SG10201911991YA - Heterostructure and method of fabrication - Google Patents
Heterostructure and method of fabricationInfo
- Publication number
- SG10201911991YA SG10201911991YA SG10201911991YA SG10201911991YA SG10201911991YA SG 10201911991Y A SG10201911991Y A SG 10201911991YA SG 10201911991Y A SG10201911991Y A SG 10201911991YA SG 10201911991Y A SG10201911991Y A SG 10201911991YA SG 10201911991Y A SG10201911991Y A SG 10201911991YA
- Authority
- SG
- Singapore
- Prior art keywords
- heterostructure
- fabrication
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H3/04—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
- H03H3/10—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves for obtaining desired frequency or temperature coefficient
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/072—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies
- H10N30/073—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by laminating or bonding of piezoelectric or electrostrictive bodies by fusion of metals or by adhesives
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6489—Compensation of undesirable effects
- H03H9/6496—Reducing ripple in transfer characteristic
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
- H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
- H10N30/086—Shaping or machining of piezoelectric or electrostrictive bodies by machining by polishing or grinding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N35/00—Magnetostrictive devices
- H10N35/01—Manufacture or treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/42—Piezoelectric device making
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1501222A FR3037443B1 (fr) | 2015-06-12 | 2015-06-12 | Heterostructure et methode de fabrication |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201911991YA true SG10201911991YA (en) | 2020-02-27 |
Family
ID=54848603
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201911991YA SG10201911991YA (en) | 2015-06-12 | 2016-06-09 | Heterostructure and method of fabrication |
Country Status (8)
Country | Link |
---|---|
US (3) | US10826459B2 (ko) |
EP (1) | EP3308411B1 (ko) |
JP (1) | JP2018518840A (ko) |
KR (3) | KR20180011243A (ko) |
CN (2) | CN107710431B (ko) |
FR (1) | FR3037443B1 (ko) |
SG (1) | SG10201911991YA (ko) |
WO (1) | WO2016198542A1 (ko) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110832774B (zh) * | 2017-07-27 | 2023-07-21 | 京瓷株式会社 | 弹性波元件 |
FR3079660B1 (fr) * | 2018-03-29 | 2020-04-17 | Soitec | Procede de transfert d'une couche |
US20200044621A1 (en) * | 2018-07-31 | 2020-02-06 | Qualcomm Incorporated | Thin film devices |
TWI815970B (zh) * | 2018-11-09 | 2023-09-21 | 日商日本碍子股份有限公司 | 壓電性材料基板與支持基板的接合體、及其製造方法 |
CN113228508A (zh) * | 2018-12-20 | 2021-08-06 | 三安日本科技株式会社 | 弹性波装置、弹性波滤波器、双工器及模块 |
DE102019119239A1 (de) * | 2019-07-16 | 2021-01-21 | RF360 Europe GmbH | Multiplexer |
CN113922778B (zh) * | 2020-07-10 | 2022-06-21 | 济南晶正电子科技有限公司 | 一种滤波器用压电衬底结构及其制备方法 |
CN111883644B (zh) * | 2020-07-23 | 2021-04-13 | 中国科学院上海微系统与信息技术研究所 | 一种异质压电薄膜结构及其制备方法 |
CN114244311A (zh) * | 2021-12-22 | 2022-03-25 | 江苏卓胜微电子股份有限公司 | 一种声表面波谐振器及滤波器 |
FR3136327A1 (fr) * | 2022-06-02 | 2023-12-08 | Soitec | Dispositif a ondes elastiques de surface |
FR3136326A1 (fr) * | 2022-06-02 | 2023-12-08 | Soitec | Filtre dispositif a ondes elastiques de surface |
FR3136325A1 (fr) * | 2022-06-02 | 2023-12-08 | Soitec | Dispositif a ondes elastiques de surface |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5759753A (en) | 1995-07-19 | 1998-06-02 | Matsushita Electric Industrial Co., Ltd. | Piezoelectric device and method of manufacturing the same |
JP3924810B2 (ja) | 1995-07-19 | 2007-06-06 | 松下電器産業株式会社 | 圧電素子とその製造方法 |
FR2789518B1 (fr) * | 1999-02-10 | 2003-06-20 | Commissariat Energie Atomique | Structure multicouche a contraintes internes controlees et procede de realisation d'une telle structure |
US6861021B2 (en) | 2002-04-16 | 2005-03-01 | General Electric Company | Molding tool construction and molding method |
JP4723207B2 (ja) * | 2004-05-31 | 2011-07-13 | 信越化学工業株式会社 | 複合圧電基板 |
US8664747B2 (en) | 2008-04-28 | 2014-03-04 | Toshiba Techno Center Inc. | Trenched substrate for crystal growth and wafer bonding |
WO2009139108A1 (ja) | 2008-05-12 | 2009-11-19 | 株式会社村田製作所 | 弾性境界波装置 |
KR100945800B1 (ko) * | 2008-12-09 | 2010-03-05 | 김영혜 | 이종 접합 웨이퍼 제조방법 |
FR2942911B1 (fr) * | 2009-03-09 | 2011-05-13 | Soitec Silicon On Insulator | Procede de realisation d'une heterostructure avec adaptation locale de coefficient de dilatation thermique |
FR2953328B1 (fr) * | 2009-12-01 | 2012-03-30 | S O I Tec Silicon On Insulator Tech | Heterostructure pour composants electroniques de puissance, composants optoelectroniques ou photovoltaiques |
US8141429B2 (en) | 2010-07-30 | 2012-03-27 | Rosemount Aerospace Inc. | High temperature capacitive static/dynamic pressure sensors and methods of making the same |
FR2967812B1 (fr) * | 2010-11-19 | 2016-06-10 | S O I Tec Silicon On Insulator Tech | Dispositif electronique pour applications radiofrequence ou de puissance et procede de fabrication d'un tel dispositif |
JP5601377B2 (ja) * | 2010-11-30 | 2014-10-08 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
US9490418B2 (en) | 2011-03-29 | 2016-11-08 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator comprising collar and acoustic reflector with temperature compensating layer |
KR101635151B1 (ko) * | 2011-07-29 | 2016-06-30 | 가부시키가이샤 무라타 세이사쿠쇼 | 압전 디바이스 및 압전 디바이스의 제조방법 |
US20150042210A1 (en) * | 2012-06-26 | 2015-02-12 | Honda Electronics Co., Ltd. | Electromechanical transformation device and method for manufacturing the same |
JP6092535B2 (ja) * | 2012-07-04 | 2017-03-08 | 太陽誘電株式会社 | ラム波デバイスおよびその製造方法 |
EP2736169B1 (en) * | 2012-08-17 | 2016-09-14 | NGK Insulators, Ltd. | Composite substrate, elastic surface wave device, and method for producing composite substrate |
EP3367424B1 (en) * | 2015-03-03 | 2022-10-19 | GlobalWafers Co., Ltd. | Charge trapping polycrystalline silicon films on silicon substrates with controllable film stress |
US11646714B2 (en) * | 2018-07-10 | 2023-05-09 | Texas Instruments Incorporated | Laterally vibrating bulk acoustic wave resonator |
-
2015
- 2015-06-12 FR FR1501222A patent/FR3037443B1/fr active Active
-
2016
- 2016-06-09 SG SG10201911991YA patent/SG10201911991YA/en unknown
- 2016-06-09 JP JP2017563155A patent/JP2018518840A/ja active Pending
- 2016-06-09 CN CN201680033898.XA patent/CN107710431B/zh active Active
- 2016-06-09 KR KR1020177036949A patent/KR20180011243A/ko active Application Filing
- 2016-06-09 KR KR1020207036755A patent/KR102301378B1/ko active IP Right Grant
- 2016-06-09 CN CN202010766588.7A patent/CN111864051A/zh active Pending
- 2016-06-09 EP EP16728029.6A patent/EP3308411B1/en active Active
- 2016-06-09 KR KR1020207007038A patent/KR102285595B1/ko active IP Right Grant
- 2016-06-09 US US15/735,477 patent/US10826459B2/en active Active
- 2016-06-09 WO PCT/EP2016/063198 patent/WO2016198542A1/en active Application Filing
-
2020
- 2020-05-18 US US16/877,309 patent/US11595020B2/en active Active
- 2020-10-20 US US17/075,465 patent/US11637542B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2018518840A (ja) | 2018-07-12 |
WO2016198542A1 (en) | 2016-12-15 |
US20200280298A1 (en) | 2020-09-03 |
CN111864051A (zh) | 2020-10-30 |
KR20180011243A (ko) | 2018-01-31 |
EP3308411B1 (en) | 2021-10-13 |
KR20200145848A (ko) | 2020-12-30 |
US20230275559A1 (en) | 2023-08-31 |
US11637542B2 (en) | 2023-04-25 |
KR102301378B1 (ko) | 2021-09-14 |
FR3037443A1 (ko) | 2016-12-16 |
EP3308411A1 (en) | 2018-04-18 |
KR102285595B1 (ko) | 2021-08-04 |
CN107710431A (zh) | 2018-02-16 |
US11595020B2 (en) | 2023-02-28 |
US10826459B2 (en) | 2020-11-03 |
US20180159498A1 (en) | 2018-06-07 |
CN107710431B (zh) | 2020-07-31 |
KR20200029067A (ko) | 2020-03-17 |
US20210058058A1 (en) | 2021-02-25 |
FR3037443B1 (fr) | 2018-07-13 |
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