- F27B9/062—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated
- F27B9/066—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity heated without contact between combustion gases and charge; electrically heated electrically heated heated by lamps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories or equipment specially adapted for furnaces of these types
- F27B9/40—Arrangements of controlling or monitoring devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F10/00—Individual photovoltaic cells, e.g. solar cells
- H10F10/10—Individual photovoltaic cells, e.g. solar cells having potential barriers
- H10F10/14—Photovoltaic cells having only PN homojunction potential barriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/121—The active layers comprising only Group IV materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/129—Passivating
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0431—Apparatus for thermal treatment
- H10P72/0434—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/04—Apparatus for manufacture or treatment
- H10P72/0431—Apparatus for thermal treatment
- H10P72/0436—Apparatus for thermal treatment mainly by radiation
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
- H10P72/0602—Temperature monitoring
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/33—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations into and out of processing chamber
- H10P72/3314—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Photovoltaic Devices (AREA)
- Life Sciences & Earth Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Sustainable Development (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Manufacturing & Machinery (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102013010575 | 2013-06-26 | ||
| PCT/EP2013/070104 WO2014206504A1 (de) | 2013-06-26 | 2013-09-26 | Verfahren und vorrichtung zum herstellen eines photovoltaikelements mit stabilisiertem wirkungsgrad |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| SG11201510423YA true SG11201510423YA (en) | 2016-01-28 |
Family
ID=49274634
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| SG11201510423YA SG11201510423YA (en) | 2013-06-26 | 2013-09-26 | Method and device for producing a photovoltaic element with stabilized efficiency |
Country Status (10)
| Country | Link |
|---|---|
| US (2) | US10892376B2 (https=) |
| EP (1) | EP3014663B1 (https=) |
| JP (1) | JP6266768B2 (https=) |
| KR (1) | KR101807381B1 (https=) |
| CN (1) | CN105340085B (https=) |
| DE (2) | DE202013012849U1 (https=) |
| ES (1) | ES2830766T3 (https=) |
| MY (1) | MY182430A (https=) |
| SG (1) | SG11201510423YA (https=) |
| WO (1) | WO2014206504A1 (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013113123B4 (de) | 2013-11-27 | 2021-11-18 | Hanwha Q Cells Gmbh | Solarzellenherstellungsverfahren |
| DE102013113108B4 (de) | 2013-11-27 | 2024-08-29 | Hanwha Q Cells Gmbh | Solarzellenherstellungsverfahren |
| US20160005915A1 (en) * | 2014-07-03 | 2016-01-07 | Sino-American Silicon Products Inc. | Method and apparatus for inhibiting light-induced degradation of photovoltaic device |
| EP3214658A4 (en) * | 2014-10-27 | 2017-10-25 | Panasonic Intellectual Property Management Co., Ltd. | Method for manufacturing solar cell module and apparatus for manufacturing solar cell module |
| CN107408497B (zh) * | 2015-03-13 | 2021-05-18 | 新南创新私人有限公司 | 加速掺杂硅中缺陷形成、稳定电池性能、制造电池的方法和电池 |
| US10443941B2 (en) * | 2015-05-20 | 2019-10-15 | Illinois Tool Works Inc. | Light annealing in a cooling chamber of a firing furnace |
| DE102015114240B4 (de) * | 2015-08-27 | 2026-02-05 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und Verfahren zur Bearbeitung eines Halbleitersubstrats mittels Laserstrahlung |
| DE102015114298A1 (de) * | 2015-08-27 | 2017-03-02 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Vorrichtung zum Stabilisieren einer photovoltaischen Silizium-Solarzelle |
| DE102015219087A1 (de) * | 2015-10-02 | 2017-04-06 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zur Stabilisierung der Konversionseffizienz von Siliziumsolarzellen |
| KR20180099844A (ko) * | 2016-02-22 | 2018-09-05 | 어플라이드 머티어리얼스 이탈리아 에스.알.엘. | 태양 전지 기판의 프로세싱을 위한 장치, 태양 전지 기판의 프로세싱을 위한 시스템 및 태양 전지 기판의 프로세싱을 위한 방법 |
| FR3051074B1 (fr) * | 2016-05-03 | 2018-05-18 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de fabrication d'une cellule photovoltaique a heterojonction |
| AU2017276802A1 (en) * | 2016-06-06 | 2018-11-29 | Newsouth Innovations Pty Limited | A method for processing silicon material |
| TW201806174A (zh) | 2016-07-12 | 2018-02-16 | 阿波朗索拉爾公司 | 用於製造光伏打裝置之方法 |
| JP6655791B2 (ja) * | 2016-08-25 | 2020-02-26 | パナソニックＩｐマネジメント株式会社 | 太陽電池セル及びその製造方法 |
| TWI585988B (zh) * | 2016-10-21 | 2017-06-01 | 茂迪股份有限公司 | 太陽能電池 |
| AU2017363826A1 (en) * | 2016-11-22 | 2019-05-16 | Newsouth Innovations Pty Limited | Advanced hydrogen passivation that mitigates hydrogen-induced recombination (HIR) and surface passivation deterioration in PV devices |
| KR101912772B1 (ko) * | 2016-12-26 | 2019-01-14 | 주식회사 한화 | 광기전력 소자 제조 장치 및 제조 방법 |
| US20220262973A1 (en) * | 2018-07-30 | 2022-08-18 | mPower Technology, Inc. | In-situ rapid annealing and operation of solar cells for extreme environment applications |
| DE102019102227A1 (de) | 2019-01-29 | 2019-11-14 | Universität Konstanz | Vorrichtung zum Messen einer Strahlungsintensität insbesondere in einem Durchlaufofen |
| CN112768372A (zh) * | 2019-11-05 | 2021-05-07 | 伊利诺斯工具制品有限公司 | 烧结设备 |
| DE102020002335B4 (de) | 2020-04-17 | 2022-02-24 | Ce Cell Engineering Gmbh | Verfahren zur Verbesserung des ohmschen Kontaktverhaltens zwischen einem Kontaktgitter und einer Emitterschicht einer Silizumsolarzelle |
| CN112599609B (zh) * | 2020-12-15 | 2022-07-08 | 山东力诺阳光电力科技有限公司 | 一种高效晶体硅太阳能电池及其制备方法 |
| GB202216076D0 (en) * | 2022-10-31 | 2022-12-14 | Extraterrestrial Power Pty Ltd | Solar cell |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2949607A (en) * | 1958-09-05 | 1960-08-16 | Carl W Lamb | Multiple-band gamma matched antenna |
| DE3536299A1 (de) | 1985-10-11 | 1987-04-16 | Nukem Gmbh | Solarzelle aus silizium |
| JP4405161B2 (ja) * | 2003-02-04 | 2010-01-27 | シャープ株式会社 | 多結晶シリコン基板の処理方法、その方法により処理された多結晶シリコン基板および太陽電池 |
| JP2006073715A (ja) * | 2004-09-01 | 2006-03-16 | Sharp Corp | 太陽電池 |
| DE102006012920B3 (de) | 2006-03-21 | 2008-01-24 | Universität Konstanz | Verfahren zum Herstellen eines Photovoltaikelements mit stabilisiertem Wirkungsgrad |
| CN101478882B (zh) | 2006-06-26 | 2013-07-10 | Tp太阳能公司 | 具有高强度加热区段的快速热烧结红外线传送带式热处理炉 |
| US7805064B2 (en) * | 2006-06-26 | 2010-09-28 | TP Solar, Inc. (Corporation of CA, USA) | Rapid thermal firing IR conveyor furnace having high intensity heating section |
| US7993700B2 (en) * | 2007-03-01 | 2011-08-09 | Applied Materials, Inc. | Silicon nitride passivation for a solar cell |
| JP5127273B2 (ja) * | 2007-03-27 | 2013-01-23 | 京セラ株式会社 | 太陽電池素子の製造方法 |
| WO2009052141A1 (en) | 2007-10-18 | 2009-04-23 | E. I. Du Pont De Nemours And Company | Conductive compositions and processes for use in the manufacture of semiconductor devices |
| FR2929755B1 (fr) | 2008-04-03 | 2011-04-22 | Commissariat Energie Atomique | Procede de traitement d'un substrat semi-conducteur par activation thermique d'elements legers |
| JP5058184B2 (ja) | 2009-01-23 | 2012-10-24 | 三菱電機株式会社 | 光起電力装置の製造方法 |
| US8828776B2 (en) * | 2009-04-16 | 2014-09-09 | Tp Solar, Inc. | Diffusion furnaces employing ultra low mass transport systems and methods of wafer rapid diffusion processing |
| CN102356458B (zh) * | 2009-04-16 | 2014-10-15 | Tp太阳能公司 | 利用极低质量运送系统的扩散炉及晶圆快速扩散加工处理的方法 |
| FR2949607B1 (fr) | 2009-09-03 | 2011-10-21 | Commissariat Energie Atomique | Procede de traitement de cellules photovoltaiques contre la diminution du rendement lors de l'eclairement |
| US8772068B2 (en) * | 2009-10-26 | 2014-07-08 | Newsouth Innovations Pty Limited | Metallization method for silicon solar cells |
| FR2966980B1 (fr) * | 2010-11-02 | 2013-07-12 | Commissariat Energie Atomique | Procédé de fabrication de cellules solaires, atténuant les phénomènes de lid |
| US20120060758A1 (en) * | 2011-03-24 | 2012-03-15 | Primestar Solar, Inc. | Dynamic system for variable heating or cooling of linearly conveyed substrates |
| JP6113152B2 (ja) * | 2011-06-03 | 2017-04-12 | エムイーエムシー・シンガポール・プライベイト・リミテッドＭｅｍｃ Ｓｉｎｇａｐｏｒｅ Ｐｔｅ． Ｌｔｄ． | シリコンウェハにおいて少数キャリア寿命劣化を抑制する方法 |
| FR2977079B1 (fr) * | 2011-06-27 | 2013-07-26 | Commissariat Energie Atomique | Procede de traitement de cellules photovoltaiques a heterojonction pour ameliorer et stabiliser leur rendement |
| KR102102873B1 (ko) | 2012-05-21 | 2020-04-22 | 뉴사우스 이노베이션즈 피티와이 리미티드 | 실리콘 태양 전지의 개선된 수소화 공정 |
| US9780252B2 (en) * | 2014-10-17 | 2017-10-03 | Tp Solar, Inc. | Method and apparatus for reduction of solar cell LID |
| US11538956B2 (en) * | 2018-04-27 | 2022-12-27 | Illinois Tool Works Inc. | Methods and apparatus to control zone temperatures of a solar cell production system |
-
2013
- 2013-09-26 KR KR1020157035754A patent/KR101807381B1/ko active Active
- 2013-09-26 CN CN201380077813.4A patent/CN105340085B/zh active Active
- 2013-09-26 JP JP2016522294A patent/JP6266768B2/ja active Active
- 2013-09-26 DE DE202013012849.6U patent/DE202013012849U1/de not_active Expired - Lifetime
- 2013-09-26 WO PCT/EP2013/070104 patent/WO2014206504A1/de not_active Ceased
- 2013-09-26 MY MYPI2015704636A patent/MY182430A/en unknown
- 2013-09-26 EP EP13770893.9A patent/EP3014663B1/de active Active
- 2013-09-26 SG SG11201510423YA patent/SG11201510423YA/en unknown
- 2013-09-26 ES ES13770893T patent/ES2830766T3/es active Active
- 2013-09-26 US US14/900,004 patent/US10892376B2/en active Active
- 2013-09-26 DE DE112013005591.0T patent/DE112013005591C5/de active Active
-
2020
- 2020-10-22 US US17/077,995 patent/US11784279B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP6266768B2 (ja) | 2018-01-24 |
| WO2014206504A1 (de) | 2014-12-31 |
| US10892376B2 (en) | 2021-01-12 |
| DE112013005591B4 (de) | 2016-08-04 |
| EP3014663A1 (de) | 2016-05-04 |
| CN105340085A (zh) | 2016-02-17 |
| DE112013005591C5 (de) | 2018-10-04 |
| DE112013005591A5 (de) | 2015-10-22 |
| KR101807381B1 (ko) | 2018-01-10 |
| MY182430A (en) | 2021-01-25 |
| DE202013012849U1 (de) | 2020-07-03 |
| KR20160023687A (ko) | 2016-03-03 |
| CN105340085B (zh) | 2018-07-06 |
| EP3014663B1 (de) | 2020-09-02 |
| US20160141445A1 (en) | 2016-05-19 |
| US11784279B2 (en) | 2023-10-10 |
| ES2830766T3 (es) | 2021-06-04 |
| US20210057600A1 (en) | 2021-02-25 |
| JP2016525276A (ja) | 2016-08-22 |
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